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63 results about "Laser fabrication" patented technology

Method for predicting residual stress and deformation of TA15 alloy component through laser directional energy deposition

The invention relates to the technical field of laser manufacturing and intelligent manufacturing, in particular to a residual stress and deformation prediction method for a laser directional energy deposition TA15 alloy component, and the method comprises the following steps: constructing a thermal-metallurgical-mechanical multi-physics field coupling model; firstly, a transient temperature field model comprehensively considering heat conduction, convection and radiation effects in the laser directional energy deposition process is established based on the Fourier heat conduction theory; then, a metallurgical model is established based on the phase change principle, finally, a multi-stage phase change kinetic model is established, and diffusion control type and non-diffusion type transformation mechanisms are considered at the same time; a phase change kinetic model is introduced into a sequentially coupled thermal-mechanical framework, so that multi-scale integrated prediction from microstructure evolution to macroscopic stress distribution is realized; and a theoretical basis is provided for microstructure regulation and control and residual stress optimization of the TA15 alloy LDED process.
Owner:SICHUAN UNIV

Intelligent laser manufacturing system and method based on natural language or image

According to the intelligent laser manufacturing system and method based on the natural language or the image, after a user inputs information through a natural language instruction or uploads a target image, a laser manufacturing large language model module analyzes input content and generates a corresponding SVG vector code, and a point cloud coordinate generation agent module generates point cloud coordinate data according to the SVG vector code; the data is transmitted to a laser manufacturing system module through a data transmission and control module to control a scanning galvanometer or a micro / nano translation stage to execute processing, so that the manufacturing of a target structure is completed; integrated automatic processing of micro-nano structure design, path generation and laser processing can be achieved, the operation complexity and the use threshold are remarkably reduced, the processing efficiency and the manufacturing precision are improved, and the method has the technical advantages of being high in intelligent degree, easy and convenient to operate and wide in application prospect.
Owner:STATE-OWNED LUOYANG DANCHENG RADIO FACTORY

Design method and device for in-situ thermal field induction heating module

The invention provides an in-situ thermal field induction heating module design method and device, and relates to the technical field of laser manufacturing, and the in-situ thermal field induction heating module design device comprises an optical fiber laser, a laser cladding nozzle, a six-axis mechanical arm, a coil adjusting structure, an induction coil, an induction power supply, a water cooling machine, a molten pool monitoring and control system and a base material; the optical fiber laser is connected with the laser cladding nozzle, the six-axis mechanical arm is used for controlling the laser cladding nozzle to move, and the coil adjusting structure is installed on the six-axis mechanical arm and connected with the induction coil so that the induction coil can synchronously move along with the laser cladding nozzle. The sprayed metal powder is solidified on the base material to form a cladding layer, the induction power supply generates high-frequency current and conducts the high-frequency current to the induction coil, the induction coil heats the cladding layer, and the water cooling machine is used for cooling the induction coil; the molten pool monitoring and control system is installed on the side face of the molten pool and used for monitoring thermal field distribution of the molten pool in real time. The method has the advantage that the problem that defects such as cracks and air holes are prone to being generated in the laser cladding process is solved.
Owner:NUCLEAR POWER INSTITUTE OF CHINA

Laser manufacturing of graphene-metal composites

A method of manufacturing a graphene-metal composite includes providing a metal substrate having a graphene precursor layer disposed thereon and irradiating the graphene precursor layer disposed on the metal substrate with a laser to transform the graphene precursor layer into graphene and to embed and bond the graphene in the metal substrate to produce a graphene-metal composite having at least one enhanced characteristic. A system for manufacturing a graphene-metal composite includes a stage configured to support a metal substrate having a graphene precursor layer disposed thereon, a laser configured to irradiate the graphene precursor layer disposed on the metal substrate, and a controller configured to control at least one irradiation setting of the laser to transform the graphene precursor layer into graphene and to embed and bond the graphene in the metal substrate to produce a graphene-metal composite having at least one enhanced characteristic.
Owner:GEORGE MASON UNIVERSITY

Method for regulating and controlling interface between laser reduction deposition metal and transparent substrate

