The invention discloses a manufacturing method of a memory device and the memory device, and the manufacturing method comprises the steps: providing a
semiconductor substrate which comprises a substrate and a
hard mask layer on the substrate; a plurality of first grooves are formed in the active area of the substrate from the
hard mask layer, one part of the first grooves are located in the
storage area, the other part of the first grooves are located in the leading-out area, and the parts, in the substrate, of the first grooves are defined as base body grooves; forming a gate insulating layer and a semi-floating gate at the bottom of the groove of the substrate; one part of the semi-floating gate is in contact with the substrate, and the other part of the semi-floating gate is isolated from the substrate through a gate insulating layer; and forming an inter-
gate dielectric layer and a first gate layer in the first groove, forming a control gate of the memory unit in the first groove of the memory region, and forming a lead-out wire of the memory unit in the first groove of the lead-out region, namely, enabling the lead-out region to be in contact with the outside, and solving the problem of
voltage drop caused by large buried
gate resistance.