68results about How to "Improve coupling efficiency" patented technology

The optical module provided by the present disclosure comprises a circuit board, a base, a first light emitting component, a second light emitting component, a first light receiving component and a second light receiving component. The circuit board has a first notch part and a second notch part on the surface, and the base is embedded in the first notch part and the second notch part, so as to fix the base on the circuit board. The first light emitting component and the second light emitting component are located on the top surface of the base. The first light emitting component and the second light emitting component are respectively located in different notch parts, so that the wiring space of the circuit board between the first notch part and the second notch part can be used to increase the wiring area. The top surface of the base is used to carry the first light emitting component and the second light emitting component, and the top surface of the base faces the upper surface of the circuit board. The first light receiving component and the second light receiving component are arranged on the lower surface of the circuit board. The three-dimensional deployment and integrated deployment are realized, which is more conducive to wiring and reducing the occupation of the circuit board space, so as to realize multi-channel light emitting and light receiving.

The utility model discloses a kind of optical receiving assembly and optical module, the optical receiving assembly includes: PCB board, receiving end FA, lens array, PD array and receiving end FA gasket;Wherein, receiving end FA gasket is set on PCB board, and receiving end FA is set on receiving end FA gasket;The light outlet end of receiving end FA is equipped with reflection bevel, and lens array is set in reflection bevel downside;Signal light received by receiving end FA is reflected to lens array by reflection bevel, and enters PD array by lens array.The optical receiving assembly of the utility model adds receiving end FA gasket, receiving end FA is elevated by receiving end FA gasket, can promote the operation space when coupling, effectively reduce the damage risk of element such as receiving end FA and PD array in coupling process;In addition, the light outlet end of receiving end FA is equipped with reflection bevel, and lens array is set in reflection bevel downside, can be received signal light reflection to lens array and shape, make signal light converge on the photosensitive surface of PD array, promote coupling efficiency.

The application discloses a chip coupling method and system, comprising calculating an initial position for optical coupling according to a light emitting point position and a center position; after controlling the lens to move to the initial position, searching for an optical signal according to a preset scanning track; after finding the optical signal, entering a dry coupling stage, performing optimization alignment to determine a preliminary maximum optical power; at an alignment position, dispensing glue and entering a wet coupling stage, performing fine coupling scanning to find a final maximum optical power, and performing a second specification inspection; on the basis of passing the second specification inspection, curing the glue to fix the lens, and then performing a final specification inspection. The application can automatically complete identification and positioning of the chip and the lens, positioning and searching of the optical signal, dry and wet coupling, and final curing inspection, does not need manual intervention, can adaptively adjust parameters and specification inspection in the coupling process, can cope with various complex situations, and has high stability.

The application provides a triarylamine derivative and an organic electroluminescent device thereof, and particularly relates to the technical field of organic electroluminescence. In order to solve the problem of low device performance caused by the covering layer material in the prior art, the application provides a triarylamine derivative and an organic electroluminescent device thereof, which is applied to an organic electroluminescent device as a covering layer material to effectively improve the luminous efficiency and service life of the device. Since the triarylamine derivative has strong rigidity, a suitable glass transition temperature (Tg), good thermal stability and a high refractive index in the molecule, the coupling efficiency of light in the device is increased, the light extraction efficiency is improved, the generation of Joule heat is reduced, and the service performance of the device is improved.

The present invention relates to a bioactive conjugate, a preparation method therefor, and use thereof. In particular, the present invention relates to a novel type of bioactive molecular conjugates obtained by improving the coupling of a drug to a targeted moiety in ADC or SMDC, a preparation method therefor, and use thereof in the preparation of drugs for treating diseases associated with abnormal cellular activity.

The embodiment of the present application discloses an XY coupling table, which comprises a bottom plate, a top plate, an X-axis driving mechanism and a Y-axis driving mechanism, the X-axis driving mechanism comprises an XY-axis guide rail assembly, an X-axis mover and an X-axis coil, the Y-axis driving mechanism comprises a YX-axis guide rail assembly, a Y-axis mover and a Y-axis coil, the XY-axis guide rail assembly comprises a first X-axis guide rail assembly and a first Y-axis guide rail assembly, the X-axis mover of the X-axis driving mechanism is connected with the first X-axis guide rail assembly; the YX-axis guide rail assembly comprises a second Y-axis guide rail assembly and a second X-axis guide rail assembly, the Y-axis mover of the Y-axis driving mechanism is connected with the second Y-axis guide rail assembly; and the top plate is connected with the first Y-axis guide rail assembly and the second X-axis guide rail assembly. The present application can significantly reduce the assembly height and the overall volume of the coupling table, remove the drag chain cable, reduce the motion friction and external interference, and greatly improve the alignment accuracy and the fiber coupling efficiency of the coupling table.

