The invention provides a SiC device
ohmic contact preparation method and a SiC device, and the preparation method comprises the following steps: providing an n-type
SiC substrate, and depositing a Ni film layer on the surface, forming
ohmic contact, of the n-type
SiC substrate; annealing the Ni film layer by using
laser pulse to form a NiSi film layer; removing the NiSi film layer by adopting a wet
etching process; and depositing a conductive
metal layer. Compared with the prior art, the preparation method of the SiC device
ohmic contact has the advantages that the Ni film layer is deposited firstly, then the
laser pulse annealing process is performed, so that the density of carbon vacancies in the
SiC substrate is greatly increased, and the downward bending amplitude of an energy band of the SiC of a contact interface is increased, so that the width of a conductive
metal layer and a SiC barrier is greatly reduced; according to the method, the
electron tunneling probability is greatly increased, the ohmic contact resistivity is reduced, meanwhile, the adhesion of the conductive
metal layer on the back face is improved by removing the NiSi film layer, and the reliability of ohmic contact on the back face of the n-type SiC power device is improved.