21 results about "Waveguide photodetector" patented technology

A waveguide photodetector includes a slab over a substrate, first and second contact portions protruding upward from the slab, and a ridge protruding upward from the slab between the first and second contact portions. A first semiconductor layer is over the substrate and includes a first doped region in the first contact portion, a second doped region in the slab between the first contact portion and the ridge, a third doped region and a sixth doped region in the ridge, a fourth doped region in the second contact portion, a fifth doped region in the slab between the second contact portion and the ridge, a first intrinsic region between the sixth and third doped regions, and a second intrinsic region between the sixth and fifth doped regions. A second semiconductor layer is over the first intrinsic region and between the sixth and third doped regions.

The invention relates to the technical field of optical sensing, in particular to a displacement system based on a sausage cavity and a displacement sensing method thereof.The system comprises a computer, a laser, a polarization controller, a displacement sensing microcavity, an optical fiber waveguide, a photoelectric detector and a displacement device.The displacement sensing microcavity comprises a first convergence section, a straight section and a second convergence section; the large-diameter end of the first convergence section and the large-diameter end of the second convergence section are connected with the two ends of the straight section respectively. The method comprises the following steps: starting the displacement device to generate relative displacement between the displacement sensing microcavity and the optical fiber waveguide; when the displacement sensing microcavity generates n times of displacement, n corresponding resonance spectrums are obtained at the output end of the optical fiber waveguide; and inputting the obtained resonance spectrum data into a computer, and monitoring the displacement condition of the displacement sensing microcavity by using the transmittance change of the resonance mode by the computer, thereby realizing the displacement sensing based on the displacement sensing microcavity. The device is convenient to use and can realize high-precision displacement measurement.

A waveguide photodetector includes a slab over a substrate, first and second contact portions protruding upward from the slab, and a ridge protruding upward from the slab between the first and second contact portions. A first semiconductor layer is over the substrate and includes a first doped region in the first contact portion, a second doped region in the slab between the first contact portion and the ridge, a third doped region and a sixth doped region in the ridge, a fourth doped region in the second contact portion, a fifth doped region in the slab between the second contact portion and the ridge, a first intrinsic region between the sixth and third doped regions, and a second intrinsic region between the sixth and fifth doped regions. A second semiconductor layer is over the first intrinsic region and between the sixth and third doped regions.

A waveguide photodetector for reducing retroreflection and increasing bandwidth is provided. The waveguide photoelectric detector comprises a waveguide photodiode, and comprises a main waveguide; an absorbing waveguide integrated with the main waveguide, one or more of the absorbing waveguide and the main waveguide having an optical axis; an n-type doped semiconductor region along a first side of the absorbing waveguide; a p-type doped semiconductor region along a second side of the absorbing waveguide, the second side being opposite the first side; and an input face at the absorption waveguide, the input face forming an acute angle with the optical axis, and an interior of the input face being angled toward the p-type doped semiconductor region such that light input to the input face refracts toward the p-type doped semiconductor region.

In one embodiment, an apparatus includes a substrate, an oxide layer on the substrate, a silicon layer on the oxide layer, which includes a waveguide region and etched regions adjacent to the waveguide region, a germanium layer on the silicon layer and adjacent the waveguide region of the silicon layer, and a resistive element adjacent to the germanium layer to provide heat to the germanium layer in response to a current applied to the resistive element.

The invention relates to the technical field of photoelectric detectors, in particular to a waveguide type photoelectric detector based on a double-distributed Bragg reflector resonant cavity. The ridge waveguide is etched to the n-type doped layer of the epitaxial layer; the electrode is arranged at the middle section of the ridge waveguide; the double distributed Bragg reflector resonant cavity structure DBR comprises a first distributed Bragg reflector and a second distributed Bragg reflector, and the first distributed Bragg reflector and the second distributed Bragg reflector are arranged on the two sides of the area where the electrodes are located respectively. The first distributed Bragg reflector allows light to be transmitted from the incident end to the emergent end and reflects light from the emergent end to the incident end at the same time, so that a resonant cavity is formed by the first distributed Bragg reflector and the second distributed Bragg reflector. Therefore, the problem of tradeoff between responsivity and bandwidth in a traditional photoelectric detector is solved, and the problems of insufficient manufacturing flexibility of a DBR structure and the like are solved.

The present invention provides a waveguide photodetector integrated with an antenna, a system, and a method for sending a signal. The waveguide photodetector integrated with an antenna includes: a photodetector, N optical waveguides and an antenna, where N is a positive integer; the antenna is disposed on a substrate, and a feed gap is formed on a central axis of two arms of the antenna, the photodetector being disposed in the feed gap; and the N optical waveguides are formed on the substrate, and the photodetector is connected to the optical waveguides to obtain modulated optical signals transmitted from the optical waveguides. According to the present invention, the feed gap is formed on a central axis of two arms of the antenna, and the photodetector is disposed in the feed gap, such that the antenna and the photodetector can be integrated on a same device of a same chip, thereby improving the integration level of an optical integrated circuit and system.

