170results about How to "Improve coupling efficiency" patented technology

The invention discloses an optical chip-optical fiber coupler based on a collimating grating penetrating through a substrate, which belongs to the technical field of photoelectric chips and comprises a substrate, an inverted optical chip is arranged on the substrate, and the optical chip comprises at least one optical device, an optical waveguide array for realizing input and output and a collimating grating array. The collimating grating array is provided with a gradually changing period and duty ratio, so that light output from the optical waveguide array is diffracted to the substrate through the collimating grating array and is propagated to the back surface of the optical chip as basically collimated light; an optical coupling element array is arranged at the position, corresponding to emergent light of the collimating grating array, of the back face of the optical chip to couple light to an optical fiber array. By the adoption of the structure, high-efficiency coupling of the optical chip and the optical fiber array is achieved, and compared with a common grating coupler and an edge coupler, the coupler has higher coupling efficiency and alignment tolerance, is easier to manufacture and can be widely applied to the fields of optical IO, photoelectric sealing (CPO) and the like of large-scale photoelectric integrated chips.

According to the MTP device and the preparation method thereof, an MOS capacitor composed of a substrate, a gate oxide layer and a floating gate in a traditional MTP device is replaced with a capacitor located on the substrate and composed of the floating gate, an insulating layer and a conductive plug, so that the potential of the floating gate is controlled through capacitive coupling between the floating gate and the conductive plug; according to the MTP device disclosed by the invention, the capacitor is completely isolated from the substrate, so that the MTP device is not influenced by the potential of the substrate during programming and erasing operation, the operation range of the MTP device is further effectively expanded, namely the programming efficiency and the erasing efficiency of the MTP device are improved, and the reliability of the MTP device is improved. And meanwhile, higher capacitance coupling efficiency is realized in a smaller area, and the reduction of the chip area is facilitated.

The invention discloses an integrated optical diversity receiving device, solves the problem of high power consumption when the influence caused by phase distortion and light beam pointing error is corrected in the existing free space optical communication, and belongs to the field of optical communication. The method comprises the steps that free space light focused by a lens is received by a multimode / few-mode optical fiber; the multi-mode light beams received by the multimode / few-mode optical fiber enter the photon lantern; the photon lantern is coupled to the single-mode fiber array after mode demultiplexing; each light beam in the single-mode fiber array enters a polarization beam splitting rotary combiner through an edge coupler; the polarization beam splitting rotation combiner performs transverse electric wave (TE) and transverse magnetic wave (TM) mode separation on the entered light beam, then rotates the separated TM polarization state light to a TE polarization state, combines the rotated TE polarization state light and the separated TE polarization state light, and then enters the MZI network; the MZI network is used for realizing optical coherent beam combination; a control circuit controls the merging of the light beams in the MZI network.

The invention discloses a VCSEL array and multi-core optical fiber high-efficiency coupling and aligning system, and belongs to the field of semiconductor lasers. The VCSEL array and multi-core optical fiber high-efficiency coupling system comprises a VCSEL array, a micro lens array and a multi-core optical fiber. A layer of microlens array is arranged between the VCSEL array and the multi-core optical fiber, and divergent light beams emitted by the VCSEL array are focused through the microlens array, so that the light beams can be respectively aligned with each fiber core of the multi-core optical fiber for incidence. The invention further discloses a VCSEL array and multi-core optical fiber alignment system, on the basis of the VCSEL array and multi-core optical fiber high-efficiency coupling system, the system further comprises a CCD camera, a high-magnification visual system and piezoelectric motors, the VCSEL array, the micro-lens array and the multi-core optical fiber are fixed in the three piezoelectric motors respectively, the plane where the piezoelectric motors are located is an x-y plane, and the plane where the piezoelectric motors are located is an x-y plane. A CCD camera is placed at the position parallel to the x-y plane, image information of the VCSEL array, the micro-lens array and the multi-core optical fiber is captured, and machine vision automatic alignment is carried out.

The invention discloses an automatic coupling method and device for a photoelectric detector wafer, and the method comprises the steps: employing a visual recognition technology to achieve the coarse positioning of the coupling of a to-be-detected wafer chip, taking an optical power count value collected in real time as a search signal, carrying out the real-time analysis of the signal through combining with a breadth-first search algorithm, and carrying out the detection of the signal. Path planning is carried out on a three-dimensional space to determine a search path, precise control of a motion path is carried out on the three-axis precision platform through a software control system, finally, optical power value signals under each path position are traversed to find out a maximum value signal, the maximum value signal is moved to the position, and the maximum value signal is the optimal coupling position. Therefore, automatic coupling of wafers in a limited space is realized. The wafer coupling device has the beneficial effects that the automation degree of wafer coupling can be improved, the manual operation cost and the time cost are reduced, meanwhile, the precision and the stability of wafer coupling are improved, and adverse effects caused by manual operation errors are reduced.

