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157 results about "Ceramic heater" patented technology

A ceramic heater as a consumer product is a space heater that generates heat using a heating element of PTC (Positive Temperature Coefficient) ceramic. Ceramic heaters are usually portable and typically used for heating a room or small office, and are of similar utility to metal-element fan heaters.

Micro-water density monitoring method and system based on multi-sensor fusion compensation

The invention discloses a micro-water density monitoring method and system based on multi-sensor fusion compensation, and relates to the field of power equipment safety. According to the micro-water density monitoring method based on multi-sensor fusion compensation, parameters are collected in real time through a micro-water collector composed of a ceramic heater, a humidity-sensitive capacitor collection sheet, a dew point sensor, a pressure sensor and a temperature sensor; a signal conditioning circuit and an analog-to-digital conversion module are integrated by adopting a four-layer PCB (Printed Circuit Board), and the micro-water collector is heated for multiple times by a main controller; carrying out digital filtering processing, cross validation operation and operation of eliminating influence of environment temperature on the acquired parameters; the measurement precision is improved through a sensor self-calibration mechanism, finally standardized micro-water density data are output, and an early warning function is triggered based on a multi-level threshold value. According to the invention, the problems of low precision and poor reliability of the measured micro-water density in the prior art are solved. Therefore, the accuracy of micro-water density measurement under complex working conditions is effectively improved, and data support is provided for predictive maintenance of intelligent equipment.
Owner:XIAN YUANSHUN INSTR TECH CO LTD

Ceramic heater and liquid heating device

To provide a ceramic heater and a liquid heating device capable of improving heating efficiency without obstructing a flow of liquid to be heated.SOLUTION: A ceramic heater 100 for heating liquid includes a columnar ceramic body 10 having a heating resistor 13 and extending in a direction of an axis line O, and a radiation fin 20 protruding from a surface of the ceramic body, extending in the direction of the axis line, and having thermal conductivity higher than that of the ceramic body, where a plurality of radiation fins is provided apart from each other in a circumferential direction of the ceramic body and extend in the direction of the axis line.SELECTED DRAWING: Figure 1
Owner:NITERRA CO LTD

Ceramic connector and method of welding and use thereof

PendingCN122254909ASemiconductorHeat treating
The application relates to the technical field of ceramic welding, and discloses a ceramic connecting piece, a welding method thereof and application. The welding method comprises the following steps: (1) introducing a welding material between a to-be-welded area of a ceramic piece I and a ceramic piece II to obtain a to-be-welded assembly piece; (2) performing preliminary welding on the to-be-welded assembly piece to obtain a sealed welding piece; the temperature of the preliminary welding is 1400-1580 DEG C, and the pressure of the preliminary welding is 0.5-2 MPa; (3) performing annealing heat treatment on the sealed welding piece to obtain a ceramic connecting piece; the annealing heat treatment temperature is 50-200 DEG C lower than the temperature of the preliminary welding, and the gas pressure of the annealing heat treatment is greater than or equal to 2 MPa. The welding method of the ceramic connecting piece provided in the application can realize high-strength sealed connection of ceramics under low temperature and low pressure, and is especially suitable for preparing electrostatic chucks and ceramic heaters in semiconductor processing equipment.
Owner:NO 12 RES INST OF CETC

A PTC heating circuit and a heating method

The application provides a PTC heating circuit and a heating method, which comprises the following steps: connecting the first end of the first-stage switching circuit with the L-phase line of an external AC power supply; connecting the second end of the first-stage switching circuit with the first end of the second-stage switching circuit; connecting the third end of the first-stage switching circuit with an external DC power supply; connecting the fourth end of the first-stage switching circuit with an external controller; the first-stage switching circuit comprises a relay; connecting the second end of the second-stage switching circuit with the first end of a PTC heater; connecting the third end of the second-stage switching circuit with the external DC power supply; connecting the fourth end of the second-stage switching circuit with the external controller; and connecting the second end of the PTC heater with the N-phase line of the external AC power supply. By implementing the application, the relay is not directly subjected to the large current impact of the ceramic PTC heater when it is first turned on, so that the relay type does not need to be increased, and the cost increase caused by the relay is avoided.
Owner:AUPU INTELLIGENT TECH CORP LTD

