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67 results about "Green band" patented technology

Method and apparatus for discriminating ambient light in a fingerprint scanner

A surface pattern imaging device applicable to fingerprint and other surface imaging applications operates with an illumination source. In an embodiment, the illumination source is a narrow band green light, and an optical imaging path of the reader includes a green band pass filter and an infrared (IR) cutoff filter between the surface of interest and an image sensor. The filters prevent ambient light outside the green range from reaching the image sensor. In an exemplary embodiment useful in fingerprint imaging, ambient light wavelengths in the green range are absorbed and blocked naturally by the finger, and therefore cannot pass through the finger into the imaging path. Ambient light in other ranges, particularly including the red and infrared ranges which may pass through the finger, is attenuated by the band pass and IR cutoff filters. The image sensor in the improved reader therefore receives the light reflected from the green illumination source, while interference from ambient light sources is substantially attenuated.
Owner:CROSS MATCH TECH

Endoscopy system

An endoscopy system includes a lighting section for emitting blue narrow-band light, green band light and red band light, an endoscope using an image pickup device for splitting light into blue, green and red spectral bands for photometry, and a processing section for generating a special light inspection image and a normal light inspection image from images produced by the image pickup device.
Owner:FUJIFILM CORP

Light-emitting diode device and production method thereof

A double hetero structure light-emitting diode device includes an active layer (6), a positive-electrode-side cladding layer, a negative-electrode-side cladding layer (4), a window layer (9) and an undoped AlInP layer. The positive-electrode-side cladding layer includes an undoped AlInP layer (7) grown to have a thickness of 0.5 μm and an intermediate layer (8) doped to assume p-type conductivity and having an intermediate energy band gap value between that of the undoped AlInP layer and that of the window layer. The window layer on the intermediate layer is a GaP layer grown at 730° C. or higher and at a growth rate of 7.8 μm / hour or more in the presence of Ze serving as a dopant. The negative-electrode-side cladding layer is provided with an undoped AlInP layer (5) having a thickness of 0.1 μm or more. With this configuration, there is provided a light-emitting diode device that enhances the crystallinity of a window layer, prevents generation of faults caused by a high-temperature process and attains high luminance at a wavelength falling within a yellow-green band.
Owner:SHOWA DENKO KK

Method and Arrangement for Detecting Surface and Structural Defects of a Long Moving Product

A method for detecting defects of a material moving in a rolling mill generally comprises illuminating product, obtaining (ACQ) image thereof in at least one spectral band, in pre-processing the formed image, in detecting and extracting (DTEXTR) eventually suspected areas of the pre-processed image, and in classifying (CLASS) the suspected areas into one or several defect or defect-free categories. For hot-rolled materials, the product is inspected in three disjointed spectral bands, including infrared, red and, for instance, green band in such a way that the suspected areas are classified into one or several defect-free or defect categories including the surface and structural defects.
Owner:CLECIM SAS

Light-emitting diode (LED) device

The invention discloses an LED device. The LED device comprises a substrate, a cup-like structure and a separation structure. The separation structure divides the accommodating space defined by the cup-like structure into a first block and a second block. A first blue light chip and a first package colloid are arranged in the first block, and a second blue light chip and a second package colloid are arranged in the second block. The second package colloid is mixed with a green phosphor powder for completely transforming the monochromatic emission spectrum of the second blue band of the second blue light chip to the monochromatic emission spectrum of the green band. The green phosphor powder is selected from one of silicates, nitrogen oxides, lutetium aluminum oxides and calcium scandium oxides. The liquid crystal display device in the invention can effectively reduce the difference of characteristics of three chips with different colors of the conventional LED device, and can greatly improve the market competitiveness of liquid crystal display devices with the LED device.
Owner:AU OPTRONICS CORP

Plant for forming electronic circuits on substrates

Embodiments of the present invention generally provide a cluster tool 10 that can be used to form electronic circuits on a substrate in an automated fashion. In one embodiment, the cluster tool 10 is adapted to process portions of a substrate to form part of a photovoltaic cell or a green-tape type circuit device in an automated fashion using a system controller 101. In one embodiment, the cluster tool 10 having plurality of work stations that comprise at least one station to deposit a layer on a substrate, a drying oven to dry the substrates, a testing station to test the substrates, and a storage station to store the substrates, and a transport element that is positionable in each of the work stations. A guide defines a substantially closed circuit along which a plurality of transport elements are able to be moved, on each of which at least one of the substrates is disposed.
Owner:APPLIED MATERIALS ITALIA SRL