The invention belongs to the technical field of laser manufacturing, and relates to a method for regulating and controlling an interface between laser reduction deposited metal and a transparent substrate, which comprises the following steps of: coating a precursor material on the surface of the transparent substrate, and irradiating the interface between the precursor material and the transparent substrate by adopting ultrashort pulse laser through the transparent substrate; and the ultra-short pulse laser scans the interface of the precursor material and the transparent substrate for multiple times according to a preset path for laser direct writing, and a patterned metal structure is obtained. The ultra-short pulse laser penetrates through the transparent substrate from the back to irradiate the precursor material / substrate interface, thickness limitation on the precursor material is avoided, and in the multiple laser scanning process, the temperature of the metal / substrate interface exceeds the chemical bond fracture and recombination temperature, so that more chemical bonds are formed on the two sides of the transition layer, and the performance of the transition layer is improved. The chemical bonding degree of a metal / substrate interface is improved, interface regulation and control of the metal and the transparent substrate are achieved, and a patterned metal structure is obtained.
Owner:BEIJING UNIV OF TECH

Insert element for manufacturing a tread profile of a vehicle tire, as well as a vehicle tire manufactured with the insert element.

The present invention relates to an insert element (10) for producing a tread profile of a vehicle tire in a vulcanizing station, wherein the insert element (10) is manufactured using a selective laser manufacturing (SLM) process. The insert element (10) comprises a lamellar element (12) for generating a cut, in particular a fine cut, in the tread profile and a surface element (14), wherein the surface element (14) has a first side (22) with a rough surface for generating a roughness of the tread profile.
Owner:CONTINENTAL REIFEN DEUTSCHLAND GMBH

Method for predicting geometrical characteristics of laser directional energy deposition layer based on machine learning

The invention relates to a method for predicting geometrical characteristics of a laser directional energy deposition layer based on machine learning, and belongs to the technical field of laser manufacturing and intelligent manufacturing. The method comprises the following steps: S1, establishing a fusion data set; s2, establishing a model related to the technological parameters and the shape of the deposition layer; s3, establishing a method based on improved Rime-LSBboost to predict the morphology of the sedimentary layer; s4, inputting the fusion data set into the proposed Rime-LSBboost method for training and optimization, and predicting the morphology of the sedimentary layer; and S5, evaluating the influence of different factors of the fusion data set on the prediction model by adopting an SHAP method. According to the method, the sedimentary layer experimental data and the numerical simulation data are fused, so that the morphology of the sedimentary layer in the laser directional energy deposition process is effectively predicted. It is proved that by means of the experimental data and simulation data fusion method, the morphology of the sedimentary layer can be effectively predicted, prediction accuracy is improved, resources are saved, and prediction efficiency is improved.
Owner:SHENYANG UNIVERSITY OF TECHNOLOGY

A method for manufacturing a high-temperature-resistant thin film temperature sensor based on laser manufacturing

ActiveCN120685214BThin membraneErbium lasers
The application discloses a high-temperature-resistant film temperature sensor preparation method based on laser manufacturing. First, a precursor film of a polymer precursor ceramic is coated on a substrate. After being heated to 180 DEG C or being naturally placed to solidify, the precursor film is scanned by a fiber laser in a certain mode, and the unnecessary part is removed, and the pattern part is left, so that the polymer precursor ceramic sensing film is simultaneously completed by patterning and pyrolysis. By using the technical scheme, the problems of a wide pattern, low preparation efficiency and high cost of the polymer precursor ceramic film are solved.
Owner:LINGNAN NORMAL UNIV

A method and device for predicting strain of laser directed energy deposition using online monitoring

The present invention discloses a method and device for online monitoring of laser directed energy deposition strain prediction, the method comprising: acquiring an image data set during the manufacturing process of a processed part and performing data preprocessing to obtain a preprocessed image data set; introducing significant feature analysis to construct a multi-scale multi-modal fusion prediction model; performing laser directed energy deposition strain prediction on the preprocessed image data set based on the multi-scale multi-modal fusion prediction model to obtain a prediction result of the laser directed energy deposition strain value during the manufacturing process of the processed part. The device comprises: a laser DED manufacturing system and a manufacturing monitoring system. The embodiments of the present invention can improve the efficiency of laser directed energy deposition strain prediction and the accuracy of laser directed energy deposition strain prediction. As an online monitoring method and device for laser directed energy deposition strain prediction, the present invention can be widely used in the field of laser directed energy deposition technology.
Owner:SOUTH CHINA UNIV OF TECH

