128 results about "Grating coupling" patented technology

The invention relates to the technical field of semiconductor chip packaging, in particular to a photoelectric co-packaging optical coupling passive alignment packaging structure and method. According to the invention, high-precision automatic alignment of the grating coupler in the optical chip and the through hole of the adapter plate is realized by using the solder ball tension effect in the flip reflow soldering process of the optical chip, and a stable optical limiting structure is formed. The passive coupling of the optical elements (such as bare optical fibers, optical fiber arrays, reflectors and the like) and the grating coupler is realized by placing the optical elements with matched sizes in the via holes of the adapter plate and completing refractive index matching and structure fixing by using curing glue. The whole process does not need additional active alignment equipment, is the same as a traditional chip packaging process, has the advantages of being simple in process, low in cost and high in packaging efficiency, and is a key packaging technology of a photoelectric co-packaging system in the future.

The embodiment of the utility model provides a test chip for testing the optical performance of a wafer-level optical waveguide and a packaging structure thereof, and the test chip comprises a light inlet end face which enables test light to enter the test chip in a coupling manner; the waveguide is used for transmitting the test light to the transmitting end grating; the transmitting end grating is used for coupling the test light rays into the receiving end grating of the wafer to be tested, coupling the test light rays into a waveguide pattern area to be tested of the wafer to be tested through the receiving end grating of the wafer to be tested and then conducting the test light rays to the transmitting end grating of the wafer to be tested; the light passing through the to-be-tested waveguide pattern area is coupled by the transmitting end grating of the to-be-tested wafer and is incident to the receiving end grating of the test chip; and the receiving end grating couples the received light into the waveguide of the test chip and then emits the light through the end face of the light outlet, and the emitted light is used for determining optical performance parameters. The utility model also provides a packaging structure for realizing the test function of the test chip. According to the scheme, the optical performance test of the wafer-level optical waveguide is realized.

The invention provides a high-density photoelectric common connection pinboard based on a low-loss silicon nitride grating coupler. The invention aims to overcome the difficulty that the existing photoelectric heterogeneous chip is difficult to integrate, stack and package, and realizes high-density interconnection between the chip and the interposer by using a grating coupling structure and a silicon through hole technology, thereby realizing high-integration low-loss packaging of the heterogeneous chip on the interposer. According to the invention, high-efficiency optical interconnection between the heterogeneous chip and the photoelectric co-connection intermediate layer is realized through the high-efficiency grating coupler, and high-density electrical interconnection between the chip and the photoelectric co-connection intermediate layer is realized through the TSV technology and the RDL technology. Meanwhile, the optical interconnection efficiency between the interposer and the chip is improved by utilizing the electrode patterning advantage of the RDL technology, and the self-alignment between the chip and the interposer is realized. The method has extremely high compatibility to the packaging scene of the existing photoelectric heterogeneous chip, so that the method has great significance in improving the integration density and reducing the interconnection loss of a photoelectric heterogeneous integrated system and promoting the practicability of the photoelectric heterogeneous integrated system.

The invention relates to the technical field of AR display, in particular to a binocular waveguide, a design method of the binocular waveguide and AR glasses, the binocular waveguide comprises a waveguide substrate, and two exit pupil areas are symmetrically distributed on the waveguide substrate; and a coupling-in grating, a first diffraction element, a second diffraction element, a first coupling-out grating and a second coupling-out grating, the coupling-in grating is arranged on the waveguide substrate, and the first diffraction element and the first coupling-out grating are respectively arranged in one exit pupil area. The second diffraction element and the second coupling-out grating are respectively arranged in the other exit pupil area, and incident light can be respectively transmitted to the first diffraction element and the second diffraction element after being coupled into the waveguide substrate through the coupling-in grating. The application has the effect of improving the wearing experience of the AR equipment.

The invention discloses a stepped three-band grating coupler and a reverse optimization method thereof, and belongs to the technical field of photonic devices and integration, and the reverse optimization method comprises the steps: determining a design target of the grating coupler, and defining an initial structure; defining optimization parameters including grating height and grating width according to the grating number; defining an optimization quality factor according to a design target of the grating coupler, and dynamically updating a weight coefficient of the quality factor; optimizing the width and height distribution of all gratings by using an improved direct binary search algorithm; and iterative optimization is continuously carried out until a design target is achieved, and width distribution corresponding to gratings with different heights in the optimized stepped grating structure is obtained. The problem that traditional grating diffraction has inherent wavelength dependence is effectively solved, and efficient coupling of three optical communication wavebands is achieved.