Ceramic heater

Provided is a ceramic heater capable of exhibiting improved thermal uniformity while maintaining corrosion resistance to corrosive gases such as halogen-based gases. This ceramic heater comprises: a ceramic plate assembly including an upper ceramic plate and a lower ceramic plate joined together at joining surfaces thereof; and a heater electrode embedded only in the lower ceramic plate. The upper ceramic plate includes a first ceramic material containing magnesium, aluminum, oxygen, and nitrogen as main components, and the first ceramic material contains, as a main phase, a magnesium-aluminum oxynitride phase in which a peak is observed at least at 2θ=47-50° in an XRD profile obtained by using Cu K alpha rays. The lower ceramic plate includes a second ceramic material containing yttrium, aluminum, oxygen, and nitrogen in a mixing ratio of 10-30 parts by weight of yttrium oxide to 100 parts by weight of aluminum nitride.
Owner:NGK INSULATORS LTD

Ceramic heater

Provided is a ceramic heater in which damage due to temperature distribution of center cooling is less likely to occur without impairing the function of an RF / ESC electrode. The ceramic heater comprises: a ceramic plate having a first surface on which a wafer is placed and a second surface which faces the first surface; a first RF / ESC electrode which is embedded in the ceramic plate in parallel to the first surface; a second RF / ESC electrode which is electrically connected to the first RF / ESC electrode and is embedded in parallel to the first surface at a depth position, in the ceramic plate, apart further from the first surface as compared to the first RF / ESC electrode; an RF / ESC rod which has one end electrically connected to the second RF / ESC electrode and the other end extending to the outside of the ceramic plate from the second surface; an RF / ESC terminal hole which is a bottomed hole provided from the second surface of the ceramic plate toward the second RF / ESC electrode in the thickness direction and to which the tip portion of the RF / ESC rod is inserted; and a heater circuit which is embedded at a depth position, in the ceramic plate, closer to the second surface as compared to the second RF / ESC electrode. The distance between the center lines of the first RF / ESC electrode and the second RF / ESC electrode is 2-7 mm. The distance from the first surface to the bottom of the RF / ESC terminal hole is 4-9 mm.
Owner:NGK INSULATORS LTD

Novel variable air heater main machine

The utility model discloses a novel variable wind warmer host, including casing, the top of casing bolted with cover plate, the inside of casing is integratedly injection molded with volute hot air bin, the device drives wind wheel to rotate through first motor to generate air flow, cooperates with PTC ceramic heater to heat the air flow, forms stable hot air output, and the heating efficiency is improved. Meanwhile, a third motor is used for driving a swing plate and a swing arm to be linked so as to cooperatively drive an air guide plate to rotate oppositely, under the condition that the power of the first motor is not changed, the air pressure of an air outlet can be changed only through adjustment of a mechanical structure, hot air can cover a longer distance, and the heating range and comfort are remarkably improved; by means of the mechanical air pressure adjusting mode, the problem that energy consumption is increased due to traditional frequency conversion speed regulation is solved, stability of heat output is guaranteed, energy consumption is reduced, and the problem that the air supply distance of a traditional warmer is short is effectively solved while low cost is maintained.
Owner:JIAXING CHUHAN ELECTRIC APPLIANCE CO LTD