The invention discloses an optical frequency comb generation device and method based on lithium niobate film waveguide series connection double micro-rings. The device comprises a first bus waveguide, a first annular waveguide, a second annular waveguide and a second bus waveguide which are etched on a lithium niobate film. Wherein one end of the first bus waveguide is a pump light input end, the other end of the first bus waveguide is an auxiliary light input end, the first bus waveguide and the first annular waveguide are mutually coupled, the first annular waveguide and the second annular waveguide are mutually coupled, the second annular waveguide is a soliton cavity, and a temperature regulation and control device is arranged below the soliton cavity. The temperature of the soliton cavity is regulated and controlled to enable the harmonic peak of the soliton cavity to drift, so that the pump light enters a soliton state, the auxiliary light performs power compensation on the soliton state of the pump light, and a soliton optical frequency comb is generated. In combination with auxiliary photo-thermal modulation, the micro-cavity thermal effect is compensated, the soliton stability is improved, and finally a comb-shaped structure spectrum with stable performance, high coherence and high flatness is output from a soliton cavity port.

The invention discloses a grating coupling device and a preparation method thereof. The grating coupling device comprises a dielectric layer arranged on the surface of a substrate; the functional layer is arranged in the dielectric layer and is provided with a first grating and a waveguide which are adjacent to each other; the second grating is arranged in the dielectric layer and located on the side, away from the surface of the substrate, of the first grating, the grating constant of the second grating corresponds to the grating constant of the first grating, and the second grating is aligned to the first grating; and the material refractive index of the second grating is greater than that of the first grating. The overall coupling efficiency of the device can be obviously improved, and the coupling loss is reduced.

The invention discloses a grating coupler, a diffraction optical waveguide with the grating coupler and a display device with the grating coupler. The grating coupler comprises a grating body and an optical film layer, at least part of a grating line of the grating body comprises a first side wall and a second side wall, and the first side wall and the second side wall respectively form an included angle theta 1 and an included angle theta 2 and theta 1lt relative to a plane where the grating body is located; theta 2; the optical film layer comprises a first film layer covering the grating body and a second film layer covering the first film layer; the grating body has a grating refractive index n0, the first film layer has a refractive index n1, and the second film layer has refractive indexes n2 and n1lt; n01t; n01t; n1, n2; the parts, located on the first side wall and the second side wall, of the first film layer have the average thickness d1, d2 and d1gt respectively; d2; and the portions of the second film layer located on the first and second sidewalls have an average thickness d3 and d4, d3gt, respectively; and d4. By providing the optical film layer with specific asymmetry, the coupling efficiency is remarkably improved, and meanwhile, an additional means is provided for uniformity adjustment.

The invention discloses an intermediate infrared super-continuum spectrum light source with a spatial light structure, which comprises a pumping source, a light source, a light source and a light source, the collimating lens is used for collimating the pump light and outputting parallel light; the grating pair is formed by arranging two gratings in parallel and is used for splitting the light input into the grating pair according to the frequency, changing the optical path of the light of each frequency and outputting transmission light to the roof prism; the optical fiber is also used for compounding the light returned to the grating pair from the original path of the roof prism, realizing pulse compression and outputting compressed light to the reflector; the roof prism is used for reflecting the light penetrating through the grating pair to penetrate through the grating pair again; the reflecting mirror is used for reflecting the compressed light; the focusing lens is used for focusing the compressed light reflected by the reflecting mirror; and the compressed light focused by the focusing lens is spatially coupled at a focal point to enter the fluoride optical fiber, and intermediate infrared super-continuum spectrum laser is output. In the spatial optical coupling system, the grating pair is used for compressing the pulse, and further broadening of the super-continuum spectrum is achieved.