The invention belongs to the field of integrated optics, and particularly relates to an enhanced waveguide integrated photoelectric detector for an MIR wave band, in the photoelectric detector, a waveguide structure layer is mainly composed of a suspended waveguide in the center and sub-wavelength gratings on the two sides, buried oxide layers are removed below the suspended waveguide and the sub-wavelength gratings in an etching mode and the like, and therefore the photoelectric detector is formed. Forming an air gap; the light in the waveguide interacts with the two-dimensional material layer above through the evanescent field; compared with a traditional two-dimensional material heterogeneous integrated silicon waveguide photoelectric detector working in an NIR wave band, the enhanced waveguide integrated photoelectric detector has high response in the MIR wave band, meanwhile, the gold nanosphere array on the top can further limit a light field to a two-dimensional material layer, the interaction between light and substances is enhanced, and the photoelectric detector has the advantages that the photoelectric detector is simple in structure and convenient to operate. Therefore, the performance of the photoelectric detector is improved, and the influence on waveguide transmission loss is very small and even can be ignored.

A photonic integrated circuit has a coherent focal plane array architecture that contains an array of coherent detection pixels and in which adjacent pixels in the same row or in the same column share one or more waveguide photodetectors and one or more associated transimpedance amplifiers. For example, a pair of two pixels that share one or more common photodetectors may be situated on separate buses, such that a laser light signal can be toggled between the two pixels using an optical switch. By having one set of photodetectors shared between the two pixels in such a pair, this architecture reduces the average number of components per pixel, therefore allowing for a reduction in pixel pitch.

Provided is a light detection and ranging (LIDAR) device that includes a light source configured to emit a light beam. The LIDAR device further includes free-space optics configured to receive a first portion of the light beam as a target signal and a second portion of the light beam as a local oscillator signal, and to combine the target signal and the local oscillator signal. The LIDAR device includes a multimode (MM) waveguide configured to receive the combined signal.

The invention provides a silicon-based waveguide photoelectric detector and a preparation method thereof, and is applied to the technical field of optical interconnection. The silicon-based waveguide photoelectric detector comprises a substrate which is provided with a p-type lightly doped region, a p-type heavily doped region, an n-type lightly doped region and an n-type heavily doped region; the light absorption layer, the p-type lightly doped region, the light absorption layer and the n-type lightly doped region form a transverse PIN junction; an epitaxial window is formed in the silicon dioxide window layer, and the light absorption layer is located in the epitaxial window; the first insulating dielectric layer and the first p electrode are electrically connected with the p-type heavily doped region, and the first n electrode is electrically connected with the n-type heavily doped region; the second insulating dielectric layer, the second p electrode and the first p electrode are electrically connected, and the second n electrode and the first n electrode are electrically connected.

This application relates to a lithium niobate waveguide photodetector in the visible light band and its fabrication method. The detector includes a lithium niobate double-ridge waveguide, a silicon crystal layer, a P-type doped region, and an N-type doped region. The lithium niobate double-ridge waveguide includes two spaced-apart ridges. The silicon crystal layer is disposed between the two ridges. A P-type doped region is disposed on the lithium niobate double-ridge waveguide and located on one of the ridges away from the silicon crystal layer, in contact with the silicon crystal layer. An N-type doped region is disposed on the lithium niobate double-ridge waveguide and located on the other ridge away from the silicon crystal layer, in contact with the silicon crystal layer. This application provides a new type of photodetector for visible light communication, making lithium niobate waveguide photodetectors possible in visible light communication.

A chip is described, including a substrate having an active device in the substrate. The chip also includes a first optical waveguide on the substrate. The chip further includes a second optical waveguide on the first optical waveguide and extending from the first optical waveguide though back-end-of-line (BEOL) layers of the chip. The chip also includes a waveguide photo detector (PD) on the first optical waveguide and communicably coupled to the active device through the BEOL layers of the chip.

A waveguide photodetector for reducing retroreflection and increasing bandwidth is provided. The waveguide photodetector includes: a waveguide photodiode having: a main waveguide; an absorption waveguide integrated with the main waveguide; an input surface located on the absorption waveguide; and an input waveguide for transmitting light to the waveguide photodiode, an input angle between the input waveguide and the input face being an acute interface angle.

A ridge structure (7) including at least a light-absorbing layer (4) is provided on a semiconductor substrate (1). A semiconductor embedding layer (8) has a refractive index lower than that of the light-absorbing layer (4) and embeds a side surface of the light-absorbing layer (4). A semiconductor layer (13) has a refractive index between that of the light-absorbing layer (4) and that of the semiconductor embedding layer (8) and is provided between the side surface of the light-absorbing layer (4) and the semiconductor embedding layer (8). The refractive index of the semiconductor layer (13) is n3, a wavelength of the incident light (15) is λ, a thickness of the semiconductor layer (13) in a lateral direction is in a range of −30% to +20% of λ / (4×n3).

