The invention discloses a TOPCON battery front
passivation structure for improving PID, and relates to the technical field of battery preparation, the TOPCON battery front
passivation structure comprises an N-type
silicon substrate, and a high-thickness aluminum
oxide passivation film, an ultrathin
silicon oxynitride film, a
silicon nitride film layer, a
silicon oxynitride film layer and a
silicon oxide film are sequentially laminated from inside to outside, the
silicon nitride film layer sequentially comprises a bottom-layer high-
refraction silicon nitride film, a secondary-outer-layer
silicon nitride film and an outermost-layer silicon
nitride film from inside to outside, the
silicon oxynitride film layer sequentially comprises a bottom-layer
silicon oxynitride film and an outer-layer silicon oxynitride film from inside to outside, and the
refractive index of the bottom-layer high-
refraction silicon
nitride film is 2.28-2.34. The
refractive index of the bottom-layer high-
refraction silicon nitride film is controlled by adjusting the
nitrogen-silicon ratio, and the
nitrogen-silicon ratio is 1: 3.3 or 1: 3.5. According to the front passivation structure of the TOPCON battery,
metal ions and
water vapor are effectively prevented from diffusing and entering a PN junction, reduction of minority carrier recombination loss is facilitated, performance degradation caused by PID can be relieved, and the open-circuit
voltage and the short-circuit current are improved.