Semiconductor laser-pumped kerr lens mode-locked titanium sapphire laser

The invention discloses a semiconductor laser-pumped kerr lens mode-locked titanium sapphire laser, which comprises first semiconductor lasers, a resonant cavity, an interferometer and a feedback regulation unit, wherein the first semiconductor lasers are used for emitting continuous laser light of blue and green bands to pump titanium sapphire crystal in the resonant cavity; the resonant cavity is used for carrying out oscillating and mode locking on the laser light of near-infrared bands to output femtosecond pulse laser light; the interferometer is used for driving the femtosecond pulse laser light to generate a beat note signal to obtain a carrier-envelope offset frequency; and the feedback regulation unit is used for regulating front and back positions and gradients of end mirrors ofthe resonant cavity and the power of the laser light output by the semiconductor lasers, thereby keeping the stability of a repetition frequency and the carrier-envelope offset frequency. An ultrashort laser light pulse with stable repetition frequency and carrier-envelope offset frequency can be output, and the semiconductor lasers are directly adopted as pumping sources, so that the cost of thelasers is greatly reduced, and the volume of the whole lasers is further reduced.
Owner:HUAZHONG UNIV OF SCI & TECH

A method for evaluating fusion quality of remote sensing images is provided

A method for evaluating fusion quality of remote sensing images is provided. Considering the influence of spectral domain distortion and spatial domain distortion on the image quality of remote sensing fusion, the method extracts red-band images, green-band images, blue-band images, near infrared-band images, normalized vegetation index images, normalized difference water index images, and road and building index images, and the original multivariate Gaussian model of training sample set is constructed by extracting statistical eigenvectors of all sub-blocks. In the test phase, by acquiring the original multivariate Gaussian model of test sample set composed of test remote sensing fusion images, according to the original multivariate Gaussian model constructed in the training stage, the objective quality evaluation prediction value of the test remote sensing fusion image is predicted. Because the statistical feature vector information obtained can reflect the quality change of the remote sensing fusion image, the correlation between the objective evaluation result and the subjective perception is effectively improved.
Owner:苏州深蓝空间遥感技术有限公司 +1

Automobile powered lifting device

The invention relates to an automatically lifter of car, which can avoid motor and electricity supply, but use vehicle driving wheel to rotate the friction rolling wheel on the parking platform to drive the lifting element, to lift the parking platform, wherein it comprises a support frame, parking platform, and lifting element; the parking platform is mounted with one or several friction rolling wheels; said friction wheel, via active axle is connected to the lifting element. The invention has simple structure and low cost, which can be used in chassis detection and washing, to save the parking area. The invention uses truss structure, which can be arranged in green band.
Owner:宣伯民

Satellite remote sensing image generating method and system

The invention discloses a satellite remote sensing image generating method and a satellite remote sensing image generating system. The method comprises the following steps of: S1, combining a green band image and a near infrared band image of a satellite multispectral camera to form a newly generated band image; S2, performing color synthesis by using color adding synthesis of three primary colors to generate a synthesized image, wherein the newly generated band image is adopted in a green channel; and S3, performing color and tone adjustment on the synthesized image generated in the step S2 to generate a final image. The method and the system can improve the color fidelity and definition of the satellite remote sensing image, and increase the information quantity of the satellite remote sensing image.
Owner:PEKING UNIV

Light-emitting diode device and production method thereof

A double hetero structure light-emitting diode device includes an active layer ( 6 ), a positive-electrode-side cladding layer, a negative-electrode-side cladding layer ( 4 ), a window layer ( 9 ) and an undoped AlInP layer. The positive-electrode-side cladding layer includes an undoped AlInP layer ( 7 ) grown to have a thickness of 0.5 mum and an intermediate layer ( 8 ) doped to assume p-type conductivity and having an intermediate energy band gap value between that of the undoped AlInP layer and that of the window layer. The window layer on the intermediate layer is a GaP layer grown at 730 DEG C. or higher and at a growth rate of 7.8 mum / hour or more in the presence of Ze serving as a dopant. The negative-electrode-side cladding layer is provided with an undoped AlInP layer ( 5 ) having a thickness of 0.1 mum or more. With this configuration, there is provided a light-emitting diode device that enhances the crystallinity of a window layer, prevents generation of faults caused by a high-temperature process and attains high luminance at a wavelength falling within a yellow-green band.
Owner:SHOWA DENKO KK

