Manufacturing process of CdTe solar cell

Abstract

The invention provides a manufacturing process of a CdTe solar cell, which is characterized by comprising the steps of providing a substrate layer with a bottom electrode, and depositing a buffer layer and a light absorption layer on the bottom electrode; activating and annealing the light absorption layer; etching the bottom electrode, the buffer layer and the light absorption layer by using a first laser; spraying photoresist at the etching line of the first laser by adopting a photoresist micro-nozzle array, exposing and developing by ultraviolet light in the direction of the substrate, and filling the etching line; cleaning the unexposed photoresist, and etching the buffer layer and the light absorption layer beside each etching line adjacent to the first laser by using a second laser; depositing a back electrode on the whole film surface; and etching the buffer layer, the light absorption layer and the back electrode beside each etching line adjacent to the second laser by adopting a third laser to obtain the CdTe solar cell with a plurality of cell units connected in series. According to the invention, the laser grooving area is accurately filled with the photoresist through the micro nozzle array, so that the photoresist waste and the environmental protection pressure are reduced, the cost is obviously reduced in the technological process, and the yield is improved.

Description

technical field [0001] The invention belongs to the technical field of photovoltaic cells, in particular to a manufacturing process of a CdTe solar cell. Background technique [0002] Cadmium telluride solar cell is a thin-film solar cell based on the heterojunction of p-type CdTe and n-type CdS / CdSe. Compared with single crystal silicon solar cells, it has the advantages of convenient fabrication, low cost and lighter weight. The production cost of cadmium telluride thin-film solar cells is far lower than that of crystalline silicon and other solar cell technologies. Secondly, it is very consistent with the solar spectrum and can absorb more than 95% of sunlight. In the process of large-scale industrial production of CdTe solar cells, it is necessary to cut the entire multi-layer film structure to form a multi-cell serial structure assembly. The electrical insulation between the bottom electrode and the light-absorbing layer is realized by photoresist exposure and developme...

AI Technical Summary

Problems solved by technology

[0003] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a manufacturing process for CdTe so

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