231 results about "Grating coupling" patented technology

The invention relates to the technical field of light emitting devices, and discloses a control method for a silicon light integrated multi-wavelength light emitting device, and the method comprises the steps: carrying out the grating coupling processing and polarization state separation processing of a plurality of wavelength channels of the silicon light integrated multi-wavelength light emitting device, and obtaining an initial optical characteristic data set; performing temperature response characteristic analysis to obtain a temperature field characteristic parameter set; performing spectral characteristic analysis on the plurality of wavelength channels to obtain wavelength channel characteristic vectors; a wavelength drift coefficient matrix and a refractive index change coefficient matrix are calculated, and a multi-wavelength linkage control data model is generated; according to the method, a hierarchical control structure comprising a quick response layer, a temperature compensation layer and a polarization optimization layer is constructed, multi-wavelength cooperative control operation is executed, and a steady-state control parameter set is output, so that the wavelength stability control precision and the temperature control precision are improved, the adaptive capacity to disturbance of different time scales is enhanced, and the stability of the system is improved. And stable operation under complex working conditions is ensured.

The invention discloses an optical chip-optical fiber coupler based on a collimating grating penetrating through a substrate, which belongs to the technical field of photoelectric chips and comprises a substrate, an inverted optical chip is arranged on the substrate, and the optical chip comprises at least one optical device, an optical waveguide array for realizing input and output and a collimating grating array. The collimating grating array is provided with a gradually changing period and duty ratio, so that light output from the optical waveguide array is diffracted to the substrate through the collimating grating array and is propagated to the back surface of the optical chip as basically collimated light; an optical coupling element array is arranged at the position, corresponding to emergent light of the collimating grating array, of the back face of the optical chip to couple light to an optical fiber array. By the adoption of the structure, high-efficiency coupling of the optical chip and the optical fiber array is achieved, and compared with a common grating coupler and an edge coupler, the coupler has higher coupling efficiency and alignment tolerance, is easier to manufacture and can be widely applied to the fields of optical IO, photoelectric sealing (CPO) and the like of large-scale photoelectric integrated chips.

A method of forming a grating coupler includes: providing an initial design layout of the grating coupler, wherein the initial design layout includes: a taper section, comprising a pair of tapers; and a grating section coupled to the taper section, the grating section having an array of gratings, wherein the gratings includes gradually changing shapes, from a top-view perspective, from a first non-convex octagonal shape of a central grating, at a center of the grating section, of one of a second non-convex octagonal shape, a convex octagonal shape, and a quadrilateral shape, to an edge grating near an edge of the grating section. The method further includes: converting the initial design layout into a revised design layout through an optical proximity correction operation; and manufacturing the grating coupler using the revised design layout.

The invention relates to the technical field of semiconductor chip packaging, in particular to a photoelectric co-packaging optical coupling passive alignment packaging structure and method. According to the invention, high-precision automatic alignment of the grating coupler in the optical chip and the through hole of the adapter plate is realized by using the solder ball tension effect in the flip reflow soldering process of the optical chip, and a stable optical limiting structure is formed. The passive coupling of the optical elements (such as bare optical fibers, optical fiber arrays, reflectors and the like) and the grating coupler is realized by placing the optical elements with matched sizes in the via holes of the adapter plate and completing refractive index matching and structure fixing by using curing glue. The whole process does not need additional active alignment equipment, is the same as a traditional chip packaging process, has the advantages of being simple in process, low in cost and high in packaging efficiency, and is a key packaging technology of a photoelectric co-packaging system in the future.

A vertical grating coupler is disclosed. The grating coupler includes a first waveguide having a first grating, a second waveguide having a second grating, and a dielectric layer positioned between the first waveguide and the second waveguide. The first grating includes a plurality of first grating ridges separated by a plurality first grating gaps, and the second grating includes a plurality of second grating ridges separated by a plurality second grating gaps. The first grating, the second grating, and the dielectric layer are located in a vertical overlap region between the first waveguide and the second waveguide. The first grating and the second grating have different grating periods, and each of the plurality of first grating gaps and second grating gaps are filled with the dielectric layer.

