This invention relates to the field of
alloy material composition design and preparation technology, and particularly to a multi-component
alloy deposition design method. Specifically, it includes the following steps: (1) proposing an
alloy composition design model based on multi-target
confocal magnetron
sputtering technology; (2) based on the
alloy composition design model, calculating the
deposition rate,
sputtering power, and
sputtering time of each component according to the accurate multi-alloy target composition required for the study; (3) stacking and integrating alloy sublayers with different design compositions onto a
single sample based on the above steps. The method provided by this invention can achieve accurate prediction and design of
alloy composition, with a large controllable range, from 0-100 at.% and a prediction deviation of less than 5 at.%; it can achieve high-
throughput preparation of alloy samples by combining alloy sublayers with multiple compositions onto a
single sample through a single experimental procedure.