The invention provides an on-chip integrated laser light source and an optical coupling integration method thereof.The on-chip integrated laser light source comprises a silicon optical substrate and a light source chip assembly integrated on the silicon optical substrate, and the silicon optical substrate comprises an optical signal transmission waveguide; the light source chip assembly comprises a surface-emitting distributed feedback laser chip so as to generate laser beams emitted in the direction perpendicular to the surface of the chip. The on-chip integrated laser light source further comprises a grating coupling structure arranged between the surface emission distributed feedback laser chip and the optical signal transmission waveguide. The light-emitting surface of the surface-emitting distributed feedback laser chip is arranged towards the silicon light substrate, and a laser beam generated by the surface-emitting distributed feedback laser chip is directly projected and coupled into the light signal transmission waveguide through the grating coupling structure; the surface-emitting distributed feedback laser chip is fixedly combined on the silicon optical substrate through a flip chip technology, so that the high-precision end face alignment requirement of the heterogeneous integrated waveguide is converted into high-efficiency grating coupling based on a surface light emitting mode. In this way, harsh end face coupling is converted into efficient grating coupling.

A pupil-replicating waveguide usable in a VR display may have a slab of transparent material, an input grating coupler supported by the slab at the center of the slab, with output gratings supported by the slab and surrounding the input grating coupler. The input grating coupler couples image light into the slab, which propagates in the slab by total internal reflections. The out-coupling grating or gratings spread the image light all around the input grating, providing a wide beam of image light illuminating the eyebox of the VR display.

The invention provides a two-dimensional grating coupler, and relates to the field of photoelectric integration and the technical field of optical communication. The two-dimensional grating coupler comprises a silicon waveguide layer used for receiving optical signals, respectively coupling the optical signals according to a first optical field coupling coefficient and a second optical field coupling coefficient to obtain a first coupled optical signal and a second coupled optical signal, and respectively outputting the first coupled optical signal and the second coupled optical signal along a first direction and a second direction; the first organic electro-optical material layer is arranged above the silicon waveguide layer, and a first electrode pair is arranged in the first organic electro-optical material layer; and the second organic electro-optical material layer is arranged below the silicon waveguide layer, and a second electrode pair is arranged in the second organic electro-optical material layer. According to the embodiment of the invention, the organic electro-optical materials are respectively bonded on the upper layer and the lower layer of the silicon waveguide layer, and the electrode pairs which can be independently driven are arranged in all directions, so that the real-time adjustment of the optical field coupling coefficient is realized, and the coupling efficiency is remarkably improved.

The present application discloses a method for heterogeneous hybrid integration of planar optical waveguide devices, relating to the field of integrated silicon photonics technology. The method is used for heterogeneous hybrid integration of PLC chips with greatly different waveguide characteristic dimensions in different material systems. The method first grinds the light-emitting end of the front-end chip at a large angle to form a reflection angle for the waveguide. The device surface of the front-end chip is then arranged relative to the device surface of the back-end chip so that the light emitted by the front-end chip can be reflected to the device surface of the back-end chip and aligned with the grating coupler on the device surface of the back-end chip. Finally, the aligned two chips are packaged to achieve optical interconnection between the two chips. When performing heterogeneous integration, the technical solution of the present application can directly align the light emitted by the front-end chip to the grating coupler of the back-end chip without considering the height difference between the two chips. This solves the problem of the existing end-face coupling technology being sensitive to the chip height difference and difficult coupling mode matching, and effectively improves the integration level of the discrete device optical network system.

