Emitter structure of crystal silicon heterojunction solar battery
A solar cell and emitter technology, applied in the field of solar cells, can solve the problems of increasing the recombination probability of photogenerated carriers, deteriorating the performance of solar cells, and increasing the density of defect states, so as to improve the open circuit voltage and filling factor, improve the photogenerated current and Efficiency, effect of low doping concentration
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[0015] Embodiment 1: For a crystalline silicon cell using n-type silicon wafers, a p-type layer is prepared to form a pn junction, and specific implementation cases are described in conjunction with the content of the present invention and combined with the accompanying drawings to further illustrate the present invention.
[0016] The preparation sequence and performance parameters of the p-type double-layer gradient doped emitter are as follows:
[0017] 1) Deposit a shallow doped a-Si:H layer on the prepared crystalline silicon wafer with the intrinsic a-Si:H passivation layer deposited; the thickness of this layer is 15nm, and the doping concentration is 2×10 18 cm -3 . 2) Continue to deposit a heavily doped a-Si:H layer on the shallowly doped a-Si:H layer; the thickness of this layer is 3nm, and the doping concentration is 9×10 19 cm -3 .
[0018] After the gradient emitter is prepared, the TCO transparent conductive film, conductive grid lines and other structures are prepared ...
Example Embodiment
[0020] Example 2: For crystalline silicon cells using p-type silicon wafers, an n-type layer is prepared to form a pn junction,
[0021] The preparation sequence and performance preparation of n-type double-layer gradient doped emitter are as follows:
[0022] 1) Deposit a shallow doped a-Si:H layer on the prepared crystalline silicon wafer on which the intrinsic a-Si:H passivation layer has been deposited; the thickness of this layer is 15nm and the doping concentration is 1.5×10 18 cm -3 . 2) Continue to deposit a heavily doped a-Si:H layer on the shallowly doped a-Si:H layer; the thickness of this layer is 3nm, and the doping concentration is 9×10 19 cm -3 .
[0023] After preparing the gradient emitter, install the TCO transparent conductive film, conductive grid lines and other structures in the same process as the emitter composed of a single film.
[0024] The obtained crystalline silicon heterojunction solar cell with a double-layer gradient doped emitter structure and a cryst...
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