A high-precision leveling apparatus, comprising a leveling base plate (3), a driving
assembly (8), and a transmission
assembly (9). The driving
assembly (8) is connected to the leveling base plate (3) by means of the transmission assembly (9), and adjusts the height of the leveling base plate (3). The driving assembly (8) comprises a rigid base (8-2), and a
ball screw (8-5) arranged on the rigid base (8-2) along a first direction, wherein the
ball screw (8-5) is movably provided with a rigid support piece (8-4), and on the basis of the
ball screw (8-5) and the rigid support piece (8-4), the rotation
stroke of the ball screw (8-5) is converted into displacement of the height of a
support surface of the rigid support piece (8-4), thereby ensuring the accuracy of the rotation process of the ball screw (8-5). A return gap between the rigid support piece (8-4) and the ball screw (8-5) is eliminated by means of stretch assemblies (8-7), thereby ensuring the support stability after the rigid support piece (8-4) is in place, and ensuring the accuracy and
controllability of the displacement of the rigid support piece (8-4). A plurality of displacement detection apparatuses (8-1, 8-8, 8-9) are used to accurately monitor the displacement of the rigid support piece (8-4). A
mechanical transmission-type active leveling solution is used to ensure the stability and reliability after leveling, and various measures are also used to eliminate errors in the
mechanical transmission process, thereby ensuring the adjustment accuracy of the leveling apparatus. Also disclosed are a high-precision leveling platform, and a leveling method.