The invention relates to the technical field of gratings, and discloses a grating unit, a grating array and a grating coupler.The grating unit comprises a waveguide layer, the waveguide layer is provided with a first groove body and a second groove body, the cross section of the first groove body and the cross section of the second groove body are quadrilateral, and the depth of the first groove body is larger than that of the second groove body; the distance between the first groove body and the second groove body is larger than the negative value of the preset distance. One-way radiation without a bottom reflector is realized in the short-band grating coupler, downward radiation is suppressed, and the grating unit has a relatively high quality factor, so that the upper radiation efficiency loss in a mode field matching process is greatly reduced.

The application relates to the technical field of waveguide display, in particular to a single-light-machine binocular diffractive light waveguide and display equipment, which comprises a waveguide substrate, an in-coupling grating, an out-coupling grating and a turning grating. The waveguide substrate is symmetrically provided with a left exit pupil area and a right exit pupil area; the in-coupling grating is arranged in the left exit pupil area; the out-coupling grating is arranged in at least two groups, one group of the out-coupling gratings is arranged in the left exit pupil area, and the other group of the out-coupling gratings is arranged in the right exit pupil area; the turning grating is arranged in the right exit pupil area and is arranged above the out-coupling grating; after incident light is coupled into the waveguide substrate through the in-coupling grating, the incident light can be transmitted to the turning grating and the out-coupling grating in the left exit pupil area. The application has the effect of improving the wearing experience of the display equipment.

The invention provides a grating coupler and a design method thereof, relates to the technical field of optics, and aims to realize dynamic regulation and control of the grating coupler. The grating coupler comprises a substrate, a waveguide layer and a phase change material metasurface layer. The waveguide layer is disposed on the substrate. The phase change material metasurface layer is arranged on the side, away from the substrate, of the waveguide layer. Wherein the phase-change material metasurface layer comprises a plurality of protruding structures, so that filtering coupling and switching of the grating coupler on a target working wavelength are achieved.

The application discloses a grating coupler, an optical waveguide device and a display device. The grating coupler couples input light incident thereon into a waveguide substrate and makes it propagate in the waveguide by total reflection, and comprises a grating body and an optical coating. The grating body comprises a plurality of unit structures arranged according to a predetermined grating period, and the optical coating covers the grating body and comprises one or more film layers. The grating coupler has one or more grating vectors, and the average thickness of at least one film layer in the optical coating gradually decreases in the direction of the at least one grating vector within a single grating period. By adopting the optical film layer with the thickness gradually decreasing in the coupling-in direction / grating vector direction, the grating coupler has a higher positive first-order diffraction efficiency in the upstream area of the coupling-in direction / grating vector direction and a lower coupling-out loss in the downstream area, so that the overall coupling-in efficiency of the grating coupler is maximized.

The application relates to the technical field of grating coupler design, and discloses a design method and system of a grating coupler, computer equipment and a storage medium, which comprise the following steps: a topological prediction model is constructed based on a deep neural network, and the topological prediction model is trained by using a preset method; the response spectrum of the grating coupler is input into the trained topological prediction model, so that the structure parameters of the functional area of the grating coupler are obtained; and the topological structure of the functional area of the grating coupler is determined according to the structure parameters, so that the design of the grating coupler is realized. Through the approximate processing of the training data set, the simple network structure is combined with the complex nonlinear algorithm, the model power requirement is reduced, the prediction efficiency and effect of the model are improved, the prediction accuracy of the model is further improved through the training method combining the forward direction and the reverse direction, so that the design of the grating coupler with high coupling efficiency at any angle is realized, and the device performance of the grating coupler is ensured.

This application discloses a silicon nitride grating coupler and a silicon-based optical chip. The silicon nitride grating coupler exhibits high coupling efficiency when facing incident light of different wavelengths and modes. Specifically, it includes: a substrate; a first grating layer located on one side of the substrate; a second grating layer located on the side of the first grating layer opposite to the substrate, the second grating layer and the first grating layer being staggered, the duty cycle of the second grating layer being greater than that of the first grating layer, the second grating layer being used to change the scattering path of the incident light and guide the incident light to couple into the first grating layer; a third grating layer located on the side of the first grating layer opposite to the substrate, the third grating layer and the first grating layer also being staggered, the duty cycle of the third grating layer being less than that of the first grating layer, the third grating layer being used to reflect the diffracted light leaking from the first grating layer and guide the reflected light back to the coupling region of the first grating layer; and a waveguide layer connected to the first grating layer along the grating period arrangement direction of the first grating layer.