Ceramic material for ceramic heaters and method for the production thereof

The application relates to the technical field of functional ceramics, and mainly relates to a ceramic material for a ceramic heater and a preparation method thereof. The ceramic material for the ceramic heater comprises the following raw materials: 90-100 parts by weight of alumina; 5-10 parts by weight of modified calcium silicate glass powder; 0.1-1 part by weight of yttrium oxide; 5-15 parts by weight of modified zirconium oxide; 0.1-1 part by weight of silicon dioxide; 0.1-1 part by weight of magnesium oxide; 1-5 parts by weight of a binder; and the preparation raw materials of the modified calcium silicate glass powder comprise quartz sand, limestone and alumina. The ceramic material for the ceramic heater provided by the application is excellent in thermal shock resistance, thermal conductivity, mechanical properties and the like, and can well adapt to the application scene of the ceramic heater.
Owner:DONGGUAN FANGTAI NEW MATERIAL TECH CO LTD

An induction-heated air outlet device

PendingCN122296603AMechanicsFlow divider
An induction heating air outlet device includes a housing, within which a vortex tube, a heating system, and an induction device are installed. The vortex tube is equipped with a flow guiding system and a cold flow system. The flow guiding system includes an air inlet connected to the air inlet of the housing, with an arc-shaped wind wall at the air inlet and a flow divider cone connected to it. Heat outlet holes are formed on the wall of the flow divider cone. The cold flow system includes a return pipe for returning cold flow located at the air inlet, connected to a guide ring. A pressure-increasing port is located on one side of the guide ring. The heating system includes a ceramic heater installed outside the heat outlet holes. The pressure-increasing port is connected to the ceramic heater via the air flow pipe, and the ceramic heater is connected to the air outlet of the housing. A pressure-increasing gap is formed between the front side of the air flow pipe and the outer wall of the guide ring, connected to the air inlet of the housing. The induction device includes a far-infrared sensor lamp installed at the center of the air outlet of the housing.
Owner:NINGBO HORD INTELLIGENT TECH CO LTD

Glaze spraying equipment for manufacturing ceramic heater

The invention relates to the technical field of ceramic glaze spraying equipment, and discloses ceramic heater manufacturing glaze spraying equipment which comprises a box body, a glaze slip nozzle is fixedly mounted at the top of an inner cavity of the box body, four movable adjusting devices are arranged in the box body, and each movable adjusting device comprises a rotatable U-shaped frame. Two rotary adjusting devices are movably arranged on the U-shaped frame, the two rotary adjusting devices can synchronously move in the same direction or in the opposite directions, and movable clamping blocks are rotationally connected to the rotary adjusting devices. Two rotary adjusting devices which synchronously move in the same direction or in the opposite directions are arranged on each movable adjusting device, servo air cylinders on the two sides drive clamping blocks to move so as to clamp a ceramic heater base body and drive the ceramic heater base body to rotate, and therefore glaze is sprayed to the ceramic heater base body through a glaze slurry spray head; the situation that glaze cannot be sprayed on the clamped part on the surface of the ceramic heater base body to obtain an insulating layer is avoided, and the ceramic heater base body does not need to be re-positioned and clamped for glaze spraying.
Owner:GUIZHOU INST OF TECH +1

Multipurpose plate-shaped ceramic heater

The utility model relates to the technical field of ceramic heaters, and discloses a multipurpose plate-shaped ceramic heater which comprises a shell, a second connecting plate is fixedly connected in the shell, a second clamping groove is formed in the second connecting plate, a second clamping block is connected to the inner wall of the second clamping groove in a sliding mode, and a fixing plate is fixedly connected to the outer wall of the second clamping block. A third connecting plate is fixedly connected to the inner wall of the fixing plate, the two sides of the third connecting plate are fixedly connected to the side, away from the second clamping groove, of the second clamping block, a rotating block is fixedly connected to the side, away from the second connecting plate, of the fixing plate, a heating pipe is rotationally connected to the outer wall of the rotating block, and a fixing assembly is arranged on the upper surface of the shell. According to the utility model, in the aspect of installation and replacement of the heating pipe, through the clamping design of the clamping block II and the clamping groove II, the operation process is greatly simplified, and compared with a traditional complex fixing structure, the heating pipe can be rapidly replaced only by operating separation and combination of the clamping block II and the clamping groove II, so that the working efficiency is effectively improved.
Owner:YANCHENG GEMEI ELECTRIC HEATING TECH CO LTD

