Method of forming a lead-free bump and a plating apparatus therefor
Patent Information
- Authority / Receiving Office
- US · United States
- Current Assignee / Owner
- SHIMOYAMA MASASHI
- Publication Date
- 2005-12-22
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
BACKGROUND OF THE INVENTION
[0001] 1. Field of the Invention
[0002] The present invention relates to a lead-free bump and a method of forming the same, and more particularly to a lead-free bump with suppressed formation of voids, obtained by reflowing a plated film of Sn—Ag solder alloy having an adjusted Ag content, and a method of forming the lead-free bump, and also to a plating apparatus for forming such a lead-free bump.
[0003] 2. Description of the Related Art
[0004] In surface mounting technology of semiconductor devices or the like, it is very important to carry out soldering with high reliability. Although an eutectic solder containing lead (Sn:Pb=63:37) has heretofore been used widely in soldering, in the light of environmental contamination and because of the problem of α-rays generation from lead, development of lead-free soldering is under way.
[0005] For example, lead-free soldering by means of printing or electroplating is being studied. With printing, however, there ...