To improve coupling efficiency when coupling wavelength-coupled light beams with an optical transmission fiber. A wavelength beam coupling device couples a plurality of laser beams emitted from a laser light source and having mutually different peak wavelengths, and the central axes of the light beams emitted in a first direction are arranged in a second direction intersecting the first direction. The wavelength beam coupling device includes: first and second diffraction gratings, the first diffraction grating being disposed at a position receiving the plurality of laser beams and causing the plurality of laser beams to be diffracted in different directions according to wavelengths to be incident on the second diffraction grating, the second diffraction grating further diffracting the plurality of laser beams diffracted by the first diffraction grating to form wavelength-coupled light beams, and the wavelength-coupled light beams being emitted in the first direction; and an optical coupling unit coupling the wavelength-coupled light beams with the optical transmission fiber and configured to be movable in the second direction.

This application relates to the field of transformer technology, specifically to a chip transformer and power module, including a ceramic substrate; the ceramic substrate includes a plurality of stacked ceramic diaphragms; conductive posts are provided on the ceramic diaphragms, the conductive posts extending perpendicularly to the ceramic diaphragms; helical coils are provided on the surface of the ceramic diaphragms, and the ends of adjacent helical coils are connected through the conductive posts; at least two helical coils are connected through the conductive posts to form a coil winding. The embodiments of this application can significantly increase the number of turns in the winding by using planar helical coils, effectively improving the inductance value and enhancing the coupling coefficient between the primary and secondary coils while achieving a miniaturized integrated design.

This invention provides an end-face coupler and its formation method, comprising: a substrate; an isolation layer located on the surface of the substrate; a silicon oxynitride waveguide located on the surface of the isolation layer, the silicon oxynitride waveguide having a ring-shaped longitudinal section; a silicon nitride waveguide partially located within the ring-shaped silicon oxynitride waveguide, the silicon nitride waveguide being separated from the silicon oxynitride waveguide by a first dielectric layer, the silicon nitride waveguide within the ring-shaped silicon oxynitride waveguide having a tapered cross-section, and the width of the silicon nitride waveguide gradually increasing along the incident direction of light; and a second dielectric layer covering the ring-shaped silicon oxynitride waveguide. This forms a ring-shaped silicon oxynitride waveguide, with the silicon nitride waveguide located inside the ring, thus expanding the optical mode field of the end-face coupler and improving coupling efficiency. Furthermore, the tapered portion of the silicon nitride waveguide inside the ring-shaped silicon oxynitride waveguide allows the optical signal to gradually couple into the silicon nitride waveguide, preventing the optical signal from leaking into the first dielectric layer, thereby reducing light loss.

The application relates to the technical field of optical communication device manufacturing, in particular to a double-lens automatic coupling machine and a coupling method, which comprises a coupling platform, a collimating lens coupling module, a focusing lens coupling module, a vision module, a dispensing module and a UV curing module; a stage for fixing a PCBA and a carrier for placing collimating lens boxes and focusing lens boxes are arranged on the coupling platform; the collimating lens coupling module and the focusing lens coupling module are arranged on the two sides of the coupling platform respectively; and the dispensing module and the UV curing module are both mounted on the collimating lens coupling module. The application discards the traditional complex gantry structure design, separately arranges the collimating lens coupling module and the focusing lens coupling module on the two sides of the coupling platform, and independently completes all actions, avoids the shaft system avoiding action necessary for the multi-shaft system in the gantry structure, greatly saves the coupling time, has high coupling efficiency, carries the dispensing module and the UV curing module on the collimating lens coupling module, has smaller space structure, better structural stability, lower cost, and can also save the occupied space.

