342results about How to "High temperature control accuracy" patented technology

The invention discloses a continuous zooming laser interference end point detection system, which is used for semiconductor etching and thin film process end point detection, and comprises an illumination module, a laser interference module and an imaging module, the laser interference module comprises a laser, a beam splitter, a beam splitting cube, a lens and a detector, a laser beam emitted by the laser passes through the beam splitter, the beam splitting cube and the lens and then is focused to a to-be-detected area on the surface of a wafer, and the surface of the wafer reflects the laser to the detector for detection; the focal length of the lens is continuously adjustable; the illumination module comprises a light source which is arranged on one side of the lens, and an illumination light beam emitted by the light source is used for illuminating a to-be-detected area on the surface of the wafer; and the imaging module comprises a camera which is arranged on one side of the lens and is used for recording and outputting image information of a to-be-detected area on the surface of the wafer. According to the invention, through continuous zooming and large numerical aperture of the lens, high-definition imaging and etching of a long working distance and accurate detection of a thin film process end point are realized.

The invention discloses an aquatic product ultra-low temperature fresh-keeping processing control method, and relates to the technical field of aquatic product fresh-keeping processing, and the method specifically comprises the following steps: evaluating a fat local oxidation risk grade caused by oxygen exposure on the surface of a high-fat aquatic product in each region in a freezing chamber; dividing each area in the freezing chamber into a low risk area, a medium risk area and a high risk area according to an evaluation result; constructing an oxidation risk adjustment mechanism according to the division result of each region in the freezing chamber; in the implementation process of the oxidation risk adjustment mechanism, whether the adjustment effect of the oxidation risk adjustment mechanism on each region can reach the expectation or not is evaluated, and the oxidation risk adjustment mechanism is optimized according to the evaluation result. According to the method, the problem of fat oxidation caused by oxygen exposure on the surface of the high-fat aquatic product in the ultralow-temperature freezing process is solved, and the preservation effect in the freezing process is effectively improved through real-time monitoring and dynamic optimization of an adjustment mechanism.

The invention discloses a CPU junction temperature control method and system, and the method comprises the steps: obtaining first temperature data collected by an internal temperature sensor and n pieces of second temperature data collected by n ambient temperature sensors disposed around, constructing a temperature field grid topological graph, and carrying out the calculation to obtain standardized temperature field data; carrying out first-order and second-order derivative calculation of time dimension, constructing spatio-temporal characteristic sequence data, and calculating to obtain topological characteristic vector data of the temperature field; the attention weight is adopted, and fusion feature vector data are obtained through calculation; calculating to obtain system stability index data by adopting a gating circulation unit network; constructing a workload feature vector, and performing classification processing to obtain load type index data; calculating to obtain multi-level early warning threshold set data; and a prediction model is constructed and optimized to obtain control parameter set data, and a final control instruction sequence is generated. According to the invention, the temperature control precision is improved, and the reliability and the use efficiency of the power utilization information acquisition terminal are improved.

The invention provides an intelligent temperature control method for a heating kettle. The method comprises the steps that various sensors are integrated inside and outside the kettle to collect various data of the inside and the environment of the kettle in real time; constructing and training a hybrid deep learning model based on the combination of a convolutional neural network and a long-short-term memory network, and deploying the trained hybrid deep learning model into a control system of the kettle; carrying out data fusion and synchronization and real-time denoising, and carrying out real-time feature extraction on the denoised sensor data; dynamically adjusting heating power, and detecting water temperature abnormity; and a user-friendly interface design and a remote control function are designed. According to the intelligent temperature control kettle system combining deep learning, fuzzy logic control and sound wave sensing technologies, high-precision temperature control, intelligent analysis and personalized service are achieved through comprehensive application of multiple advanced technologies, and therefore the user experience is remarkably improved.

