Thin film strip structure, solar cell and manufacturing method of thin film strip structure

Abstract

The invention provides a thin film strip structure, a manufacturing method the thin film strip structure, and a thin film strip structure array. The manufacturing method of the thin film strip structure comprises the following steps: providing a semiconductor substrate; forming at least one dent or a row of separating holes on a first surface and / or a second surface of the semiconductor substrate; etching the semiconductor substrate from the first surface to form at least two first grooves, and etching the semiconductor substrate from the second surface to form at least one second groove; and separating the semiconductor substrate from the dent or the separating holes, and cutting or stretching the semiconductor substrate from the first grooves and the second grooves to form the thin film strip structure. With the adoption of the thin film strip structure, the damage to the strip structure and the thin film when separating the thin film strip structure from the semiconductor substrate can be effectively reduced, and the production rate can be increased. The thin film strip structure and the manufacturing method of the thin film strip structure also can save the semiconductor material and reduce the manufacturing cost.

Description

technical field [0001] The invention relates to a semiconductor process, in particular to a novel, high-efficiency, low-cost thin film strip structure and a manufacturing method of a solar cell. Background technique [0002] The thin film strip structure is prepared into a semiconductor device with a layer of thin film, which uses very little semiconductor material, so it is easier to reduce the cost. For the typical application of thin film strip structure - thin film solar cell, it is not only a high-efficiency energy product, but also can be used as a new type of building material, which is easier to realize the perfect combination with the building. Under the background of continuous shortage of silicon raw materials in the international market, thin-film solar cells have become a new trend and new hotspot in the development of the international photovoltaic market. At present, there are three main types of thin-film batteries that can be industrialized and mass-produce...

AI Technical Summary

Problems solved by technology

[0004] For a wafer with a large number of film strip structures on it, its surface is covered with a large area of ​​film. When the film strip structure is separated, it is easy to damage the film on the surface. After scribing, the film on the edge and the substrate Reliability issues such as stratification

And the scribing operation when separating the strip structure is easy to cause irregular cracks to destroy the semiconductor substrate of the strip structure

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