676results about How to "The preparation process is stable" patented technology

The invention relates to a steel forging manufacturing process for deep-sea Christmas tree equipment connectors, which comprises the following steps: (1) using chromium-nickel-molybdenum low-alloy steel as the blank material; (2) selecting square ingots, heating to 1220 DEG C, cogging, pulling out the material, sawing, and taking the middle section as the blank; (3) heating to the initial forging temperature, upsetting in the directions of three-dimensional coordinates, and drawing out to obtain the isotropic blank; (4) upsetting and forging the blank to obtain an octagonal prism, punching, circularly rolling and shaping to obtain a cylindrical forging stock with a hole; (5) carrying out rough machining on the cylindrical forging stock with a hole to obtain a cylindrical workpiece with a hole; (6) heating the cylindrical workpiece with a hole to 940 DEG C, and cooling in the air to room temperature; (7) heating the cylindrical workpiece with a hole subjected to the step (6), to 930 DEG C, and quenching with water; and (8) heating the cylindrical workpiece with a hole subjected to the step (7), to 640 DEG C, and cooling in the air to room temperature.

The invention discloses a triple system (Na,Bi)TiO3-based lead-free piezoelectric ceramic material, the formula of the disclosed lead-free piezoelectric ceramic component is denoted with (1-x-y)(Bi0.5Na0.5)TiO3-x(Bi0.5K0.5)TiO3-yBi(Me)O3 and (1-x-y)(Bi0.5Na0.5)TiO3-x(Bi0.5K0.5)TiO-yBi(Me)O3+zM(a)O(b), in the formula x,y and z denote molar fractions, wherein x is bigger than or equal to 0 and smaller than or equal to 1.0, y is bigger than or equal to 0 and smaller than or equal to 0.2, z is bigger than or equal to 0 and smaller than or equal to 0.1, Me is trivalent metal element, M(a)O(b) is one or more oxides, wherein M is +1 to +6 valence and is an element that can be integrated with oxygen to form a solid oxide. The lead-free piezoelectric ceramic has high ceramic density and excellent performance, piezoelectric constant d33 can reach above 180pC per N, Kp can reach above 0.36. The lead-free piezoelectric ceramic adopts traditional electronic ceramic preparation process, and has low sintering temperature, simple and stable manufacture process and is suitable for industrialization production.

The invention discloses a self-crosslinking antibacterial hydrogel material containing hydroxypropyl chitosan / oxidized sodium alginate. The material is made from the following components by mass percent: 1-25% of hydroxypropyl chitosan, 1-30% of oxidized sodium alginate, 0.01-0.5% of nano-silver and distilled water. The material is prepared by the following steps: preparing the hydroxypropyl chitosan by a hydroxypropylation reaction of chitosan at the temperature of 10-90 DEG C; preparing the oxidized sodium alginate by an oxidation reaction of sodium alginate at the temperature of 10-45 DEG C; respectively preparing aqueous solution of the hydroxypropyl chitosan and aqueous solution of the oxidized sodium alginate; adding the nano-silver solution and blending at certain ratio; allowing self-crosslinking of the components at the temperature of 10-50 DEG C to produce the antibacterial hydrogel material. The antibacterial hydrogel material has the advantages of low cost, environmental protection, simple process and the like; as the hydroxypropyl chitosan has good biocompatibility, the oxidized sodium alginate is nontoxic to human body, and the nano-silver has excellent antibacterial property, the obtained material can be applied to wound dressing, hemostatic materials and the like.

The invention discloses a polyvinyl chloride (PVC) / ASA alloy, which is prepared by polyvinyl chloride resin, ASA resin and right amount of processing aids. The preparation method includes: mixing uniformly the polyvinyl chloride resin and processing material at 60-120 DEG C, adding ASA resin powders, mixing evenly, dropping the temperature to 43 DEG C, to obtain the mixture; extruding the mixture through a screw extruder to obtain the alloy, wherein, the temperature of the extruder head is 165 DEG C - 185 DEG C, and the revolution speed is 120-160 r / min. Compared with the existing technology, the PVC / ASA alloy prepared by the invention has high impact resistance, weather resistance, fire-retardant, superior synthesized dynamic performance, good processing performance, stable preparation process, non three wastes pollution. The alloy can be formulated into various colors according to requirements, can be produced by screw rod extruding continuous manufacturing method, and can also be produced by extrusion molding and injection molding according to manufacturing requirements of products.