Intelligent watering device for city green belt

InactiveCN107667834ARealize intelligent sprinkler functionImprove work efficiencyWatering devicesRoad cleaningGear wheelArchitectural engineering
The invention relates to an intelligent watering device for a city green belt. The device comprises a transport vehicle body which is provided with a support column, a water storage tank and a watering system in sequence, the support column is in clearance fit with a cylinder rack, a vertical displacement gear is fixed to the support column through a bearing, the vertical displacement gear is connected with the cylinder rack through a gear rack in a matched mode, the vertical displacement gear is fixedly connected with a vertical displacement motor, the vertical displacement motor is fixed tothe transport vehicle body through a motor frame, a support frame is arranged at the upper end of the cylinder rack, a guide-track groove is formed in the middle of the support frame, and a connectingrod is arranged in the guide-rack groove. Accordingly, the defects that for an existing device, when city green belt watering is conducted, the height of the watering device needs to be controlled manually, and obstacles need to be avoided, so that operation is tedious, and the labor intensity is high are overcome, and the intelligent watering function of the green belt is achieved.
Owner:CHINA JILIANG UNIV

Pavement and pipe rack combined system with double functions of drainage and automatic snow melting

InactiveCN107326769AIncrease profitRealize the function of regulating and storing waterArtificial islandsIn situ pavingsSnow meltingSewage
A combination system of pavement and pipe gallery with drainage and automatic snow melting, including road (1), drainage ditch (2), pipe gallery (3), cover plate (10), green belt (12), sewage pipe (14) , rainwater pipe (15), ventilation hole (21), drainage pipe (22); the two sides of the road (1) are provided with a drainage ditch (2) with a cover plate (10) on the upper part, and the side of the drainage ditch (2) A green belt (12) is provided, and a ventilation hole (21) is arranged in the green belt (12). The ventilation hole (21) is connected with the pipe gallery (3) under the road (1). The sewage pipe (14) and the rainwater pipe (15), the rainwater pipe (15) is connected to the gutter (2) through the drainage pipe (22). The beneficial effects of the present invention are: the function of adjusting and accumulating water is realized, surface water is discharged in time in summer, and sufficient heat source is provided for the road surface prone to freezing in winter, so that the temperature of the road surface is controlled above the freezing temperature.
Owner:SHENYANG JIANZHU UNIVERSITY

Blue-green band pulse all-solid-state laser

ActiveCN104795717AHigh energyRealize long-distance underwater communicationActive medium materialLine widthTriple frequency
A blue-green band pulse all-solid-state laser mainly comprises a single-frequency 1.06-micrometer pulse laser, an optical parametric oscillation amplifier, a frequency doubling module, a triple-frequency module and a control circuit. The blue-green band pulse all-solid-state laser has the advantages of simple and compact structure, narrow linewidth and high stability and pulse energy. The transmission wave band of the laser belongs to solar spectrum Frauenhofer darkline (518.36 nm), and the laser stays in an ocean blue-green window and is applicable to the underwater communication system.
Owner:NANJING INST OF ADVANCED LASER TECH

Hydrogen production chlamydomonas chloroplast separation method

The invention discloses a hydrogen production chlamydomonas chloroplast separation method which comprises the following steps: 1) hanging Chlamydomonas in a lysate, adding saponin until the final concentration is 0.25g / 100mL; 2) putting the step 1) solution on the ice for 1-2min for chlamydomonas cell lysis; 3) centrifuging the step 2) solution for 1min at 2300g at 4 DEG C; 4) using the lysate for rinsing steps 3) precipitate, centrifuging for 1min at 1000-2300g at 4 DEG C to obtain crude chloroplast extract; 5) hanging the crude chloroplast extract in a lysate; 6) adding 75% by volume of Percoll on the centrifugal pipe bottom, adding 45% by volume of Percoll into the upper layer, adding the step 5) solution into the uppermost layer to the form the gradient, centrifuging for 20min at 4600g at 4 DEG C to form dark green bands between two different volume fractions of Percoll; and 7) taking the dark green bands out, using the lysate to dilute, centrifuging for 2min at 890-1000g at 4 DEG C, and collecting precipitate to obtain chlamydomonas chloroplast. The experiment proves that the method has the advantages of simple operation, high chlamydomonas chloroplast yield and shorter time.
Owner:INST OF BOTANY CHINESE ACAD OF SCI

