The invention relates to the technical field of tunnel junctions, in particular to an optimization design method for improving the performance of an AlGaN-based deep
ultraviolet light-emitting
diode, which comprises the following steps of: selecting a
hole transport layer and a p-GaN interface as a
tunnel junction interface, recording material group distribution,
acceptor distribution and thickness parameters, obtaining a
tunnel junction thickness range, and determining the performance of the AlGaN-based deep
ultraviolet light-emitting
diode according to the
tunnel junction thickness range. The method comprises the following steps of: selecting a
hole transport layer and a p-GaN layer, calculating hole tunneling injection capability to evaluate
electron leakage, screening a thickness scheme which meets injection and
electron limitation requirements according to a transport result, and generating tunnel junction structure parameters, and in the method, material group distribution,
acceptor distribution and
layer thickness information are integrated around the interface of the
hole transport layer and the p-GaN layer, so that the hole
transport layer and the p-GaN layer are integrated; a tunnel junction
insertion position is dominated by carrier transport characteristics, the matching degree of parameters and process
realizability is enhanced in combination with the corresponding relation between an epitaxial controllable thickness range and a barrier width, the hole tunneling capability and
electron leakage distribution are evaluated in parallel in thickness screening, and cooperative balance of injection enhancement and leakage suppression is realized. And the stability and reproducibility of structural parameters are improved.