The invention belongs to the field of a lead-free piezoelectric material and discloses BCT-BZT-BST (barium calcium titanate-barium zirconate titanate-barium stannate titanate) ternary system lead-free piezoelectric ceramic. The BCT-BZT-BST ternary system lead-free piezoelectric ceramic is characterized by having the following material components: Ba0.8-xCaxTi0.8O3-0.1BaTi0.9Sn0.1O3-0.1BaTi0.8Zr0.2O3, wherein x is in the range of 0.005 to 0.06. The BCT-BZT-BST ternary system lead-free piezoelectric ceramic is prepared from industrial raw materials by adopting a conventional piezoelectric ceramic preparation technology. The system is a perovskite phase. When x is in the range of 0.005 to 0.04, the BCT-BZT-BST ternary system lead-free piezoelectric ceramic is in morphotropic phase boundary region, has excellent piezoelectric property, has a piezoelectric constant d33 value of 420pC / N and an electro-mechanical coupling coefficient of 44 percent, and has a stable preparation process and wide application prospect.

The invention discloses a bismuth ferrite-based leadless piezoelectric ceramic with high Curie temperature and a preparation method thereof. The general formula for the piezoelectric ceramic is (1-x-y)(BizM1-z)t(FeuM'1-u)O3-xBaTiO3-yBiMnO3, wherein, M is a trivalent metallic element with large ionic radius, M' is a trivalent metallic element with small ionic radius, and x, y, u, t and z represent mole content in a ceramic system and satisfy the following relations: 0<=x<=1.0, 0<=y<=0.1, 0<z<1, 0.85<t<1.2, 0<u<1 and x+y<1. The piezoelectric ceramic is prepared by a conventional ceramic preparation method through selection of proper technological parameters. The piezoelectric constant d33 of the ceramic can reach 140 pC / N, Curie temperature can reach 490 DEG C, and Kt is more than 0.50. The preparation method has the advantages of a simple and stable process, and obtained leadless piezoelectric ceramic has excellent performance and is suitable for being used under high temperature.

The invention relates to a completely degradable polymer medicine elution stent and a preparation method thereof. The stent is prepared from the following steps: 1) processing and forming a degradable polymer material into a pipe; 2) subjecting the pipe to laser engraving to form a stent substrate; 3) polishing the surface of the degradable polymer stent substrate and removing processing defects on the surface of the stent; and 4) forming a medicine carrier coating on the surface of the degradable polymer stent substrate. In the invention, a novel light source is used for implementing the laser engraving of the pipe and the processing defects on the surface of the stent is polished by using a polishing technique, so the obtained stent has high structural stability and can has high mechanical supporting performance; and compared with the conventional method, the method has obvious advantages, the prepared stent has high biocompatibility, can effectively treat diseases such as intravascular stenosis and thrombus, has high positive remodeling effect on blood vessels and can effectively prevent a restenosis in later implanting period of the stent.

The invention discloses lenalidomide composition tablets and a preparation method thereof. The tablets comprise components in percentage by weight as follows: 10%-18% of lenalidomide crystals, 28%-40% of lactose, 28%-40% of microcrystalline cellulose, 1%-5% of konjac glucomannan, 10%-15% of beta-cyclodextrin, 5%-10% of sodium carboxymethyl starch, 0.5%-1.5% of sodium stearyl fumarate and 0.5%-1.5% of powdered cellulose. The preparation technology of the lenalidomide composition tablets is stable, simple and easy to operate, technological parameters are reliable, and the production cycle is shorter; experimental research shows that the lenalidomide raw material is stable in crystal form, higher in purity and capable of meeting the quality requirement of final products; the synthesis technology is concise, stable, feasible and applicable to mass production; the quality is controllable, the stability is better, and the lenalidomide raw material is unchanged under conditions of affecting factors such as the high temperature, high humidity and 10 days of illumination and is stable after being stored for 6 months under the acceleration condition.

The invention discloses an ultraviolet light detector with a titanium dioxide nanotube array serving as a matrix and a preparation method thereof. The ultraviolet light detector comprises a titanium sheet substrate (1), the titanium dioxide nanotube array (2), an insulating layer (3) and a graphene film (4) sequentially from bottom to top, extraction electrodes (5) are arranged on the lower surface of the titanium sheet substrate (1) and the upper surface of the graphene film (4) respectively and are connected with a current measurer (6). The titanium dioxide nanotube array is prepared on the titanium sheet substrate by an anodizing method, oxygen vacancy of the array prepared by the method is less, and mismatch of stoichiometric ratio is avoided. Therefore, titanium dioxide is good in crystalline structure after annealing to lead to high response, low dark current and high ultraviolet-to-visible rejection ratio.

