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192results about How to "Improve erase efficiency" patented technology

Electrical programming-ultraviolet light erasing memory device structure and preparation method thereof

The invention provides an electrical programming-ultraviolet light erasing memory device structure and a preparation method thereof. A heavily-doped N type monocrystalline silicon wafer is used as a substrate and an extraction electrode of a gate; an oxide insulator with relatively good compactness is used as a charge barrier layer of a memory; a thin-film material with many charge defects or nanocrystalline is used as a charge capture layer; an oxide insulator with relatively good compactness and a forbidden band being large in width as a tunneling layer of the memory; an IGZO film is used as an electroconductive channel of the memory, an active area is defined through photoetching and wet etching and the electroconductive channel is formed; processing of a source electrode and a drain electrode is completed through photoetching, metal deposition and stripping technology; in test, a positive pulse is applied to a gate electrode to realize programming operation of the device; and erasure of the device is realized by using ultraviolet light to irradiate the device without applying any bias voltage. The electrical programming-ultraviolet light erasing memory device structure solves the problem that an IGZO channel-based TFT memory cannot be erased; the erasure efficiency and the working speed of the device are improved; and the application space of the IGZO channel-based TFT memory is enlarged.
Owner:FUDAN UNIV

Method for improving efficiency of erasing floating gate

The invention discloses a method for improving the efficiency of erasing a floating gate, which comprises the following steps: sequentially forming a floating gate (FG) oxide layer, a FG polycrystalline silicon layer, an oxide layer-nitride layer-oxide layer (ONO) dielectric layer, a control gate (CG) polycrystalline silicon layer, a CG silicon nitride layer, a CG silicon oxide layer and a CG silicon nitride hard mask layer on a semiconductor substrate; coating photoresist on the CG silicon nitride hard mask layer, and patterning the photoresist; taking the patterned photoresist as a mask, and sequentially etching the CG silicon nitride hard mask layer, the CG silicon oxide layer, the CG silicon nitride layer, the CG polycrystalline silicon layer and the ONO dielectric layer to form two CGs; forming a CG side wall layer at two sides of each CG; forming a sacrificial layer at the outside of each CG side wall layer; taking the CG side wall layers, the sacrificial layer and the CG as masks, and etching the FG polycrystalline silicon layer to form FG; removing the sacrificial layer; and sequentially forming the oxide layer and depositing the polycrystalline silicon film outside the CG side wall layer and the FG, and finally forming the erasing gate EG by the polycrystalline silicon film. The method can effectively improve the efficiency of erasing the floating gate.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP

Flash memory unit and formation method thereof

The invention discloses a flash memory unit and a formation method thereof. The flash memory unit comprises a substrate, a floating gate, a source line doping area, a second dielectric layer, a control gate, a first side wall, a third dielectric layer, word lines and a bit line doping area, wherein the surface of the substrate is provided with a first dielectric layer, the floating gate is located on the surface of the first dielectric layer, a second opening is formed inside the floating gate, the source line doping area is located at the position, at the bottom of the second opening, inside the substrate, the second dielectric layer is located on the surface of the floating gate and arranged on the surface of the position, at the bottom of the second opening, of the substrate, the control gate is located on the surface of the second dielectric layer, the first side wall is located on the surface of the side wall of the control gate, the third dielectric layer is located on the surface of the side wall of the floating gate, the word lines are located on the two sides of the first side wall, the two sides of the control gate, the two sides of the floating gate and the two sides of the third dielectric layer, and the bit line doping area is located inside the position, on the two sides of the first side wall, the two sides of the control gate, the two sides of the floating gate and the two sides of the word lines, of the substrate. The size of the formed flash memory unit is reduced.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Flash memory unit structure with high coupling ratio and preparation method thereof

The present invention relates to a flash memory unit structure with a high coupling ratio and a preparation method thereof. The flash memory unit structure comprises: a semiconductor substrate, wherein the semiconductor substrate comprises two shallow trench isolations and an active area, and the active area is located in the semiconductor substrate between the two shallow trench isolations; a tunneling oxide layer; a floating gate; a dielectric layer; and a control gate, wherein the dimensions of the top portions of the two shallow trench isolations are equal to the dimension of the top portion of the active area, and the dimension of the tunneling oxide layer is equal to the dimension of the top portion of the active area. A silicon nitride reduction resistance amount prior to depositionof the shallow trench isolations is increased to increase the dimensions of the top portions of the shallow trench isolations; and moreover, in the subsequent technology process, the top portions ofthe shallow trench isolations can be consumed, the dimensions of the top portions of the shallow trench isolations after consumption are equal to the actual dimension of the top portion of the activearea to allow the width of the bottom portion of the floating gate to be equal to the dimension of the top portion of the active layer when a subsequent floating gate process is performed so as to reduce the capacitance of the floating gate to the substrate and increase the coupling ratio of a flash unit.
Owner:SHANGHAI HUALI MICROELECTRONICS CORP

