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16 results about "Soft lithography" patented technology

In technology, soft lithography is a family of techniques for fabricating or replicating structures using "elastomeric stamps, molds, and conformable photomasks". It is called "soft" because it uses elastomeric materials, most notably PDMS.

Flexible Microelectrode Arrays

The problems of high costs and lack of flexibility in microelectrode arrays (MEAs) is addressed by the inexpensive flexible MEA systems and methods for manufacturing them presented herein. The MEA systems described herein are generally formed from a flexible substrate such as polydimethylsiloxane (PDMS). The flexible substrate generally comprises a series of wells and channels patterned therein. The wells and channels are filled with a conductive flexible material such as a mixture of PDMS and carbon nanotubes (CNTs) to form sets of microelectrodes, microelectrode leads, and contact pads therein. The resulting MEA systems may be substantially more flexible and less expensive than prior MEA systems. The MEA systems presented herein may be manufactured using a variety of soft lithography techniques described herein.
Owner:NIKON CORP

Parallel electrodes sensor

Systems and methods to integrate electrical sensors comprising parallel electrodes into microfluidic devices that are manufactured using soft lithography are disclosed herein. With minimal fabrication complexity, more uniform electric fields than conventional coplanar electrodes are produced. The methods disclosed are also more suitable for the construction of complex electrical sensor networks in microfluidic devices due to greater layout flexibility and provide improved sensitivity over conventional coplanar electrodes.
Owner:GEORGIA TECH RES CORP

Laminated three-dimensional aneurysm chip as well as preparation method and application thereof

The invention relates to the technical field of tissue engineering, and particularly discloses a lamina-free three-dimensional aneurysm chip as well as a preparation method and application thereof. The method comprises the following steps: firstly, designing a non-layered three-dimensional aneurysm chip mold which comprises a semi-aneurysm part capable of being accurately matched with aneurysm physiological structural characteristics, then preparing a non-layered three-dimensional aneurysm chip mold blank by adopting a photocuring 3D printing technology, and then coating a photosensitive resin mixture to obtain the non-layered three-dimensional aneurysm chip mold. Laminated lines on the surface layer of the mold blank are eliminated through the steps of spin coating treatment, ultraviolet curing and the like, the roughness of the surface of the mold blank is optimized, and finally the three-dimensional aneurysm chip is prepared through the soft photoetching technology. According to the method, through a series of combined processes of mold design, mold blank 3D printing, mold blank layer grain elimination and soft photoetching of the chip, the recarving precision of the three-dimensional aneurysm chip is remarkably improved, and the strict requirement of an aneurysm in-vitro simulation experiment for the structural precision is met; the technical defects that an existing three-dimensional aneurysm chip is low in precision, obvious in lamina and the like are overcome.
Owner:SUN YAT SEN UNIVERSITY SHENZHEN +1

Microfluidic chip driven by acoustically excited droplet-shaped microbubbles and its fabrication process

ActiveCN120515508Bachieve orientationEfficient driveNitrogen plasmaLithography process
This invention relates to a microfluidic chip driven by acoustically excited droplet-shaped microbubbles and its fabrication process. A droplet-shaped microbubble array is obtained through microfluidic chip structure design. Under acoustic excitation, the microbubbles oscillate, generating asymmetric acoustic-flow vortices, which in turn directionally drive the microfluidic fluid within the microchannels. The flow rate can be linearly controlled by adjusting the driving voltage, offering advantages such as non-contact, pollution-free, and highly efficient directional driving. The fabrication process is based on MEMS technology, employing nitrogen plasma bonding and soft lithography, resulting in low cost and suitability for mass production. This invention solves the problem of the lack of directionality in traditional symmetrical acoustic-flow vortices and can be widely applied in fields such as biomedicine, drug delivery, and chemical analysis.
Owner:BEIJING UNIV OF TECH

Micro-fluidic chip manufacturing method and application method based on 3D printing technology

The invention relates to the technical field of biomedical detection, in particular to a micro-fluidic chip manufacturing method and an application method based on a 3D printing technology, and the method comprises the following steps: manufacturing a micro-fluidic chip through combination of 3D printing and soft lithography, optimizing a liquid drop generation and detection process, and developing a YOLO-Drop deep learning model to realize automatic identification and counting of liquid drop targets. According to the invention, the manufacturing cost and time of the micro-fluidic chip can be obviously reduced, the droplet generation precision and detection efficiency are improved, and meanwhile, ultra-sensitive protein detection is realized through intelligent analysis. Experimental verification shows that the detection limit of the system reaches 0.015 fM, the recovery rate range is 94.0%-116.96%, the coefficient of variation is lower than 10%, and an innovative solution is provided for biomedical detection.
Owner:SHENZHEN UNIV

Polycarbonate heat molding for soft lithography

ActiveUS12339585B2Photomechanical apparatusElastomerSoft lithography
A method of replicating master molds used in the fabrication of microsystems having micron to millimeter sized features. Master molds are replicated using a polymer sheet, which is heated and melted onto an elastomeric mold fabricated from the master mold. The copy molds accurately replicate the geometries of the master mold, such as high aspect ratio features, microposts, and channels with slender sidewalls. The polymer sheet encases the elastomeric mold without the application of an external force, permitting copying without deformation of the features.
Owner:CARNEGIE MELLON UNIV