A method of forming a grating coupler includes: providing a design layout of the grating coupler, wherein the design layout includes: a taper section, comprising a pair of tapers; and a grating section coupled to the taper section, a grating section coupled to the taper section, the grating section including an array of gratings, wherein the gratings include gradually changing shapes, from a top-view perspective, from a central grating having a first non-convex octagonal shape at a center of the grating section to an edge grating having a second non-convex octagonal shape or a convex octagonal shape near an edge of the grating section, wherein the second non-convex octagonal shape is different from the first non-convex octagonal shape. The method further includes manufacturing the grating coupler using the design layout.

The embodiment of the invention provides a distributed feedback laser, relates to the technical field of lasers, and is used for solving the problem that the performance is affected by insertion of a phase shift grating. The laser comprises a ridge waveguide and feedback gratings arranged on the two sides of the ridge waveguide, each feedback grating comprises a Bragg grating and a phase shift grating inserted into the Bragg grating, the Bragg grating comprises two connecting gratings located on the two sides of the phase shift grating respectively, and each connecting grating comprises a chirp grating and a uniform grating which are connected. The uniform grating is away from the phase shift grating relative to the chirp grating. The length of grating teeth in the chirp grating is a first length, and the duty ratio is a first duty ratio; the width of a part, corresponding to the chirp grating, of the ridge waveguide is a first waveguide width; in the process of approaching the uniform grating from the phase shift grating along the first direction, at least one of the first length, the first duty ratio and the first waveguide width is gradually changed to realize grating coupling coefficient chirp of the chirp grating. The laser can be applied to the field of optical communication.

The present application relates to the field of optical communication technology, and specifically relates to a design method, device and equipment of a grating coupler and a storage medium. The method comprises: obtaining initial parameters; determining the period of each grating unit according to the initial parameters and the relationship between the scattering angle and the period of the grating unit, and obtaining the initial structure of the grating coupler; under the initial structure, judging whether the scattering range of the grating coupler meets the target scattering range; when the scattering range of the grating coupler does not meet the target scattering range, adjusting the focal point coordinates or the groove array parameters, determining the new period of the grating unit, and repeating the process of adjusting the focal point coordinates or the groove array parameters and determining the period of the grating unit until the scattering range of the grating coupler meets the target scattering range. In the present application, the grating coupler with a specific scattering range is designed without introducing a lens, the good matching between the scattering range of the coupler and the divergence angle of the light source is realized, the coupling efficiency is improved, and the device packaging is not affected.

The application relates to the technical field of multi-plane light converters, and more particularly to an on-chip multi-plane light conversion device and an optimization design method thereof. A grating coupling unit, a multi-plane phase sheet and a mirror are integrated on the same glass substrate, three-dimensional monolithic integration of input coupling, light path folding and light field transformation functions is realized, precise mechanical alignment requirements among discrete components are completely eliminated, the integration degree is high, high-precision alignment is avoided, stability is improved, and the volume is reduced to a certain extent. The application realizes efficient conversion of a light field between an on-chip waveguide and free space through the grating coupling unit, and performs arbitrary unitary transformation in the free space by using an MPLC composed of the multi-plane phase sheet and the mirror, the two work cooperatively, the high mode capacity and low crosstalk advantages of the MPLC are combined with the on-chip integration advantages of the grating coupling unit, and high-performance and small-volume light field transformation can be realized.

The present invention belongs to the technical field of surface enhanced Raman spectroscopy detection, and specifically discloses a SERS substrate based on a grating-coupled MIM structure, a preparation method thereof, and an application thereof. In the MIM structure, an Ag layer is selected as a SERS active layer, which solves the problem of non-repeatable substrate preparation caused by the random generation of "hot spots" when Ag particles are used in traditional manufacturing schemes; an SU8 layer is selected as an insulating layer in the MIM structure, which solves the problem of low interference field intensity caused by the low refractive index of the SiO2 layer when a SiO2 layer is used in traditional manufacturing schemes; and the grating structure is manufactured by laser interference lithography technology and displacement Talbot lithography technology, which solves the problems of high cost and low efficiency caused by the use of technologies such as electron beam lithography and focused ion beam lithography.