Air vent apparatus for vehicle

An air vent apparatus for a vehicle according to one embodiment of the present disclosure includes a rear wing having a plurality of lead wires plated in a longitudinal direction by a laser manufacturing antenna (LMA) method, and a knob connected to the rear wing and configured such that a position of the knob is horizontally adjustable.At this point, the knob includes a housing surrounding a partial section of the rear wing, an electrode portion located inside the housing and having input and output terminals electrically connected to the lead wire, and a light source electrically connected between the input and output terminals of the electrode portion to emit light into a vehicle.
Owner:HYUNDAI MOBIS CO LTD

Preparation method of high-temperature-resistant film temperature sensor based on laser manufacturing

The invention discloses a method for preparing a high-temperature-resistant film temperature sensor based on laser manufacturing, which comprises the following steps of: firstly, coating a precursor film of polymer precursor ceramic on a substrate, heating to 180 DEG C or naturally placing and curing, scanning the precursor film by adopting a fiber laser according to a certain mode, and removing unnecessary parts, so as to obtain the high-temperature-resistant film temperature sensor. The left pattern part is the polymer precursor ceramic sensing film with patterning and pyrolysis completed synchronously. By adopting the technical scheme provided by the invention, the problems of relatively wide pattern, low preparation efficiency and high cost of the current polymer precursor ceramic film are solved.
Owner:LINGNAN NORMAL UNIV

Semiconductor laser quantum well hybrid device and semiconductor laser preparation process

The invention discloses a semiconductor laser quantum well hybrid device and a semiconductor laser preparation process, and the device automatically achieves the plating of a three-layer film structure on the surface of a wafer through a photoresist spraying assembly, a photoresist cleaning assembly, a pure silicon magnetron sputtering coating assembly, a silicon nitride magnetron sputtering coating assembly and a pure iron magnetron sputtering coating assembly. The surface of the wafer is heated through the heating disc, then kinetic energy is provided for silicon atoms after heat enters the pure silicon film, the silicon atoms move and diffuse in the depth direction of the area, needing diffusion, of the wafer, and due to the fact that the three-layer film structure only exists in the area, needing diffusion, of the surface of the wafer, and heat distribution is only limited to the area needing diffusion. The transverse diffusion speed of silicon atoms can be effectively controlled; silicon atoms are diffused to a specified depth along the depth direction of a quantum well region according to requirements, and a stable and reliable semiconductor laser is obtained.
Owner:ZHEJIANG HUIMU TECHNOLOGY CO LTD

Cloud controlled laser fabrication

An execution plan segment of an execution plan can be received at a control unit of a computer numerically controlled machine from a general purpose computer. The execution plan segment can define operations for causing movement of a moveable head of the computer numerically controlled machine to deliver electromagnetic energy to effect a change in a material within an interior space of the computer numerically controlled machine. The execution plan segment can include a predefined safe pausing point from which the execution plan can be restarted while minimizing a difference in appearance of a finished work-product relative to if a pause and restart are not necessary. Operations of the computer numerically controlled machine can be commenced only after determining that the execution plan segment has been received up to and including the predefined safe pausing point by the computer numerically controlled machine.
Owner:MAKEBLOCK HONGKONG HOLDING LTD

Device and method for laser non-destructive preparation of anti-glare glass

This invention provides an apparatus and method for non-destructive laser fabrication of anti-glare glass, belonging to the field of glass manufacturing. The apparatus includes an ultrafast laser atomization unit, a high-temperature passivation unit, and a sample-changing unit. The ultrafast laser atomization unit uses an ultrafast laser to perform laser scanning etching on the glass to be processed, forming random micro / nano structures on its surface to obtain atomized glass. The high-temperature passivation unit heats the surface of the atomized glass to remelt its micro / nano structures, adjusting gloss, haze, and transmittance to obtain anti-glare glass. The sample-changing unit transports the atomized glass and anti-glare glass to exchange samples between the laser atomization unit and the high-temperature passivation unit. This invention can form a random textured anti-glare structure on the surface of the glass to be processed, thereby reducing its reflectivity to incident light and achieving an anti-glare effect. Furthermore, it exhibits good wear resistance and scratch resistance, and can directly process glass of any thickness.
Owner:JIANGSU XINGCHI LASER TECHNOLOGY CO LTD