Memory and formation method thereof

A memory and a formation method thereof are disclosed. The method includes the following steps: a substrate is provided, the substrate includes erasure regions, floating gate regions and word line bitline regions, wherein the floating gate regions are located on both sides of the erasure regions, and the word line bit line regions are located on both sides of the erasure regions and the floatinggate regions; a floating grid electrode structure membrane and a dielectric layer located on the floating grid electrode structure membrane are formed on the substrate, and a first opening exposing the floating grid electrode structure membrane of the floating gate regions and the word line bit line regions are disposed in the dielectric layer; a first side wall is formed on the side wall of the first opening; a control grid electrode membrane is formed on the bottom of the first opening; a second side wall is formed on the side wall of the first side wall; the control grid electrode membraneand the floating grid electrode structure membrane exposed by the first side wall, the second side wall, and the dielectric layer are removed to form a floating gate structure layer, a control grid electrode layer and a second opening; the dielectric layer and the floating gate structure layer on the erasure regions are removed to form a third opening and a floating grid electrode structure; and an erasure grid electrode structure is formed in the third opening. The method enables the production efficiency of the memory to be improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Partial erasing liquid-crystal handwriting board device and forming method thereof

ActiveCN109932834AFast implementation of partial erasurePartial Erase ImplementationNon-linear opticsInput/output processes for data processingInfraredBasic dimension
The invention discloses a partial erasing liquid-crystal handwriting board device and a forming method thereof. The partial erasing liquid-crystal handwriting board device comprises a liquid-crystal handwriting board and an erasing pen. The liquid-crystal handwriting board includes a substrate, a first conductive layer, an infrared absorbing material layer, a liquid crystal layer, a second conductive layer, and a flexible transparent substrate. The first conductive layer and the infrared absorbing material layer are arranged on the substrate in a basic dimension consistence manner. The first conductive layer and the second conductive layer are transparent conductive layers; the second conductive layer is formed on the flexible transparent substrate; and the substrate and the flexible transparent substrate jointly clamp the liquid crystal layer to form a liquid crystal box of the liquid-crystal handwriting board. The erasing pen includes an infrared emitting light source and a control switch. According to the partial erasing liquid-crystal handwriting board device, the partial erasing is realized by means of non-contact photothermal conversion; the erasing efficiency is high; the device is convenient to use; and energy-saving and low-cost effects are realized.
Owner:JIANGSU JICUI INTELLIGENT LCD TECH CO LTD

Method for manufacturing split gate flash by reducing writing interference

The invention discloses a method for manufacturing a split gate flash by reducing writing interference. After a control gate, a floating gate, an erasing gate and a word line are formed on a semiconductor substrate, lightly-doped ions are implanted; and the iron implantation comprises a vertically lightly doping step and a pocket ion implantation step, wherein in the pocket ion implantation step, an ion beam is injected into the semiconductor substrate below the word line at an inclined angle. By the method for manufacturing the split gate flash, an ion implantation step which is used for defining threshold value voltage of a flash unit in the prior art is eliminated; after a step of forming the word line, the pocket ion implantation step is added to reduce the doping concentration of a substrate area below a clearance between the word line and the floating gate, so that the difference of the doping concentration of the substrate area below the clearance between the word line and the floating gate and the doping concentration between the concentrations of channels below the floating gate is reduced; therefore, a writing unit which is not ought to have a writing change is prevented from having the writing change, and the writing interference is effectively avoided.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1

Teaching board

The invention discloses a teaching board which comprises a base. A support column is fixedly connected with the upper side of the base, a teaching board body is fixedly connected with a side of the support column, a mounting frame is fixedly connected with the side, which is far away from the support column, of the teaching board body, a mounting cover is fixedly connected with the lower side of the mounting frame, a first bevel gear is rotationally connected with the inner bottom of the mounting cover by a first transmission shaft, the lower end of the first transmission shaft penetrates thebottom of the mounting cover and is connected with a crank, and slide plates are connected with two sides of the first bevel gear by adjusting mechanisms. The teaching board has the advantages that the two slide plates can be driven by the adjusting mechanisms to move towards opposite directions, mounting plates can be driven to move under the movement actions of the slide plates, brushes can be driven to move under the movement actions of the mounting plates, accordingly, board writing on the teaching board body can be quickly erased under the movement actions of the brushes, and the erasingefficiency of the teaching board body can be improved without influence on the teaching progress of teachers or influence on learning of students.
Owner:JIANGSU MARITIME INST
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