The invention provides an optical path structure and electronic equipment, and relates to the technical field of optical signal communication. The optical path structure comprises an optical chip, a circuit base plate and a substrate. The circuit base plate is provided with a window area; the active surface of the optical chip is welded at the edge of the window area on the circuit bottom plate, and the optical chip is electrically connected with the circuit bottom plate; in the arrangement direction perpendicular to the plane of the circuit base plate, part of the optical waveguide on the end face of the optical chip is located in the projection area of the window area. Wherein the signal transmission direction of the optical chip is parallel to the plane of the circuit base plate; the target surface of the substrate is bonded and fixed on the bottom surface of the optical chip. According to the invention, the optical chip is inversely welded on the edge of the window area of the windowing on the circuit base plate, so that part of the optical waveguide can perform signal transmission in the window area in the plane direction of the circuit base plate, thereby reducing the space size required in the setting direction when the grating coupler is used for coupling, effectively improving the integration level of the device, and improving the reliability of the device. And the integration difficulty of the device is reduced.

Methods of semiconductor device fabrication are provided. A method includes providing a device including a photonic die having a grating coupler. The method includes patterning an upper surface of the device to form a lens component configured to receive light from an upper surface of the photonic die. The method includes forming a first mirror configured to optically couple the lens component with the grating coupler according to an angle of incidence between the light and the grating coupler of less than about 15 degrees. The embodiment of the invention also relates to a semiconductor device, a manufacturing method thereof and an optical coupling method.

A first circuit sends electrical data. The electrical data is sent to a vertical-cavity surface-emitting laser (VCSEL). A wavelength of the VCSEL is modulated. The modulating includes emitting, by the VCSEL, a wavelength-modulated beam (WMB). The WMB is based on the electrical data that was sent. The modulating can be based on injecting current into the VCSEL. The modulating can be based on VCSEL chirp. The WMB is coupled optically to an optical medium. The optical medium comprises a waveguide or a fiberoptic cable. The coupling optically is accomplished using a grating coupler, a mirror, or an off-axis diffractive lens. The optical medium is further coupled to a wavelength-dependent optical element (WDOE). The WDOE decodes the WMB into the electrical data that was sent. The electrical data is delivered to a second circuit.

The application relates to a method, device and medium for optimizing a vertical super-structure grating coupler, the method comprising: initializing a dielectric constant distribution in a two-dimensional design area and stretching the dielectric constant distribution into an etching layer height; based on the initialized dielectric constant distribution, performing continuous topology optimization; in the continuous topology optimization process, performing smoothing processing on the dielectric constant distribution according to a preset filtering radius; when a change of a target function is in a predefined threshold range, introducing random disturbance; converting the dielectric constant after the continuous topology optimization into two discrete values; designing a geometric structure of the vertical super-structure grating coupler according to the discrete dielectric constant distribution obtained through optimization; and performing performance simulation on the designed vertical super-structure grating coupler to evaluate coupling efficiency and bandwidth parameters. The application provides an excellent input / output interface solution for realizing a large-scale super-compact super-structure photonic integrated circuit.

The invention discloses a two-point optical touch positioning method and system based on a double-frequency signal, and belongs to the technical field of optical touch, the method comprises the following steps: enabling two light sources to emit optical signals carrying different frequencies, enabling the optical signals to enter an optical film through grating coupling, then propagating the optical signals to the edge of the optical film, and converting the optical signals into electric signals; signals are collected in a multi-channel signal collection mode to obtain time sequence data, the signals are distinguished according to edge number differences, coordinates of corresponding incidence points are calculated, and coordinate deviation of overlapped signals is corrected through cross check; the system comprises a double-frequency light source module, an optical conduction module, a photoelectric conversion module, a signal processing module and an output module, incident light of the double-frequency light source module is transmitted to the edge of the optical conduction module through the optical conduction module and received by the photoelectric conversion module, and the coordinate of the incident light and the coordinate of the incident light are calculated through the signal processing module. And touch interaction is realized by the output module. The anti-interference performance and the response speed of two-point touch are improved by simplifying the frequency distinguishing logic.