The present application relates to a kind of nanosecond laser space-time control methods based on double-cone pair collision direct drive laser device, in the case of meeting the nearly isentropic compression waveform of driving implosion, the time waveform of all sub-beams in device is redistributed, a small part of beam is used to generate low-energy foot pulse, and is focused on larger target surface, target surface is slowly contracted under the action of low-energy foot pulse, and is contracted to a smaller target surface at the end of the duration of low-energy foot pulse, then the majority of remaining beam is used to generate driving main pulse, and is focused on this smaller target surface, so as to realize zooming.The method reduces the waveform contrast of sub-beam by redistributing the time-power curve of all sub-beams, can realize higher precision control of time-power curve on target surface, also effectively reduces the loss caused by energy transfer (CBET) of cross-beam by zooming, improves beam-target coupling efficiency, and improves the irradiation uniformity of target pellet.

The application discloses a mode spot converter based on proton exchange and a lithium niobate film, which comprises a lithium niobate film, a proton exchange waveguide, a silicon dioxide waveguide, wherein the lithium niobate film comprises a stepped film section, a flat film section and a last film section; the stepped film section has multiple steps, the tread of each step is a plane, and the kick of each step is a concave curve; the tread of the highest step of the stepped film section is flush with the top surface of the flat film section; and the last film section forms an LN ridge waveguide; the proton exchange waveguide is formed on the stepped film section and the flat film section of the lithium niobate film; the stepped film section forms a stepped section of the proton exchange waveguide, and the flat film section forms a transition section of the proton exchange waveguide; and the silicon dioxide waveguide serves as an upper cladding layer of the stepped section of the proton exchange waveguide. The application is used for end face coupling between a chip and an external optical fiber, and has the advantages of high transmission efficiency, small light leakage and low transmission loss.

This utility model relates to the field of optical waveguide technology, and provides a display device and display equipment, comprising: a laser emitting component, a focusing component, and an optical waveguide, wherein the optical waveguide includes a coupling-in unit and a coupling-out unit; the laser emitting component is used to emit an image beam to the focusing component; the focusing component is used to focus the image beam and then direct it into the coupling-in unit where total internal reflection occurs, and finally exit through the coupling-out unit. This application focuses the image beam through the focusing component, and the focused beam is completely received by the coupling-in unit, reducing the phenomenon of the image beam energy distribution exceeding the coupling area of ​​the optical waveguide, resulting in high coupling efficiency; furthermore, the focusing component makes the image beam incident on the coupling-in unit more concentrated and directional, thereby forming a more uniform light distribution inside the waveguide, improving the brightness uniformity and display quality of the final exit pupil image.

The invention provides a double-layer silicon nitride grating coupler for a visible light wave band. The double-layer silicon nitride grating coupler comprises a substrate, a lower cladding, a first layer of silicon nitride, an interlayer, a second layer of silicon nitride and an upper cladding from bottom to top, the first layer of silicon nitride comprises a first layer of silicon nitride grating and a silicon nitride waveguide, and the second layer of silicon nitride is a second layer of silicon nitride grating and is output by the lower layer of silicon nitride waveguide, so that relatively high coupling efficiency is realized. Due to the visible light wave band, the thickness of the first layer of silicon nitride and the second layer of silicon nitride does not exceed 500nm. According to the double-layer silicon nitride grating coupler, the vertical symmetry of gratings is broken through, high-directivity propagation of light waves is achieved through proper position arrangement of the two layers of silicon nitride gratings, and meanwhile the refractive index contrast ratio and the coupling efficiency can be improved through the double-layer gratings; on the premise that the grating period is not affected, the technology of the double-layer silicon nitride grating coupler manufactured based on the two uniform fully-etched gratings is simple.

This invention provides a recombinant Staphylococcus aureus enterotoxin B nanoparticle protein vaccine, mSEB-mi3, its preparation method, and its applications. This invention utilizes a SpyTag / SpyCather protein linker system to connect the recombinant protein to the nanoparticle protein, allowing mSEB to be displayed on the surface of self-contained nanoparticles, thus obtaining the recombinant Staphylococcus aureus enterotoxin B nanoparticle protein mSEB-mi3. Both mSEB-SpyTag and SpyCather-mi3 proteins in this invention are induced to be expressed in soluble form in Escherichia coli. The mSEB-SpyTag and SpyCather-mi3 of this invention can be covalently bound via isopeptide bonds to form the mSEB-mi3 nanoparticle protein vaccine. The binding conditions are simple, and when combined with the adjuvant MF59, it can induce rapid antibody production in mice, generating a high-level immune response and exerting a protective effect. Furthermore, its antibody response rate and protective efficiency are superior to those of the monomeric protein mSEB.

