The invention discloses a light-emitting
diode epitaxial
wafer, a preparation method thereof and a light-emitting
diode, and relates to the field of
semiconductor photoelectric devices. The light-emitting
diode epitaxial
wafer comprises a substrate, and a buffer layer, a
dislocation regulation and
control layer, an N-type GaN layer, a low-
temperature stress release layer, a multi-
quantum well layer, an
electron blocking layer and a P-type GaN layer which are sequentially arranged on the substrate, and the
dislocation regulation and
control layer is of a periodic structure. Each period comprises a first three-dimensional Si-doped GaN layer, a second three-dimensional Si-doped GaN layer, a first two-dimensional Si-doped GaN layer and a second two-dimensional Si-doped GaN layer which are stacked in sequence; wherein the thickness of the first three-dimensional Si-doped GaN layer is h1, the
doping concentration of Si is C1, and the growth temperature of the first three-dimensional Si-doped GaN layer is T1; the thickness of the second three-dimensional Si-doped GaN layer is h2, the
doping concentration of Si is C2, and the growth temperature of the second three-dimensional Si-doped GaN layer is T2; the thickness of the first two-dimensional Si-doped GaN layer is h3, the
doping concentration of Si is C3, and the growth temperature of the first two-dimensional Si-doped GaN layer is T3; the thickness of the second two-dimensional Si-doped GaN layer is h4, the doping concentration of Si is C4, and the growth temperature of the second two-dimensional Si-doped GaN layer is T4; h1 < h2 < h3 < h3, C1 < C2 < C3 < C4, and T1 < T2 < T3 < T4. By implementing the invention, the luminous efficiency of the light-emitting diode can be improved.