Method of manufacturing ultra-thin film anti-reflective stickers

The present invention relates to a method of manufacturing a single-layered ultra-thin film anti-reflection sticker by a soft etching process, and an ultra-thin film anti-reflection sticker. To this end, the present invention provides a method of manufacturing an ultra-thin film anti-reflection sticker, characterized by comprising: a step of manufacturing a master mold, the master mold being a mold structure in which a plurality of hemispherical shapes are formed on an upper surface; a sticker material coating step of coating a sticker forming material on the upper surface of the master mold; a cured film covering step of covering a cured film on an upper surface of the sticker forming material; a curing step of curing the sticker forming material; a cured film removing step of removing the cured film from the sticker forming material; and a sticker peeling step of peeling the cured sticker forming material from the master mold, and the peeled sticker forming material is formed as a single-layered ultra-thin film anti-reflection sticker in which a plurality of anti-reflection structures are formed on an upper surface.
Owner:THE IND & ACADEMIC COOP IN CHUNGNAM NAT UNIV (IAC)

Optical fiber end face microstructure precision packaging method based on double-layer PDMS mold

The invention discloses an optical fiber end face microstructure precise packaging method based on a double-layer PDMS mold. The method comprises the following steps that 1, a micro-groove mold is prepared on a silicon wafer through the photoetching technology, a PDMS bottom layer with a micro-groove is obtained through transfer printing, a micro-cylinder mold is prepared on the silicon wafer through the photoetching technology, and a PDMS top layer with a through hole is obtained through transfer printing; step 2, concentrically aligning and bonding the PDMS top layer with the through hole and the PDMS bottom layer with the micro groove under a microscope to form a composite die with a guide hole-micro cavity structure; and step 3, filling the cavity with ultraviolet curing resin, vertically inserting the optical fiber into the top guide hole and abutting against the bottom groove, and demolding after ultraviolet curing to realize precise integration of the microstructure on the end face of the optical fiber. According to the method, a double-layer PDMS composite mold is prepared by using a soft lithography technology, and blind-mating self-alignment packaging of the optical fiber is realized through physical limiting.
Owner:HARBIN INST OF TECH

Method of manufacturing ultra-thin antireflection sticker and ultra-thin antireflection sticker

ActiveUS12534643B2StampsFilm/foil adhesivesLithography processSoft lithography
A method of manufacturing a monolayer-structured ultra-thin antireflection sticker through a soft lithography process and an ultra-thin antireflection sticker, includes: a master mold manufacturing step in which a master mold having a plurality of semi-spherical mold structures on an upper surface thereof is manufactured; a sticker material coating step in which a sticker material is coated onto the upper surface of the master mold; a cured film covering step in which a cured film is disposed to cover an upper surface of the sticker material; a curing step in which the sticker material is cured; a cured film removal step in which the cured film is removed from the sticker material; and a sticker peeling step in which the cured sticker material is peeled off the master mold, the peeled-off sticker material forming a monolayer-structured ultra-thin antireflection sticker having a plurality of antireflective structures on an upper surface thereof.
Owner:THE IND & ACADEMIC COOP IN CHUNGNAM NAT UNIV (IAC)

Preparation method of bionic microfluidic device for studying fluid migration in carbonate rock micro-nano cracks

The application provides a preparation method of a biomimetic microfluidic device for studying fluid migration in carbonate rock micro-nano cracks, comprising the following steps: step one, analyzing and classifying scanning electron microscope images of carbonate rock core slices by a random forest algorithm to generate a chip design drawing; step two, based on the chip design drawing, adopting soft lithography technology, copying crack structures through a photoresist template and polydimethylsiloxane, and bonding with a glass substrate to form a microfluidic chip; step three, injecting a precursor liquid containing calcite nanocrystal seeds into the flow channel of the microfluidic chip, fixing the crystal seeds by ultraviolet irradiation, and realizing calcium carbonate mineral precipitation by injecting a saturated equilibrium liquid to form a biomimetic microfluidic device. The application can be used for coupling research of all fluids and carbonate rock cracks, and provides a method for restoring the structure of carbonate rock cracks to the greatest extent and a method for cloning the properties of rock surfaces.
Owner:CHINA UNIV OF PETROLEUM (BEIJING)

A ScAlN thin film with high crystallinity and high C-axis preferred orientation, and a preparation method and application thereof