The utility model belongs to the technical field of semiconductors, and discloses a wafer bearing device and wafer testing equipment. The wafer bearing device comprises a bearing disc, a cooling member and a heating member. One side of the bearing disc is used for bearing wafers, and the bearing disc is provided with a plurality of adsorption holes used for adsorbing and fixing the wafers; the cooling piece is fixedly arranged on the other side of the bearing disc, and a cooling flow channel allowing cooling liquid to circularly flow is defined between the cooling piece and the bearing disc; the heating member is arranged on one side, far away from the bearing disc, of the cooling member and is used for heating the wafer. When the bearing device is used, heat generated by the heating piece can be transmitted into the bearing disc only through the one-layer structure of the cooling piece during transmission, so that the temperature control precision of the bearing disc is effectively improved, and when automatic control is carried out according to an actual control program, the temperature difference amplitude of the bearing disc can be kept at + / -0.5 DEG C or even lower; therefore, the bearing disc can keep good temperature uniformity in the wafer testing process.

The invention discloses an emulsion paint production temperature control management system and method, and relates to the technical field of automatic temperature control. According to the emulsion paint production temperature control management system and method, by arranging the emulsion paint temperature monitoring module, the temperature abnormity module and the temperature adjusting module, accurate temperature control in the emulsion paint production process is achieved. The temperature change of the latex paint in different production stages is monitored in real time through a temperature sensor, a temperature fluctuation curve is generated through time sequence analysis, periodic fluctuation and amplitude characteristics of temperature are recognized based on a spectrum similarity analysis technology, a temperature fluctuation intensity index is calculated, and whether temperature abnormity exists or not is judged by comparing the temperature fluctuation intensity index with a preset threshold value; when the temperature abnormity is identified, the temperature adjusting module dynamically adjusts the power output of the temperature control equipment through a PID control algorithm, and precise temperature control is achieved. The temperature control precision and the stability in the production process are obviously improved, and the quality consistency and the production efficiency of the latex paint are ensured.

The invention provides an environment data processing method and device based on digital twinning and a storage medium. The method comprises the following steps: acquiring a temperature time change curve, a humidity time change curve and a pressure time change curve based on historical test environment data of a cloud chamber environment control system to construct a twin simulation operation model of a cloud cabin; a twin operation model is used for simulating the required temperature control duration, the required humidity control duration and the required pressure control duration corresponding to the environment data target value, and through a temperature monitoring subsystem, a humidity monitoring subsystem and a pressure monitoring subsystem, according to the required temperature control duration, the required humidity control duration and the required pressure control duration, the temperature control duration, the humidity control duration and the pressure control duration are controlled. And controlling environmental data of the cloud cabin. The environment data of the cloud cabin can be simulated in advance by using the twin operation model of the cloud chamber environment control system, and the environment data of the cloud cabin is controlled through the monitoring subsystem by using the simulation result, so that the control accuracy of the environment data of the cloud cabin is improved, and the invalid test process is reduced.

The invention relates to the field of glass product production, and discloses an electric heating segmented temperature control material channel and application thereof in molded glass bottle production, and the electric heating segmented temperature control material channel comprises a material channel body and a cover body covering the material channel body. The material channel body is of a segmented structure and at least comprises an inlet section, a middle section and an outlet section, the interior of the cover body is divided into a plurality of heating subareas, and the heating subareas are isolated through partition plates; the heating subareas are respectively provided with an independent heating device and an independent temperature control device, the temperature control device comprises a control algorithm module, and the power of the heating device is dynamically adjusted by detecting the temperature of the heating subareas in real time so as to keep the glass blocks reach a set temperature range in the conveying process of the material channel body; through segmented temperature control design and a dynamic adjustment algorithm, the temperature of the glass material block can be accurately controlled, the glass bottle forming quality is improved, energy consumption is reduced, diversified production requirements are met, and good industrial application value is achieved.

