269 results about "Ceramic heater" patented technology

Provided is a heater assembly for a hand-held appliance. The assembly includes a ceramic heater substrate having a heated region that includes heater elements for converting electrical energy to heat, and an unheated region adjacent to the heated region. The assembly includes a heat sink for dissipating heat from the heater elements, where the heat sink extends from the heated region of the ceramic heater substrate. The assembly includes electronic control devices for controlling electrical energy supply to the heater elements, and which are mounted at the unheated region of the ceramic heater device. The assembly includes heat dissipation means to dissipate heat from the heater elements to maintain the unheated region at a lower temperature than the heated region.

The invention discloses a micro-water density monitoring method and system based on multi-sensor fusion compensation, and relates to the field of power equipment safety. According to the micro-water density monitoring method based on multi-sensor fusion compensation, parameters are collected in real time through a micro-water collector composed of a ceramic heater, a humidity-sensitive capacitor collection sheet, a dew point sensor, a pressure sensor and a temperature sensor; a signal conditioning circuit and an analog-to-digital conversion module are integrated by adopting a four-layer PCB (Printed Circuit Board), and the micro-water collector is heated for multiple times by a main controller; carrying out digital filtering processing, cross validation operation and operation of eliminating influence of environment temperature on the acquired parameters; the measurement precision is improved through a sensor self-calibration mechanism, finally standardized micro-water density data are output, and an early warning function is triggered based on a multi-level threshold value. According to the invention, the problems of low precision and poor reliability of the measured micro-water density in the prior art are solved. Therefore, the accuracy of micro-water density measurement under complex working conditions is effectively improved, and data support is provided for predictive maintenance of intelligent equipment.

The invention discloses a high-power ceramic heater based on a new energy automobile and a manufacturing method of the high-power ceramic heater, and relates to the technical field of ceramic heater manufacturing. The invention comprises: a hollow tubular ceramic matrix; the temperature sensing layer, the first ceramic substrate, the heating layer, the second ceramic substrate, the first metal layer and the first electroplating alloy layer are sequentially attached to the outer side of the ceramic base body; the second metal layer and the second electroplating alloy layer are sequentially attached to the inner side of the ceramic base body. Through surface treatment of the novel heating slurry, the novel ceramic material, the metal layer and the electroplated alloy layer and innovative design of the integrated temperature sensing layer, the high-power ceramic heater is excellent in performance, service life, safety, temperature control and temperature impact resistance, and can cope with a harsh working environment; a more stable and efficient heating solution is provided; due to the innovative design, the ceramic heater is more reliable and durable under high-power, high-pressure and complex working conditions.

The invention relates to a ceramic heating body and a preparation method and application thereof, in particular to the technical field of heating equipment, and the ceramic heating body comprises a first ceramic layer, a heating layer, a second ceramic layer, a radio frequency net layer and a third ceramic layer which are sequentially arranged; the thickness of the first ceramic layer is larger than that of the second ceramic layer and larger than that of the third ceramic layer; the first ceramic layer, the second ceramic layer and the third ceramic layer are prepared from the following raw materials: aluminum nitride powder, yttrium oxide powder, an adhesive, a plasticizer and alcohol. According to the ceramic heating body provided by the invention, by designing the structure and the composition of the ceramic heating body, the surface temperature uniformity and the heat conductivity of the ceramic heating body are effectively improved, the use performance of the ceramic heating body is remarkably improved, meanwhile, the efficiency of the heating process is also improved, and efficient heating of a workpiece is facilitated.

The utility model relates to the technical field of thermal management, in particular to an automotive liquid ceramic heater with a temperature detection function. An automotive liquid ceramic heater with a temperature detection function comprises a ceramic body, a heating resistance wire and a temperature sensor resistance wire. The ceramic body comprises an upper ceramic layer and a lower ceramic layer; the upper ceramic layer is located above the lower ceramic layer, at least one mounting space is defined between the upper ceramic layer and the lower ceramic layer, and the temperature sensor resistance wire and the heating resistance wire are both located in any mounting space; the heating resistance wire is configured to generate heat after being electrified to complete external heating; the resistance wire of the temperature sensor is configured to change the resistance value along with high temperature change so as to realize temperature detection. Therefore, the temperature of the MCH can be detected, and the temperature acquisition precision is higher.

