The invention provides a transparent electrode of a light-emitting diode. A preparation method of the transparent electrode comprises the following steps: S1, carrying out chemical cleaning on the surface of an epitaxial wafer, then putting the epitaxial wafer into an MOCVD reaction chamber with temperature of 300-900 DEG C and pressure of 3-100 Torr, and treating for 1-60 minutes; S2, under the protective atmosphere, adjusting the growth temperature to 450-650 DEG C, adjusting the pressure of the reaction chamber to 3-80 Torr, then, introducing an indium source, a tin source and an oxygen source, controlling the growth speed to 0.1-3 nm / min, and growing an ITO main body layer with the thickness of 40-500 nm on the surface of the pretreated epitaxial wafer; and S3, under the protective atmosphere, adjusting the growth temperature to 300-450 DEG C, adjusting the pressure of the reaction chamber to 3-80 Torr, then, introducing an indium source, a tin source and an oxygen source, controlling the growth speed to 1-10 nm / min, and growing an ITO coarsening layer with the thickness of 20-200 nm on the ITO main body layer. The method for in-situ growth of the coarsening layer is very matched with the preparation method of a main body layer of the ITO transparent electrode, subsequent complex process treatment is avoided, and the light extraction efficiency of the LED can be effectivelyimproved.