The embodiment of the utility model provides a test chip for testing the optical performance of a wafer-level optical waveguide and a packaging structure thereof, and the test chip comprises a light inlet end face which enables test light to enter the test chip in a coupling manner; the waveguide is used for transmitting the test light to the transmitting end grating; the transmitting end grating is used for coupling the test light rays into the receiving end grating of the wafer to be tested, coupling the test light rays into a waveguide pattern area to be tested of the wafer to be tested through the receiving end grating of the wafer to be tested and then conducting the test light rays to the transmitting end grating of the wafer to be tested; the light passing through the to-be-tested waveguide pattern area is coupled by the transmitting end grating of the to-be-tested wafer and is incident to the receiving end grating of the test chip; and the receiving end grating couples the received light into the waveguide of the test chip and then emits the light through the end face of the light outlet, and the emitted light is used for determining optical performance parameters. The utility model also provides a packaging structure for realizing the test function of the test chip. According to the scheme, the optical performance test of the wafer-level optical waveguide is realized.

The present disclosure describes a platform assembly for a monopole. The platform assembly includes a plurality of T-arm assemblies. Each T-arm assembly has a platform frame including a pair of support members, a pair of brace members coupled to and extending between the pair of support members, at least two grating edge members coupled to the support members, and a pair of gratings, each grating coupled to a grating edge member and one of the brace members such that the pair of gratings are separated to define an opening therebetween. Each T-arm assembly further includes an adjustable arm member configured to move relative to the support members and a pair of locking mechanisms, each locking mechanism coupled to a respective support member and configured to secure the adjustable arm member in a desired position in relation to the platform frame. Other platform assemblies and related antenna assemblies are described herein.

The invention provides a high-density photoelectric common connection pinboard based on a low-loss silicon nitride grating coupler. The invention aims to overcome the difficulty that the existing photoelectric heterogeneous chip is difficult to integrate, stack and package, and realizes high-density interconnection between the chip and the interposer by using a grating coupling structure and a silicon through hole technology, thereby realizing high-integration low-loss packaging of the heterogeneous chip on the interposer. According to the invention, high-efficiency optical interconnection between the heterogeneous chip and the photoelectric co-connection intermediate layer is realized through the high-efficiency grating coupler, and high-density electrical interconnection between the chip and the photoelectric co-connection intermediate layer is realized through the TSV technology and the RDL technology. Meanwhile, the optical interconnection efficiency between the interposer and the chip is improved by utilizing the electrode patterning advantage of the RDL technology, and the self-alignment between the chip and the interposer is realized. The method has extremely high compatibility to the packaging scene of the existing photoelectric heterogeneous chip, so that the method has great significance in improving the integration density and reducing the interconnection loss of a photoelectric heterogeneous integrated system and promoting the practicability of the photoelectric heterogeneous integrated system.

The invention relates to the technical field of AR display, in particular to a binocular waveguide, a design method of the binocular waveguide and AR glasses, the binocular waveguide comprises a waveguide substrate, and two exit pupil areas are symmetrically distributed on the waveguide substrate; and a coupling-in grating, a first diffraction element, a second diffraction element, a first coupling-out grating and a second coupling-out grating, the coupling-in grating is arranged on the waveguide substrate, and the first diffraction element and the first coupling-out grating are respectively arranged in one exit pupil area. The second diffraction element and the second coupling-out grating are respectively arranged in the other exit pupil area, and incident light can be respectively transmitted to the first diffraction element and the second diffraction element after being coupled into the waveguide substrate through the coupling-in grating. The application has the effect of improving the wearing experience of the AR equipment.

The invention discloses a grating coupling device and a preparation method thereof. The grating coupling device comprises a dielectric layer arranged on the surface of a substrate; the functional layer is arranged in the dielectric layer and is provided with a first grating and a waveguide which are adjacent to each other; the second grating is arranged in the dielectric layer and located on the side, away from the surface of the substrate, of the first grating, the grating constant of the second grating corresponds to the grating constant of the first grating, and the second grating is aligned to the first grating; and the material refractive index of the second grating is greater than that of the first grating. The overall coupling efficiency of the device can be obviously improved, and the coupling loss is reduced.