The present application relates to the technical field of medical detection, and particularly relates to a high-hook-capability and anti-interference HBP detection kit, which comprises R1 reagent and R2 reagent; 3-[3-(cholylamido propyl) dimethylamino] propanesulfonic acid inner salt and sodium dodecyl sulfate are used to prepare the reagent R1, and by adjusting the use ratio of the two, the mutual cooperation of the two can ensure the reaction sensitivity of the reagent and improve the anti-interference performance of the reagent; two kinds of latex microspheres with different particle sizes are used to coat two kinds of HBP antibodies with different antigen recognition epitopes in the reagent R2, which can not only ensure that the reagent has a wider detection range in the high value area and improve the hook capability, but also ensure the sensitivity of the kit; the activation system adopts the method of combining two activators of NHS and EDC, which can effectively improve the coupling efficiency. Meanwhile, the present application also provides a preparation method of the high-hook-capability and anti-interference HBP detection kit, which does not need centrifugation and resuspension operation steps, and the method operation is simpler and the production cost is lower.

The application discloses a kind of multispectral nanocluster doped multiple coating light concentrator and its method, including preparation substrate layer, preparation light emitting layer and preparation anti-reflection function layer, multispectral nanocluster doped light emitting layer is coated on substrate layer, anti-reflection function layer is coated on light emitting layer, the multispectral nanocluster is using Eu 3+ 、Tb 3+ 、Ce 3+ Ion or any combination thereof induced nanocluster of agglomerated polymer formation, the light emitting layer is obtained using multispectral nanocluster doped resin, for the absorption of incident short-wave light and conversion into characteristic emission light;The anti-reflection function layer is coupled to the outermost layer of light emitting coating, for limiting the light quantum conduction in coating, using different refractive index coating to limit the light quantum conduction in coating, to lock the fluorescent light quantum escape emitted by inner layer light emitting material, while, also can play the role of reducing interface reflection loss and improving the injection efficiency of incident light to light emitting layer.

The utility model discloses a coupling clamping structure for packaging an optical device, which is suitable for a BOX packaging process. According to the structure, accurate adjustment of the longitudinal position of the optical device is realized through the adjusting device, and the optical device is fixed at a set position in combination with the clamping device, so that the stability of the optical device in the packaging process is ensured; the adjusting device achieves high-precision movement through elastic buffering and threaded connection, the clamping device achieves reliable fixation of the optical device through a bidirectional screw and a clamping plate, the whole structural design is reasonable, operation is easy and convenient, the positioning reliability and coupling efficiency of the optical device are effectively improved, the success rate of production and manufacturing is remarkably increased, and the production cost is reduced. And high practicability and popularization value are achieved.

The invention relates to a silicon-copper co-oxide catalyst for strengthening CO2 electroreduction and preparation and application of the silicon-copper co-oxide catalyst for strengthening CO2 electroreduction, and the preparation method comprises the following steps: dissolving soluble copper salt and tetraethoxysilane in ethanol to form a uniformly mixed precursor solution; the precursor solution is conveyed to a spraying nozzle through a sample injection pump, the spraying nozzle atomizes the precursor solution into aerosol through atomization gas and sprays the aerosol into a combustion chamber, the aerosol is combusted under the high-temperature condition of the combustion chamber, evaporation, pyrolysis and oxidation reactions are generated, and nano-particles are generated; and putting the nano particles into a quenching device, and rapidly cooling to obtain a nano Si-Cu-Ox co-oxide, namely the catalyst. When the catalyst is applied to the process of preparing ethylene through CO2 electroreduction, Cu < + > active species generated in the electroreduction process can be stabilized and prevented from being reduced, so that C-C coupling of an intermediate product is strengthened, and the selectivity of an ethylene product is remarkably improved.

