Grating coupler and coupling structure and packaging structure of grating coupler and optical fibers

Abstract

The invention discloses a grating coupler, which comprises a silicon substrate layer (1) of a silicon-on-insulator (SOI) substrate, an optical waveguide structure and an optical coupling grating (5). The optical waveguide structure consists of a silicon dioxide intermediate layer (2) of the SOI substrate, a silicon top layer (3) of the SOI substrate and an upper cladding layer (4) from the bottom up. The optical coupling grating (5) is arranged on the silicon top layer (3) of the SOI substrate. An etched hole (6) is etched on the silicon substrate layer (1) of the SOI substrate. The invention additionally discloses a coupling structure of the grating coupler and optical fibers and a packaging structure for coupling of the grating coupler and the optical fibers. By using the grating coupler, the coupling structure and the packaging structure, the passive self-alignment and positioning of the optical coupling grating and the optical fibers can be realized.

Description

technical field [0001] The invention relates to the fields of optical communication and optical interconnection, in particular to a grating coupler on an SOI substrate, a coupling structure with an optical fiber, and a packaging structure. Background technique [0002] With the explosive development of the global digitalization process, information technology places more emphasis on low power consumption, high bandwidth density and low cost. Integration of discrete optoelectronic devices, automated mass production and low-cost assembly is a promising solution. III-V materials have always occupied a dominant position in the field of optoelectronic devices, but due to the inherent characteristics and process limitations of materials, different photonic devices are fabricated on different material substrates (such as InP, GaAs, lithium niobate, etc.) , the integration is very difficult, the integration level is low, the cost is expensive, and the process compatibility with the...

AI Technical Summary

Problems solved by technology

[0005] At present, the coupling between the grating coupler on the SOI substrate and the optical fiber generally adopts the way that the optical fiber is coupled from the upper surface of the SOI substrate; for ordinary symmetrical gratings, the optical fiber usually tilts a small angle (about 8- 10 degrees) in order to obtain a higher optical coupling efficiency; at this time, the alignment and positioning of the optical fiber are still not effectively resolved

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