154 results about "Grating coupling" patented technology

The invention relates to the technical field of light emitting devices, and discloses a control method for a silicon light integrated multi-wavelength light emitting device, and the method comprises the steps: carrying out the grating coupling processing and polarization state separation processing of a plurality of wavelength channels of the silicon light integrated multi-wavelength light emitting device, and obtaining an initial optical characteristic data set; performing temperature response characteristic analysis to obtain a temperature field characteristic parameter set; performing spectral characteristic analysis on the plurality of wavelength channels to obtain wavelength channel characteristic vectors; a wavelength drift coefficient matrix and a refractive index change coefficient matrix are calculated, and a multi-wavelength linkage control data model is generated; according to the method, a hierarchical control structure comprising a quick response layer, a temperature compensation layer and a polarization optimization layer is constructed, multi-wavelength cooperative control operation is executed, and a steady-state control parameter set is output, so that the wavelength stability control precision and the temperature control precision are improved, the adaptive capacity to disturbance of different time scales is enhanced, and the stability of the system is improved. And stable operation under complex working conditions is ensured.

The invention relates to the technical field of semiconductor chip packaging, in particular to a photoelectric co-packaging optical coupling passive alignment packaging structure and method. According to the invention, high-precision automatic alignment of the grating coupler in the optical chip and the through hole of the adapter plate is realized by using the solder ball tension effect in the flip reflow soldering process of the optical chip, and a stable optical limiting structure is formed. The passive coupling of the optical elements (such as bare optical fibers, optical fiber arrays, reflectors and the like) and the grating coupler is realized by placing the optical elements with matched sizes in the via holes of the adapter plate and completing refractive index matching and structure fixing by using curing glue. The whole process does not need additional active alignment equipment, is the same as a traditional chip packaging process, has the advantages of being simple in process, low in cost and high in packaging efficiency, and is a key packaging technology of a photoelectric co-packaging system in the future.

The embodiment of the utility model provides a test chip for testing the optical performance of a wafer-level optical waveguide and a packaging structure thereof, and the test chip comprises a light inlet end face which enables test light to enter the test chip in a coupling manner; the waveguide is used for transmitting the test light to the transmitting end grating; the transmitting end grating is used for coupling the test light rays into the receiving end grating of the wafer to be tested, coupling the test light rays into a waveguide pattern area to be tested of the wafer to be tested through the receiving end grating of the wafer to be tested and then conducting the test light rays to the transmitting end grating of the wafer to be tested; the light passing through the to-be-tested waveguide pattern area is coupled by the transmitting end grating of the to-be-tested wafer and is incident to the receiving end grating of the test chip; and the receiving end grating couples the received light into the waveguide of the test chip and then emits the light through the end face of the light outlet, and the emitted light is used for determining optical performance parameters. The utility model also provides a packaging structure for realizing the test function of the test chip. According to the scheme, the optical performance test of the wafer-level optical waveguide is realized.

The invention provides a high-density photoelectric common connection pinboard based on a low-loss silicon nitride grating coupler. The invention aims to overcome the difficulty that the existing photoelectric heterogeneous chip is difficult to integrate, stack and package, and realizes high-density interconnection between the chip and the interposer by using a grating coupling structure and a silicon through hole technology, thereby realizing high-integration low-loss packaging of the heterogeneous chip on the interposer. According to the invention, high-efficiency optical interconnection between the heterogeneous chip and the photoelectric co-connection intermediate layer is realized through the high-efficiency grating coupler, and high-density electrical interconnection between the chip and the photoelectric co-connection intermediate layer is realized through the TSV technology and the RDL technology. Meanwhile, the optical interconnection efficiency between the interposer and the chip is improved by utilizing the electrode patterning advantage of the RDL technology, and the self-alignment between the chip and the interposer is realized. The method has extremely high compatibility to the packaging scene of the existing photoelectric heterogeneous chip, so that the method has great significance in improving the integration density and reducing the interconnection loss of a photoelectric heterogeneous integrated system and promoting the practicability of the photoelectric heterogeneous integrated system.

