The invention discloses an SF6 density and micro-water comprehensive
verification device and a control method thereof. The SF6 density and micro-water comprehensive
verification device comprises a micro-water detection unit, a purity detection unit, a density
verification unit, a gas
path system, a multi-parameter synchronous acquisition module and a control module. The micro-water detection unit is connected in series with a constant flow valve; the purity detection unit comprises an
infrared detection cavity, and a constant-temperature heating sheet wraps the outer side of the
infrared detection cavity and is used for stabilizing the temperature in the cavity; the density checking unit is connected in series with a precise pressure regulating valve for realizing
dynamic pressure regulation; the gas
path system comprises a main gas path, a density calibration sub-gas path, a micro-water detection sub-gas path and a purity detection sub-gas path; the multi-parameter synchronous acquisition module is used for synchronously acquiring environment temperature, gas path pressure and environment
humidity data in the device; the control module is internally provided with
sequential control logic and is used for controlling the electromagnetic switching valve to sequentially conduct the density calibration sub-gas circuit, the micro-water detection sub-gas circuit and the purity detection sub-gas circuit and controlling the main gas circuit to be vacuumized and then filled with
nitrogen to form
positive pressure isolation when the sub-gas circuits are switched; and meanwhile, a temperature, pressure and
humidity coupling compensation algorithm is executed based on data of the multi-parameter synchronous acquisition module. According to the device, micro-water, purity and density detection of the SF6 gas is realized through one device, and the detection accuracy is high.