The embodiment of the invention provides a gold-silver
alloy bump structure, a preparation method and a
semiconductor device, and the preparation method comprises the steps: providing a
semiconductor device, and forming a seed layer on the surface of the
semiconductor device; a first gold-silver
alloy bump is formed on the seed layer through an
electroplating technology, the
gold content in the formed first gold-silver
alloy bump is larger than 45%, and the thickness of the first gold-silver alloy bump ranges from 0.2
micrometer to 5 micrometers; and
electroplating the first gold-silver alloy bump by using the same
electroplating liquid to form a second gold-silver alloy bump, wherein the
gold content in the formed second gold-silver alloy bump is less than 30%, and the thickness range of the second gold-silver alloy bump is 3-20 [mu] m. The first gold-silver alloy bump with high
gold content improves the
binding force between the bottom of the gold-silver alloy bump structure and the seed layer of the
semiconductor device, and improves the reliability of the
semiconductor device. The second gold-silver alloy bump with low gold content can avoid pure gold bumps on the surface of the gold-silver alloy bump structure, the
hardness and morphology of the gold-silver alloy bump structure are controlled, and subsequent packaging is ensured.