The invention relates to the technical field of AR display, in particular to a binocular waveguide, a design method of the binocular waveguide and AR glasses, the binocular waveguide comprises a waveguide substrate, and two exit pupil areas are symmetrically distributed on the waveguide substrate; and a coupling-in grating, a first diffraction element, a second diffraction element, a first coupling-out grating and a second coupling-out grating, the coupling-in grating is arranged on the waveguide substrate, and the first diffraction element and the first coupling-out grating are respectively arranged in one exit pupil area. The second diffraction element and the second coupling-out grating are respectively arranged in the other exit pupil area, and incident light can be respectively transmitted to the first diffraction element and the second diffraction element after being coupled into the waveguide substrate through the coupling-in grating. The application has the effect of improving the wearing experience of the AR equipment.

The invention discloses a stepped three-band grating coupler and a reverse optimization method thereof, and belongs to the technical field of photonic devices and integration, and the reverse optimization method comprises the steps: determining a design target of the grating coupler, and defining an initial structure; defining optimization parameters including grating height and grating width according to the grating number; defining an optimization quality factor according to a design target of the grating coupler, and dynamically updating a weight coefficient of the quality factor; optimizing the width and height distribution of all gratings by using an improved direct binary search algorithm; and iterative optimization is continuously carried out until a design target is achieved, and width distribution corresponding to gratings with different heights in the optimized stepped grating structure is obtained. The problem that traditional grating diffraction has inherent wavelength dependence is effectively solved, and efficient coupling of three optical communication wavebands is achieved.

The invention discloses a grating coupler, a diffraction optical waveguide with the grating coupler and a display device with the grating coupler. The grating coupler comprises a grating body and an optical film layer, at least part of a grating line of the grating body comprises a first side wall and a second side wall, and the first side wall and the second side wall respectively form an included angle theta 1 and an included angle theta 2 and theta 1lt relative to a plane where the grating body is located; theta 2; the optical film layer comprises a first film layer covering the grating body and a second film layer covering the first film layer; the grating body has a grating refractive index n0, the first film layer has a refractive index n1, and the second film layer has refractive indexes n2 and n1lt; n01t; n01t; n1, n2; the parts, located on the first side wall and the second side wall, of the first film layer have the average thickness d1, d2 and d1gt respectively; d2; and the portions of the second film layer located on the first and second sidewalls have an average thickness d3 and d4, d3gt, respectively; and d4. By providing the optical film layer with specific asymmetry, the coupling efficiency is remarkably improved, and meanwhile, an additional means is provided for uniformity adjustment.

According to the photoelectric system packaging structure and the preparation method thereof provided by the invention, in the packaging process, the first through hole is formed in the back surface of the image sensor chip, and the metal wiring layer and the solder mask layer are sequentially formed in the first through hole and the back surface of the image sensor chip, so that an electric signal of the image sensor chip is led to the back surface from the front surface; in this way, the distance between the image sensor chip and the grating coupling-out surface of the optical chip can be controlled within 10 [mu] m, so that the optical signal of the optical chip can be received in a close-range fit manner; in addition, electric signals of the image sensor chip can be led to the substrate through the metal wiring layer on the back face of the image sensor chip in the formed solder resist window, the signal transmission difficulty between the optical chip and the image sensor chip and between the optical chip and other devices is effectively reduced, in addition, the photoelectric system packaging structure is simple, the manufacturing cost is low, and the photoelectric system packaging structure is suitable for large-scale popularization and application. And the yield and the service life of a finished product of the photoelectric system packaging structure can be improved.

The invention relates to a method, equipment and medium for optimizing a vertical super-structure grating coupler, and the method comprises the steps: initializing the dielectric constant distribution in a two-dimensional design region, and stretching the dielectric constant distribution into the etching layer height; performing continuous topological optimization based on the initialized dielectric constant distribution; in the continuous topological optimization process, smoothing the dielectric constant distribution according to a preset filtering radius; when the change of the target function is within a predefined threshold range, introducing random disturbance; converting the dielectric constant after continuous topological optimization into two discrete values; according to the discrete dielectric constant distribution obtained through optimization, the geometric structure of the vertical super-structure grating coupler is designed; and carrying out performance simulation on the designed vertical super-structure grating coupler, and evaluating the coupling efficiency and bandwidth parameters of the vertical super-structure grating coupler. The invention provides an excellent input / output interface solution for the realization of a large-scale ultra-compact super-structure photon integrated circuit.

