The application discloses a kind of comprehensive microscopic measurement
system and its measurement method of multi-parameter synchronous measurement, solve the measurement mode single of existing microscopic measurement
system, cannot realize the demand of in-situ measurement multiple optical parameters problem, specifically including objective table,
transmission illumination module, imaging module and
reflection illumination module;Objective table is used to carry the sample piece to be measured;
Transmission illumination module is set below objective table, to emit transmission measurement light to the sample piece to be measured on objective table;
Reflection illumination module is set in the side of objective table, for emitting reflection measurement light;Imaging module is set above objective table, for receiving transmission measurement light or reflection measurement light, to measure corresponding parameter.The comprehensive microscopic measurement
system and its measurement method can realize the imaging of light-transmitting / non-light-transmitting sample piece, three-dimensional
topography,
phase modulation quantity,
polarization modulation quantity and other physical measurements, meet multiple measurement requirements, significantly improve measurement efficiency and multifunctionality.