The invention belongs to the technical field of ceramic preparation, and discloses a dry pressing forming machine for PTC ceramic heater powder preparation, which comprises a shell, and further comprises a lower mold, an upper mold and a lower mold, the lower mold is arranged on the outer wall of the shell, and a demolding mechanism is arranged on the inner wall of the lower mold; the driving module is arranged on the outer wall of the top end of the shell, and an upper mold is arranged at the movable end of the driving module through a connecting mechanism; the collecting mechanism is arranged in the inner wall of the shell; wherein the demolding mechanism comprises a moving rod, and the inner wall of the moving rod is elastically connected with a triangular block through an elastic piece A; through cooperation of the cambered surface block, the moving rod and other structures, the upper mold moves upwards to drive the ejection block to eject a ceramic green body upwards out of the mold cavity, the two sets of lower molds move towards the two sides at the same time to be disengaged from the green body, it is ensured that the green body is not bonded with the mold cavity, and then an operator can take out the green body conveniently.

There is provided a ceramic heater including a ceramic plate including a center portion within a radius of 60 mm, an intermediate portion having a radius of 80 to 120 mm, and an outer peripheral portion having a radius of 130 mm or more; and a resistance heating element embedded in the ceramic plate. The resistance heating element is configured such that a volume resistivity of the resistance heating element is gradually increased as a distance from the center is increased. When the volume resistivity of the resistance heating element at an outer edge of the center portion is 100%, a ratio of the volume resistivity of the resistance heating element in the intermediate portion is within a range of 102 to 120%, and a ratio of the volume resistivity of the resistance heating element in the outer peripheral portion is within a range of 108 to 139%.

A wireless electric blower comprises a handle and an air outlet cylinder, the air outlet cylinder is installed at the upper end of the handle, an air inlet is formed in the lower end of the handle, a battery pack, a motor and a motor component set are sequentially installed in the handle from bottom to top, a ventilation pipeline is arranged on the inner side of the inner wall of the handle and communicated with the air inlet, and the air inlet is communicated with the air outlet. The ventilation pipeline is communicated with an air inlet of the air outlet cylinder; an air flow channel is arranged in the air outlet barrel, a ceramic heater is installed in the air flow channel, air flow inclined walls are arranged at the air inlet end and the air outlet end of the air flow channel, the air inlet end is communicated with the air inlet, and an air outlet with the large inside and the small outside is formed in the air outlet end. The air flow inclined walls of the air inlet end and the air outlet end can adsorb air flow to the inclined faces to flow, local accelerated flow is generated, the Bernoulli principle is formed at the air outlet, air compression and release are carried out, air flow acceleration is generated, and therefore the air outlet efficiency is improved.

The invention discloses a method for positioning a heating wire terminal of an AlN ceramic heater, and belongs to the technical field of semiconductors, and the method comprises the steps: S1, preparing a ceramic block with a groove: carrying out the groove processing of the ceramic block according to the distribution pattern of a heating wire, and forming the preparation of the ceramic block with the groove; s2, preparing an AlN ceramic heater green body: paving AlN ceramic powder in a mold to form a lower AlN ceramic powder layer, then putting the processed ceramic block with the groove into the mold, specifically, putting the ceramic block with the groove on the lower AlN ceramic powder layer, determining the position according to the actual position, correctly putting a heating wire terminal in the groove of the ceramic block, and then putting the heating wire terminal into the lower AlN ceramic powder layer to form the AlN ceramic heater green body; the AlN ceramic powder is laid again to form an upper AlN ceramic powder layer, and compression molding is carried out; and S3, hot pressed sintering: if the ceramic green bodies are formed in a dry press, the ceramic green bodies are subjected to degreasing and glue discharging and then are put into a hot pressing furnace to be sintered together, and if the ceramic green bodies are formed in the hot pressing furnace, sintering is directly carried out.

The utility model discloses an annular ceramic heater forming device, which relates to the technical field of ceramic heater production equipment and is characterized in that an upper module can be driven to lift and rotate through a driving component, so that a semi-forming upper die, a clamp and a pressing die can be sequentially matched with a bottom die; according to the circular-ring-shaped ceramic heater forming device, the operations of semi-finished product pressing, heating coil placing, finished product pressing forming and the like are sequentially completed, and therefore the forming operation of a circular-ring-shaped ceramic heater is completed in a small space at a time. The forming device has the advantages of being small in occupied space, short in forming period, high in finished product quality and the like on the premise that production efficiency is considered, full-automatic annular ceramic heater forming operation can be achieved only by being matched with an existing automatic feeding and discharging mechanism, and popularization and improvement of the annular ceramic heater forming device are facilitated; and through the arrangement of the station point positions and the sensors, the accuracy of forming operation is improved, and therefore the product quality is improved.