The present application belongs to the technical field of light field wavefront measurement, and discloses an on-chip light field wavefront measurement system and method based on a grating coupler. The system comprises a grating coupler array, an optical fiber array, an optical fiber and a photoelectric detector connected in sequence. The grating coupler array is arranged on a silicon photon chip and is used for coupling a wavefront to be measured into a waveguide and converting a wavefront angle into an optical intensity signal in the waveguide. The optical fiber array is used for transmitting the optical intensity signal coupled into the waveguide to the photoelectric detector. The photoelectric detector is used for receiving the optical intensity signal and performing photoelectric conversion processing on the optical intensity signal to obtain characteristic parameters of the wavefront to be measured. The present application converts the wavefront angle into the optical intensity signal in the waveguide through the grating coupler array, and reconstructs the wavefront to be measured according to the optical intensity signal received by the photoelectric detector. The measurement method and device are simple, have high spatial resolution and a large dynamic angle range.

The invention relates to the technical field of photoelectric co-packaging, in particular to an adapter plate micro lens integrated CPO optical fiber vertical coupling architecture and process. According to the invention, the micro-lens array is integrated on the adapter plate by innovatively utilizing a glue dripping tension principle, and the glue lens supports the coupling of inclined gratings with different curvature radiuses and different inclination angles, so that the preparation flexibility is higher. Compared with a traditional lens coupling scheme, no extra lens needs to be installed, the advantages of being low in cost, compact in structure, high in mechanical stability and more reasonable in stress distribution are achieved, and the characteristic of high channel density is achieved; the lens surface of the micro lens is formed by liquid tension, the lens surface is smoother, and the transmission efficiency is higher; in addition, due to integration on the adapter plate, the adapter plate has the optical interconnection function and the electric interconnection function at the same time, and the photoelectric transmission performance of the photoelectric co-packaging module can be remarkably improved.

The invention provides a high-passband composite electro-optical modulator. The high-passband composite electro-optical modulator comprises a substrate, a buffer layer arranged on the substrate, an electro-optical material layer arranged on the buffer layer, an electrode layer arranged on the electro-optical material layer and a covering layer which is arranged on the electro-optical material layer and wraps the electrode layer. Wherein the electro-optical material layer comprises an electro-optical substrate arranged on the buffer layer and an electro-optical modulation layer integrally formed with the electro-optical substrate on the surface of the electro-optical substrate, and the electro-optical modulation layer comprises at least one grating coupling structure and an embedded strip-shaped waveguide arranged at an interval with the grating coupling structure; the electrode layer comprises two electrode plates which are arranged at intervals, and the two electrode plates are arranged on the electro-optical substrate and are distributed in a mirror symmetry mode relative to the central axis of the embedded strip-shaped waveguide. According to the high-passband composite electro-optical modulator provided by the invention, the high-efficiency coupling advantage of the grating, the low transmission loss characteristic of the embedded strip-shaped waveguide and the precise electric field regulation and control capability of the electrode layer are integrated, so that the transmission loss is reduced, and meanwhile, the modulation bandwidth is widened and the modulation depth is improved.

The invention provides a double-layer silicon nitride grating coupler for a visible light wave band. The double-layer silicon nitride grating coupler comprises a substrate, a lower cladding, a first layer of silicon nitride, an interlayer, a second layer of silicon nitride and an upper cladding from bottom to top, the first layer of silicon nitride comprises a first layer of silicon nitride grating and a silicon nitride waveguide, and the second layer of silicon nitride is a second layer of silicon nitride grating and is output by the lower layer of silicon nitride waveguide, so that relatively high coupling efficiency is realized. Due to the visible light wave band, the thickness of the first layer of silicon nitride and the second layer of silicon nitride does not exceed 500nm. According to the double-layer silicon nitride grating coupler, the vertical symmetry of gratings is broken through, high-directivity propagation of light waves is achieved through proper position arrangement of the two layers of silicon nitride gratings, and meanwhile the refractive index contrast ratio and the coupling efficiency can be improved through the double-layer gratings; on the premise that the grating period is not affected, the technology of the double-layer silicon nitride grating coupler manufactured based on the two uniform fully-etched gratings is simple.