The application belongs to the technical field of
red light emitting
diode epitaxy and
chip manufacturing, and particularly relates to an AlGaInP
red light emitting
diode epitaxy and
chip manufacturing method and
chip. A buffer layer, an AlInP
etching stop layer, an n-type
ohmic contact layer, an n-AlInP roughening expansion layer, a
waveguide layer, a multi-
quantum well layer and a p-type layer are epitaxially grown on a GaAs substrate in sequence. A hole is opened by
lithography, and a multilayer p
electrode is evaporated in the hole. The epitaxial
wafer is low-temperature bonded with a
Si substrate on which a
metal layer is evaporated, and is cooled in stages. After the substrate is removed, an n
electrode pad layer is lithographically evaporated. A light emitting area is formed by
etching, the AlInP
etching stop layer is segmented and chemically wet roughened, a
passivation layer is deposited, and a single device is obtained through
thinning, back gold
evaporation and
laser cutting. The
superlattice layer has a
capacitive effect, which matches the hole and
electron recombination time, reduces the
electron leakage rate, the AlInP roughening layer cooperates with the segmented wet roughening process, improves the light extraction efficiency, the low-temperature bonding and the staged cooling effectively release the thermal stress, and improve the reliability.