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34results about How to "Reduce recombination current" patented technology

Method for preparing N-type crystalline silicon solar cell with aluminum-based local emitters on back side

The invention provides a method for preparing an N-type crystalline silicon solar cell with aluminum-based local emitters on the back side. The method comprises the following steps: firstly, selecting N-type silicon wafers to carry out the surface-textured etching process; further forming a front surface field through phosphorous diffusion; depositing a passivating film on the front surface after the phosphorosilicate glass is formed during the removal of diffused phosphorous; carrying out the back-side chemical polishing process on the silicon wafers to remove the N+ layer formed on the back side during the phosphorous diffusion; then, sequentially printing an aluminum layer or a silver-aluminum layer through the passivating film deposited on the back side, local holes or grooves on the back side and screens on the back side; then, printing silver paste on the front surface; and finally, carrying out the one-step sintering process to form a local P+ layer on the back side and allowing the P+ layer to coming into ohmic contact with the electrodes on the front and back surfaces. By using the N-type substrate, forming local aluminum-based P-N junctions on the back side and further using the back-side chemical polishing process to remove the edge junctions, the invention can substitute for the conventional stacking-type plasma etching process, simplify the technological procedures and further bring a series of performance improvement to cells.
Owner:JA YANGZHOU SOLAR PHOTOVOLTAIC ENG

Passivation contact solar cell with selective emitter structure and preparation method of passivation contact solar cell

The invention relates to a passivation contact solar cell with a selective emitter structure and a preparation method of the passivation contact solar cell. The method comprises the following steps: (1) preparing texturing surfaces on two surfaces of an N-type crystalline silicon substrate; (2) performing boron diffusion treatment on the texturing surface of the front surface of the substrate to form a lightly doped region layer; (3) performing local boron ion implantation on the lightly doped region layer by using a mask, and annealing to form a local heavily doped region; (4) preparing a tunneling oxide layer on the texturing surface of the back surface of the substrate, and preparing a phosphorus-doped polycrystalline silicon layer on the tunneling oxide layer; (5) preparing a silicon nitride antireflection layer on the phosphorus-doped polycrystalline silicon layer; preparing an aluminum oxide passivation layer on the lightly doped region layer on the front surface of the substrate, and preparing a silicon nitride antireflection layer on the aluminum oxide passivation layer; and (6) carrying out silk-screen printing of metallized slurry on the two surfaces of the substrate, andsintering. According to the invention, the composite current on the surface of the emitter can be remarkably reduced, so that the efficiency of the N-type passivation contact battery can be improvedby more than 0.2%.
Owner:TAIZHOU ZHONGLAI PHOTOELECTRIC TECH CO LTD

Method for implementing base region window of silicon germanium heterojunction transistor

The invention discloses a method for implementing a base region window of a silicon germanium heterojunction transistor, which comprises the following steps of: depositing a composite dielectric film on a silicon chip with an embedded layer, a collector region and a substrate isolation region on a silicon substrate; performing dry etching on the composite dielectric film, defining the base regionwindow, and etching an oxide film stopped on the composite dielectric film; after the base region window is opened and before the oxide film of the composite dielectric film is removed, depositing a dielectric film layer, and forming a D-shaped side wall at the interface step of the base region window by using the dielectric film layer; and meanwhile, performing wet removal on the residual oxide film in the base region window by using the protection of the D-shaped side wall, and epitaxially growing an SiGe base region. The interface step of the base region window is changed slowly because ofthe formation of the D-shaped side wall, and the slowly changed step formed by the D-shaped side wall is continuously reserved after SiGe extension and has no insulator residue in the subsequent emitter polycrystalline silicon side wall process, so that continuous metal silicide is formed, the resistance of an outer base region is reduced, and the performance of the device is improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

MWT (Metal Wrap Through) solar battery and manufacturing method thereof

The invention provides a manufacturing method of a MWT (Metal Wrap Through) solar battery. The method comprises the steps of: providing a substrate which comprises a body layer, a reflection-reducing layer and a passivation layer, wherein a plurality of through holes and openings are arranged on the substrate; forming conductive electrodes in the through holes and forming a first back contact electrode on the back of the substrate; forming second back contact electrodes in the openings; forming a touch grid line electrode on the front face of the substrate; sintering the substrate so that the touch grid line electrode is electrically connected with the conductive electrode; and forming a local front surface field in the front surface of the body layer; and forming a local back emitting electrode in the back surface of the substrate. The MWT solar battery manufactured by the method is small in composite current, large in light receiving area and high in photoelectric conversion efficiency, and the problem that the battery is bended is reduced. In addition, according to the manufacturing method provided by the invention, steps such as diffusive knot manufacture, edge corrosion, glass layer removal and secondary clean in conventional process are avoided, so that the manufacturing process flow is simplified and the production cost is reduced.
Owner:上饶捷泰新能源科技有限公司