The invention discloses a homogenizing temperature feedback control system and method for tea production, and relates to the field of temperature feedback control, and the method comprises the steps: setting a lattice environment monitoring sensor according to the condition of a tea production environment, and collecting the data of the tea production environment; based on historical data and simulation experiments, analyzing the temperature influence of different environmental factors on each small subarea of the tea leaf production area; according to a regional equalization temperature adjustment algorithm, temperature changes caused by different environmental factors are regulated and coped with; based on an integral separation type PID algorithm, the homogenization temperature for tea production is automatically adjusted, and the stability of the tea production environment temperature is guaranteed; a temperature control device is arranged, and a man-machine interaction platform is established and used for recording and displaying system data and changing system parameters. The method has the advantages that fine control over the tea leaf production temperature is effectively improved, the problem that the accuracy of range temperature regulation and control is insufficient is solved, and the tea leaf production quality is greatly improved.

The invention discloses a thermoelectric refrigerating unit self-adaptive temperature control system and method based on transient supercooling. In the system, a temperature detection unit is used for acquiring cold end temperature information of a thermoelectric refrigerating unit; the thermal load monitoring unit is used for monitoring thermal load information of the thermoelectric refrigerating unit; the PID controller is used for controlling the cold end temperature of the thermoelectric refrigerating unit at the target temperature as an optimization target, and regulating and outputting a first current by utilizing the cold end temperature information; the transient pulse controller regulates and controls the amplitude limiting current based on the thermal load information; the feedforward controller adjusts the advanced regulation and control current based on the thermal load information and outputs a second current; the amplitude limiting output unit is used for outputting and limiting the total current of the first current and the second current to be within an amplitude limiting current according to the amplitude limiting current generated by the transient pulse controller; the power output unit drives the thermoelectric refrigerating unit based on the current generated by the amplitude limiting output unit. The thermal load resistance of the thermoelectric refrigerating unit can be remarkably improved, and the temperature control precision and stability are improved.

The invention relates to the technical field of terminal processing, in particular to a cold-pressed terminal processing control method and system and related equipment, and the method comprises the steps: determining the temperature fluctuation intensity of each position point at each collection moment; determining a noise elimination weight of each position point at each acquisition moment; determining the melt temperature difference of any section at each acquisition moment, and determining the temperature control response capability of the heating element in any section at each acquisition moment in combination with the change trend of the temperature fluctuation intensity of each position point at each acquisition moment and all adjacent moments thereof; and the temperature of the charging barrel of the injection molding machine is regulated and controlled by combining the significant conditions of the gray values of all the pixel points in the gray-scale map of the plastic cold-pressed terminal. By comprehensively analyzing the temperature of the plastic melt in the charging barrel, the precision of temperature control in the processing process of the plastic cold-pressed terminal is improved.

The air and water two-stage temperature control system comprises a constant temperature chamber, an indoor air temperature control system and an air conditioner water supply temperature control system, and the indoor air temperature control system comprises a cooling coil and an electric heater which are sequentially communicated through an air duct. The air temperature sensor, the air temperature PID controller and the electric heater are sequentially connected through a circuit, the air conditioner water supply temperature control system comprises a water chilling unit and a heat exchange unit which are sequentially connected through a water pipe, and the air conditioner water supply temperature control system is connected with the indoor air temperature control system through a cooling coil. The air conditioner water supply temperature sensor, the air conditioner water supply temperature PID controller and the electric two-way regulating valve are sequentially connected through a circuit. Compared with the prior art, high-precision control over air conditioner water supply is achieved, the capacity of eliminating chilled water side disturbance is improved, and the advantage that the chilled water supply flow can be adjusted is achieved.

The invention provides a partition temperature control irradiation device, and belongs to the technical field of nuclear irradiation devices, the partition temperature control irradiation device is characterized in that a first connecting pipe connects a first test section and a second test section, by adjusting the first connecting pipe, on one hand, the first connecting pipe can play a role in protecting a second pipe group, and on the other hand, by adjusting the first connecting pipe, the second pipe group can play a role in protecting the second pipe group; the relative position between the first test section and the second test section can be adjusted, so that the axial position of the second test section can be adjusted, and the ventilation volume of temperature control loops of the first pipe group and the second pipe group and the component proportion of mixed gas are respectively controlled; according to the irradiation device, samples at different positions in the axial direction of the irradiation pore channel can meet different or same test temperature requirements, control over multiple test temperatures is achieved in the same irradiation device, the temperature control range of the irradiation device is expanded, and the temperature control precision of the irradiation device is improved by adjusting the axial position of the second test section.