To provide a ceramic heater and a liquid heating device capable of improving heating efficiency without obstructing a flow of liquid to be heated.SOLUTION: A ceramic heater 100 for heating liquid includes a columnar ceramic body 10 having a heating resistor 13 and extending in a direction of an axis line O, and a radiation fin 20 protruding from a surface of the ceramic body, extending in the direction of the axis line, and having thermal conductivity higher than that of the ceramic body, where a plurality of radiation fins is provided apart from each other in a circumferential direction of the ceramic body and extend in the direction of the axis line.SELECTED DRAWING: Figure 1

The application relates to the technical field of ceramic welding, and discloses a ceramic connecting piece, a welding method thereof and application. The welding method comprises the following steps: (1) introducing a welding material between a to-be-welded area of a ceramic piece I and a ceramic piece II to obtain a to-be-welded assembly piece; (2) performing preliminary welding on the to-be-welded assembly piece to obtain a sealed welding piece; the temperature of the preliminary welding is 1400-1580 DEG C, and the pressure of the preliminary welding is 0.5-2 MPa; (3) performing annealing heat treatment on the sealed welding piece to obtain a ceramic connecting piece; the annealing heat treatment temperature is 50-200 DEG C lower than the temperature of the preliminary welding, and the gas pressure of the annealing heat treatment is greater than or equal to 2 MPa. The welding method of the ceramic connecting piece provided in the application can realize high-strength sealed connection of ceramics under low temperature and low pressure, and is especially suitable for preparing electrostatic chucks and ceramic heaters in semiconductor processing equipment.

A ceramic heater 10 comprises: a ceramic plate 20 having a wafer mounting surface 21 on the upper surface 20a thereof; inner peripheral side and outer peripheral side resistance heating elements 25, 26 that are buried in the ceramic plate 20 and wired in zones Z1, Z2 obtained by dividing the wafer mounting surface 21 into two; a cylindrical shaft 40 supporting the ceramic plate 20 from the lower surface 20b thereof; a thermocouple insertion hole 30 provided in a shaft inner region 27 of the lower surface 20b of the ceramic plate 20; and four resistance heating element terminal holes provided in the shaft inner region 27 so as to respectively correspond to terminals 25a, 25b, 26a, 26b of the inner peripheral side and outer peripheral side resistance heating elements 25, 26. The inner peripheral side resistance heating element 25 is located above the bottom surface 31 of the thermocouple insertion hole 30, and has a portion overlapping the thermocouple insertion hole 30 in plan view.

The utility model relates to the technical field of ceramic heaters, and discloses an embedded type ceramic heater which comprises a mounting plate, a ceramic heater body is mounted in the middle of the mounting plate, fixing rods are fixedly connected to the two sides of the interior of the mounting plate, and a movable plate is slidably connected to the outer portions of the two fixing rods. The two fixing rods are sleeved with first springs, a grip is fixedly connected to the upper portion of the moving plate, a positioning rod is fixedly connected to the front side of the outer portion of the moving plate, fixing plates are fixedly connected to the two sides of the upper portion of the mounting plate, a dustproof shell is arranged in the middles of the two fixing plates, and dismounting assemblies are arranged in the two fixing plates. The dismounting and mounting assembly is used for mounting and dismounting the dustproof cover, and ventilation holes are formed in the two sides of the outer portion of the dustproof shell. According to the utility model, the installation of the embedded ceramic heater is convenient, the bolt installation mode is used separately, the installation mode is simple and convenient, and the installation efficiency is improved.

The application provides a PTC heating circuit and a heating method, which comprises the following steps: connecting the first end of the first-stage switching circuit with the L-phase line of an external AC power supply; connecting the second end of the first-stage switching circuit with the first end of the second-stage switching circuit; connecting the third end of the first-stage switching circuit with an external DC power supply; connecting the fourth end of the first-stage switching circuit with an external controller; the first-stage switching circuit comprises a relay; connecting the second end of the second-stage switching circuit with the first end of a PTC heater; connecting the third end of the second-stage switching circuit with the external DC power supply; connecting the fourth end of the second-stage switching circuit with the external controller; and connecting the second end of the PTC heater with the N-phase line of the external AC power supply. By implementing the application, the relay is not directly subjected to the large current impact of the ceramic PTC heater when it is first turned on, so that the relay type does not need to be increased, and the cost increase caused by the relay is avoided.

