A
semiconductor device includes a substrate, a
gate oxide layer formed on the substrate, a gate formed on the
gate oxide layer, and a spacer formed adjacent the gate and over the substrate. The spacer includes a void filled with air to prevent leakage of charge to and from the gate, thereby reducing
data loss and providing better
memory retention. The reduction in charge leakage results from reduced parasitic capacitances, fringing capacitances, and overlap capacitances due to the low
dielectric constant of air relative to other spacer materials. The spacer can include multiple
layers such as
oxide and
nitride layers. In some embodiments, the
semiconductor device is a multiple-time programmable (MTP) memory device.