The invention relates to a three-dimensional multilayer waveguide mode multiplexing and de-multiplexing device and a preparation method thereof and belongs to the optical communication device technical field, in particular, a mode division multiplexing system. According to the three-dimensional multilayer waveguide mode multiplexing and de-multiplexing device and the preparation method thereof ofthe invention, a three-dimensional multilayer waveguide integrated structure is adopted, and therefore, the limitations of a traditional two-dimensional planar waveguide structure can be eliminated, the integration dimensions of the device can be increased, the integration and flexibility of the device can be enhanced, and the communication capacity of a system can be improved. The boundary of anyone side of the upper-layer waveguide of the three-dimensional waveguide is aligned with the boundary of any one side of the lower-layer waveguide of the three-dimensional waveguide, so that the direct three-dimensional coupling of a fundamental mode and a high-order mode is realized, and therefore, a defect that a traditional three-dimensional mode multiplexer fails to realize direct coupling ofmodes can be eliminated, and the structure and complexity of the device can be simplified. The device of the invention is prepared based on a mature CMOS process, so that high efficiency, low cost and mass production of the device can be realized. With the three-dimensional multilayer waveguide mode multiplexing and de-multiplexing device and the preparation method thereof of the invention adopted, the flexible three-dimensional coupling of the modes can be realized, a solid foundation is laid for on-chip mode multiplexing technology. The three-dimensional multilayer waveguide mode multiplexing and de-multiplexing device and the preparation method thereof can be further applied to the flexible mode routing of a mode division multiplexing network.