The invention, which relates to the technical field of the optical receiver, discloses a silicon optical transceiver chip comprising an oblique incidence grating coupler, a symmetrical bidirectional angle multimode interference coupler, a micro-ring modulator, a micro-ring filter, and a single-input photoelectric detector. Each oblique incidence grating coupler is composed of a grating area and a spot-size converter, a certain coupling inclination angle is adopted by a grating etching part through an optical fiber, optical signals are obliquely incident into a grating coupling area, the optical signals are converted into single-mode conditions through the spot-size converters and transmitted into an optical waveguide, and then the input and output functions of the optical signals are achieved. According to the invention, a plurality of micro-ring modulators are used for converting electric signals into optical signals for information transmission, and a receiving part is combined with a micro-ring filter to realize a secondary filtering function, so that the crosstalk problem between two adjacent optical information transmission channels can be reduced.

The invention discloses a stepped three-band grating coupler and a reverse optimization method thereof, and belongs to the technical field of photonic devices and integration, and the reverse optimization method comprises the steps: determining a design target of the grating coupler, and defining an initial structure; defining optimization parameters including grating height and grating width according to the grating number; defining an optimization quality factor according to a design target of the grating coupler, and dynamically updating a weight coefficient of the quality factor; optimizing the width and height distribution of all gratings by using an improved direct binary search algorithm; and iterative optimization is continuously carried out until a design target is achieved, and width distribution corresponding to gratings with different heights in the optimized stepped grating structure is obtained. The problem that traditional grating diffraction has inherent wavelength dependence is effectively solved, and efficient coupling of three optical communication wavebands is achieved.

The disclosure relates to a grating coupler, the grating coupler comprising: a substrate comprising a first major surface and a second major surface; and a surface relief structure located on at least one of the major surfaces of the substrate wherein: the grating coupler has a first order diffraction efficiency of at least 0.3 (30%) across at least a 20° incident light angle range. The surface relief structures described herein can comprise a plurality of notches, each of the notches facing substantially in a x-direction and having a radius of curvature greater than about 50 nm.

The invention discloses a grating coupler, a diffraction optical waveguide with the grating coupler and a display device with the grating coupler. The grating coupler comprises a grating body and an optical film layer, at least part of a grating line of the grating body comprises a first side wall and a second side wall, and the first side wall and the second side wall respectively form an included angle theta 1 and an included angle theta 2 and theta 1lt relative to a plane where the grating body is located; theta 2; the optical film layer comprises a first film layer covering the grating body and a second film layer covering the first film layer; the grating body has a grating refractive index n0, the first film layer has a refractive index n1, and the second film layer has refractive indexes n2 and n1lt; n01t; n01t; n1, n2; the parts, located on the first side wall and the second side wall, of the first film layer have the average thickness d1, d2 and d1gt respectively; d2; and the portions of the second film layer located on the first and second sidewalls have an average thickness d3 and d4, d3gt, respectively; and d4. By providing the optical film layer with specific asymmetry, the coupling efficiency is remarkably improved, and meanwhile, an additional means is provided for uniformity adjustment.

According to the photoelectric system packaging structure and the preparation method thereof provided by the invention, in the packaging process, the first through hole is formed in the back surface of the image sensor chip, and the metal wiring layer and the solder mask layer are sequentially formed in the first through hole and the back surface of the image sensor chip, so that an electric signal of the image sensor chip is led to the back surface from the front surface; in this way, the distance between the image sensor chip and the grating coupling-out surface of the optical chip can be controlled within 10 [mu] m, so that the optical signal of the optical chip can be received in a close-range fit manner; in addition, electric signals of the image sensor chip can be led to the substrate through the metal wiring layer on the back face of the image sensor chip in the formed solder resist window, the signal transmission difficulty between the optical chip and the image sensor chip and between the optical chip and other devices is effectively reduced, in addition, the photoelectric system packaging structure is simple, the manufacturing cost is low, and the photoelectric system packaging structure is suitable for large-scale popularization and application. And the yield and the service life of a finished product of the photoelectric system packaging structure can be improved.