The invention relates to the technical field of temperature prediction, and discloses a steel furnace temperature prediction method and system, computer equipment and a storage medium, and the method comprises the steps: obtaining the historical operation data of a steel furnace, and carrying out the data processing of the historical operation data, and obtaining a model data set; the model data set is used for training a temperature prediction model, a trained temperature prediction model is obtained, the temperature prediction model comprises a composite embedding module, an encoder module and a decoder module, and the composite embedding module comprises a composite convolution layer, a category embedding layer, an attention layer and a splicing layer; and acquiring real-time operation data of the steelmaking furnace, and inputting the real-time operation data into the trained temperature prediction model to obtain a temperature prediction result of the steelmaking furnace. According to the method, the precision of a model prediction result is improved by comprehensively processing the data of the multi-dimensional sensor, so that the temperature control precision in the steelmaking process is improved, the energy consumption is reduced through a temperature feedback mechanism, and the steel quality is further improved.

The invention discloses a multi-dimensional energy-saving analysis dynamic management platform and method for a building, and relates to the technical field of building energy-saving management, and the method comprises the following steps: monitoring the indoor temperature in real time through a temperature monitoring system, and transmitting the collected temperature data to a control system; the obtained current indoor temperature is compared with a preset starting value and a preset stopping value of the air conditioning system, and starting and stopping of the air conditioning system are controlled through a control system; real-time indoor temperature data are collected and constructed into an analysis data set, and key features capable of reflecting the temperature change trend are extracted from the analysis data set. Through real-time temperature data analysis and machine learning prediction, temperature change stages are accurately divided, conventional start-stop control is adopted in a normal stage, output power is dynamically adjusted through fuzzy logic in a rapid stage, frequent start-stop and energy waste are avoided, temperature control precision and comfort are improved, energy efficiency is remarkably improved, operation cost is reduced, and the method is suitable for large-scale popularization and application. The service life of air conditioning equipment is prolonged, and an efficient and intelligent energy-saving management scheme is provided.

A radiation distance adjustable glass heating device is characterized in that a ceramic roller way is arranged in a furnace body in a penetrating manner, an upper heating assembly and a lower heating assembly are respectively arranged above and below the ceramic roller way, and each of the upper heating assembly and the lower heating assembly comprises a plurality of heating elements which are sequentially arranged left and right; each heating element is arranged in the furnace body through a fixing frame, a temperature measuring element is arranged on one side of each fixing frame, the other side of each fixing frame is connected with a driving unit, and the control mechanism can control the driving unit to act to conduct lifting adjustment of the heating elements through temperature feedback of the temperature measuring elements. Therefore, the local radiation distance of the surface of the to-be-heated glass can be accurately adjusted. The radiation distance adjustable glass heating device is simple in structure and convenient to use, the control mechanism can regulate and control the radiation distance between each heating element and the glass in real time through the driving unit by means of feedback of the temperature measuring element, and the problem that the local temperature is difficult to accurately control when the glass is heated is solved.

The invention discloses a refrigerator temperature equalization method and system based on dynamic wind speed control, and relates to the technical field of refrigerator temperature equalization, and the method comprises the following steps: monitoring the standard temperature of each region under the optimal operation state of a refrigerator, and obtaining the temperature equalization data of the refrigerator; acquiring load temperature influence data and fan processing influence data which influence the temperature equalization of the refrigerator; carrying out machine learning on the load temperature influence data and the fan processing influence data to obtain a temperature change suitable model; and controlling the output wind speed and output stop of the fan according to the output of the temperature change suitable model in combination with the temperature uniformity data. According to the invention, the wind speed is accurately controlled, so that the problem that the temperature nonuniformity is influenced by over-high or over-low regulation of the wind speed is solved.