The invention discloses a photoelectric co-packaging device and a preparation method thereof, and relates to the technical field of optical communication, the photoelectric co-packaging device comprises a substrate, an optical chip, an electric chip, an optical fiber array unit and an optical waveguide, the optical chip is electrically connected between the substrate and the electric chip, the electric chip is used for providing a driving signal and a control signal for the optical chip, and the optical fiber array unit is electrically connected with the substrate. The optical chip is provided with a plurality of optical couplers, the optical fiber array unit comprises a plurality of optical fibers in one-to-one correspondence with the plurality of optical couplers, and the optical waveguide is formed through a photon lead bonding method and is used for coupling each optical coupler to the corresponding optical fiber. Optical port position offset caused by warping of the optical chip and fiber core position offset caused by manufacturing tolerance of the optical fiber array are effectively compensated, coupling efficiency is improved, the energy efficiency ratio of the optical communication device is further improved, packaging difficulty is reduced, meanwhile, the optical chip is arranged between the substrate and the electric chip, heat dissipation of the electric chip is facilitated, and the service life of the electric chip is prolonged. The overall reliability and the long-term working stability of the photoelectric co-packaging device can be improved.

The application discloses a preparation method of an ester-substituted polythiophene, and the preparation method comprises the following steps: mixing a monomer M, a palladium catalyst, a ligand, an oxidant, a base and a solvent to obtain a reaction material, reacting the reaction material at 60-150 DEG C for 12-72 hours, and purifying the reaction material to obtain the ester-substituted polythiophene. The preparation method can significantly improve the C-H / C-H coupling efficiency of the monomer, obtain the ester-substituted polythiophene, and the number average molecular weight of the ester-substituted polythiophene can be higher than 90000, and the yield can be higher than 99%. The raw materials required by the preparation method are simple and easy to obtain, the raw materials do not need to be pretreated, and the polymerization can be directly carried out, so that the use of air-sensitive reagents, toxic metal reagents and the generation of toxic by-products are avoided.

The invention discloses a semiconductor laser-based heterogeneous integrated coupling structure and a preparation method thereof, and belongs to the technical field of optoelectronic integrated devices. The heterogeneous integrated coupling structure comprises a chip and a laser; the chip is provided with a bonding groove, a silicon nitride conical waveguide and a silicon nitride single-mode waveguide, and the wide end of the silicon nitride conical waveguide is connected with the silicon nitride single-mode straight waveguide; the laser includes a contact layer, a ridge waveguide, a first tapered waveguide, and a second tapered waveguide. According to the invention, a double-layer tapered waveguide structure composed of a first tapered waveguide and a second tapered waveguide is designed, a silicon nitride tapered waveguide and a silicon nitride single-mode waveguide are arranged on a chip, and the second tapered waveguide and the silicon nitride tapered waveguide are optically interconnected in a vertical coupling manner; the problem of mode adaptation of an existing laser and a silicon nitride chip can be effectively solved, efficient on-chip coupling of heterogeneous integration of the laser is achieved, and the coupling efficiency of the heterogeneous integration coupling structure is improved.

This invention provides a method for preparing a tungsten-titanium-aluminum alloy target. The method includes the following steps: ball milling tungsten powder, titanium powder, and aluminum powder under an inert atmosphere to obtain a mixed powder; adding the mixed powder in portions into a hot-pressing mold, performing hot-pressing sintering and post-treatment to obtain the tungsten-titanium-aluminum alloy target. The tungsten-titanium-aluminum alloy target provided by this invention is widely used in the field of high-performance thin film deposition as a diffusion barrier layer to prevent copper atoms from diffusing into the silicon substrate. Furthermore, due to its high thermal stability and low resistivity, it can also be used as a gate or contact electrode.

The invention discloses a solution concentration detection device and a method thereof. The solution concentration detection device comprises a light source for generating initial light; the optical splitter is used for splitting the initial light into detection light and reference light; the two-way accommodating cavity comprises a to-be-detected solution accommodating cavity for accommodating a to-be-detected solution and a reference solution accommodating cavity for accommodating a reference solution; the detection light is transmitted through the to-be-detected solution to form to-be-detected signal light; the reference light is transmitted through the reference solution to form reference signal light; the detection processing module is configured to obtain a phase difference between the signal light to be detected and the reference signal light; the detection processing module is further configured to obtain the concentration of the solution to be detected according to the phase difference and the concentration of the reference solution. The reference solution with the known concentration is introduced as a contrast path to be compared with the to-be-detected solution, and the concentration of the to-be-detected solution is inverted through the phase difference between the to-be-detected signal light and the reference signal light, so that the precision of a solution concentration detection result can be effectively improved.