The invention relates to the technical field of optical modules, and discloses a grating coupling optical engine packaging structure, which comprises a substrate, an electric chip, a silicon optical chip, an optical fiber socket, an optical fiber array and a laser, and is characterized in that the electric chip is arranged on the upper side of the substrate, the silicon optical chip is arranged on the upper side of the electric chip, and the silicon optical chip and the electric chip are electrically connected with the substrate; the optical fiber socket is fixed on the upper side of the silicon optical chip, the optical fiber socket is provided with a positioning groove of which the opening direction is vertical to the silicon optical chip, the optical fiber array is inserted into the positioning groove in a guiding manner, and the optical fiber socket is also provided with a locking piece for fixing the optical fiber array; a waveguide group and a grating array are arranged in the silicon optical chip, the waveguide group and the grating array are conducted in the direction parallel to the surface of the silicon optical chip, and a lens and a grating array are further arranged in the optical fiber socket, and the lens and the optical fiber array are conducted in the direction perpendicular to the surface of the silicon optical chip; the lasers are arranged on the substrate and electrically connected with the substrate, the lasers and the silicon optical chips are arranged at intervals, and input optical fibers are connected between the lasers and the silicon optical chips.

The invention provides an on-chip integrated laser light source and an optical coupling integration method thereof.The on-chip integrated laser light source comprises a silicon optical substrate and a light source chip assembly integrated on the silicon optical substrate, and the silicon optical substrate comprises an optical signal transmission waveguide; the light source chip assembly comprises a surface-emitting distributed feedback laser chip so as to generate laser beams emitted in the direction perpendicular to the surface of the chip. The on-chip integrated laser light source further comprises a grating coupling structure arranged between the surface emission distributed feedback laser chip and the optical signal transmission waveguide. The light-emitting surface of the surface-emitting distributed feedback laser chip is arranged towards the silicon light substrate, and a laser beam generated by the surface-emitting distributed feedback laser chip is directly projected and coupled into the light signal transmission waveguide through the grating coupling structure; the surface-emitting distributed feedback laser chip is fixedly combined on the silicon optical substrate through a flip chip technology, so that the high-precision end face alignment requirement of the heterogeneous integrated waveguide is converted into high-efficiency grating coupling based on a surface light emitting mode. In this way, harsh end face coupling is converted into efficient grating coupling.

A waveguide grating coupler (WGC) for coupling light transmitted between an integrated optical waveguide and an optical fiber and a method for making the waveguide grating coupler are provided. The waveguide grating coupler working for dual polarization includes a grating layer having a first plurality of etched holes and an overlay layer disposed on the grating layer, having a second plurality of etched holes. At least one of the second plurality of etched holes partially overlaps a corresponding etched hole of the first plurality of etched holes. The overlay layer is configured to create a shift of every period of grating to the grating layer to achieve upwards constructive interference and downwards destructive interference of light such that coupling efficiencies of both vertical grating coupling and angle coupled grating coupling are enhanced for a single mode optical fiber, a few mode optical fiber, or a multi-mode optical fiber.

A pupil-replicating waveguide usable in a VR display may have a slab of transparent material, an input grating coupler supported by the slab at the center of the slab, with output gratings supported by the slab and surrounding the input grating coupler. The input grating coupler couples image light into the slab, which propagates in the slab by total internal reflections. The out-coupling grating or gratings spread the image light all around the input grating, providing a wide beam of image light illuminating the eyebox of the VR display.

The invention provides a two-dimensional grating coupler, and relates to the field of photoelectric integration and the technical field of optical communication. The two-dimensional grating coupler comprises a silicon waveguide layer used for receiving optical signals, respectively coupling the optical signals according to a first optical field coupling coefficient and a second optical field coupling coefficient to obtain a first coupled optical signal and a second coupled optical signal, and respectively outputting the first coupled optical signal and the second coupled optical signal along a first direction and a second direction; the first organic electro-optical material layer is arranged above the silicon waveguide layer, and a first electrode pair is arranged in the first organic electro-optical material layer; and the second organic electro-optical material layer is arranged below the silicon waveguide layer, and a second electrode pair is arranged in the second organic electro-optical material layer. According to the embodiment of the invention, the organic electro-optical materials are respectively bonded on the upper layer and the lower layer of the silicon waveguide layer, and the electrode pairs which can be independently driven are arranged in all directions, so that the real-time adjustment of the optical field coupling coefficient is realized, and the coupling efficiency is remarkably improved.