The invention relates to the technical field of leather processing, in particular to a leather forming processing device for automotive trim. The device comprises a pretreatment device and a mold device, the rear side of the mold device is connected and provided with a trimming device, the front side of the mold device is connected and provided with a heating device, and the mold device is internally provided and connected with a cooling device. The pretreatment device is used for improving the quality and the processing efficiency of leather, improving the consistency of products and effectively shortening the production cycle, the mold device is used for forming the leather, ensuring the size accuracy and effectively improving the consistency of the products, and the heating device is used for softening the leather, facilitating subsequent processing, improving the process effect and effectively improving the quality of the products. The cooling device is used for rapidly cooling leather, stabilizing the size and effectively improving the product precision, the trimming device is used for finely adjusting the leather and improving the finished product quality, and the safety monitoring device is used for guaranteeing the safety of the machining process and effectively improving the operation safety.

The invention relates to a coating sample anti-condensation performance simulation test device and an anti-condensation performance evaluation method. The simulation test device comprises an indoor environment simulation box and an inner wall temperature simulation device which is arranged in the indoor environment simulation box and is used for controlling the temperature of a sample to be tested. The evaluation method comprises the following steps: calculating the critical dew formation temperature of a sample to be tested and the temperature control temperature of the sample when the critical dew formation temperature is obtained, and calculating the difference between the critical dew formation temperature and the temperature control temperature so as to simulate the temperature difference between the critical dew formation temperature and the temperature control temperature in a test environment to evaluate the anti-dew formation performance of the sample to be tested. Compared with the prior art, the method has the advantage that the anti-condensation performance of the coating sample can be accurately evaluated.

The utility model relates to a rare earth aluminum alloy cable heat treatment device which comprises a heating box, microwave heaters and guide rollers, a heat shielding layer is arranged in the heating box, the microwave heaters are arranged on the front face and the back face of the heating box, a controller is arranged on one side of the heating box, and a heat insulation plate is fixedly installed at the top of the heating box. A guide roller is arranged in the heating box, a cable body is erected in the guide roller, the cable body penetrates into the guide roller during use, the cable body is fully stretched in the heating box through the guide roller, the heating uniformity of the rare earth aluminum alloy cable can be further improved through the unique design, the heat treatment effect is enhanced, the service life of the cable is prolonged, and the service life of the cable is prolonged. And the microwave heating technology is adopted, and microwave heating has the characteristics of high penetrability and high temperature control precision, so that the cable can be uniformly heated in the heat treatment process, the generation of internal stress is reduced, the service life of the cable is prolonged, and the performance stability of the cable is improved.

The invention discloses a temperature control management system of an intelligent medical cabin for high altitude, which comprises a multi-source data acquisition module, a power self-adaptive processing module and a temperature control management display module, relates to the technical field of medical environment control, and solves the technical problems of serious performance attenuation, low energy efficiency, rigid control strategy and poor adaptability. According to the method, the current altitude and the current atmospheric pressure serve as core input parameters, the heating capacity attenuation coefficient and the convective heat transfer coefficient of the heat pump are subjected to real-time and quantitative scientific correction, the limitation that a traditional system neglects changes of environmental physical characteristics is broken through, a heat load calculation model is converted into a plateau self-adaptive model from a plain model, and the calculation efficiency is improved. The calculated total heat load demand and the heat pump output power better meet the actual physical conditions of the plateau, and therefore it is guaranteed that the basic output capacity of the temperature control system is consistent with the design expectation.