The application provides a backside incidence and top reflection integrated fiber-waveguide coupler, which comprises a substrate, an SOI substrate, a linearly variable grating device, a reflection cavity structure, a lens focusing fiber and a fiber fixing assembly, wherein the SOI substrate is arranged on the top surface of the substrate, the linearly variable grating device is arranged on the SOI substrate, the reflection cavity structure is arranged above the grating waveguide in the linearly variable grating device and is used for reflecting the uncoupled light back to the grating area to enhance the coupling efficiency, and the lens focusing fiber and the fiber fixing assembly are arranged on the back surface of the substrate, so that the incident light signal enters the grating waveguide part of the grating area through the back surface of the substrate at a preset inclination angle. The fiber-waveguide coupler of the application can improve the coupling efficiency, widen the coupling bandwidth, release the front surface space of the chip, and is beneficial to high-density photon integration and low-temperature environment application.

This invention discloses an optical waveguide module, relating to the field of optical device technology. It includes a substrate, an optical waveguide layer on top of the substrate, and a buffer layer with a continuously curved, wave-shaped design between the substrate and the waveguide layer. This invention forms a stress-relieving structure based on the wave-shaped buffer layer, substrate, and waveguide layer, achieving thermal expansion coefficient matching and bending stress dispersion between the substrate and the waveguide layer. Simultaneously, combined with various adhesion enhancement layers, it ensures the long-term stability of the multi-layer interface. Furthermore, the input coupling layer employs a composite design of a blazed grating and a subwavelength grating, significantly improving the coupling efficiency from visible light to near-infrared. The output coupling layer achieves wide field-of-view output through a gradient periodic grating, adapting to large viewing angle requirements. Additionally, it integrates a modulator and a graphene thermal conductive layer, simultaneously solving the problems of high-speed modulation and heat dissipation, significantly improving the optical performance, thermal stability, and mechanical reliability of the optical waveguide module.

This invention relates to viscosity index improver concentrates for use in lubricating oils, and particularly to a viscosity index improver concentrate (a concentrate of a star-shaped hydrogenated styrene (S)-isoprene (I)-butadiene (B) terpolymer viscosity index improver) prepared in situ in low-viscosity base oils, and its preparation method. The star-shaped viscosity index improver is synthesized by polymerization, hydrogenation, and deashing in low-viscosity base oils at a monomer concentration of 5wt%-15wt%, directly yielding the viscosity index improver concentrate. This invention's method for in-situ synthesis of star-shaped viscosity index improvers in low-viscosity base oils reduces the steps of solvent removal, solvent recovery, product drying, and redissolution required in traditional viscosity index improver synthesis methods, thereby lowering production costs and ensuring product quality. This invention also provides a method for preparing the viscosity index improver concentrate prepared in situ in low-viscosity base oils.

The application relates to a single-molecule transistor structure coupled with a THz wave band and a preparation method thereof. The single-molecule transistor structure comprises a silicon substrate, a gate, a gate dielectric layer, a source and a drain matched with the gate control, a split ring resonator structure, a peripheral electrode and a single-molecule active region located at a nanometer / sub-nanometer gap of the source and the drain. Through the structure and the method, a significant terahertz local field enhancement can be obtained in the gap region where the molecules are located while the transistor characteristics and the device stability are ensured, and an implementable process path is provided for the construction and application research of the single-molecule coupling device in the terahertz wave band.

This application relates to the field of semiconductor technology, specifically to a MEMS piezoelectric loudspeaker and acoustic device, including a substrate and a piezoelectric stack disposed on the substrate; the piezoelectric stack has multiple tangents extending from the geometric center of the piezoelectric stack to the edge of the piezoelectric stack, forming multiple cantilever beams arranged rotationally symmetrically about the geometric center; each cantilever beam has a fixed edge away from the geometric center; at least two of the cantilever beams have trench structures on the substrate, the trench structures being located close to the fixed edge of the cantilever beam. This application can reduce peaks at resonant frequencies and effectively expand the frequency bandwidth, improving overall audio performance; in addition, this application can also reduce diaphragm stiffness, thereby significantly enhancing its low-frequency deformation capability and optimizing the low-frequency sound pressure level curve.

This application provides a semiconductor structure and its fabrication method. The semiconductor structure includes: a substrate; a dielectric layer disposed on the substrate; an optical waveguide structure disposed within the dielectric layer; a cavity surrounding the optical waveguide structure; and a dielectric layer, including a first dielectric layer disposed on the cavity wall. This semiconductor structure can reduce the risk of corrosion by moisture.