Thin film of solar battery structure, thin film of solar battery array and manufacturing method thereof

A thin film solar battery structure and a manufacturing method thereof, and a thin film solar battery array are provided. The manufacturing method of the thin film solar battery structure includes: at least two first trenches are formed by etching semiconductor substrate from the first surface; at least one of the second trench is formed by etching the semiconductor substrate from the second surface; each of the second trench is located between two adjacent first trenches; a first structure is formed on the side wall of at least the first trench; a second structure is formed on the side wall of at least the second trench; the semiconductor substrate is cut or drawn from the first trench and the second trench for forming the thin film solar battery structure, the distance of the electrodes can be reduced effectively, the probability recombination of the electron and the hole can be reduced, the bulk recombination current and the surface bulk recombination current can be reduced, the efficiency of the electrical power can be increased, the thin film solar battery structure and the manufacturing method thereof can reduce the semiconductor material and reduce the manufacturing cost.
Owner:江苏盐新汽车产业投资发展集团有限公司

Locally doped solar cell and preparation method thereof

The invention discloses a preparation method of a locally doped solar cell. The preparation method comprises the steps of 1) prearranging and drying doping slurry: prearranging the doping slurry in aposition where a film is to be opened, contacting the doping slurry with a silicon base layer, and carrying out drying; 2) depositing a dielectric passivation film layer on the back surface of the silicon base layer; 3) carrying out laser ablation: carrying out ablation on the dielectric passivation film layer in a metallization region on the back surface of the silicon base layer by laser in a position as same as that of prearranging the doping slurry in the step 1); and 4) carrying out metallization: preparing a metal electrode through a metallization process. The invention provides the locally doped solar cell and the preparation method thereof. Before the dielectric passivation film layer is deposited on the back surface, the doping slurry is prearranged in the metallization region onthe back surface; and when the laser ablation is carried out on the dielectric passivation film layer, the prearranged doping slurry is pushed into the silicon base layer by utilizing energy of the laser, so that the heavy doping and depth of the metallization region are realized, and the composite current of the metallization region on the back surface of the silicon base layer is reduced; and the large-scale production is realized.
Owner:SUZHOU TALESUN SOLAR TECH CO LTD

MWT solar cell and method of making the same

The invention provides a manufacturing method of a MWT (Metal Wrap Through) solar battery. The method comprises the steps of: providing a substrate which comprises a body layer, a reflection-reducing layer and a passivation layer, wherein a plurality of through holes and openings are arranged on the substrate; forming conductive electrodes in the through holes and forming a first back contact electrode on the back of the substrate; forming second back contact electrodes in the openings; forming a touch grid line electrode on the front face of the substrate; sintering the substrate so that the touch grid line electrode is electrically connected with the conductive electrode; and forming a local front surface field in the front surface of the body layer; and forming a local back emitting electrode in the back surface of the substrate. The MWT solar battery manufactured by the method is small in composite current, large in light receiving area and high in photoelectric conversion efficiency, and the problem that the battery is bended is reduced. In addition, according to the manufacturing method provided by the invention, steps such as diffusive knot manufacture, edge corrosion, glass layer removal and secondary clean in conventional process are avoided, so that the manufacturing process flow is simplified and the production cost is reduced.
Owner:淮安捷泰新能源科技有限公司

Polycrystalline silicon thin film containing silicon-oxygen nanocrystalline layer and preparation method and application of polycrystalline silicon thin film

The invention discloses a polycrystalline silicon thin film containing a silicon-oxygen nanocrystalline layer, which comprises a tunneling layer positioned on the back surface of a substrate, a doped polycrystalline silicon layer positioned on the back surface of the tunneling layer, a sintered electrode positioned on the back surface of the doped polycrystalline silicon layer, and a first silicon-oxygen nanocrystalline layer positioned between the doped polycrystalline silicon layer and the sintered electrode. According to the polycrystalline silicon thin film containing the silicon-oxygen nanocrystalline layer, the doped silicon-oxygen nanocrystalline layer is added to serve as a barrier layer for diffusion of electrode metal, the polycrystalline silicon layer is prevented from being burnt through in the sintering process of metal slurry to make direct contact with crystalline silicon, and diffusion of the electrode metal to a substrate is blocked; the invention further provides a preparation method and application of the polycrystalline silicon thin film containing the silicon-oxygen nanocrystalline layer, an annealing crystallization process in preparation of a tunneling layer and a doped polycrystalline silicon layer and a high-temperature sintering process in preparation of a sintered electrode are combined into a whole, and the cost is reduced; and the polycrystalline silicon thin film containing the silicon-oxygen nanocrystalline layer is applied to a solar cell, and the cell efficiency is improved.
Owner:NINGBO INST OF MATERIALS TECH & ENG CHINESE ACADEMY OF SCI

