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A metal mask for vapor plating and a production method thereof

A metal mask and its technology are applied in vacuum evaporation plating, metal material coating process, sputtering plating, etc., which can solve the problems of limiting the development prospects of Invar alloy, poor opening precision, and rough hole walls. Achieve the effect of good opening quality, high opening precision and good coating surface quality

Inactive Publication Date: 2013-07-17
KUN SHAN POWER STENCIL
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Problems solved by technology

Seriously limit the development prospect of Invar alloy
[0006] At present, the traditional process generally adopts the method of chemical etching to directly etch the opening pattern that can meet the evaporation process on the Invar alloy, but it has certain disadvantages: it is not conducive to demoulding, the opening precision is poor, and the hole wall is not smooth. There is an urgent need for a mask plate for evaporation with good opening quality, high precision, and good taper and the corresponding preparation method

Method used

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  • A metal mask for vapor plating and a production method thereof

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Embodiment Construction

[0038] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0039] An embodiment of the present invention provides a metal mask for evaporation. The material of the metal mask for evaporation includes iron and nickel, wherein the iron content is 63% to 65%. The preferred metal mask for evaporation with an iron content of 63.8% is more similar to the composition percentage of Invar alloy, which can better meet the requirements of evaporation and improve the quality of evaporation products.

[0040] The surface brightness of the metal mask plate for evaporation is first-class brightness, and the uniformity of the plate surface is ≤5%. The metal mask plate for evaporation has the characteristics of high magnetic control performance, ...

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Abstract

The present invention relates to the technical filed of electroformed alloy deposition, and discloses a metal mask for vapor plating. Materials for the metal mask for vapor plating include iron and nickel, wherein the iron content is 63%-65%. The metal mask for vapor plating has good surface brightness, and a coating surface is good in quality; and compared with an etched invar alloy, the metal mask for vapor plating is low in the cost, simple in the process and energy-saving, and has a high opening precision, and openings with good quality. Meanwhile, the present invention also provides a production method for the metal mask for vapor plating.

Description

[0001] technical field [0002] The invention belongs to the technical field of co-deposition of electroforming alloys, and in particular relates to a metal mask plate for evaporation with high iron content produced by an electroforming process and a preparation method thereof. [0003] Background technique [0004] Invar alloy usually contains 32% to 36% nickel. Invar alloy is also called invar steel, and its average expansion coefficient is generally 1.5×10 -6 ℃. When the nickel content is 36%, it reaches 1.8×10 -8 °C, and it does not change from -80 °C to +100 °C. The increase or decrease of nickel content within a certain range will cause a sharp change in the linear expansion coefficient of iron and nickel alloys. Therefore, Invar alloy is the preferred material for evaporation masks with high precision requirements. Other materials will expand and affect precision due to heat during the evaporation process, thus greatly affecting product quality. [0005] But at ...

Claims

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Application Information

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IPC IPC(8): C23C14/24C23C14/04C25D1/10C25D3/56
Inventor 魏志凌高小平
Owner KUN SHAN POWER STENCIL
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