Provided is a ceramic heater capable of exhibiting improved thermal uniformity while maintaining corrosion resistance to corrosive gases such as halogen-based gases. This ceramic heater comprises: a ceramic plate assembly including an upper ceramic plate and a lower ceramic plate joined together at joining surfaces thereof; and a heater electrode embedded only in the lower ceramic plate. The upper ceramic plate includes a first ceramic material containing magnesium, aluminum, oxygen, and nitrogen as main components, and the first ceramic material contains, as a main phase, a magnesium-aluminum oxynitride phase in which a peak is observed at least at 2θ=47-50° in an XRD profile obtained by using Cu K alpha rays. The lower ceramic plate includes a second ceramic material containing yttrium, aluminum, oxygen, and nitrogen in a mixing ratio of 10-30 parts by weight of yttrium oxide to 100 parts by weight of aluminum nitride.

Provided is a ceramic heater in which damage due to temperature distribution of center cooling is less likely to occur without impairing the function of an RF / ESC electrode. The ceramic heater comprises: a ceramic plate having a first surface on which a wafer is placed and a second surface which faces the first surface; a first RF / ESC electrode which is embedded in the ceramic plate in parallel to the first surface; a second RF / ESC electrode which is electrically connected to the first RF / ESC electrode and is embedded in parallel to the first surface at a depth position, in the ceramic plate, apart further from the first surface as compared to the first RF / ESC electrode; an RF / ESC rod which has one end electrically connected to the second RF / ESC electrode and the other end extending to the outside of the ceramic plate from the second surface; an RF / ESC terminal hole which is a bottomed hole provided from the second surface of the ceramic plate toward the second RF / ESC electrode in the thickness direction and to which the tip portion of the RF / ESC rod is inserted; and a heater circuit which is embedded at a depth position, in the ceramic plate, closer to the second surface as compared to the second RF / ESC electrode. The distance between the center lines of the first RF / ESC electrode and the second RF / ESC electrode is 2-7 mm. The distance from the first surface to the bottom of the RF / ESC terminal hole is 4-9 mm.

An enclosure for a ceramic heater rod installed within an interior wall of a sauna is disclosed. Such an enclosure may include a rectangular member having a concave rear surface and an open front surface facing the interior of the sauna. The enclosure may further comprise two spring clips into which a ceramic heater rod is affixed. The rod may further comprise a current wire and a ground wire which terminate at plugs which interface with corresponding plugs on current and ground wires within the sauna. Finally, the enclosure may include a cover that prevents contact with the rod while the sauna is in use. The cover is attached to the sauna wall at one end by one or more hinge member, and by one or more magnets at the opposite end such that a magnetic force holds the cover in place when it is in the closed position.

Provided is a ceramic heater capable of improving heat uniformity in the central part of an inner zone. This ceramic heater comprises: a ceramic plate including an inner zone and an outer zone; a ceramic shaft; an inner zone heater circuit; an outer zone heater circuit; a pair of first power supply terminals provided to the central part of the inner zone; a pair of second power supply terminals provided to the central part of the inner zone; and at least a pair of jumpers embedded in the inner zone. The inner zone heater circuit is provided in a manner so as to start from one of the first power supply terminals and meanderingly reach the other of the first power terminals by one stroke. In the central part of the inner zone: the inner zone heater circuit, which starts from the one of the first power supply terminals, is provided in a manner so as to meander while circumventing a prescribed position; and the total of the opening angles formed by one or more pairs of tangential lines drawn from the center of the ceramic plate in a manner so as to define one or more openings in a circumvention part of the inner zone heater circuit is 60° or less.

The utility model discloses a novel variable wind warmer host, including casing, the top of casing bolted with cover plate, the inside of casing is integratedly injection molded with volute hot air bin, the device drives wind wheel to rotate through first motor to generate air flow, cooperates with PTC ceramic heater to heat the air flow, forms stable hot air output, and the heating efficiency is improved. Meanwhile, a third motor is used for driving a swing plate and a swing arm to be linked so as to cooperatively drive an air guide plate to rotate oppositely, under the condition that the power of the first motor is not changed, the air pressure of an air outlet can be changed only through adjustment of a mechanical structure, hot air can cover a longer distance, and the heating range and comfort are remarkably improved; by means of the mechanical air pressure adjusting mode, the problem that energy consumption is increased due to traditional frequency conversion speed regulation is solved, stability of heat output is guaranteed, energy consumption is reduced, and the problem that the air supply distance of a traditional warmer is short is effectively solved while low cost is maintained.