A method for processing a 45-degree micro-mirror of a polymer waveguide end face

ActiveCN121410884BCoupling lossTransceiver
This invention relates to the field of polymer waveguide fabrication technology, specifically disclosing a method for processing a 45° micromirror on the end face of a polymer waveguide, comprising the following steps: Step S1: Determining the forming quality characterization of the 45° micromirror on the end face of the polymer waveguide; Step S2: Determining the initial range of influencing factors affecting the quality of the 45° micromirror on the end face of the polymer waveguide fabricated by femtosecond laser; Step S3: Determining the laser incident mode, using a waveguide substrate tilted at 45° to the horizontal plane, with the laser incident perpendicular to the horizontal plane; Step S4: Optimizing the influencing factors to obtain the optimal parameter combination; Step S5: Conducting experiments with the optimal parameter combination, detecting and analyzing the experimental results. The femtosecond laser fabrication of the 45° micromirror on the end face of the waveguide of this invention results in small surface roughness and angle deviation, leading to higher integration, greater transmission efficiency, and lower coupling loss in the link formed by coupling the polymer waveguide and optical transceiver devices.
Owner:NO 30 INST OF CHINA ELECTRONIC TECH GRP CORP

Laser-based manufacturing using optical correction

To provide a method of forming an object from a material.SOLUTION: The method includes directing a first beam of light toward a first target location of the material to define a first portion of the object. The method also includes, after directing the first beam of light toward the first target location, determining an optical correction to be applied by an optical system. The optical correction is based on an atmospheric change in an atmospheric distortion region proximate to the first target location due, at least in part, to interaction of the first beam of light and the material. The method further includes directing a second beam of light toward a second target location of the material to define a second portion of the object. The second beam of light is directed through at least a portion of the atmospheric distortion region while the optical correction is applied.SELECTED DRAWING: Figure 1
Owner:THE BOEING CO

Smart denture with embedded thin film sensor manufactured using femtosecond laser, manufacturing method therefor and health monitoring system

The present invention relates to a smart denture with an embedded thin film sensor manufactured using a femtosecond laser, a manufacturing method therefor and a health monitoring system and, more specifically, to a denture comprising a thin-film-type sensor provided on one side of the denture, wherein the sensor includes: a substrate; a deposition layer deposited on the substrate; and a circuit part having a circuit pattern formed by partially removing the deposition layer, the circuit part being manufactured by a laser printing method in which the deposition layer is irradiated with femtosecond laser pulses by means of a femtosecond laser system.
Owner:UNIVERSITY INDUSTRY COOPERATION GROUP OF KYUNG HEE UNIVERSITY +1

A method for printing a functional device based on a composite manufacturing apparatus in a space-oriented environment

The application provides a composite manufacturing method for printing functional devices in a space environment, and the method comprises the following steps: slicing, moving a printing platform to a target position, supplying paving material, light curing forming, performing microstructure processing on a green ceramic substrate based on laser engraving, filling metal conductive material, controlling the printing platform to descend by one layer thickness, returning to step 2, and performing composite multi-material fine printing of the next printing layer, and continuously circulating in this way, so as to finally form a functional device with a complex structure. The application provides a new composite manufacturing method combining a light curing process, a laser manufacturing process and an inkjet / extrusion process, solves the printing problem of mixed manufacturing functional devices in a space environment, realizes high-precision on-orbit manufacturing of complex functional devices in a microgravity environment, and finally meets the demand of on-orbit application.
Owner:TECH & ENG CENT FOR SPACE UTILIZATION CHINESE ACAD OF SCI

Graphitization apparatus for manufacturing artificial graphite using laser

The present disclosure relates to a graphitization apparatus for manufacturing artificial graphite using lasers, including: a first chamber having doors located on both walls thereof in such a way as to be open when saggars go in and out and providing a workspace for graphitization of raw materials filled in the saggars; a laser heater consisting of a plurality of laser systems and irradiating laser beams onto the raw materials introduced into the first chamber to graphitize the raw materials; and a first transfer conveyor for sending the saggars filled with the raw materials to the first chamber and taking the saggars out of the first camber after the graphitization has been completed.
Owner:EFC CO LTD +4

Iron-based alloy material for laser manufacturing and remanufacturing of steel long product rolls and its preparation method

The present invention belongs to the field of alloy material technology, specifically relating to an iron-based alloy material for laser manufacturing of long steel rolls and a preparation method thereof. The iron-based alloy material of the present invention, the alloy powder material, comprises the following components by weight: La: 0.3-2%, Cr: 5-13%, Ni: 2-6%, Ti: 0.5-4%, B: 2-5%, Nb: 1-3%, and Fe: the balance. The present invention designs a laser composite manufacturing method for small-spot thin-layer cladding, successfully producing a cladding layer with a thickness greater than 10 mm.
Owner:SHENYANG CONTINENTAL LASER ENG TECH CO LTD

