The invention provides a manufacturing process of a
CdTe solar cell, which is characterized by comprising the steps of providing a substrate layer with a bottom
electrode, and depositing a buffer layer and a light
absorption layer on the bottom
electrode; activating and annealing the light
absorption layer;
etching the bottom
electrode, the buffer layer and the light
absorption layer by using a first
laser; spraying
photoresist at the
etching line of the first
laser by adopting a
photoresist micro-
nozzle array, exposing and developing by
ultraviolet light in the direction of the substrate, and filling the
etching line; cleaning the unexposed
photoresist, and etching the buffer layer and the light absorption layer beside each etching line adjacent to the first
laser by using a second laser; depositing a back electrode on the whole film surface; and etching the buffer layer, the light absorption layer and the back electrode beside each etching line adjacent to the second laser by adopting a third laser to obtain the
CdTe solar cell with a plurality of
cell units connected in series. According to the invention, the laser grooving area is accurately filled with the photoresist through the micro
nozzle array, so that the photoresist waste and the
environmental protection pressure are reduced, the cost is obviously reduced in the technological process, and the yield is improved.