Ceramic heater

The ceramic heater is provided with: a ceramic plate 20 having a wafer placement surface on the upper surface thereof; a plurality of segments (Z1 to Z6) provided on the wafer placement surface; section heaters implanted in the ceramic plate (20) so as to correspond to each of the plurality of sections (Z1 to Z6); a single temperature measurement member path 30 provided on the ceramic plate 20; and a single temperature measurement member (Multi TC40) disposed in the temperature measurement member path (30). The temperature measurement member passage 30 is provided so as to pass through each of the plurality of sections Z1-Z6 from an inlet 32 provided in the lower surface of the ceramic plate 20. The Multi TC40 is provided with a plurality of temperature measuring parts (41 m to 46 m). The plurality of temperature measurement units (41m-46m) are disposed at measurement positions (P1-P6) corresponding to the plurality of segments (Z1-Z6), respectively.
Owner:NGK INSULATORS LTD

A special hot air blower for high-pressure gas heating

ActiveCN224454904UThermodynamicsAir blower
This utility model discloses a special hot air blower for high-pressure gas heating, relating to the field of heating equipment. It includes an outer casing containing a cylinder. An air inlet and an air outlet are respectively located at the top two ends of the cylinder, both penetrating the casing. A ceramic heater is housed inside the cylinder. A temperature sensor is located at the front end of the cylinder, with its sensing end extending through the cylinder into its interior. A temperature controller is located at the front end of the outer casing. The temperature controller, temperature sensor, and ceramic heater are electrically connected. This utility model places the ceramic heater inside the cylinder, and the air inlet and outlet are located at the top of the cylinder. Gas only needs to pass through these air inlets and outlets. Furthermore, the air inlet and outlet can be connected and sealed to the cylinder using ordinary gas connecting pipes, facilitating the connection and sealing of the ceramic heater.
Owner:SUZHOU BEREK MASCH EQUIP CO LTD

Ceramic heater

Provided is a ceramic heater. The ceramic heater includes a disk-shaped plate and a heating element embedded in the plate. A portion of the heating element is a coiled wire, and another portion of the heating element is a non-coiled wire. The non-coiled wire is arranged in a central portion of the plate.
Owner:MICOCERAMICS LTD

Ceramic heater

The utility model provides a ceramic heater, which relates to the technical field of ceramic heaters and comprises a shell, a mounting mechanism and a heat dissipation mechanism, a groove is arranged in the shell, a plurality of ceramic chips are mounted in the groove, the mounting mechanism comprises a pair of insertion blocks, the pair of insertion blocks is mounted on one side of a first mounting rod, and the heat dissipation mechanism is mounted on the first mounting rod. The heat dissipation mechanism comprises a heat dissipation fan, a heat dissipation box is installed on one side of the exterior of the shell, a heat dissipation groove is formed in the heat dissipation box, a first through hole is formed in one side of the interior of the heat dissipation box, and a second through hole is formed in one side of the interior of the heat dissipation box. A pair of protective nets is installed in the first through hole, and the cooling fan is installed between the pair of protective nets. The heating device is simple and reasonable in structure, novel in design and easy and convenient to operate, the heater can be effectively, rapidly and conveniently installed, the working efficiency of workers is improved, and the heating device has high practical value.
Owner:NINGBO SU PAI APPLIANCE CO LTD

A water-based trailer special paint drying device

The utility model discloses a kind of water trailer special paint drying device, belong to lacquer surface drying technical field, including drying chamber, the inside of the drying chamber is provided with heat preservation layer, in the utility model, by setting bidirectional motor, support frame and filter grid, when there is trailer needing to carry out lacquer surface drying, first pull sliding door inside the inside of pulley groove and slide, after the completion that sliding door opens, start bidirectional motor, by guiding device drive conveyor belt with the end of support frame to extend drying chamber, to place the trailer compartment needing drying on the top of support frame, again bidirectional motor reverses, by guiding device drive support frame to return to the inside of drying chamber, start far infrared ceramic heater gradually to increase the temperature inside heat preservation layer, after drying is completed, start heat pipe heat exchanger, open exhaust fan, carry out waste heat collection and exhaust heat dissipation to room, to shorten drying time, provide production efficiency, ensure that paint film is rapidly, uniformly dry.
Owner:SHANDONG QICAI PAINT CO LTD