Systems and methods for improved laser fabrication

The problem of plasma shielding in pulsed laser shaping processes is addressed by a system and method that divides a pulsed laser scan line into subsets of irradiation locations. The subsets are typically offset from one another along the scan line. Within each subset, the irradiation locations are separated from one another by a predetermined separation distance. Thus, the irradiation locations in a given subset are interleaved with the irradiation locations in other subsets. The predetermined separation distance is selected at least for the purpose of minimizing plasma shielding effects.
Owner:NIKON CORP

Graphitization apparatus for manufacturing artificial graphite using laser

The present invention relates to a graphitization apparatus for manufacturing artificial graphite using a laser. The graphitization apparatus comprises: a first chamber having doors on opposite walls, the doors being opened only when a saggar enters and exits, and providing a working space for graphitization treatment of a raw material filled in the saggar; a laser heating unit which is composed of a plurality of laser systems and irradiates a laser beam to heat the raw material in the saggar introduced into the first chamber to graphitize the raw material; and a first transfer conveyor which introduces the saggar filled with the raw material into the first chamber and discharges the saggar to the outside of the first chamber after the graphitization treatment is completed.
Owner:EFC CO LTD +4

Novel handheld high-power light cone integrated semiconductor laser and preparation method thereof

The invention relates to the technical field of semiconductor laser preparation, and discloses a novel handheld high-power light cone integrated semiconductor laser and a preparation method thereof.The laser comprises a first heat sink and a second heat sink which are stacked up and down, chips and electrodes are attached to the first heat sink and the second heat sink respectively, and a back-to-back series structure is formed through insulation gaskets and bent electrode plates; and the screws are matched with the insulating terminals to realize mechanical locking. The light cone integrated at the front end covers the light emitting area of the double chips, and rectangular or square light spots with uniform energy are output through total reflection light mixing. The preparation method comprises the following steps: preparing upper and lower semi-finished modules respectively; the inverted buckles are stacked and welded to form a series loop; carrying out mechanical locking and low-temperature insulation packaging; and integrating the optical cone. Power multiplication is achieved through space stacking, connection reliability is guaranteed through the step welding technology, and the LED lamp has the advantages of being small in size, good in heat dissipation, excellent in light spot quality and stable in structure.
Owner:ZHENGZHOU ZHONGLEI OPTOELECTRONICS TECHNOLOGY CO LTD

A frequency selective surface conformal pattern electro-spraying and laser etching combined machining device for complex curved surfaces and a control method thereof

The application discloses a frequency selective surface conformal pattern electro-jet printing and laser etching combined machining device and a control method thereof, and belongs to the field of additive and subtractive combined machining manufacturing.The device comprises a bed body module, a motion module, an electro-jet printing module and a control module, a numerical control G code program is generated through a complex curved surface functional structure paving software, the numerical control G code program is controlled by an upper computer to drive a machine tool box, the bed body and the motion module are matched, and the accurate execution of a complex curved surface electro-jet printing path in the electro-jet printing and laser manufacturing process is completed, and the on-demand manufacturing of different types and different material functional structures can be realized by changing printing parameters of a flow field controller and an electric field controller in the electro-jet printing module.
Owner:DALIAN UNIV OF TECH

Processing method and application of a stimuli-responsive morphing structure

This invention discloses a method for fabricating a stimulus-responsive deformable structure, comprising an actuator layer and a passive layer, specifically including the following steps: S1, preparation of the stimulus-responsive deformable structure; S2, microstructure fabrication pattern design; S3, microstructure laser fabrication; S4, application of a stimulus to cause deformation of the structure; its application is a deformable flexible electronic system. This invention, employing the above steps, provides a method for fabricating a stimulus-responsive deformable structure and its application. It uses a laser to directly fabricate micro-damaged structures on a thin film, and quantitatively controls the deformation parameters of the stimulus-responsive deformable structure by adjusting the pattern, depth, width, arrangement direction, and spacing of the micro-damaged structures. This control is precise and rapid, not limited by material fabrication processes, and has a wide range of applications.
Owner:BEIHANG UNIV

