Substrate inspecting device and transmission illumination device for substrate inspecting device

Abstract

The invention relates to a substrate inspecting device and a transmission illumination device for substrate inspecting device. The substrate inspecting device can be used for preventing infrared light from the infrared light source from transmitting substrate and emitting to the camera, thereby accurately inspecting the substrate. The shape and the arrangment of infrared light can be set in the mode that the view of infrared light source of a CCD camera is covered by the view of the substrate of the CCD camera. However, by the effect of Fresnel lens, the illuminating angle of infrared light emitted from LED elment equipped near the end of the infrered light source deflects to the end directon of the substrate. In addition, the intensify of the infrared light sourface on the end region of the substrate to the substrate is larger than the intensify of the infrared light on the central part of the substrate.

Description

technical field [0001] The present invention relates to a substrate inspection device and a transillumination device for the substrate inspection device, and in particular to a substrate inspection device and a transillumination device for the substrate inspection device that use a substrate for a solar cell unit as an inspection object. Background technique [0002] Inspecting the shape of a fracture or a defect is performed on a substrate for a solar cell in a step before an electrode formation step in a manufacturing step of a solar cell, such as a receiving inspection step or a film-forming step of an antireflection film or after a film-forming step Inspection, inspection of particles attached to the substrate, pinholes of the anti-reflection film, surface condition inspection of uneven film thickness of the anti-reflection film, and inspection of microcracks generated inside the solar cell ( microcrack) or void (void) etc. internal inspection. [0003] Among them, when...

AI Technical Summary

Problems solved by technology

[0005] In this substrate inspection device, when the infrared light irradiated from the light source passes through the outside of the edge of the substrate and directly enters the camera without passing through the substrate, compared with the infrared light that enters the camera after passing through the substrate, it directly enters the camera. The intensity of the infrared light is extremely high, so the image captured by the camera becomes extremely bright near the edge of the substrate, making it difficult to recognize the infrared light transmitted through the substrate

Therefore, it is impossible to accurately identify microcracks, pores, etc. that occur inside the solar cell.

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