The invention discloses an annular fiber grating manufacturing method and system for a high-order mode coupling fundamental mode, and the method comprises the steps: starting a femtosecond laser and corresponding equipment, and enabling the femtosecond laser and corresponding equipment to be in a standby state, so as to guarantee the stability of laser processing; a coating layer at the optical fiber processing position is stripped, the relative distance and height of the electric rotating clamps on the two sides are adjusted, so that the exposed part of the optical fiber is located between the electric rotating clamps on the two sides, and the horizontal and vertical positions of the electric displacement platform are adjusted; the grating period lambda, the rotating speed of the electric rotating clamp, the moving speed of the electric displacement platform, the interval time of opening and closing of the laser valve and the period number are preset on the computer; and executing a preset program, and forming annular fiber gratings periodically distributed along the fiber axis on the interface of the fiber core and the cladding. The annular fiber bragg grating inscribed by the method has circular symmetry performance, and the problem that mode coupling is influenced by random azimuth angles of a transverse mode field in a high-order mode influenced by non-uniform fiber refractive index distribution and external environment disturbance can be effectively avoided.

The invention relates to the technical field of laser communication, in particular to a free space optical communication system, device and method. According to the free space optical communication system provided by the invention, the space light beam is firstly coupled with the multimode optical fiber, and the characteristic that the diameter of a fiber core of the multimode optical fiber is larger is utilized, so that the coupling efficiency is improved, and the energy loss in the coupling process can be effectively reduced. Then, a mode demultiplexer is used, and a mode conversion technology is adopted to separate and convert multiple modes of light in the multimode optical fiber, so that the obtained LP01 mode is separated and converted into a fundamental mode of the single-mode optical fiber to serve as an output optical signal, and the problem that the modes of the multimode optical fiber and the single-mode optical fiber are not matched is solved through the mode conversion technology; and finally, the converted fundamental mode signal in the single-mode fiber is used for communication, so that a high-speed communication module can be better matched.

The invention discloses a mid-infrared and far-infrared heterogeneous integrated optical fiber combiner and a preparation method thereof, and belongs to the technical field of mid-infrared optical fiber devices.The combiner comprises six sulfur-based chalcogenide optical fibers with the working wave band being 3-5 microns and four Te-based chalcogenide optical fibers with the working wave band being 7-11 microns, the six sulfur-based chalcogenide optical fibers and the four Te-based chalcogenide optical fibers are mixed in a heterogeneous mode, and ten input optical fibers are closely arranged according to a regular triangle; beam combination transmission is formed by optimizing a low-temperature fused biconical taper process, the optical fiber is precisely welded with an output optical fiber with a slightly large core diameter, and finally the optical fiber is packaged. The beam combiner realizes broadband efficient laser transmission, has the characteristics of excellent beam quality, high synthesis efficiency, large total output power, compact structure and strong stability, and can be widely applied to the fields of optical fiber sensing, laser processing, national defense and the like.

The invention belongs to the technical field of ultrasound, and particularly relates to a photoacoustic transducer with a gradient acoustic impedance matching layer, a preparation method and a test method. The preparation method comprises the following steps: coating a photoacoustic transducer carrier with a mixed solution formed by polydimethylsiloxane and a carbon material, and heating and curing the photoacoustic transducer carrier coated with the mixed solution to obtain an initial photoacoustic transducer; infiltrating the initial photoacoustic transducer in a coupling agent solution, and coating the surface of the initial photoacoustic transducer infiltrated by the coupling agent with a matching solution to obtain the photoacoustic transducer with a gradient acoustic impedance matching layer; the matching liquid is a mixture of epoxy resin and metal or metal oxide. The opto-acoustic transducer prepared by the method has three matching layers with acoustic impedance gradients from low to high, and the matching layers can effectively improve the acoustic transmittance from an opto-acoustic material to a metal material, improve the ultrasonic propagation range of the opto-acoustic transducer and expand the application scene of the opto-acoustic transducer.

The invention discloses a multi-channel optical fiber array and waveguide coupling system and method and related equipment, and the method comprises the steps: scanning a waveguide coupling surface on a printed circuit board through employing a first group of infrared lasers, and obtaining first plane data; scanning the coupling surface of the multi-channel optical fiber array by adopting a second group of infrared lasers to obtain second plane data; determining a plane included angle according to the first plane data and the second plane data; based on the plane included angle, a coupling algorithm is adopted to generate an adjustment coupling strategy; and executing an adjustment coupling strategy, and performing coupling adjustment on the multi-channel optical fiber array and the waveguide. Two to-be-coupled planes are scanned through infrared laser, plane data are obtained, and the plane angle is calculated, so that the precision of the plane angle is improved, and the coupling efficiency is improved.