Wireless hair dryer

A wireless hair dryer comprises a handle and an air outlet cylinder, the air outlet cylinder is installed at the upper end of the handle, an air inlet is formed in the lower end of the handle, a battery pack, a motor and an electric control chip are sequentially installed in the handle from bottom to top, a ventilation pipeline is arranged on the inner side of the inner wall of the handle and communicated with the air inlet, and the air outlet cylinder is connected with the air inlet. The ventilation pipeline is communicated with an air inlet of the air outlet cylinder; an air flow channel is arranged in the air outlet barrel, a ceramic heater is arranged in the air flow channel, the air outlet barrel is provided with an air outlet with a large inner part and a small outer part, and an infrared induction system is arranged on the front side of the middle part of the air outlet barrel. The air outlet is large in inside and small in outside to form the Bernoulli principle, air compression and release are carried out, air flowing acceleration is generated, and therefore the air outlet efficiency is improved. The infrared sensing system senses the distance between the air opening and the scalp and the temperature of the scalp, the distance and the temperature are mutually adjusted, and meanwhile a comfortable environment is created for hair drying and blowing of the head.
Owner:NINGBO HORD INTELLIGENT TECH CO LTD

Aluminum nitride ceramic heater (HT22-16)

1. Name of the product in this design: Aluminum Nitride Ceramic Heater (HT22-16). 2. Application of this design: This design is used for aluminum nitride ceramic heaters. 3. The key design feature of this product is its shape. 4. The image or photograph that best illustrates the design's key points: 3D view 1.
Owner:ZHONGSHAN THINK ELECTRONICS TECH CO LTD

Ceramic heater

The invention relates to a ceramic heater. The present invention relates to a two-zone heating element embedded in a ceramic heater, comprising: a first heating unit and a second heating unit which can be independently controlled by a power supply device; the first non-heating part is arranged between a first sub-heating part and a second sub-heating part which form the first heating part and is electrically connected with the first sub-heating part and the second sub-heating part; and a second non-heating part disposed between the second heating part and the first electrode terminal and electrically connecting the second heating part and the first electrode terminal.
Owner:MICOCERAMICS LTD

Intelligent ventilation and temperature and humidity control equipment for agricultural animal husbandry place

The invention discloses intelligent ventilation and temperature and humidity control equipment for an agricultural livestock place, and relates to the technical field of agricultural livestock environment regulation and control, in particular to the intelligent ventilation and temperature and humidity control equipment for the agricultural livestock place, which comprises a shell, a touch panel, a switch and an air inlet pipe are arranged at the front end of the shell, a pull-out water tank and a charging socket are arranged at the side end of the shell, and an axial flow exhaust fan is arranged at the rear end of the shell; an air supply pipeline, a temperature and humidity composite sensor, a microcontroller and the like are arranged at the inner end. A filter screen is arranged in the air supply pipeline to intercept dust and impurities, and an outer-end ceramic heater can heat airflow to adjust temperature; the temperature and humidity composite sensor is close to the air inlet pipe to detect temperature and humidity, and the microcontroller sends an instruction to coordinate operation of components according to set parameters; the ultrasonic humidifier is connected with the pull-out type water tank, and atomized water is used for humidifying. The equipment can realize intelligent regulation and control of ventilation and temperature and humidity, is adaptive to environmental requirements of livestock places, and is reasonable in structure and high in practicability.
Owner:李卉

Electrode-embedded member with pin-shaped projections of varying heights, substrate holding member, ceramic heater, and electrostatic chuck