The invention discloses a double-Curie-temperature composite foil and a preparation method thereof. The double-Curie-temperature composite foil comprises a magnetic metal matrix and a composite foil, wherein the surface of one side of the composite foil is formed by cold rolling ferrite magnetic particles and a forming agent. The composite foil with the double Curie temperatures is used for a heating material of a decentralized electromagnetic heating low-temperature cigarette product, accurate control over heating is facilitated, and the composite foil has the following advantages that (1) the composite foil has the accurate double Curie temperatures, and the temperature control accuracy of the decentralized electromagnetic product can be improved; (2) the total thickness of the composite foil is relatively small, so that a continuous production process from molding to cartridge is facilitated; and (3) the metal substrate and the ferrite particles are in semi-metallurgical and semi-mechanical combination, the production process is simple, and the cost is lower.

The utility model belongs to the technical field of glass reinforced plastic plates, and particularly relates to a rapid cooling device for a glass reinforced plastic plate. The device comprises a fixed frame which is arranged between a drying oven and roller glue equipment, and a glass reinforced plastic plate penetrates through the middle of the fixed frame; the multiple air curtain machines are arranged above and below the fixed frame, the air curtain machines above and the air curtain machines below are arranged in a staggered mode, and air outlets of the air curtain machines face the glass steel plate; a tray is further arranged at the air inlet of the upper air curtain machine and used for containing cold water or ice blocks. The utility model is used for solving the technical problems in the prior art that the production efficiency is influenced and the cooling temperature is difficult to accurately control because the glass reinforced plastic plate is naturally cooled.

The invention discloses a waste incineration boiler steam temperature control method and system based on a hierarchical control strategy, and the method comprises the steps: collecting data through a high-precision sensor, and constructing a fault detection model for monitoring the system fault and abnormal conditions in real time; when the fault detection model detects a fault, an improved PID control algorithm considering mutual influence of characteristics is used to quickly respond to and adjust the instantaneous change of the steam temperature at the outlet of the waste heat boiler of the waste incineration power plant; constructing a medium-term prediction model by using the adjusted outlet steam temperature of the waste heat boiler of the waste incineration power plant, and predicting the relationship between the main steam flow and the outlet steam temperature of the boiler in real time; a long-term prediction model is constructed through historical data, and the large inertia effect and the long-term change trend of the waste heat boiler of the waste incineration power plant are predicted; and collecting and analyzing suggestions of a user on system operation, and dynamically adjusting a control strategy to improve system performance and user satisfaction. And load fluctuation and environment change can be adapted more quickly, and stable operation of the system is ensured.

The invention relates to the technical field of plasma electrodes, in particular to an intelligent temperature control and bubble elimination plasma electrode system and a control method thereof.The intelligent temperature control and bubble elimination plasma electrode system comprises an electrode tip, a ceramic insulating layer, an outer electrode, a miniature temperature sensor array, an electromagnetic field modulation device and an optimized electrode surface microstructure design, the outer layer is a ceramic insulating layer, the outer layer of the ceramic insulating layer is an outer electrode, the miniature temperature sensor array covers a key working area and realizes a temperature acquisition function by connecting a temperature sampling circuit in parallel, and the electromagnetic field modulation device enables the ceramic insulating layer to generate micro vibration by regulating and controlling the electromagnetic field intensity and frequency so as to promote bubble discharge. The method has the effect that the size of the plasma electrode is not increased while temperature acquisition and bubble removal are achieved.

The invention discloses a plate processing technology, and aims to provide a plate arc-shaped surface processing method which is characterized by comprising the following steps: S1, plate pretreatment; s2, plate heating; s3, preparing a bending die; s4, the plates are placed and pressurized; s5, bending processing is carried out; s6, cooling treatment; s7, surface quality detection; s8, size detection; s9, post-processing the plate; and S10, final detection and packaging. Compared with the prior art, the plate arc-shaped surface machining method has the advantages that high-quality arc-shaped surface machining of the plate can be effectively realized; through a series of process steps of systematic pretreatment, heating, bending, cooling and the like on the plate, it is guaranteed that the plate does not deform or crack in the machining process, and the surface quality and the size precision of the bent plate can also be guaranteed; the invention is suitable for the technical field of plate processing.