The optical module provided by the present disclosure comprises a circuit board, a base, a first light emitting component, a second light emitting component, a first light receiving component and a second light receiving component. The circuit board has a first notch part and a second notch part on the surface, and the base is embedded in the first notch part and the second notch part, so as to fix the base on the circuit board. The first light emitting component and the second light emitting component are located on the top surface of the base. The first light emitting component and the second light emitting component are respectively located in different notch parts, so that the wiring space of the circuit board between the first notch part and the second notch part can be used to increase the wiring area. The top surface of the base is used to carry the first light emitting component and the second light emitting component, and the top surface of the base faces the upper surface of the circuit board. The first light receiving component and the second light receiving component are arranged on the lower surface of the circuit board. The three-dimensional deployment and integrated deployment are realized, which is more conducive to wiring and reducing the occupation of the circuit board space, so as to realize multi-channel light emitting and light receiving.

The invention relates to the technical field of optical devices, and discloses a waveguide structure and a preparation method thereof, and an interlayer coupling device and a preparation method thereof. The preparation method of the waveguide structure comprises the following steps: forming a first lower cladding on a substrate layer; the first lower cladding layer forms a first groove comprising a first strip-shaped groove and a first tapered groove, and the section width of the first tapered groove is gradually reduced and gradually approaches to a preset width; a second lower cladding layer with a second groove is conformally formed on the first lower cladding layer, the second groove extends into the first groove and comprises a second strip-shaped groove and a second tapered groove, and the section width of the second tapered groove is gradually reduced and gradually approaches zero; and forming a waveguide core conformal with the second groove in the second groove. According to the interlayer coupling device formed by the preparation method of the waveguide structure, the coupling efficiency and the integration degree can be improved, the transmission loss is reduced, and a high-resolution photoetching process is not needed.

This invention discloses a method for measuring the grounding resistance of transmission towers based on multi-circuit high-frequency synchronous excitation, belonging to the field of power equipment testing and grounding resistance measurement technology. The method is implemented using a multi-circuit high-frequency signal excitation transmission device. First, a multi-circuit measurement calibration parameter library is established, a non-contact coupling unit is installed and the measurement parameters are initialized, then multiple synchronous high-frequency excitation signals are generated, amplified and dynamically impedance matched, and then non-contactly coupled to the grounding down conductor. Subsequently, multiple feedback signals are synchronously acquired and signal characteristics are extracted. Based on the feedback signals, multi-circuit synchronous closed-loop calibration is performed, the grounding impedance and grounding resistance measurements of each circuit are calculated, and anomalies are eliminated and weighted fusion is performed on the multiple measurement values ​​to obtain the final grounding resistance value. This invention eliminates the need to split the grounding down conductor, improving measurement efficiency, synchronization stability, and anti-interference capability.

The utility model discloses a kind of optical receiving assembly and optical module, the optical receiving assembly includes: PCB board, receiving end FA, lens array, PD array and receiving end FA gasket;Wherein, receiving end FA gasket is set on PCB board, and receiving end FA is set on receiving end FA gasket;The light outlet end of receiving end FA is equipped with reflection bevel, and lens array is set in reflection bevel downside;Signal light received by receiving end FA is reflected to lens array by reflection bevel, and enters PD array by lens array.The optical receiving assembly of the utility model adds receiving end FA gasket, receiving end FA is elevated by receiving end FA gasket, can promote the operation space when coupling, effectively reduce the damage risk of element such as receiving end FA and PD array in coupling process;In addition, the light outlet end of receiving end FA is equipped with reflection bevel, and lens array is set in reflection bevel downside, can be received signal light reflection to lens array and shape, make signal light converge on the photosensitive surface of PD array, promote coupling efficiency.

The invention provides a compact low-loss grating coupler with a bottom reflector, which sequentially comprises a silicon substrate layer, a distributed Bragg reflector, a buried oxide layer, a top silicon layer and a top cladding from bottom to top, and is characterized in that the distributed Bragg reflector is formed by laminating silicon and silicon dioxide; the top silicon layer is composed of a focusing type grating waveguide structure and a strip-shaped waveguide structure connected with the focusing type grating waveguide structure, the focusing type grating waveguide structure is composed of a shallow etching area and a full-height waveguide, optimization design is conducted by evaluating the influence rule of physical parameters, and finally efficient transmission of optical signals in an integrated photoelectric system can be achieved. According to the invention, the substrate loss is reduced, and the efficiency of the grating coupler is improved.