The present application discloses a method for heterogeneous hybrid integration of planar optical waveguide devices, relating to the field of integrated silicon photonics technology. The method is used for heterogeneous hybrid integration of PLC chips with greatly different waveguide characteristic dimensions in different material systems. The method first grinds the light-emitting end of the front-end chip at a large angle to form a reflection angle for the waveguide. The device surface of the front-end chip is then arranged relative to the device surface of the back-end chip so that the light emitted by the front-end chip can be reflected to the device surface of the back-end chip and aligned with the grating coupler on the device surface of the back-end chip. Finally, the aligned two chips are packaged to achieve optical interconnection between the two chips. When performing heterogeneous integration, the technical solution of the present application can directly align the light emitted by the front-end chip to the grating coupler of the back-end chip without considering the height difference between the two chips. This solves the problem of the existing end-face coupling technology being sensitive to the chip height difference and difficult coupling mode matching, and effectively improves the integration level of the discrete device optical network system.

The invention relates to the technical field of gratings, and discloses a grating unit, a grating array and a grating coupler.The grating unit comprises a waveguide layer, the waveguide layer is provided with a first groove body and a second groove body, the cross section of the first groove body and the cross section of the second groove body are quadrilateral, and the depth of the first groove body is larger than that of the second groove body; the distance between the first groove body and the second groove body is larger than the negative value of the preset distance. One-way radiation without a bottom reflector is realized in the short-band grating coupler, downward radiation is suppressed, and the grating unit has a relatively high quality factor, so that the upper radiation efficiency loss in a mode field matching process is greatly reduced.

The application relates to the technical field of waveguide display, in particular to a single-light-machine binocular diffractive light waveguide and display equipment, which comprises a waveguide substrate, an in-coupling grating, an out-coupling grating and a turning grating. The waveguide substrate is symmetrically provided with a left exit pupil area and a right exit pupil area; the in-coupling grating is arranged in the left exit pupil area; the out-coupling grating is arranged in at least two groups, one group of the out-coupling gratings is arranged in the left exit pupil area, and the other group of the out-coupling gratings is arranged in the right exit pupil area; the turning grating is arranged in the right exit pupil area and is arranged above the out-coupling grating; after incident light is coupled into the waveguide substrate through the in-coupling grating, the incident light can be transmitted to the turning grating and the out-coupling grating in the left exit pupil area. The application has the effect of improving the wearing experience of the display equipment.

The invention provides a grating coupler and a design method thereof, relates to the technical field of optics, and aims to realize dynamic regulation and control of the grating coupler. The grating coupler comprises a substrate, a waveguide layer and a phase change material metasurface layer. The waveguide layer is disposed on the substrate. The phase change material metasurface layer is arranged on the side, away from the substrate, of the waveguide layer. Wherein the phase-change material metasurface layer comprises a plurality of protruding structures, so that filtering coupling and switching of the grating coupler on a target working wavelength are achieved.

The application discloses a grating coupler, an optical waveguide device and a display device. The grating coupler couples input light incident thereon into a waveguide substrate and makes it propagate in the waveguide by total reflection, and comprises a grating body and an optical coating. The grating body comprises a plurality of unit structures arranged according to a predetermined grating period, and the optical coating covers the grating body and comprises one or more film layers. The grating coupler has one or more grating vectors, and the average thickness of at least one film layer in the optical coating gradually decreases in the direction of the at least one grating vector within a single grating period. By adopting the optical film layer with the thickness gradually decreasing in the coupling-in direction / grating vector direction, the grating coupler has a higher positive first-order diffraction efficiency in the upstream area of the coupling-in direction / grating vector direction and a lower coupling-out loss in the downstream area, so that the overall coupling-in efficiency of the grating coupler is maximized.