The invention relates to a preparation method of a high-resilience urethane elastic fiber. The preparation method comprises the following steps: (1) mixing raw materials, namely, polytetramethylene ether glycol (PTMEG) and 4, 4-diphenylmethane diisocyanate (MDI) to carry out reaction so as to obtain a prepolymer; (2) adding a certain amount of a mixed diamine chain extender into the prepolymer to form polymer liquor; (3) quickly adding polyamine (the number of functional groups is greater than 2) into the polymer liquor while stirring to carry out reaction so as to form polyurethaneurea liquor; (5) carrying out reaction on MDI and polyether polyhydric alcohol and blocking with ethanediamine to prepare oligomers; (6) blending nano attapulgite with the oligomers to prepare a prepreg; and (7) mixing the polyurethaneurea liquor with the prepreg to prepare a spinning dope, and spinning to form the high-resilience urethane elastic fiber. The preparation method of the high-resilience urethane elastic fiber provided by the invention satisfies the demands on the high-resilience urethane elastic fiber in certain special fields, and the resilience of the urethane elastic fiber is improved.

The invention belongs to the technical field of electronic element encapsulating materials, and specifically relates to a tackifier for addition type liquid silicone rubber and a preparation method thereof as well as adhesion addition type liquid silicone rubber containing the tackifier and a preparation method thereof. In a general structural formula of the tackifier, which is shown in the specification, m+n is equal to 15 to 20. The adhesion addition type liquid silicone rubber containing the tackifier has the advantages of good flowing property, high curing speed at room temperature, excellent heat-conducting property after curing and good adhesion property to aluminum products, glass, stainless steel, PA, PVC and ABS materials.

The invention discloses fiber reinforced aluminum titanate composite material and a preparation method of products thereof. Alpha-Al2O3 and titanium yellow powder taken as raw material are in-situ synthesized into aluminum titanate by adopting one-step method, stabilizing agent for preventing the aluminum titanate from being decomposed and mullite fiber with reinforcement effect are added in the batch mixture, vacuum slip casting is performed after wet ball milling in a ball mill, and the products are obtained by sintering after being dried. The material comprises the following components of raw materials: 49 to 55 percent of Alpha-Al2O3, 35 to 42 percent of titanium yellow powder, 3 to 6 percent of stabilizing agent, and 3 to 6 percent of mullite fiber, wherein, the stabilizing agent is compounded by magnesium oxide and cerium oxide. The prepared fiber reinforced aluminum titanate composite material has the advantages of small thermal expansion coefficient, high thermal stability and chemical stability, and can greatly improve the service life of composite material. Vacuum slip casting is adopted, the technology is simple, the microstructure texture of the product is uniform, and the products can be used for preparing cast aluminum riser tubes, thermoelectric couple protecting sleeves and crucibles, and other products.

The invention relates to a high frequency nickel-copper-zinc ferrite and a method for preparing the same, which belong to the technical field of nickel series soft magnetism ferrite. The main components of the ferrite are ferric oxide, nickel oxide, zinc oxide, and copper oxide, the accessory components comprise cobalt oxide, bismuth oxide, and silicon oxide, and the ferrite is prepared by an oxide method. The invention adopts an iron deficiency formulation, a low calcination temperature, and a low sintering temperature so that the prepared high frequency nickel-copper-zinc ferrite has good performances of low initial permeability, low relative dissipation factor between 50MHz and 200MHz, and high Curie temperature, and can better satisfy the use requirement of communication electronic parts and components; besides, the preparation process is stable, and the production process has low energy consumption.

The invention discloses an antibacterial thermoplastic polyurethane composite material and a preparation method thereof. The antibacterial thermoplastic polyurethane composite material is prepared from, by weight, 40-70 parts of macromolecular polyols, 0.05-3.0 parts of inorganic antibacterial materials, 5-50 parts of isocyanate, 3-30 parts of micromolecular chain extenders and 0-10 parts of hydrolytic stabilizers. The preparation technology is stable, the requirement for equipment is low, cost is low, the inorganic antibacterial materials are not prone to being separated out, the obtained product can keep good mechanical performance of thermoplastic polyurethane elastomers, and the product also has the advantages of being high in antibacterial performance, lasting in effect, high in safety, elasticity and tenacity, resistant to hydrolysis and aging, high in chemical stability, small in pollution to the environment and free of toxin.

