The invention discloses a double-layer optical
waveguide coupling type
pressure sensor, which comprises a detection optical
signal generation module, a
pressure sensing unit and a detection
signal processing module, and is characterized in that the detection optical
signal generation module and the detection
signal processing module are connected with the
pressure sensing unit through optical fibers; the
pressure sensing unit mainly comprises two
layers of flat plates containing optical waveguides, and air or low-loss transparent liquid with a certain thickness clamped between the flat plates to form a pressure sensing structure, when the upper-layer
waveguide deforms due to
external pressure, the distance between the upper-layer
waveguide and the lower-layer waveguide and the
coupling efficiency are changed, the output
optical power of each optical waveguide is changed, and the output
optical power of each optical waveguide is changed. Therefore, the pressure on the
chip can be detected. According to the invention, high-precision sensing can be realized, and compared with a traditional electric
pressure detection method, the method has the advantages of resisting
electromagnetic interference, supporting sensing and transmission integration and high-speed dynamic sensing, and being suitable for dangerous occasions such as a complex
electromagnetic environment and the like; compared with a
wavelength resolution type optical
pressure sensor, the optical
pressure sensor has the advantages of wide spectrum, simple preparation process and high
cost performance.