Polarity face GaN-based light-emitting device capable of improving light-emitting efficiency
A light-emitting device, GaN-based technology, applied in semiconductor devices, electrical components, circuits, etc., can solve problems such as interface conduction band downshift, positive and negative charge center asymmetry, unfavorable electron leakage, etc.
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[0015] refer to figure 1 As shown, this embodiment provides an AlGaN DUV LED with a light emission wavelength of about 280nm using the structure of this patent, which includes:
[0016] A substrate 10; the substrate 10 is a (0001) crystal orientation (ie c-plane) sapphire substrate; it can also be GaN, 6H-SiC, 4H-SiC, Si, AlN or ZnO;
[0017] A buffer layer 11, which is made on the substrate 10; the buffer layer 11 is AlN;
[0018] - n-type Al u Ga 1-u N contact layer 12, it is made on buffer layer 11; Wherein n-type Al u Ga 1-u The range of the Al composition u in the N contact layer 12 is 0.40.6, the doped donor impurity is silicon, and the silicon doping concentration is 10 17 10 19 / cm 3 ;
[0019] A light-emitting active region 13, which is fabricated on n-type Al u Ga 1-u On the N contact layer 12; the luminescent active region 13 is a multi-period structure, each period includes a quantum barrier layer 132 and a quantum well layer 131, and the number of period...
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