Thin film strip structure, solar cell and manufacturing method of thin film strip structure

The invention provides a thin film strip structure, a manufacturing method the thin film strip structure, and a thin film strip structure array. The manufacturing method of the thin film strip structure comprises the following steps: providing a semiconductor substrate; forming at least one dent or a row of separating holes on a first surface and / or a second surface of the semiconductor substrate; etching the semiconductor substrate from the first surface to form at least two first grooves, and etching the semiconductor substrate from the second surface to form at least one second groove; and separating the semiconductor substrate from the dent or the separating holes, and cutting or stretching the semiconductor substrate from the first grooves and the second grooves to form the thin film strip structure. With the adoption of the thin film strip structure, the damage to the strip structure and the thin film when separating the thin film strip structure from the semiconductor substrate can be effectively reduced, and the production rate can be increased. The thin film strip structure and the manufacturing method of the thin film strip structure also can save the semiconductor material and reduce the manufacturing cost.
Owner:盐城新汇村镇建设发展有限公司

cmos integrated process bjt structure and its manufacturing method

The invention discloses a CMOS integrated process BJT structure, which comprises: P wells and N wells arranged side by side on a silicon substrate, a first shallow trench isolation is formed at the boundary between the P well and N well, and a first shallow trench isolation is formed in the P well. Two shallow trench isolations, a first P+ doped region is formed in the P well between the first and second shallow trench isolations, and a first N+ doped region is formed in the N well next to the first shallow trench isolation , a second N+ doped region is formed in the P well on the other side of the second shallow trench isolation, and a parallel first electrode and a metal silicide barrier layer are formed on the second N+ doped region, and the first P+ doped region A second electrode is formed on the first N+ doped region, and a third electrode is formed on the first N+ doped region; before the source-drain region ion implantation process, a flat layer is deposited, source-drain region ion implantation is performed, a metal silicide barrier layer is deposited, and metal silicide is performed. The blocking layer is etched to form the first electrode to the third electrode. The invention also discloses a BJT manufacturing method of CMOS integration technology. The invention can improve the uniformity of the current gain of the transistor, and can realize precise adjustment of the current gain.
Owner:SHANGHAI HUALI INTEGRATED CIRCUTE MFG CO LTD

A step-by-step phosphorus doping method for crystalline silicon cells

The invention belongs to the technical field of solar cell manufacturing, and relates to a step-by-step phosphorus doping method of a high-efficiency and low-cost crystal silicon cell, namely a primary depletion diffusion combined with secondary high-concentration shallow layer diffusion and back etching method. By controlling the flow of oxygen, A low-temperature low-phosphorus source depositionis carry out for that first time on a p-type silicon substrate by nitrogen flow rate and phosphorus oxychloride flow rate, After a long time of high temperature propulsion, the phosphorus in the phosphor-silicate glass is exhausted, and the low surface concentration layer n + is realized. The second time, the phosphor-free glass is deposited on the phosphor-silicate glass, and the high surface concentration layer n + + is pushed to form a very thin high concentration layer, which can be quickly etched off by means of back etching. The method can accurately control the phosphorus doping distribution in different regions independently to ensure that the non-electrode region has low doping concentration and low recombination current so as to ensure higher open-circuit voltage. The electrode region has high doping concentration, which forms good ohmic contact with the metal electrode and ensures that the filling factor is not lost, so as to improve the photoelectric conversion performanceof the battery as a whole.
Owner:CHANGZHOU UNIV +1

Method for implementing base region window of silicon germanium heterojunction transistor

The invention discloses a method for implementing a base region window of a silicon germanium heterojunction transistor, which comprises the following steps of: depositing a composite dielectric film on a silicon chip with an embedded layer, a collector region and a substrate isolation region on a silicon substrate; performing dry etching on the composite dielectric film, defining the base region window, and etching an oxide film stopped on the composite dielectric film; after the base region window is opened and before the oxide film of the composite dielectric film is removed, depositing a dielectric film layer, and forming a D-shaped side wall at the interface step of the base region window by using the dielectric film layer; and meanwhile, performing wet removal on the residual oxide film in the base region window by using the protection of the D-shaped side wall, and epitaxially growing an SiGe base region. The interface step of the base region window is changed slowly because of the formation of the D-shaped side wall, and the slowly changed step formed by the D-shaped side wall is continuously reserved after SiGe extension and has no insulator residue in the subsequent emitter polycrystalline silicon side wall process, so that continuous metal silicide is formed, the resistance of an outer base region is reduced, and the performance of the device is improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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