An electrode-embedded member includes a disc-shaped base that is formed of a ceramic sintered body, an electrode embedded in the base, and a plurality of pin-shaped projections projecting upward from an upper surface of the base. The upper surface of the base is a curved surface having a shape protruding toward a center. The plurality of pin-shaped projections include first pin-shaped projections whose heights from the upper surface to respective upper ends are substantially identical to each other, and second pin-shaped projections whose heights from the upper surface to respective upper ends are each lower than the height of each of the first pin-shaped projections.
Owner:NITERRA CO LTD

Ceramic heater and manufacturing method thereof

The present invention relates to a ceramic heater with improved reliability, the ceramic heater including: a heater body having a mesh type high-frequency electrode, and an electrode rod connecting member being in contact with a lower surface of the high-frequency electrode; and a heater support mounted on a lower portion of the heater body and configured to support the heater body, in which the electrode rod connecting member is in area contact with one surface of the high-frequency electrode.
Owner:MICOCERAMICS LTD

Control device for ceramic heater module, ceramic heater unit and computer program product

The invention provides a control device of a ceramic heater module, a ceramic heater unit and a computer program product. A control device controls a ceramic heater module provided with: a ceramic heater having a ceramic base body in which a resistance heating element is embedded; and a housing that accommodates the ceramic heater and has an inlet and an outlet through which the liquid medium flows. The control device is provided with: a means for acquiring an outlet temperature, which is the temperature of the outlet side of the ceramic heater module; and a means for determining whether or not a predetermined stop condition is satisfied on the basis of a temperature difference between a start temperature, which is an outlet temperature acquired at a power-on start time at which the resistance heating element is started to be powered on by the predetermined power, and a detected temperature, which is an outlet temperature acquired at a power-on start time at which the resistance heating element is started to be powered on by the predetermined power. The detected temperature is the outlet temperature obtained at one or more specific time points after the electrifying starting time point; and a means for stopping the supply of electricity to the resistive heating element when it is determined that the stop condition is satisfied.
Owner:NITERRA CO LTD

Auxiliary machining device for PTC ceramic heater production

The utility model relates to the field of electric heating product manufacturing, in particular to an auxiliary machining device for PTC (Positive Temperature Coefficient) ceramic heater production, which comprises a mounting seat, an arranging device, a polishing component and a spraying component, the arranging device is fixedly connected onto the mounting seat, the polishing component is fixedly connected onto the mounting seat, and the spraying component for effectively inhibiting dust dispersion is arranged on the mounting seat. The rotating arm is driven by the motor to rotate, the rotating arm drives the sprayer on the U-shaped frame to swing in a reciprocating mode, when the swing arm rotates up and down, the sprayer swings front and back along with the swing arm, the spraying area is increased, then the effect of reciprocating swing of the sprayer is achieved, and the effects that the sprayer can swing in a reciprocating mode for spraying, and the spraying area is increased are achieved.
Owner:ZHUHAI DONGFANG ELECTRIC HEATING TECH CO LTD

Anti-blocking feeding device for drum flaker

The utility model discloses an anti-blocking feeding device for a rotary drum flaker, which comprises a rotary drum flaker body, the front end and the rear end of the rotary drum flaker body are respectively and fixedly connected with a bracket, a material soaking device is fixedly erected right below a roller of the rotary drum flaker body, a feeding box is fixedly arranged on the bracket on the front side, and the feeding box is fixedly connected with the bracket on the rear side. And the inner walls of the left side and the right side, close to the bottom, of the feeding box communicate with material guiding pipes correspondingly. The spiral discharging rod and the comb-tooth-shaped stirring plate are driven by the driving motor to rotate, so that the spiral discharging rod continuously turns over and stirs hot melt materials in the feeding box, the hot melt materials guided into the feeding box through the right side material guiding pipe can be conveniently and rapidly discharged into the material soaking device along the discharging pipe, hot melt excess materials in the feeding box can be conveniently and rapidly discharged, and the production efficiency is improved. Meanwhile, the hot melt in the feeding box is continuously heated by the ceramic heater, and the hot melt is continuously stirred and turned over in cooperation with the spiral discharging rod and the comb-tooth-shaped stirring plate, so that the situation that the discharging pipe is blocked after the hot melt is solidified is avoided, and feeding blockage is prevented.
Owner:ANHUI XUELANG HUABAO CHEM EQUIP TECH