The present invention provides a temperature control device for a temperature and humidity calibration box and a temperature control method thereof. The device includes a cold source system and a circulation system respectively connected to the primary side and the secondary side of the evaporator. The cold source system includes a compressor, an oil separator, a condenser, a liquid storage, a filter, a heat regenerator and a first flow regulating valve connected in sequence through pipelines; the circulation system includes a buffer tank, a surface cooler, a circulation pump, a first non-return valve and a pipeline heater connected in sequence through pipelines. The device and method have a wide temperature control range and a fast temperature control speed. The opening of the flow regulating valve can be adjusted according to the current working conditions to optimize the system performance; the temperature control accuracy is high. Due to the secondary heat exchange between the heat transfer medium and the air in the box, the influence of the temperature fluctuation of the heat transfer medium on the temperature in the box is reduced, so the temperature fluctuation degree in the box is ≤±0.01℃; the heat generated by the compressor itself is used as a heat source, the energy efficiency ratio is high, the power consumption is small, and the maximum power consumption can be saved by 50%.

The invention discloses a temperature control method of an air fryer, and relates to the technical field of food processing. The air fryer comprises a heating assembly and a temperature controller which are arranged in a cooking cavity of the air fryer, the temperature controller is arranged at the cold end or the hot end of the heating assembly and is configured to detect the environment temperature in the cooking cavity, and the method comprises the steps that in the preheating stage, the temperature controller controls the heating assembly to work according to a first temperature threshold value; the adjusting stage comprises a plurality of adjusting periods, and the temperature controller controls the heating assembly to work at a dynamic temperature control point in each adjusting period; the dynamic temperature control points corresponding to all the adjusting periods are progressively increased or decreased from the first temperature threshold value to the second temperature threshold value according to the time sequence; in the constant temperature stage, the temperature controller controls the heating assembly to work according to a second temperature threshold value; when the temperature controller is arranged at the cold end of the heating assembly, the first temperature threshold value is smaller than the second temperature threshold value; when the temperature controller is arranged at the hot end of the heating assembly, the first temperature threshold value is larger than the second temperature threshold value. Therefore, the air fryer has the advantage that the temperature control accuracy and stability of the air fryer are improved.

The invention belongs to the technical field of sputter deposition, and provides an automatic temperature control system and method for a sputter deposition device, and the system realizes the accurate control of the cavity temperature in the sputter deposition process by integrating components such as a vacuum gauge, a gas cylinder, a valve, a thermocouple temperature measurement element and a PID (Proportion Integration Differentiation) regulator. The system monitors the temperature of the cavity in real time by using the thermocouple, and automatically adjusts the power of the heating wire through the PID regulator according to the comparison result of a set value and an actual value, thereby maintaining the stability of the temperature of the cavity. In addition, the system has the function of communicating with an upper computer, remote monitoring and control can be carried out through a software layer, and the automation level and the temperature control precision of the sputtering deposition process are improved. The problems that in the prior art, temperature control precision is low, the automation degree is insufficient, and stability is poor are solved, through linkage control over the temperature, the vacuum degree and the gas flow, the consistency of film performance is guaranteed, and the method is suitable for large-scale production of high-precision films.

The constant temperature device comprises a rack, a constant temperature coil pipe, a temperature control probe, a distribution joint structure, a cooling assembly and a heating assembly, the rack is provided with a liquid storage tank, the constant temperature coil pipe is arranged in the liquid storage tank and used for keeping constant temperature of liquid medicine in the liquid storage tank, and the temperature control probe is arranged in the liquid storage tank and used for detecting the temperature of the liquid medicine in the liquid storage tank. The distribution connector structure is arranged above the rack, the first end of the distribution connector structure is connected with the constant-temperature coil pipe, the cooling assembly is arranged above the rack and connected with the second end of the distribution connector structure, the cooling assembly is used for cooling liquid medicine in the liquid storage tank, and the heating assembly is arranged above the rack and connected with the second end of the distribution connector structure. The heating assembly is used for heating liquid medicine in the liquid storage tank. The temperature control device has the advantages of simple structure, high temperature control precision and the like.