Structures including a grating coupler and a layer that exhibits an electric-field-induced Pockels effect and methods of forming such structures. The structure comprises a first grating coupler on a substrate, a second grating coupler having an overlapping relationship with the first grating coupler, and a layer including a portion having an overlapping relationship with the second grating coupler. The layer comprises a material that exhibits an electric-field-induced Pockels effect.

The invention relates to a method, equipment and medium for optimizing a vertical super-structure grating coupler, and the method comprises the steps: initializing the dielectric constant distribution in a two-dimensional design region, and stretching the dielectric constant distribution into the etching layer height; performing continuous topological optimization based on the initialized dielectric constant distribution; in the continuous topological optimization process, smoothing the dielectric constant distribution according to a preset filtering radius; when the change of the target function is within a predefined threshold range, introducing random disturbance; converting the dielectric constant after continuous topological optimization into two discrete values; according to the discrete dielectric constant distribution obtained through optimization, the geometric structure of the vertical super-structure grating coupler is designed; and carrying out performance simulation on the designed vertical super-structure grating coupler, and evaluating the coupling efficiency and bandwidth parameters of the vertical super-structure grating coupler. The invention provides an excellent input / output interface solution for the realization of a large-scale ultra-compact super-structure photon integrated circuit.

The invention relates to the technical field of optical modules, and discloses a grating coupling optical engine packaging structure, which comprises a substrate, an electric chip, a silicon optical chip, an optical fiber socket, an optical fiber array and a laser, and is characterized in that the electric chip is arranged on the upper side of the substrate, the silicon optical chip is arranged on the upper side of the electric chip, and the silicon optical chip and the electric chip are electrically connected with the substrate; the optical fiber socket is fixed on the upper side of the silicon optical chip, the optical fiber socket is provided with a positioning groove of which the opening direction is vertical to the silicon optical chip, the optical fiber array is inserted into the positioning groove in a guiding manner, and the optical fiber socket is also provided with a locking piece for fixing the optical fiber array; a waveguide group and a grating array are arranged in the silicon optical chip, the waveguide group and the grating array are conducted in the direction parallel to the surface of the silicon optical chip, and a lens and a grating array are further arranged in the optical fiber socket, and the lens and the optical fiber array are conducted in the direction perpendicular to the surface of the silicon optical chip; the lasers are arranged on the substrate and electrically connected with the substrate, the lasers and the silicon optical chips are arranged at intervals, and input optical fibers are connected between the lasers and the silicon optical chips.

The invention discloses a double-reflection grating coupler for spatial optical coupling, which comprises a substrate layer, an oxide lower cladding layer and an optical waveguide layer which are sequentially stacked from bottom to top, a first light reflection structure is arranged between the substrate layer and the oxide lower cladding layer, and a supporting polar plate is arranged above the optical waveguide layer. A second light reflection structure is arranged between the supporting polar plate and the optical waveguide layer; the optical waveguide layer comprises a left optical waveguide, a grating area and a right optical waveguide which are sequentially arranged from one side of the substrate layer to the other opposite side, and space light enters the grating area, is reflected by the first light reflection structure and the second light reflection structure, reflects an uncoupled part back to the grating area for coupling, and is output through the right optical waveguide. According to the invention, the problem of low coupling efficiency in coupling of the spatial light and the optical waveguide in the turbulent channel in the prior art is solved.