Disclosed is a method to prepare porous materials, which can not only be used for a catalyst, an adsorbent, a catalytic support, in ion exchange and gas storage, and the like, but can also be used to reserve or separate guest molecules with spaces (nanometer spaces) of nanometer size, and mixed metal oxides used as functional ceramics. More particularly, there is disclosed a preparation method, in which microwave energy is used as a heat source and a continuous stirred type reactor is used, the temperature is controlled by directly measuring the temperature of the slurry composed of the reactants, solvent and the product, and the pressure is controlled by measuring the pressure of the gas to thereby improve the stability of operation and the reproducibility, and it is easy to control the residence time and increase of the productivity, and the like can be accomplished. Further, according to the present invention, an apparatus to continuously prepare porous materials and mixed metal oxides for performing the preparing method is provided.

The invention relates to a potassium niobate natrium series leadless piezoelectric ceramics and the manufacturing method. It is expressed by the general equation: (1-u)[(1-n)(LitNa1-w-t1Kw-t2)(Nb1-g-fTagSbf)O3+nBiMeO3]+uM. The invention has stable manufacturing technology and has great usefulness.

The invention relates to a preparation method of a hydroxylapatite coating on the surface of a titanium alloy matrix. The preparation method comprises the following steps: firstly respectively performing gas atomization pelleting treatments on titanium powder and hydroxylapatite powder, then uniformly mixing the titanium powder with hydroxylapatite powder, on which the gas atomization pelleting treatments are performed, so as to obtain mixed powder of which the particle size is 10-30 [mu]m, and the content of the hydroxylapatite powder in the mixed powder is 60%-80%; secondly, performing abrasive blasting roughening treatments on the surface of the titanium alloy matrix of which the surface is pretreated, and spraying the mixed powder to the surface of the titanium alloy matrix by a cold spraying method; and finally performing laser cladding treatments on the coating obtained by the cold spraying method so as to obtain the required hydroxylapatite coating. The preparation method disclosed by the invention utilizes the cold spraying method and the laser cladding composite technology to prepare the hydroxylapatite coating on the surface of the titanium alloy matrix, the preparation technology is simple and stable, the bonding strength of the prepared hydroxylapatite coating and the surface of the matrix can reach 40-50MPa, the coating is good in performance, and the long-term stability of between an implant and a bone interface of a host can be effectively facilitated.

The invention discloses a thermo-sensitive sustained-release material, in particular to a preparation method of a thermo-sensitive sustained-release gel of a chitosan lipid composite, belonging to the polymer material science field. The invention is characterized in that: the chitosan is prepared into a chitosan fatty acid lipid composite, and the thermo-sensitive sustained-release gel is prepared by the chitosan and the chitosan lipid; the gel is prepared by the main materials with the chitosan lipid composite and alpha-beta-sodium glycerophosphate, and a medicament carrier is used for in-situ injection and partial treatment. The invention has the advantages of strengthening partial treatment effect of antitumor drugs, avoiding the side effects and favorable prospect of study, development and utilization.

The invention relates to the biomedical field of high molecular materials, in particular to a nerve grafting object containing an orientation nanofiber nerve tract and a preparing method of the nerve grafting object. A core (A) composed of the nanofiber tract is placed in the middle of the nerve grafting object, a sheath (B) composed of an irregular fiber layer (B2) and an orientation layer (B1) is arranged on the outer face of the nerve grafting object, the diameter of the core (A) composed of the nanofiber tract is 2-5mm, the length of the core (A) composed of the nanofiber tract is 3-15mm, the fiber diameter of the nanofiber tract is 40-300nm, the length of the sheath (B) is 9-25mm, the orientation layer (B1) comprises parallel-arrayed fibers of 100-500nm, and the irregular fiber layer (B2) comprises disorder-arrayed fibers of 100-500nm. The technology is stable, grafting object size is adjustable, the clinic requirement is met, production efficiency is improved, industrialization is convenient, guiding performance is high, using is convenient, and practicability is improved.

The invention relates to a multielement potassium niobate natrium series leadless piezoelectric ceramics and the manufacturing method. It is expressed by the general equation: (1-u)[(1-z-n)(LitNa1-w-t1Kw-t2)(Nb1-g-fTagSbf)O3+ z(Bi0.5Na0.5xK0.5 (1-x))TiO3+nBaTiO3]+uM. The invention has stable manufacturing technology and has great usefulness.