The invention relates to the technical field of optical communication, in particular to an optical interconnection device based on a diffraction grating. The device comprises a plurality of input ports, a diffraction grating coupler and a plurality of output ports which are arranged in sequence, a plurality of input ports for receiving a plurality of optical signals of different wavelengths; and the diffraction grating coupler is used for improving the coupling efficiency of a target optical signal in the plurality of optical signals based on temperature adjustment, and outputting the target optical signal to a target output port of the plurality of output ports. In the invention, the diffraction grating coupler is dynamically adjusted through temperature control to change the transmission direction and the coupling efficiency of the transmission signal, and optical signal routing from any input to any output is realized. The limitation of a traditional optical interconnection fixed optical path is broken through, and greater flexibility is provided for a complex communication network. And meanwhile, the diffraction grating coupler is regulated and controlled by temperature to realize optical path switching, so that the problems of high power consumption and low precision in mechanical regulation are avoided.

The application relates to the technical field of grating coupler design, and discloses a design method and system of a grating coupler, computer equipment and a storage medium, which comprise the following steps: a topological prediction model is constructed based on a deep neural network, and the topological prediction model is trained by using a preset method; the response spectrum of the grating coupler is input into the trained topological prediction model, so that the structure parameters of the functional area of the grating coupler are obtained; and the topological structure of the functional area of the grating coupler is determined according to the structure parameters, so that the design of the grating coupler is realized. Through the approximate processing of the training data set, the simple network structure is combined with the complex nonlinear algorithm, the model power requirement is reduced, the prediction efficiency and effect of the model are improved, the prediction accuracy of the model is further improved through the training method combining the forward direction and the reverse direction, so that the design of the grating coupler with high coupling efficiency at any angle is realized, and the device performance of the grating coupler is ensured.

This application discloses a silicon nitride grating coupler and a silicon-based optical chip. The silicon nitride grating coupler exhibits high coupling efficiency when facing incident light of different wavelengths and modes. Specifically, it includes: a substrate; a first grating layer located on one side of the substrate; a second grating layer located on the side of the first grating layer opposite to the substrate, the second grating layer and the first grating layer being staggered, the duty cycle of the second grating layer being greater than that of the first grating layer, the second grating layer being used to change the scattering path of the incident light and guide the incident light to couple into the first grating layer; a third grating layer located on the side of the first grating layer opposite to the substrate, the third grating layer and the first grating layer also being staggered, the duty cycle of the third grating layer being less than that of the first grating layer, the third grating layer being used to reflect the diffracted light leaking from the first grating layer and guide the reflected light back to the coupling region of the first grating layer; and a waveguide layer connected to the first grating layer along the grating period arrangement direction of the first grating layer.

The embodiment of the invention discloses a photonic integrated circuit chip and a manufacturing method of the photonic integrated circuit chip. The photonic integrated circuit chip comprises a grating coupler. The method comprises the following steps: forming the grating coupler; forming a first dielectric layer on the grating coupler, wherein the first dielectric layer covers the grating coupler; forming an etching stop layer on the first dielectric layer; a part of the etching stop layer is removed to form a first opening, the first opening is located above the grating coupler, and the grating coupler is exposed through the first opening; and forming a plurality of second openings in the etching stop layer to relieve uneven stress distribution. According to the embodiment of the invention, the second opening is formed in the etching stop layer, so that the stress of the etching stop layer is relieved, and the optical coupling performance of the grating coupler in the photonic integrated circuit chip is prevented from being affected.

A method of forming a grating coupler includes: providing a design layout of the grating coupler, wherein the design layout includes: a taper section, comprising a pair of tapers; and a grating section coupled to the taper section, a grating section coupled to the taper section, the grating section including an array of gratings, wherein the gratings include gradually changing shapes, from a top-view perspective, from a central grating having a first non-convex octagonal shape at a center of the grating section to an edge grating having a second non-convex octagonal shape or a convex octagonal shape near an edge of the grating section, wherein the second non-convex octagonal shape is different from the first non-convex octagonal shape. The method further includes manufacturing the grating coupler using the design layout.

