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69results about How to "Improved ohmic contact characteristics" patented technology

Set of ohmic contact electrodes on both p-type and n-type layers for gan-based LED and method for fabricating the same

The present disclosure relates to set of a ohmic contact electrodes on both P-type and N-type layers of a GaN-based light emitting diode (LED) and a fabricating method thereof. The materials of ohmic contact electrodes on both P-type and N-type layers of a GaN-based LED are a metal combination of Cr/Pd/Au. In one embodiment, the fabricating method comprises etching out an N-type GaN layer on an epitaxial structure on a sapphire substrate, and evaporating a P-type transparent electrode layer on the P-type GaN layer, then positioning patterns of the ohmic contact electrodes on both P-type and N-type layers, and then evaporating a metal combination of a Cr layer 50 Å to 500 Å thick, a Pd layer 300 Å to 1000 Å thick and an Au layer 3000 Å to 20000 Å thick in turn on the P-type transparent electrode layer and N-type GaN layer respectively, and then annealing electrodes of the chip, on which the Cr, Pd and Au layers are evaporated in nitrogen atmosphere for 5 minutes to 20 minutes at a temperature from 200 degrees to 450 degrees. Excellent ohmic contact characteristics and better thermal stability are obtained as well as higher oxidation resistance, thus improving the reliability of diode.
Owner:PODIUM PHOTONICS GUANGZHOU

Preparation method of P electrode of light-emitting diode chip with vertical structure

The invention provides a preparation method of a P electrode of a light-emitting diode chip with a vertical structure, and belongs to the field of light-emitting diodes. The method comprises the steps of providing a light-emitting diode epitaxial wafer, wherein the light-emitting diode epitaxial wafer comprises a substrate, and a buffer layer, an undoped GaN layer, an N-type GaN layer, a multi-quantum well layer, an electron barrier layer, a P-type GaN layer and a P-type ohmic contact layer which are stacked on the substrate in sequence, wherein a contact layer electrode is grown on the P-type ohmic contact layer, thermal annealing treatment is conducted on the contact layer electrode, and the contact layer electrode comprises a Ni layer; and a first reflecting layer electrode is grown on the contact layer electrode, thermal annealing treatment is conducted on the first reflecting layer electrode, the first reflecting layer electrode comprises a first Ag layer, the annealing time of the first reflecting layer electrode is shorter than that of the contact layer electrode, and the annealing temperature of the first reflecting layer electrode is lower than that of the contact layer electrode. According to the invention, the P electrode with high reflectivity and low contact resistivity can be obtained.
Owner:HC SEMITEK ZHEJIANG CO LTD

Silicon carbide PiN device ohmic contact method

The invention belongs to the field of PiN devices, and particularly relates to a silicon carbide PiN device ohmic contact method. The method comprises the following steps that a) a silicon carbide PiN base body is prepared; b) an amorphous silicon layer is deposited on the surface of the P-type SiC epitaxial layer of the silicon carbide PiN base body; c) a metal layer is respectively deposited on the surface, on which the amorphous silicon layer is deposited, of the SiC substrate of the silicon carbide PiN base body and the surface of the amorphous silicon layer; and d) annealing processing is performed on the silicon carbide PiN base body on which the metal layer is deposited so that a silicon carbide PiN device with formation of ohmic contact is obtained, wherein annealing processing includes a first temperature rising period, a first heat preservation period, a second temperature rising period and a second heat preservation period, and temperature of the first heat preservation period and the second heat preservation period is respectively 450-550 DEG C and 970-1020 DEG C. According to the method, P-type ohmic contact and N-type ohmic contact can be formed on the silicon carbide PiN base body on which the metal layer is deposited through one time of annealing process.
Owner:ZHUZHOU CRRC TIMES SEMICON CO LTD
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