The application relates to the technical field of functional ceramics, and mainly relates to a ceramic material for a ceramic heater and a preparation method thereof. The ceramic material for the ceramic heater comprises the following raw materials: 90-100 parts by weight of alumina; 5-10 parts by weight of modified calcium silicate glass powder; 0.1-1 part by weight of yttrium oxide; 5-15 parts by weight of modified zirconium oxide; 0.1-1 part by weight of silicon dioxide; 0.1-1 part by weight of magnesium oxide; 1-5 parts by weight of a binder; and the preparation raw materials of the modified calcium silicate glass powder comprise quartz sand, limestone and alumina. The ceramic material for the ceramic heater provided by the application is excellent in thermal shock resistance, thermal conductivity, mechanical properties and the like, and can well adapt to the application scene of the ceramic heater.

A system for burning and vaporizing consumable materials while confining vapors prior to dispensing is provided. The system comprises a portable electronic vaporizing device. The device comprises a metallic shell with two parallel rails extending from a first end of the shell. The shell contains a bowl containing combustible material, a sliding cover attached to the rails, the cover when in open position situated at a far end of the rails away from the shell and away from the bowl, and a battery-powered ceramic heater within a ceramic insulation that receives a power activation signal. The system also applies heat to the bowl when the sliding cover is in open position and transforms the combustible material into vapor based on the applied heat, the vapor trapped inside the device by the cover receiving movement into closed position over the bowl.

An induction heating air outlet device includes a housing, within which a vortex tube, a heating system, and an induction device are installed. The vortex tube is equipped with a flow guiding system and a cold flow system. The flow guiding system includes an air inlet connected to the air inlet of the housing, with an arc-shaped wind wall at the air inlet and a flow divider cone connected to it. Heat outlet holes are formed on the wall of the flow divider cone. The cold flow system includes a return pipe for returning cold flow located at the air inlet, connected to a guide ring. A pressure-increasing port is located on one side of the guide ring. The heating system includes a ceramic heater installed outside the heat outlet holes. The pressure-increasing port is connected to the ceramic heater via the air flow pipe, and the ceramic heater is connected to the air outlet of the housing. A pressure-increasing gap is formed between the front side of the air flow pipe and the outer wall of the guide ring, connected to the air inlet of the housing. The induction device includes a far-infrared sensor lamp installed at the center of the air outlet of the housing.

The invention discloses a dry and wet touch reproduction device and method based on a phase change material and a touch quantized value, and the device comprises a dry and wet touch sensing body, a temperature control assembly, a supporting assembly and a driving assembly, and can reproduce the dry and wet touch of an object. The dry and wet touch sensing body is composed of a plurality of dry and wet touch reproduction units and a bidirectional filter membrane, and each dry and wet touch reproduction unit comprises a phase change material storage unit, a 3 * 3 grid and a capsule type phase change material combination unit. A touch characteristic quantification value obtained by a touch quantification system is calculated to obtain control parameters of touch reproduction execution elements such as an infrared ceramic heater array, a refrigeration sheet array, a fan array and a lifting plate, a virtual reality system is combined to realize vision and touch fused dry and wet touch perception, and the reproduced dry and wet touch is monitored in real time. And comparing the dry and wet touch feeling with the dry and wet touch feeling needing to be reproduced, and adjusting the control parameters of the touch feeling reproduction execution element in real time, so that the accurate reproduction of the dry and wet touch feeling is realized.

The invention relates to the technical field of semiconductor manufacturing, in particular to an electrode welding structure for a ceramic heater. Comprising a ceramic substrate provided with a pre-embedded conductive member; the electrode stem is connected with the pre-embedded conductive part through the first connecting hole, and the space between the electrode stem and the pre-embedded conductive part is filled with welding flux; and the threaded part is in threaded connection with the inner side of the first connecting hole and is provided with an assembly hole for the threaded part to pass through. The ceramic base body, the electrode stem, the threaded part and other parts are arranged, the welding flux is arranged between the electrode stem and the pre-embedded conductive part, and a coaxial assembling structure in the assembling hole guides the electrode stem and the first connecting hole to be coaxially assembled. The problem that in the prior art, the assembling coaxiality of the electrode stem and the connecting hole is low is solved, and uniform welding seams between the electrode stem and the connecting hole can be filled with welding flux.