A ceramic heater with a stainless steel device for improving heating effect

ActiveCN224555804UHeating effectScrew cap
The utility model discloses a kind of ceramic heater of stainless steel device for improving heating effect, it includes, ceramic heater, fixed seat one is provided on the ceramic heater, the lower surface of fixed seat one is provided with shock-absorbing box, the inner surface of shock-absorbing box is fixedly connected with two dampers, spring is provided on the damper, screw hole one is provided on the shock-absorbing box of fixed seat one, the inner surface of screw hole one is screw-connected with nut one, the outer surface of nut one is screw-connected with nut one, by the above structure, by the linkage of damper and spring, the influence of effectively buffering external vibration to ceramic heater, protect the integrity of ceramic heating element and stainless steel device, avoid heating component contact badly, heat distribution uneven etc. Problem caused by vibration, it can also ensure that heater maintains stable working condition in vibrating environment, from the basis to guarantee the persistence and stability of heating effect.
Owner:WUXI HUCHUANGXIN MICRO SEMICON TECH CO LTD

Ceramic heater

The invention provides a ceramic heater capable of suppressing damage of the heater caused by thermal shock. A ceramic heater (100) is provided with: a ceramic body (10) having a heating resistor (13); and a coating layer (20) mainly composed of glass and configured so as to cover at least corners (11E, 12E) and a region of the surface of the ceramic body that has the heating resistor, in which ceramic particles (21) are adhered to at least a part of a portion of the surface of the coating layer that covers the ceramic body.
Owner:NITERRA CO LTD

Ceramic heater

To provide a ceramic heater.SOLUTION: A ceramic heater of the present invention includes a plate having a heating element and a first passage, a shaft having a hollow, and a thermocouple inserted into the first passage, wherein the heating element includes a plurality of concentric arc portions and a plurality of connection portions connecting the arc portions, a separation region formed by the plurality of connection portions facing each other while being spaced apart from each other extends in a radial direction of the plate, and the first passage is formed adjacent to the separation region.SELECTED DRAWING: Figure 2
Owner:MICOCERAMICS LTD

Heating device

The invention provides a heating device. A heating device (1) is provided with: a ceramic heater (10) having a cylindrical ceramic base body and a linear resistance heating element embedded in the ceramic base body, the ceramic heater (10) having a base part (111) and a heating part (112) formed thereon, the base part (111) having a first electrode pad (13) connected to one end of the resistance heating element and a second electrode pad (14) connected to the other end of the resistance heating element formed on the surface thereof, the first electrode pad (13) being formed on the surface thereof and the second electrode pad (14) being formed on the surface thereof and the second electrode pad (14) being formed on the surface thereof; the heating part (112) is heated by a resistance heating element; a first conductive member (61) connected to the first electrode pad (13); a second conductive member (62) connected to the second electrode pad (14); and a housing (20) that accommodates the ceramic heater (10). A first space (S1) for accommodating the heating part (112) and a second space (S2) for accommodating the base part (111) are formed in the housing (20). The second space (S2) is filled with a sealing member.
Owner:NITERRA CO LTD

Ceramic heater and method of making same

The electrostatic chuck heater has an electric resistance heating element 16 inside the ceramic substrate 12. A groove 17 is provided on the surface of the electric resistance heating element 16 along the length direction of the electric resistance heating element 16. The side wall surface 17a of the groove 17 is inclined with respect to the surface of the ceramic substrate 12. There is no gap between the side wall surface 17a of the groove 17 and the ceramic substrate 12.
Owner:NGK INSULATORS LTD