The invention provides an on-chip integrated laser light source and an optical coupling integration method thereof.The on-chip integrated laser light source comprises a silicon optical substrate and a light source chip assembly integrated on the silicon optical substrate, and the silicon optical substrate comprises an optical signal transmission waveguide; the light source chip assembly comprises a surface-emitting distributed feedback laser chip so as to generate laser beams emitted in the direction perpendicular to the surface of the chip. The on-chip integrated laser light source further comprises a grating coupling structure arranged between the surface emission distributed feedback laser chip and the optical signal transmission waveguide. The light-emitting surface of the surface-emitting distributed feedback laser chip is arranged towards the silicon light substrate, and a laser beam generated by the surface-emitting distributed feedback laser chip is directly projected and coupled into the light signal transmission waveguide through the grating coupling structure; the surface-emitting distributed feedback laser chip is fixedly combined on the silicon optical substrate through a flip chip technology, so that the high-precision end face alignment requirement of the heterogeneous integrated waveguide is converted into high-efficiency grating coupling based on a surface light emitting mode. In this way, harsh end face coupling is converted into efficient grating coupling.

A waveguide grating coupler (WGC) for coupling light transmitted between an integrated optical waveguide and an optical fiber and a method for making the waveguide grating coupler are provided. The waveguide grating coupler working for dual polarization includes a grating layer having a first plurality of etched holes and an overlay layer disposed on the grating layer, having a second plurality of etched holes. At least one of the second plurality of etched holes partially overlaps a corresponding etched hole of the first plurality of etched holes. The overlay layer is configured to create a shift of every period of grating to the grating layer to achieve upwards constructive interference and downwards destructive interference of light such that coupling efficiencies of both vertical grating coupling and angle coupled grating coupling are enhanced for a single mode optical fiber, a few mode optical fiber, or a multi-mode optical fiber.

A pupil-replicating waveguide usable in a VR display may have a slab of transparent material, an input grating coupler supported by the slab at the center of the slab, with output gratings supported by the slab and surrounding the input grating coupler. The input grating coupler couples image light into the slab, which propagates in the slab by total internal reflections. The out-coupling grating or gratings spread the image light all around the input grating, providing a wide beam of image light illuminating the eyebox of the VR display.

The invention provides a two-dimensional grating coupler, and relates to the field of photoelectric integration and the technical field of optical communication. The two-dimensional grating coupler comprises a silicon waveguide layer used for receiving optical signals, respectively coupling the optical signals according to a first optical field coupling coefficient and a second optical field coupling coefficient to obtain a first coupled optical signal and a second coupled optical signal, and respectively outputting the first coupled optical signal and the second coupled optical signal along a first direction and a second direction; the first organic electro-optical material layer is arranged above the silicon waveguide layer, and a first electrode pair is arranged in the first organic electro-optical material layer; and the second organic electro-optical material layer is arranged below the silicon waveguide layer, and a second electrode pair is arranged in the second organic electro-optical material layer. According to the embodiment of the invention, the organic electro-optical materials are respectively bonded on the upper layer and the lower layer of the silicon waveguide layer, and the electrode pairs which can be independently driven are arranged in all directions, so that the real-time adjustment of the optical field coupling coefficient is realized, and the coupling efficiency is remarkably improved.

The present application discloses a method for heterogeneous hybrid integration of planar optical waveguide devices, relating to the field of integrated silicon photonics technology. The method is used for heterogeneous hybrid integration of PLC chips with greatly different waveguide characteristic dimensions in different material systems. The method first grinds the light-emitting end of the front-end chip at a large angle to form a reflection angle for the waveguide. The device surface of the front-end chip is then arranged relative to the device surface of the back-end chip so that the light emitted by the front-end chip can be reflected to the device surface of the back-end chip and aligned with the grating coupler on the device surface of the back-end chip. Finally, the aligned two chips are packaged to achieve optical interconnection between the two chips. When performing heterogeneous integration, the technical solution of the present application can directly align the light emitted by the front-end chip to the grating coupler of the back-end chip without considering the height difference between the two chips. This solves the problem of the existing end-face coupling technology being sensitive to the chip height difference and difficult coupling mode matching, and effectively improves the integration level of the discrete device optical network system.