Remote sensing image ground object classification method and system

The invention relates to a remote sensing image ground object classification method. The method comprises the steps of preprocessing a remote sensing image; selecting data sets of red, green and bluebands, near-infrared bands, red and green bands and full bands for the preprocessed remote sensing images, cutting the images, and constructing a training set and a test set; providing an end-to-end algorithm framework, and constructing a network model; and inputting the training set into the constructed network model for training to obtain a network parameter model so as to use the obtained network parameter model to carry out ground object classification on the remote sensing image. The invention also relates to a remote sensing image ground object classification system. According to the method, remote sensing image fusion is not needed, the problem of high-resolution information loss in the convolutional neural network can be improved, detail information in the remote sensing image canbe better classified, details of a ground object classification result are more accurate, edge information is richer, and the overall classification precision is higher.
Owner:SHENZHEN INST OF ADVANCED TECH CHINESE ACAD OF SCI

Projection image display device

A projection image display device includes: a light source that emits a blue illumination light; a phosphor that produces, in a region irradiated by the blue illumination light, a yellow illumination light including a component in a red band and a component in a green band from a portion of the blue illumination light and that reflects the blue illumination light and the yellow illumination light; and a filter that reflects a portion of the blue illumination light reflected by the phosphor toward the phosphor. The filter reflects the portion of the blue illumination light so as to be imaged at a position displaced from a region on a phosphor surface irradiated by the blue illumination light, and the phosphor produces a yellow illumination light also from the blue illumination light reflected by the filter.
Owner:JVC KENWOOD CORP A CORP OF JAPAN

A method and apparatus for downscaling chlorophyll products based on MODIS

A MODIS-based chlorophyll product downscale method of that invention comprises the follow steps of: a, acquiring MODIS remote sensing reflectance data, Landsat atmospheric top reflectance data and corresponding MODIS sea surface chlorophyll product, and converting the Landsat atmospheric top reflectance data into remote sensing reflectance data; Step b: use U.The STFM model predicts the high-resolution Rrs data in the corresponding blue and green bands. C, using regression model to establish the relationship between Rrs blue and green bands and MODIS chlorophyll; Step d, converting the high-resolution Rrs data into the chlorophyll product data by using the relationship obtained by the regression model. The MODIS-based chlorophyll product downscaling method and device of the embodiment of the invention break through the shortcoming that the traditional image superresolution method cannot be too large for downscaling ratio, and are suitable for conversion between different-scale remote sensing data.
Owner:SHENZHEN INST OF ADVANCED TECH

Remote sensing image fusion method and system based on characteristic ratio index, equipment and medium

The invention discloses a remote sensing image fusion method and system based on a characteristic ratio index, computer equipment and a storage medium. The method comprises the following steps: acquiring a satellite remote sensing image with a near-infrared band, a red band, a green band and a blue band; calculating a characteristic ratio index by taking a near-infrared band as a numerator and one of a red band, a green band and a blue band or a linear combination thereof as a denominator; reconstructing a red wave band and a green wave band according to the characteristic ratio index; and according to the reconstructed red wave band, the reconstructed green wave band and the original blue wave band, synthesizing to obtain a final color image. The visual resolution and computer resolution of the true color remote sensing image can be improved, the application potential of the historical remote sensing data true color image mode is mined, and the application effect of the current situation and the future remote sensing data true color image mode is improved.
Owner:PEARL RIVER HYDRAULIC RES INST OF PEARL RIVER WATER RESOURCES COMMISSION

Oxygen silicon base doped nitride film yellow green wave band LED and its preparing method

For oxygen-doped silicon-based nitride film yellow-green band light-emitting diodes, a-SiNX film is deposited on a P-type single crystal silicon wafer or ITO glass substrate with a resistivity of 4-20Ωcm, and the film thickness is between 40-100nm. The a-SiNX film is then plated with a thin film metal electrode; the back of the P-type monocrystalline silicon wafer is plated with another electrode, and the ITO itself constitutes the other electrode. For silicon-based light-emitting devices with ITO as the anode, a 1 μm thick metal aluminum (Al) film is directly evaporated on the active layer as the cathode. The Al electrode is a round spot with a diameter of 3 mm, with ITO as the anode at one end. is the light exit end.
Owner:NANJING UNIV

