The invention discloses a method for manufacturing a p-type GaN low-resistance-value
ohmic contact layer. The method is characterized by sequentially comprising the steps that a substrate is processed, a buffer layer is grown on the substrate, a u-type GaN layer is grown on the buffer layer, an n-type GaN layer is grown on the u-type GaN layer, an MQW
active layer is grown on the n-type GaN layer, an AlGaN layer is grown on the MQW
active layer, a first p-type GaN layer is grown on the AlGaN layer, and a second p-type GaN layer is grown on the first p-type GaN layer. Compared with the prior art, due to the fact that the second p-type GaN layer has high Mg concentration
doping, the hole concentration of the
contact layer is high, the contact resistivity of the second p-type GaN layer and
metal is reduced, a barrier region generated by the second p-type GaN layer and the
metal becomes narrow, the probability that a carrier penetrates through a
metal and
semiconductor contact barrier region through tunneling is increased, the work
voltage of a high-power LED
chip is reduced, and therefore the light emitting efficiency of the high-power LED
chip is improved.