The invention provides an optical module which comprises an optical chip, an optical fiber and a waveguide coupler in coupling connection with the optical fiber, the waveguide coupler comprises a substrate, a first cladding and a second cladding which are arranged in the epitaxial growth direction, the refractive index of the substrate is larger than that of the second cladding, and the refractive index of the second cladding is larger than that of the first cladding; a first coupling waveguide, a second coupling waveguide and at least one transition waveguide located between the first coupling waveguide and the second coupling waveguide are arranged in the second cladding, the first coupling waveguide is in coupling connection with the optical fiber, and the gap between the first coupling waveguide and the transition waveguide is larger than that between the second coupling waveguide and the transition waveguide. The coincidence length between the first coupling waveguide and the transition waveguide is larger than the coincidence length between the second coupling waveguide and the transition waveguide, and an optical signal transmitted by the first coupling waveguide is coupled to the optical chip through at least one transition waveguide and the second coupling waveguide. According to the invention, the cladding with a low refractive index is additionally arranged between the coupling waveguide and the substrate, so that the leakage loss of the substrate is reduced.

The application discloses a chip coupling method and system, comprising calculating an initial position for optical coupling according to a light emitting point position and a center position; after controlling the lens to move to the initial position, searching for an optical signal according to a preset scanning track; after finding the optical signal, entering a dry coupling stage, performing optimization alignment to determine a preliminary maximum optical power; at an alignment position, dispensing glue and entering a wet coupling stage, performing fine coupling scanning to find a final maximum optical power, and performing a second specification inspection; on the basis of passing the second specification inspection, curing the glue to fix the lens, and then performing a final specification inspection. The application can automatically complete identification and positioning of the chip and the lens, positioning and searching of the optical signal, dry and wet coupling, and final curing inspection, does not need manual intervention, can adaptively adjust parameters and specification inspection in the coupling process, can cope with various complex situations, and has high stability.

The application provides a triarylamine derivative and an organic electroluminescent device thereof, and particularly relates to the technical field of organic electroluminescence. In order to solve the problem of low device performance caused by the covering layer material in the prior art, the application provides a triarylamine derivative and an organic electroluminescent device thereof, which is applied to an organic electroluminescent device as a covering layer material to effectively improve the luminous efficiency and service life of the device. Since the triarylamine derivative has strong rigidity, a suitable glass transition temperature (Tg), good thermal stability and a high refractive index in the molecule, the coupling efficiency of light in the device is increased, the light extraction efficiency is improved, the generation of Joule heat is reduced, and the service performance of the device is improved.

The application discloses a coupling-in design method of a diffraction optical waveguide, comprising: obtaining a pupil size of an optical machine, a first field of view range in a first direction, a second field of view range in a second direction, and an assembly error threshold of an optical machine working distance; the first direction is orthogonal to the second direction; a circular region formed with the pupil size as a diameter is a basic region of a coupling-in region; according to the first field of view range, the second field of view range and the assembly error threshold, a corresponding offset distance in the positive and negative directions of the first direction and the positive and negative directions of the second direction of the basic region is determined; the basic region is offset by the corresponding offset distance in the corresponding direction to obtain auxiliary regions in each direction, thereby obtaining four auxiliary regions of the coupling-in region; a region formed with the outer contour of the four auxiliary regions is an actual region of the coupling-in region. The technical scheme provided by the application can improve the reduction of the coupling-in efficiency caused by the alignment error.

The invention relates to the technical field of optical communication, in particular to an optical interconnection device based on a diffraction grating. The device comprises a plurality of input ports, a diffraction grating coupler and a plurality of output ports which are arranged in sequence, a plurality of input ports for receiving a plurality of optical signals of different wavelengths; and the diffraction grating coupler is used for improving the coupling efficiency of a target optical signal in the plurality of optical signals based on temperature adjustment, and outputting the target optical signal to a target output port of the plurality of output ports. In the invention, the diffraction grating coupler is dynamically adjusted through temperature control to change the transmission direction and the coupling efficiency of the transmission signal, and optical signal routing from any input to any output is realized. The limitation of a traditional optical interconnection fixed optical path is broken through, and greater flexibility is provided for a complex communication network. And meanwhile, the diffraction grating coupler is regulated and controlled by temperature to realize optical path switching, so that the problems of high power consumption and low precision in mechanical regulation are avoided.

The present invention relates to a bioactive conjugate, a preparation method therefor, and use thereof. In particular, the present invention relates to a novel type of bioactive molecular conjugates obtained by improving the coupling of a drug to a targeted moiety in ADC or SMDC, a preparation method therefor, and use thereof in the preparation of drugs for treating diseases associated with abnormal cellular activity.