The embodiment of the invention provides a distributed feedback laser, relates to the technical field of lasers, and is used for solving the problem that the performance is affected by insertion of a phase shift grating. The laser comprises a ridge waveguide and feedback gratings arranged on the two sides of the ridge waveguide, each feedback grating comprises a Bragg grating and a phase shift grating inserted into the Bragg grating, the Bragg grating comprises two connecting gratings located on the two sides of the phase shift grating respectively, and each connecting grating comprises a chirp grating and a uniform grating which are connected. The uniform grating is away from the phase shift grating relative to the chirp grating. The length of grating teeth in the chirp grating is a first length, and the duty ratio is a first duty ratio; the width of a part, corresponding to the chirp grating, of the ridge waveguide is a first waveguide width; in the process of approaching the uniform grating from the phase shift grating along the first direction, at least one of the first length, the first duty ratio and the first waveguide width is gradually changed to realize grating coupling coefficient chirp of the chirp grating. The laser can be applied to the field of optical communication.

The present application relates to the field of optical communication technology, and specifically relates to a design method, device and equipment of a grating coupler and a storage medium. The method comprises: obtaining initial parameters; determining the period of each grating unit according to the initial parameters and the relationship between the scattering angle and the period of the grating unit, and obtaining the initial structure of the grating coupler; under the initial structure, judging whether the scattering range of the grating coupler meets the target scattering range; when the scattering range of the grating coupler does not meet the target scattering range, adjusting the focal point coordinates or the groove array parameters, determining the new period of the grating unit, and repeating the process of adjusting the focal point coordinates or the groove array parameters and determining the period of the grating unit until the scattering range of the grating coupler meets the target scattering range. In the present application, the grating coupler with a specific scattering range is designed without introducing a lens, the good matching between the scattering range of the coupler and the divergence angle of the light source is realized, the coupling efficiency is improved, and the device packaging is not affected.

The application relates to the technical field of multi-plane light converters, and more particularly to an on-chip multi-plane light conversion device and an optimization design method thereof. A grating coupling unit, a multi-plane phase sheet and a mirror are integrated on the same glass substrate, three-dimensional monolithic integration of input coupling, light path folding and light field transformation functions is realized, precise mechanical alignment requirements among discrete components are completely eliminated, the integration degree is high, high-precision alignment is avoided, stability is improved, and the volume is reduced to a certain extent. The application realizes efficient conversion of a light field between an on-chip waveguide and free space through the grating coupling unit, and performs arbitrary unitary transformation in the free space by using an MPLC composed of the multi-plane phase sheet and the mirror, the two work cooperatively, the high mode capacity and low crosstalk advantages of the MPLC are combined with the on-chip integration advantages of the grating coupling unit, and high-performance and small-volume light field transformation can be realized.

The present invention belongs to the technical field of surface enhanced Raman spectroscopy detection, and specifically discloses a SERS substrate based on a grating-coupled MIM structure, a preparation method thereof, and an application thereof. In the MIM structure, an Ag layer is selected as a SERS active layer, which solves the problem of non-repeatable substrate preparation caused by the random generation of "hot spots" when Ag particles are used in traditional manufacturing schemes; an SU8 layer is selected as an insulating layer in the MIM structure, which solves the problem of low interference field intensity caused by the low refractive index of the SiO2 layer when a SiO2 layer is used in traditional manufacturing schemes; and the grating structure is manufactured by laser interference lithography technology and displacement Talbot lithography technology, which solves the problems of high cost and low efficiency caused by the use of technologies such as electron beam lithography and focused ion beam lithography.

The invention provides an optical path structure and electronic equipment, and relates to the technical field of optical signal communication. The optical path structure comprises an optical chip, a circuit base plate and a substrate. The circuit base plate is provided with a window area; the active surface of the optical chip is welded at the edge of the window area on the circuit bottom plate, and the optical chip is electrically connected with the circuit bottom plate; in the arrangement direction perpendicular to the plane of the circuit base plate, part of the optical waveguide on the end face of the optical chip is located in the projection area of the window area. Wherein the signal transmission direction of the optical chip is parallel to the plane of the circuit base plate; the target surface of the substrate is bonded and fixed on the bottom surface of the optical chip. According to the invention, the optical chip is inversely welded on the edge of the window area of the windowing on the circuit base plate, so that part of the optical waveguide can perform signal transmission in the window area in the plane direction of the circuit base plate, thereby reducing the space size required in the setting direction when the grating coupler is used for coupling, effectively improving the integration level of the device, and improving the reliability of the device. And the integration difficulty of the device is reduced.