Reflective electrode and compound semiconductor light emitting device including the same
一种反射电极、发光器件的技术,应用在半导体器件、半导体激光器、半导体/固态器件制造等方向,能够解决FCLED特性不稳定、FCLED短寿命等问题,达到优良欧姆接触特性、低工作电压、低光吸收系数的效果
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[0023] The present invention will now be described more fully with reference to the accompanying drawings, in which embodiments of the invention are shown.
[0024] figure 1 is a sectional view showing a reflective electrode according to a first embodiment of the present invention.
[0025] refer to figure 1 , the reflective electrode 22 is formed on the p-type compound semiconductor layer 20 . The reflective electrode 22 according to the first embodiment of the present invention includes a first electrode layer 22 a , a third electrode layer 22 c and a fourth electrode layer 22 d sequentially formed on the p-type compound semiconductor layer 20 .
[0026] The first electrode layer 22a is in ohmic contact with the p-type compound semiconductor layer 20 . The first electrode layer 22a is formed of one of Ag and Ag alloy with a thickness of 0.1-500 nm. Here, the Ag alloy includes a group consisting of Mg, Zn, Sc, Hf, Zr, Te, Se, Ta, W, Nb, Cu, Si, Ni, Co, Mo, Cr, Mn, Hg, Pr ...
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Abstract
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