The embodiment of the present application discloses an XY coupling table, which comprises a bottom plate, a top plate, an X-axis driving mechanism and a Y-axis driving mechanism, the X-axis driving mechanism comprises an XY-axis guide rail assembly, an X-axis mover and an X-axis coil, the Y-axis driving mechanism comprises a YX-axis guide rail assembly, a Y-axis mover and a Y-axis coil, the XY-axis guide rail assembly comprises a first X-axis guide rail assembly and a first Y-axis guide rail assembly, the X-axis mover of the X-axis driving mechanism is connected with the first X-axis guide rail assembly; the YX-axis guide rail assembly comprises a second Y-axis guide rail assembly and a second X-axis guide rail assembly, the Y-axis mover of the Y-axis driving mechanism is connected with the second Y-axis guide rail assembly; and the top plate is connected with the first Y-axis guide rail assembly and the second X-axis guide rail assembly. The present application can significantly reduce the assembly height and the overall volume of the coupling table, remove the drag chain cable, reduce the motion friction and external interference, and greatly improve the alignment accuracy and the fiber coupling efficiency of the coupling table.

To improve coupling efficiency when coupling wavelength-coupled light beams with an optical transmission fiber. A wavelength beam coupling device couples a plurality of laser beams emitted from a laser light source and having mutually different peak wavelengths, and the central axes of the light beams emitted in a first direction are arranged in a second direction intersecting the first direction. The wavelength beam coupling device includes: first and second diffraction gratings, the first diffraction grating being disposed at a position receiving the plurality of laser beams and causing the plurality of laser beams to be diffracted in different directions according to wavelengths to be incident on the second diffraction grating, the second diffraction grating further diffracting the plurality of laser beams diffracted by the first diffraction grating to form wavelength-coupled light beams, and the wavelength-coupled light beams being emitted in the first direction; and an optical coupling unit coupling the wavelength-coupled light beams with the optical transmission fiber and configured to be movable in the second direction.

The invention discloses a preparation method of functionalized magnetic beads with surface-coupled photoaffinity chains. The method comprises the following steps: activating carboxyl magnetic beads, incubating the activated carboxyl magnetic beads with photoaffinity linking chains to obtain carboxyl magnetic beads loaded with the photoaffinity linking chains, and blocking the surfaces of the carboxyl magnetic beads loaded with the photoaffinity linking chains with a blocking liquid to obtain the functionalized carboxyl magnetic beads. The photoaffinity linking chains use trifluoromethylphenyldiaziridine as photosensitive groups and have good chemical stability. Carbene intermediates generated after photolysis can be irreversibly combined with most small molecules and are relatively stable. A large number of different types of small molecules can be directly covalently docked to the surface of the functionalized carboxyl magnetic beads without the need for structure-activity relationship (QSAR) research data and corresponding chemical modifications. The small molecules can be used to fix a large number of small molecules with different structures in a complex system. The coupling of the small molecules with the functionalized magnetic beads can be achieved by only ultraviolet irradiation in the whole process. The method is fast and efficient, simple to operate, and has wider applicability.

This application relates to the field of transformer technology, specifically to a chip transformer and power module, including a ceramic substrate; the ceramic substrate includes a plurality of stacked ceramic diaphragms; conductive posts are provided on the ceramic diaphragms, the conductive posts extending perpendicularly to the ceramic diaphragms; helical coils are provided on the surface of the ceramic diaphragms, and the ends of adjacent helical coils are connected through the conductive posts; at least two helical coils are connected through the conductive posts to form a coil winding. The embodiments of this application can significantly increase the number of turns in the winding by using planar helical coils, effectively improving the inductance value and enhancing the coupling coefficient between the primary and secondary coils while achieving a miniaturized integrated design.

The invention provides a design method of a LiNbO3 microcavity with a pulley type coupler structure, and aims to generate a broadband dissipation Kerr soliton micro comb and effectively inhibit stimulated Raman scattering. According to the invention, the dispersion engineering design and the dissipation engineering design are combined, the abnormal group velocity dispersion characteristic in the microcavity is optimized, and the coupling efficiency is improved. Through accurate control of geometric parameters, abnormal GVD, phase matching conditions and coupling strength, it is guaranteed that the SRS effect is reduced to the maximum extent in the microcavity with the high-quality factor Q value, and stable generation of DKS is promoted. The output efficiency, the spectral width and the stability of the frequency comb can be effectively improved, and the frequency comb is widely applied to the fields of precision spectroscopy, optical communication, millimeter wave and microwave generation and the like.