Optical printers

One aspect of this invention relates to an illumination device for an optical printer, the illumination device comprising: a first array of light sources (20) comprising a plurality of light source elements (14) that are each operable to emit light within a red band of the visible electromagnetic spectrum; a second array of light sources (21) comprising a plurality of light source elements (14) that are each operable to emit light within a blue band of the visible electromagnetic spectrum; and a third array of light sources (22) comprising a plurality of light source elements (14) that are each operable to emit light within a green band of the visible electromagnetic spectrum; wherein said first, second and third arrays of light sources (20, 21, 22) are generally linearly arranged along respective substantially parallel notional lines (34) on a substrate (15); and said plurality of light source elements (14) of each said array (20, 21, 22) are arranged such that respective adjacent light source elements of said plurality are offset from one another with respect to the associated notional line (34). Other aspects relate to printing heads, printing head assemblies, optical printers, and methods and apparatus for calibrating an optical printer.
Owner:LUMEJET HLDG

Light emitting device, preparation method thereof and application

The invention provides a light emitting device. The light emitting device comprises a base layer, an anode layer, a first hole transport layer, a second hole transport layer, a quantum rod layer, an electron transport layer and a cathode layer which are combined together sequentially from bottom to top. Through replacing a quantum dot light emitting layer in the conventional application as the quantum rod light emitting layer, the external quantum efficiency of the light emitting device can be improved; the quantum rod light emitting layer is a quantum rod layer with a fluorescence wavelengthof 500 to 700 nm, self absorption of the light emitting device can be further reduced, and the external quantum efficiency can be further increased; through using a specific ligand octadecylphosphonicacid to prepare a CdSe core quantum dot and coating the CdSe core quantum dot, fluorescence red shift to a green band, the effect of generating green can be achieved, and the external quantum efficiency of a green light emitting device can be further improved; and the light emitting device preparation method is simple, the raw material is easy to obtain, realization is easy, and wide applicationto industrial production is facilitated.
Owner:SHENZHEN PLANCK INNOVATION TECH CO LTD

Coal rock interface identification method and coal cutting track determination method and device

The invention provides a coal rock interface identification method and a coal cutting track determination method and device, and relates to the technical field of coal rock interface identification. The method comprises the steps: obtaining a to-be-identified coal wall image group of a coal mining scene, wherein the to-be-identified coal wall image group comprises a to-be-identified near-infrared band image and a to-be-identified blue-green band image; and performing coal rock identification on the coal mining scene through a pre-trained coal rock identification network according to the to-be-identified near-infrared band image and the to-be-identified blue-green band image to obtain a coal rock identification result of the coal mining scene. According to the embodiment of the invention, the coal wall texture can be accurately collected under dust and water mist conditions, the universality of coal rock interface identification is remarkably improved, and the accuracy of coal rock interface identification is effectively improved.
Owner:天津中新智冠信息技术有限公司

Soil information extraction method and device for unmanned aerial vehicle visible light image

ActiveCN110738134AAccurate extractionTo achieve the purpose of extracting soil informationScene recognitionVegetation IndexUncrewed vehicle
The invention provides a soil information extraction method and device for an unmanned aerial vehicle visible light image, and the method comprises the steps: carrying out the segmentation of the visible light image, so as to generate a segmentation result of the visible light image; extracting initial soil information from the segmentation result by using a differential vegetation index method; and extracting final soil information from the initial soil information according to the red band, the green band and the blue band in the visible light image. According to the unmanned aerial vehiclevisible light image-oriented soil information extraction method and device provided by the invention, in the unmanned aerial vehicle visible light image, soil information and other information in theunmanned aerial vehicle visible light image can be distinguished only by utilizing three wave bands R, G and B in the visible light image, so that the soil information is accurately extracted.
Owner:YUNNAN NORMAL UNIV

Urban black and odorous water body identification method based on remote sensing spectrum

The invention discloses an urban black and odorous water body identification method based on a remote sensing spectrum, and the method comprises the following steps: S1, obtaining the remote sensing spectrum data of a to-be-identified point on a water surface; S2, preprocessing the data; S3, extracting black and odorous water body discrimination features of the image, the black and odorous water body discrimination features including extracting angles at a green band (Green) and a red band (Red) in the relation graph of the remote sensing reflectivity and the wavelength, the angle at the greenband (Green) being alpha 1, and the angle at the red band (Red) being alpha 2; and S4, presetting an interval of angles alpha 1 and alpha 2, and judging the black and odorous water body. The invention provides a novel method for identifying urban black and odorous water. The sizes of angles alpha 1 and alpha 2 at a green band and a red band in the remote sensing reflectivity and wavelength relational graph are used as characteristics; the sizes of the angles alpha 1 and alpha 2 are calculated through a formula, the black and odorous water body is recognized according to the set judgment interval of alpha 1 and alpha 2, recognition of the black and odorous water body is achieved through the remote sensing technology, and the method has popularization value.
Owner:SHENZHEN SHENSHUI WATER RESOURCES CONSULTING CO LTD