The invention discloses a centimeter wave-millimeter wave compatible absorbing composite material. The material has a five-layer structure including a substrate which is an irregular surface made of a random material, a topmost first layer which is composed of a W-shaped hexagonal ferrite absorbent and a acrylic resin adhesive, a second layer which is composed of a carbonyl iron powder absorbent and an epoxy resin adhesive, a third layer which is composed of an Fe85Si1Al6Cr8 nanocrystalline sheet-like absorbent and an epoxy resin adhesive, a fourth layer which is composed of a polycrystallineiron fiber absorbent and an epoxy resin adhesive, and a fifth layer which is composed of a short carbon fiber / carbon black mixed absorbent and a polyurethane adhesive. The material can well solve theproblem of poor centimeter wave-millimeter wave compatible absorbing performance in the prior art, and is a composite wave-absorbing material compatible with electromagnetic waves of centimeter wave-millimeter wave bands.

The invention discloses a method for manufacturing a gecko-foot-seta-inspired biomimetic array. The method can comprise the following steps: selecting a material of which an upper layer is (100) type silicon and a lower layer is provided with a self-etching stopping layer to serve as a substrate; depositing an etching resistant layer on the surface of the upper silicon layer and patterning the etching resistant layer to form an etching resistant mask; corroding an exposed silicon structure through a silicon anisotropic etching method to form a strip with a trapezoidal cross section; removing the remaining etching resistant mask to expose the silicon structure; coating the silicon structure with a photoresist through a photoresist spraying process or a thick photoresist spin-coating method, and performing photoetching; depositing a seta structure with metal or other materials, and peeling the residual photoresist; and lastly, releasing sacrificial layer silicon through silicon isotropic etching to form the gecko-foot-seta-inspired biomimetic structural array. The method is simple in process, high in yield and suitable for large-scale manufacturing. The manufactured gecko-foot-seta-inspired biomimetic array has the advantages of long service life, high structural strength and the like, and has a wide application prospect in the fields of gecko foot form bionics, and the like.

The invention discloses a roxburgh rose vinegar beverage and a preparation method thereof. The roxburgh rose vinegar beverage is a liquid beverage which is prepared by fermenting the following components in parts by weight: 10 to 50 parts of roxburgh rose dregs, 1 to 5 parts of roxburgh rose fruits and / or 4 to 8 parts of roxburgh rose juice. According to the preparation method, the roxburgh rose dregs are used as the main raw material, and a small amount of roxburgh rose fruits and / or roxburgh rose juice is used to prepare the roxburgh rose vinegar beverage; the preparation process mainly comprises the steps of alcohol fermentation, acetic fermentation, filtration, dilution and seasoning; and compared with a product of the prior art, the prepared roxburgh rose vinegar beverage is rich in nutrient components and genuine in flavor, keeps the unique flavor of roxburgh roses, is convenient and easy to produce, and is lower in cost and easier for industrial mass production. Moreover, the roxburgh rose vinegar beverage is prepared from the commonly discarded roxburgh rose dregs as the main raw material, thus having great significance for comprehensive development and full utilization of the roxburgh roses; and the utilization ratio of the roxburgh roses and the generated economic benefit are far higher than those of the prior art.

The invention discloses high pressure-resistance leadless high-temperature ferroelectric ceramic and a preparation method thereof. The composition general formula of the high pressure-resistance leadless high-temperature ferroelectric ceramic is (1-x)BiFeO3-xBaTiO3+[5%Bi2O3+1%MnO2+0.5%ZnO+1%Nb2O5], wherein x is a mole fraction and is more than 0 and less than 0.5. The leadless piezoelectric ceramic provided by the invention is prepared by a two-step synthesizing process, a flash sintering process and a rapid cooling process, so that short sintering time, simple process, high pressure resistance and low dielectric loss can be realized.

The invention relates to a method for preparing a stable water solution of a compound 6-hydroxyl platinum (IV) acid diethanolamine (HOCH2CH2NH3)2[Pt(OH)6] of a precursor of a platinized catalyst. The method comprises following steps of (1) adding NaOH or KOH into a starting material N2PtCl6(N=H,Na,K), after completely substituting for chloridion by hydroxyl, regulating pH to be 4.0-5.5 with nitric acid or acetic acid so as to obtain light yellow H2Pt(OH)6 precipitate; (2) dissolving the precipitate into certain concentration of ethanol amine water solution so as to obtain the stable (HOCH2CH2NH3)2[Pt(OH)6] water solution with 95-200mg / mL Pt and pH of 8.5-10.0. The yield reaches over 95%.

