The invention relates to the technical field of
semiconductor technologies, in particular to an
ultrasonic sensor based on an
organic polymer structure and a preparation method thereof.The
ultrasonic sensor comprises a substrate, a piezoelectric layer is formed on the front face of the substrate, a back cavity is formed in the substrate in a penetrating mode, an
organic polymer layer is formed on the surface of the piezoelectric layer, and the Young modulus of the
organic polymer layer is not higher than 2 GPa; a groove is formed in the organic
polymer layer to form a horn for determining a
sound wave field of view. The preparation method comprises the following steps: growing a piezoelectric layer on the front surface of a substrate;
etching the piezoelectric layer; growing an organic
polymer layer;
etching the organic
polymer layer and forming a horn; a back cavity is formed through the
etching substrate. According to the invention, the organic polymer layer is grown on the piezoelectric layer, the resonant frequency is effectively reduced, on the basis, the organic polymer layer forms a horn capable of limiting a
sound wave field of view, the equipment consistency is improved, the horn is formed while the organic polymer layer is etched, the
sound pressure level of the horn is improved, process steps do not need to be added, and the yield is improved.