Method for optimizing energy consumption of glass-based display screen

The invention provides a method for optimizing energy consumption of a glass-based display screen, and belongs to the technical field of energy consumption optimization of display screens. According to the method, an optical functional layer is integrated in a glass substrate, a nano resonant structure array is manufactured by femtosecond laser, and a photon localization factor and an ambient light interference characteristic spectrum are obtained. And generating a voltage compensation matrix, a Q value configuration mapping and an environment suppression matrix through the variable component sub-circuit, and dynamically adjusting parameters of a backlight layer and a pixel driving layer of the display screen. According to the method for optimizing the energy consumption of the glass-based display screen, internal physical characteristics, external ambient light interference and display content of the display screen are comprehensively considered, accurate energy consumption optimization is achieved, and meanwhile the display quality is guaranteed. The method has the characteristics of high efficiency, energy conservation and high dynamic adjustment capability.
Owner:深圳市裕融科技有限公司

Method for predicting residual stresses and deformations of laser directed energy deposited ta15 alloy components

The present application relates to the technical field of laser manufacturing and intelligent manufacturing, and particularly relates to a residual stress and deformation prediction method for laser directed energy deposition (LDED) of TA15 alloy components, and a thermal-metallurgical-mechanical multi-physical field coupling model is constructed; firstly, a transient temperature field model during the laser directed energy deposition process is established based on the Fourier heat conduction theory, which comprehensively considers the effects of heat conduction, convection and radiation; then a metallurgical model is established based on the phase transition principle; finally, a multi-stage phase transition dynamics model is established, which considers both diffusion-controlled and non-diffusion-controlled transition mechanisms; by introducing the phase transition dynamics model into the sequentially coupled thermal-mechanical framework, the multi-scale integrated prediction from microstructure evolution to macroscopic stress distribution is realized; and the present application provides a theoretical basis for microstructure regulation and residual stress optimization of the TA15 alloy LDED process.
Owner:SICHUAN UNIV

Method for manufacturing a one-piece mechanical timepiece part

A one-piece mechanical timepiece part formed by a gear for timepiece mechanisms, a wheel for timepiece mechanisms and / or a pinion for timepiece mechanisms, and its related method. The method for manufacturing the one-piece mechanical timepiece part by laser light includes the steps of providing a one-piece material part, oscillating and / or rotating the rotary element and forming the one-piece mechanical timepiece part by power and time modulation of the laser light.
Owner:THE SWATCH GRP RES & DEVELONMENT LTD

A laser manufacturing optical path system based on laser high-frequency spin oscillation

The application provides a laser manufacturing light path system based on laser high-frequency spin oscillation, and belongs to the technical field of laser processing.The system comprises a first laser, a first collimating mirror, a high-frequency vibration module, a scanning galvanometer, a field lens and a forming substrate, a first laser beam is generated by the first laser, is shot into the high-frequency vibration module through the first collimating mirror, is made to rotate circularly along a circular track by the high-frequency vibration module, is shot into the scanning galvanometer, is made to move synchronously along the X-axis direction and the Y-axis direction under the driving of the scanning galvanometer, is shot out after being focused by the field lens, and is used for melting the powder particles laid on the forming substrate.The high-frequency vibration module is coupled with the high-speed scanning of the scanning galvanometer, the high-speed spiral motion track of the light spot is ensured to be connected, the laser beam is made to generate a continuous high-speed spiral motion track along a preset printing path on the surface of the forming substrate, the uniform distribution of elements is realized, and the laser printing quality is improved.
Owner:NINGBO INST OF MATERIALS TECH & ENG CHINESE ACAD OF SCI

Holographic femtosecond laser breaks through the diffraction limit flexible processing system and method

This invention relates to the field of holographic-controlled femtosecond laser micro / nano fabrication technology, and in particular to a flexible holographic femtosecond laser fabrication system and method for overcoming the diffraction limit. The system includes: a laser; an optical path system comprising, sequentially arranged along the laser emission direction, an optical shutter, a beam expander, a first half-wave plate, a first polarizing beam splitter, two laser beam paths, a second polarizing beam splitter, a 4f optical system, an aperture, and a focusing objective; each laser beam path includes a spatial light modulator along the laser emission direction; and a motion platform for clamping, moving, and positioning the material to be processed, positioned in the direction of laser emission from the focusing objective. This invention, by modulating the shape of the laser spot, can achieve two laser spots of arbitrary shapes. By controlling the overlap range of the laser spots and utilizing the principle of phase overlap and energy superposition, material removal is achieved in the overlapping area, ultimately realizing flexible and diverse fabrication of micro / nano structures at sub-diffraction-limit scales.
Owner:QINGDAO UNIV OF TECH +1