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155results about How to "Increase erasing speed" patented technology

Preparation method of high-speed low-power-consumption phase change memory

The invention discloses a preparation method of a high-speed low-power-consumption phase change memory. In the method, a superlattice film material with rapid phase change speed and low heat conductivity is used as a phase change material, and an inductive coupling plasma dry method is used to etch the material so as to form a phase change memory unit with good appearance, steep and straight side wall and good consistency. The preparation method comprises the following steps of: (1) washing a substrate; (2) successively depositing a metal film and an insulation layer film; (3) depositing a superlattice film phase change material; (4) gluing and photoetching to form photoresist serving as an etched mask; (5) etching the superlattice film material with inductive coupling plasma etching equipment; (6) removing the etched mask; and (7) successively depositing an insulation layer film and a metal film. According to the invention, the prepared phase change memory has high speed and low power consumption through utilizing the characteristics of the inductive coupling plasma dry method etching on the superlattice phase change film material, such as anisotropism, consistency and the like; and the preparation method disclosed by the invention can be well applied to superintegrated and large-scale industrialized production.
Owner:HUAZHONG UNIV OF SCI & TECH

Split-gate memory device and forming method thereof

The invention provides a forming method of a split-gate memory device. The forming method comprises the steps of: providing a substrate; forming two control gates on the substrate, wherein a region between the two control gates is an erasing gate region, and a region outside the two control gates is a word line region; forming a side wall and a sacrifice side wall which is arranged on the side surface of the side wall; using the sacrifice side wall as a mask to form a floating gate; removing the sacrifice side wall; and forming a tunneling oxide and an erasing gate, wherein the erasing gate and the floating gate have lateral overlapped parts. The invention additionally provides the split-gate memory device. By forming the lateral protruding part of the floating gate and enabling the erasing gate and the floating gate to have the lateral overlapped parts, the overlapped parts can effectively reduce the width of the potential barrier of the tunneling oxide and can improve information erasing speed. By etching a silicon oxide layer and a silicon nitride layer in one step to form a dual-layer side wall and using the dual-layer side wall as a gap layer between word lines and the floating gate, the process of the gap layer is simplified, the uniformity of the gap layer is improved and the writing uniformity is improved.
Owner:SEMICON MFG INT (SHANGHAI) CORP +1
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