A landscape flower bed for irrigating road green belts

The invention relates to a landscape flower bed for irrigating road green belts. The internal horizontal layers of the landscape flower bed respectively include an anti-seepage layer, a water storage tank, a structural layer, a planting soil layer, and a landscape plant layer from bottom to top. The storage tank is connected with the planting soil layer in the road green belt through micro-seepage pipes. The landscape flower bed of the invention significantly improves the landscape effect around the road green belt, and realizes the function of irrigating the road green belt. On the one hand, the use of micro-seepage pipes can accurately transport the water source to the plant root system in the green belt, avoiding various forms of water loss during transportation, and is more conducive to plant absorption; on the other hand, the landscape flower bed with irrigation function is effective The labor force used for irrigation of road green belts is greatly liberated, and energy consumption such as electricity is not required, and the purpose of irrigation can be achieved only by using the gravity of the irrigation water itself, which saves input costs and operating costs.
Owner:BEIJING ORIENT LANDSCAPE

A method for identifying urban black and odorous water bodies based on remote sensing spectrum

The invention discloses a method for identifying urban black and odorous water bodies based on remote sensing spectra, comprising the following steps: step S1: acquiring remote sensing spectral data of points to be identified on the water surface; step S2: data preprocessing; step S3: extracting images to distinguish black and odorous water bodies Features, the distinguishing features of black and odorous water bodies include extracting the angle at the green band (Green) and the red band (Red) in the relationship between remote sensing reflectance and wavelength, and the angle at the green band (Green) is α. 1 , the angle at the red band (Red) is α 2 ; Step S4: preset angle α 1 and α 2 The interval of black and odorous water is judged. The invention provides a new method for identifying urban black and odorous water bodies. The angle α between the green band and the red band in the relationship between the reflectivity and wavelength of remote sensing 1 and α 2 The size of is characterized, and α is calculated by the formula 1 and α 2 The size of the angle, and according to the set α 1 and α 2 This method can identify black and odorous water bodies through remote sensing technology, and has promotion value.
Owner:SHENZHEN SHENSHUI WATER RESOURCES CONSULTING CO LTD

Coastline remote sensing extraction method

The invention provides a coastline remote sensing extraction method. The method comprises the following steps: acquiring a remote sensing image of a to-be-detected coastline area; according to the reflectivity of the green band of the first resolution of the remote sensing image and the reflectivity of the short infrared band of the first resolution of the remote sensing image, calculating a water body index of each pixel of the first resolution of the remote sensing image; obtaining a water body segmentation threshold value of the remote sensing image according to the average value of the water body pixels, the average value of the non-water body pixels, the average value of the image pixels and the variance of the image pixels of the first resolution of the remote sensing image; determining the pixels of which the water body indexes are greater than the water body segmentation threshold value as sea surface pixels, and determining the pixels of which the water body indexes are smaller than the water body segmentation threshold value as land pixels; and according to the sea surface pixel and the land pixel, obtaining a coastline feature point coordinate, and according to the coastline feature point coordinate, obtaining a coastline in the remote sensing image. According to the method, the spatial resolution and the position precision of the coastline extracted from the remote sensing image can be improved.
Owner:GUANGZHOU INST OF GEOGRAPHY GUANGDONG ACAD OF SCI +1

Multi-layer mask including non-photodefinable laser energy absorbing layer for substrate dicing by laser and plasma etch

Methods of dicing substrates having a plurality of ICs. A method includes forming a multi-layered mask comprising a laser energy absorbing, non-photodefinable topcoat disposed over a water-soluble base layer disposed over the semiconductor substrate. Because the laser light absorbing material layer is non-photodefinable, material costs associated with conventional photo resist formulations may be avoided. The mask is direct-write patterned with a laser scribing process to provide a patterned mask with gaps. The patterning exposes regions of the substrate between the ICs. Absorption of the mask layer within the laser emission band (e.g., UV band and / or green band) promotes good scribe line quality. The substrate may then be plasma etched through the gaps in the patterned mask to singulate the IC with the mask protecting the ICs during the plasma etch. The soluble base layer of the mask may then be dissolved subsequent to singulation, facilitating removal of the layer.
Owner:APPLIED MATERIALS INC
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