To provide a ceramic heater.SOLUTION: The ceramic heater includes: a plate having a heat-generation body and a first passage; a shaft having a hollow; and a thermocouple inserted into the first passage. The heat-generation body comprises multiple concentric arc parts, and multiple connection parts which connect the arc parts. A spaced area formed by the multiple connection parts spaced from and facing each other extends in the radial direction of the plate. The first passage is formed to be adjacent to the spaced area.SELECTED DRAWING: Figure 2

The invention relates to the technical field of ceramic glaze spraying equipment, and discloses ceramic heater manufacturing glaze spraying equipment which comprises a box body, a glaze slip nozzle is fixedly mounted at the top of an inner cavity of the box body, four movable adjusting devices are arranged in the box body, and each movable adjusting device comprises a rotatable U-shaped frame. Two rotary adjusting devices are movably arranged on the U-shaped frame, the two rotary adjusting devices can synchronously move in the same direction or in the opposite directions, and movable clamping blocks are rotationally connected to the rotary adjusting devices. Two rotary adjusting devices which synchronously move in the same direction or in the opposite directions are arranged on each movable adjusting device, servo air cylinders on the two sides drive clamping blocks to move so as to clamp a ceramic heater base body and drive the ceramic heater base body to rotate, and therefore glaze is sprayed to the ceramic heater base body through a glaze slurry spray head; the situation that glaze cannot be sprayed on the clamped part on the surface of the ceramic heater base body to obtain an insulating layer is avoided, and the ceramic heater base body does not need to be re-positioned and clamped for glaze spraying.

The utility model relates to the technical field of ceramic heaters, and discloses a multipurpose plate-shaped ceramic heater which comprises a shell, a second connecting plate is fixedly connected in the shell, a second clamping groove is formed in the second connecting plate, a second clamping block is connected to the inner wall of the second clamping groove in a sliding mode, and a fixing plate is fixedly connected to the outer wall of the second clamping block. A third connecting plate is fixedly connected to the inner wall of the fixing plate, the two sides of the third connecting plate are fixedly connected to the side, away from the second clamping groove, of the second clamping block, a rotating block is fixedly connected to the side, away from the second connecting plate, of the fixing plate, a heating pipe is rotationally connected to the outer wall of the rotating block, and a fixing assembly is arranged on the upper surface of the shell. According to the utility model, in the aspect of installation and replacement of the heating pipe, through the clamping design of the clamping block II and the clamping groove II, the operation process is greatly simplified, and compared with a traditional complex fixing structure, the heating pipe can be rapidly replaced only by operating separation and combination of the clamping block II and the clamping groove II, so that the working efficiency is effectively improved.

The invention provides an aluminum nitride ceramic heater plate body and a preparation method thereof, and the preparation method comprises the following steps: preparing aluminum nitride powder, an electrode piece and a heating piece, preparing a ceramic biscuit through dry pressing molding, and then sequentially carrying out hot isostatic pressing sintering, sheath removal and machining to obtain the aluminum nitride ceramic heater plate body. According to the preparation method, the compactness of the aluminum nitride ceramic can be effectively guaranteed, the compactness reaches 99.5-99.9%, the aluminum nitride material is uniform in grain, free of color difference in material appearance and uniform in density, the heat conductivity of the aluminum nitride ceramic can be guaranteed, the heat conductivity is larger than or equal to 150 W / mK, the bending strength is larger than or equal to 300 MPa, the use requirement is met, the operation steps can be simplified, and the cost is reduced. The production cost is reduced.

The ceramic heater is provided with: a ceramic plate 20 having a wafer placement surface on the upper surface thereof; a plurality of segments (Z1 to Z6) provided on the wafer placement surface; section heaters implanted in the ceramic plate (20) so as to correspond to each of the plurality of sections (Z1 to Z6); a single temperature measurement member path 30 provided on the ceramic plate 20; and a single temperature measurement member (Multi TC40) disposed in the temperature measurement member path (30). The temperature measurement member passage 30 is provided so as to pass through each of the plurality of sections Z1-Z6 from an inlet 32 provided in the lower surface of the ceramic plate 20. The Multi TC40 is provided with a plurality of temperature measuring parts (41 m to 46 m). The plurality of temperature measurement units (41m-46m) are disposed at measurement positions (P1-P6) corresponding to the plurality of segments (Z1-Z6), respectively.