P-N junction-type compoud semiconductor light-emitting diode
A technology of light-emitting diodes and nitride semiconductors, applied in semiconductor lasers, semiconductor devices, lasers, etc., can solve the problems of inconvenient emission absorption light-emitting devices, and achieve the effect of excellent reverse breakdown voltage
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[0041] Hereinafter, the present invention will be specifically described by citing an example of manufacturing a pn junction type compound semiconductor LED using a single boron phosphide semiconductor layer formed on a p-type gallium nitride (GaN) layer as an example.
[0042] Fig. 2 schematically shows a cross-sectional view of a stack structure 11 for manufacturing an LED 10 having a double hetero (DH) junction structure. FIG. 3 shows a schematic plan view of the LED 10 .
[0043] Through the (0001) sapphire (α-Al 2 o 3On a single crystal) substrate 100, an undoped buffer layer 101 formed of GaN and a lower cladding layer 102 formed of n-type GaN doped with silicon (Si) are sequentially stacked in the following order (n=7×10 18 cm -3 , layer thickness (t) = 3μm), containing undoped n-type Ga 0.86 In 0.14 N-layer light emitting layer 103, p-type Al doped with Mg 0.06 Ga 0.94 The upper cladding layer (group III nitride semiconductor layer) 104 (p=3×10) formed of N 17 ...
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