The present invention provides an antenna-integrated waveguide photodetector and system, and a method for transmitting a signal, including a photodetector, N optical waveguides, and an antenna, where N is a positive integer, the antenna being provided on a substrate, and a feed gap being provided on the symmetrical axis of both arms of the antenna, the photodetector being provided within the feed gap, and the N optical waveguides being formed on the substrate, the photodetector being connected to the optical waveguides to acquire an optical carrier radio frequency signal transmitted through the optical waveguides. By providing a feed gap on the symmetrical axis of both arms of the antenna and providing the photodetector within the feed gap, the present invention allows the antenna and the photodetector to be integrated on the same device of the same chip, thereby improving the integration degree of optical integrated circuits and systems.

A waveguide photodetector for reducing retro-reflection and increasing bandwidth is provided. The waveguide photodetector comprises: a waveguide photodiode having: a main waveguide, an absorbing waveguide integrated with the main waveguide, and an input facet at the absorbing waveguide; and an input waveguide for transmitting light to the waveguide photodiode, an input angle between the input waveguide and the input facet comprising an acute interface angle.

The present invention relates to a displacement and temperature dual-parameter sensing system based on a SNAP structure microcavity. In this scheme, a tunable laser, a polarization controller, a coupling waveguide, a photodetector and a computer are connected in sequence, a displacement device is fixedly connected to the SNAP structure microcavity, and the displacement device is slidable. The coupling waveguide is provided with an output end and an input end, the output end and the input end are arranged relatively, and the SNAP structure microcavity is arranged between the output end and the input end. The wavelength of the central band of the first-order resonance mode of the SNAP structure microcavity of this scheme does not change with displacement. When the temperature changes, the wavelength of the central band of the SNAP structure microcavity changes with the change of temperature. The displacement is monitored by using the change of the transmittance of the resonance mode, and the temperature is monitored by using the change of the wavelength of the central band of the SNAP structure microcavity, thereby realizing the simultaneous measurement of the two parameters of displacement and temperature. The present invention also includes a method for realizing a displacement and temperature dual-parameter sensing system based on a SNAP structure microcavity.

A waveguide photodetector includes a slab over a substrate, first and second contact portions protruding upward from the slab, and a ridge protruding upward from the slab between the first and second contact portions. A first semiconductor layer is over the substrate and includes a first doped region in the first contact portion, a second doped region in the slab between the first contact portion and the ridge, a third doped region and a sixth doped region in the ridge, a fourth doped region in the second contact portion, a fifth doped region in the slab between the second contact portion and the ridge, a first intrinsic region between the sixth and third doped regions, and a second intrinsic region between the sixth and fifth doped regions. A second semiconductor layer is over the first intrinsic region and between the sixth and third doped regions.

The application relates to the field of photoelectric technology and provides a monolithic integrated resonant cavity enhanced waveguide photodetector which comprises a semi-insulating substrate, a waveguide photodetector epitaxial layer, an N metal electrode and a P metal electrode; the waveguide photodetector epitaxial layer comprises a waveguide layer and a photodetector epitaxial layer; the semi-insulating substrate, the waveguide layer, the photodetector epitaxial layer and the P metal electrode are sequentially arranged along the Z-axis direction; the N metal electrode is connected with the waveguide layer; the waveguide photodetector epitaxial layer has a first end and a second end which are opposite to each other along the X-axis direction; the photodetector epitaxial layer is provided with a first groove; the waveguide photodetector epitaxial layer is provided with a second groove; the first groove is arranged close to the first end; the second groove is arranged close to the second end; and the first groove and the second groove are arranged along the Y-axis direction; the first groove and the second groove are arranged to form a resonant cavity composed of a distributed Bragg reflector, so that good responsivity and relatively fast response speed can be simultaneously satisfied.

The present application relates to the technical field of optical sensing, and more particularly to a displacement system based on sausage cavity and a displacement sensing method thereof, the system comprising a computer, a laser, a polarization controller, a displacement sensing microcavity, a fiber waveguide, a photodetector and a displacement device, the displacement sensing microcavity comprising a first converging section, a straight section and a second converging section, the large-diameter ends of the first and second converging sections being connected to the two ends of the straight section respectively. The method comprises: starting the displacement device to cause relative displacement between the displacement sensing microcavity and the fiber waveguide; when the displacement sensing microcavity is displaced n times, n corresponding resonance spectra are obtained at the output end of the fiber waveguide; and the obtained resonance spectrum data is input into the computer, which monitors the displacement of the displacement sensing microcavity by using the transmittance change of the resonance mode, thereby realizing displacement sensing based on the displacement sensing microcavity. The present application is convenient to use and can realize high-precision displacement measurement.