The present invention relates to a ScAlN thin film with high crystallinity and high C-axis preferred orientation, and a preparation method and application thereof. The preparation method includes: placing a first target and a second target at a first magnetron sputtering target position and a second magnetron sputtering target position respectively, and using an inert gas plasma to pre-clean a hard substrate at a working vacuum of 0.5 Pa - 1.5 Pa to achieve a soft etching effect; using a nitrogen plasma as a reaction gas and an inert gas as a working gas, and simultaneously reactive co-sputtering the first target and the second target on the surface of the obtained soft-etched hard substrate to obtain a ScAlN thin film with high crystallinity and high C-axis preferred orientation. The present invention combines the pre-cleaning of a hard substrate with an inert gas plasma, the nitrogen plasma-assisted reaction, and the dual-target co-sputtering, and matches a specific working vacuum for pre-cleaning, so as to prepare a ScAlN thin film with a C-axis preferred orientation that has better structural stability, lower surface stress, fewer internal defects, and higher crystallinity.
Owner:TOPOLOGY SEMICONDUCTOR (GANZHOU) CO LTD

Method and device for microfluidic formulation of stable nanoparticles as drug / biomolecules carriers

This invention involves a microfluidic chip used to create carrier nanoparticles for applications like cancer treatment and vaccine production. The chip is made of PDMS polymer and utilizes soft lithography techniques. The chip's design includes inlets for cationic water and oil phases, and an outlet with channels arranged perpendicular to each other to control nanoparticle size. The nanoparticles produced are 20-100 nm with a lipid coating which enhances cell absorption. They are also stable in vitro and in vivo, with a PDI index of 0. 07 indicating optimal uniformity and homogeneity.
Owner:SHABANI SHAHRZAD

Micro-fluidic chip driven by acoustic excitation droplet-shaped microbubbles and manufacturing process of micro-fluidic chip driven by acoustic excitation droplet-shaped microbubbles

The invention relates to a micro-fluidic chip driven by sound excitation droplet-shaped micro-bubbles and a manufacturing process of the micro-fluidic chip. A droplet-shaped microbubble array is obtained through the structural design of the micro-fluidic chip, microbubbles oscillate under the excitation of sound waves to generate asymmetric sound flow vortexes, and then a directional driving effect is generated on microfluid in a micro-channel. The flow velocity can be linearly controlled by adjusting the driving voltage, and the device has the advantages of non-contact, no pollution, efficient directional driving and the like. The manufacturing process is based on the MEMS technology, adopts nitrogen plasma bonding and soft photoetching processes, and is low in cost and suitable for batch production. The invention solves the problem that the traditional symmetrical acoustic streaming vortex lacks directivity, and can be widely applied to the fields of biomedicine, drug delivery, chemical analysis and the like.
Owner:BEIJING UNIV OF TECH

Organ-on-a-chip device for mimicking the bone marrow microenvironment, and methods for producing the device moulds, for producing the device, for filling the device, and for using the device

The present invention relates to an organ-on-a-chip device for mimicking the bone marrow microenvironment (1) comprising: a perivascular region (2) representing the perivascular niche; a central region (3) representing the central niche; an endosteal region (4) representing the endosteal niche; at least one fluid inlet channel (5); at least one channel for injecting cells, fluids and hydrogels (6) for each region (2, 3, 4); at least one containment port (7) to allow independent filling of the at least one channel for injecting cells, fluids and hydrogels (6); and at least one fluid outlet channel (8). The present invention also relates to a method for producing the device moulds using additive manufacturing, a method for producing the device from PDMS using soft lithography, a method for filling the device with hydrogel and performing three-dimensional culture, and use of the device.
Owner:FUNDACAO OSWALDO CRUZ (FIOCRUZ)

Photoactivated selective release (PHASR) of droplets from microwell arrays

Provided is photoactivated selective release (or PHASR) of droplets from a microwell array enabled by a photoresponsive polymer layer integrated into the microfluidic device. This photoresponsive layer is placed in between a microwell array that traps a large number of droplets and a monolithic flow chamber that can be used for recovery. By using focused light, the photoresponsive layer can either be punctured or induced to create local heating to selectively release droplets. The type of photoacoustic dye and the physical properties of the photoresponsive layer can be engineered to induce either puncture of the membrane or pushing of droplets out of the microwells with low thermal impact on the droplets. This approach has broad application in the field of soft lithography-based microfluidic devices for various applications including photoresponsive valves as well as high throughput single cell sequencing.
Owner:THE TRUSTEES OF THE UNIV OF PENNSYLVANIA

A micron-sized sodium fluorescein fiber phantom, its preparation method and application

This invention discloses a micron-sized sodium fluorescein fiber phantom, its preparation method, and its applications. The invention first involves adding a sodium fluorescein solution to epoxy resin and initially curing it to a certain viscosity. Then, a sodium fluorescein fiber phantom is prepared using wet spinning technology. A mold with varying depths is fabricated using 3D printing technology, and a TiO2-containing scattering layer is obtained using soft etching. Finally, the scattering layer is coated on the fiber membrane surface to obtain sodium fluorescein phantoms with different scattering thicknesses. Furthermore, by combining the phantom with a convex lens and a 3D-printed hemisphere, the conformability of the fiber is utilized to mimic the vascular structure of the fundus, resulting in an eyeball-shaped phantom. This method is simple to operate and can mass-produce sodium fluorescein phantoms of various concentrations and sizes, potentially providing broad application scenarios in the evaluation of endoscopic and fluorescein surgical navigation equipment and fundus fluorescein angiography equipment.
Owner:ZHEJIANG LAB