The invention discloses a walnut antioxidant polypeptide chewing flake and a preparation method of the walnut antioxidant polypeptide chewing flake. The walnut antioxidant polypeptide chewing flake is 1.0g+ / -0.05g in weight, the walnut polypeptide powder added to each flake is 0.7g+ / -0.035g, the soybean fructo-oligose is 0.2g+ / -0.01g, and the walnut antioxidant polypeptide chewing flake also comprises 2.0-2.5% of hydroxypropyl methyl cellulose, 3-5% of polyvinylpolypyrrolidone, 1-1.5% of magnesium stearate, and the balance of water. The preparation method comprises the following steps: degreasing walnut powder; soaking; adjusting pH; performing ultrasonic-assisted mixing, centrifuging, removing an oil layer and a lower layer sediment; adjusting the pH of the solution; performing enzymolysis; performing enzyme deactivation; adding soybean polysaccharide; homogenizing; spray drying; mixing the walnut polypeptide powder, the soybean fructo-oligose and the auxiliary materials; preparing soft particles; pelletizing; drying; straightening; tabletting; sterilizing; and packaging into the product. The walnut antioxidant polypeptide chewing flake is stable in preparation process, reliable and optimal in technical index, high in nutritive value, high in utilization rate of protein, and quick to digest and absorb inside a body, and has the functions of having low antigenicity, promoting muscle erythrocyte recovery, helping recovery from fatigue and the like.

The invention discloses a thermally stable lead-free high-temperature piezoelectric ceramic and a preparation method thereof, which is characterized in that the thermally stable lead-free high-temperature piezoelectric ceramic consists of components expressed by the following general formulas: (Naa Kb Lic Agd Bie) (Nbu Tay) O3 +xM1 +yM2, M1 is titanate of the following metals: Mg, Ca, Ba and Sr; M2 is the carbonate or oxide of the following metals: Na, K, Li, A1, Cu, Fe, Mn, Zn, Pr, Nd, Sm, Gd, La, Dy, Er, Yb, Sc and Sb; x and y are the percentages for which the weights of M1 and M2 account in the overall weight of raw materials. The lead-free high-temperature piezoelectric ceramic of the invention is a lead-free, environmentally coordinative, high-temperature piezoelectric ceramic with low agglomerating temperature, high curie temperature, stable thermal performance of electricity, and high mechanical strength, and has stable preparation technique and can be obtained by adopting the preparation technique and industrial materials for traditional piezoelectric ceramics, so the invention is practical.

The invention discloses one kind of solar cell electrode slurry comprising an organic carrier and silver powder, glass powder and an antifoaming agent which are dispersed in the organic carrier. The silver powder comprises micrometer silver particles, nanometer silver particles and silver nano wires which are 2-8 [mu]m in length and 100-200 nm in diameter, and silver nano wires account for 50-80% of the total mass of the silver powder. According to the invention, the silver powder mostly is prepared by the silver nano wires which are stable in preparation process and lower in cost relative to nanometer silver particles, so that the material cost of the electrode slurry is effectively lowered; in addition, gaps of the silver power can be filled by silver nano wires, micrometer silver particles and nanometer silver particles, so that conductive paths are added and a conductive network is formed, and the volume resistivity of the electrode material is lowered. At the same time, the invention further discloses a preparation method of the electrode slurry, and a cell electrode and a solar cell using the electrode slurry.

A silicon capacitor vacuum sensor based on micro electro mechanical system (MEMS) technology relates to the field of micro electro mechanical system (MEMS) sensor and vacuum sensor manufacture. The silicon capacitor vacuum sensor comprises an upper polar plate, a lower polar plate, a middle insulating layer, a vacuum cavity and electrical lead bonding pads on the upper polar plate and the lower polar plate. The vacuum cavity is a sealed cavity formed by the upper polar plate and the middle insulating layer, or the upper polar plate, the middle insulating layer and the lower polar plate. The vacuum cavity is internally provided with an insulation support column array. A gap is left between each top surface of each insulation support column and the upper polar plate. The silicon capacitor vacuum sensor can effectively measure high vacuum degree; the vacuum degree coverage range is large; manufacture process is simple; and the problems of sensitive film breaking, adherence failure and the used glass material outgassing and the like in a miniature capacitor film sensor in the prior art are effectively solved.