The invention relates to the technical field of gratings, and discloses a grating unit, a grating array and a grating coupler.The grating unit comprises a waveguide layer, the waveguide layer is provided with a first groove body and a second groove body, the cross section of the first groove body and the cross section of the second groove body are quadrilateral, and the depth of the first groove body is larger than that of the second groove body; the distance between the first groove body and the second groove body is larger than the negative value of the preset distance. One-way radiation without a bottom reflector is realized in the short-band grating coupler, downward radiation is suppressed, and the grating unit has a relatively high quality factor, so that the upper radiation efficiency loss in a mode field matching process is greatly reduced.

An optical waveguide of the present disclosure has a first region and a second region, and the optical waveguide includes a waveguide dielectric layer, a grating layer and an encapsulation film layer laminated one on another. The grating layer includes a first grating and a second grating, the first grating is located in the first region, and the second grating is located in the second region. The waveguide dielectric layer is configured to transmit light rays coupled into the waveguide dielectric layer by the first grating to the second grating, to enable the light rays to be coupled out through the second grating. The encapsulation film layer covers a side of the first grating and the second grating away from the waveguide dielectric layer, and grooves of the first grating and the second grating are not filled with a material of the encapsulation film layer.

The application relates to the technical field of waveguide display, in particular to a single-light-machine binocular diffractive light waveguide and display equipment, which comprises a waveguide substrate, an in-coupling grating, an out-coupling grating and a turning grating. The waveguide substrate is symmetrically provided with a left exit pupil area and a right exit pupil area; the in-coupling grating is arranged in the left exit pupil area; the out-coupling grating is arranged in at least two groups, one group of the out-coupling gratings is arranged in the left exit pupil area, and the other group of the out-coupling gratings is arranged in the right exit pupil area; the turning grating is arranged in the right exit pupil area and is arranged above the out-coupling grating; after incident light is coupled into the waveguide substrate through the in-coupling grating, the incident light can be transmitted to the turning grating and the out-coupling grating in the left exit pupil area. The application has the effect of improving the wearing experience of the display equipment.

The invention provides a grating coupler and a design method thereof, relates to the technical field of optics, and aims to realize dynamic regulation and control of the grating coupler. The grating coupler comprises a substrate, a waveguide layer and a phase change material metasurface layer. The waveguide layer is disposed on the substrate. The phase change material metasurface layer is arranged on the side, away from the substrate, of the waveguide layer. Wherein the phase-change material metasurface layer comprises a plurality of protruding structures, so that filtering coupling and switching of the grating coupler on a target working wavelength are achieved.

The application discloses a grating coupler, an optical waveguide device and a display device. The grating coupler couples input light incident thereon into a waveguide substrate and makes it propagate in the waveguide by total reflection, and comprises a grating body and an optical coating. The grating body comprises a plurality of unit structures arranged according to a predetermined grating period, and the optical coating covers the grating body and comprises one or more film layers. The grating coupler has one or more grating vectors, and the average thickness of at least one film layer in the optical coating gradually decreases in the direction of the at least one grating vector within a single grating period. By adopting the optical film layer with the thickness gradually decreasing in the coupling-in direction / grating vector direction, the grating coupler has a higher positive first-order diffraction efficiency in the upstream area of the coupling-in direction / grating vector direction and a lower coupling-out loss in the downstream area, so that the overall coupling-in efficiency of the grating coupler is maximized.

The invention relates to the technical field of optical communication, in particular to an optical interconnection device based on a diffraction grating. The device comprises a plurality of input ports, a diffraction grating coupler and a plurality of output ports which are arranged in sequence, a plurality of input ports for receiving a plurality of optical signals of different wavelengths; and the diffraction grating coupler is used for improving the coupling efficiency of a target optical signal in the plurality of optical signals based on temperature adjustment, and outputting the target optical signal to a target output port of the plurality of output ports. In the invention, the diffraction grating coupler is dynamically adjusted through temperature control to change the transmission direction and the coupling efficiency of the transmission signal, and optical signal routing from any input to any output is realized. The limitation of a traditional optical interconnection fixed optical path is broken through, and greater flexibility is provided for a complex communication network. And meanwhile, the diffraction grating coupler is regulated and controlled by temperature to realize optical path switching, so that the problems of high power consumption and low precision in mechanical regulation are avoided.