A
thin film transistor memory provided by the present invention comprises a back gate, a
barrier layer, a floating gate, a tunneling layer, a channel, a source
electrode and a drain
electrode, the back gate comprises a
bottom gate structure and a side gate structure, the side gate structure is arranged on a part of the upper surface of the
bottom gate structure to form an L-shaped structure, the
barrier layer is arranged on the upper surface of the
bottom gate structure, and the floating gate is arranged on the upper surface of the bottom gate structure. The floating gate is arranged on the upper surface of the
barrier layer, the upper surface of the floating gate is flush with the upper surface of the side gate structure, the tunneling layer is arranged on the upper surface of the floating gate, the channel is arranged on the upper surface of the tunneling layer, the source
electrode and the drain electrode are arranged on the upper surface of the channel, and the side gate structure is arranged on the upper surface of the channel. According to the technical scheme, energy band regulation and control can be carried out on the floating gate through the side gate structure, so that the electronic erasing speed is increased, the electronic erasing
voltage is reduced, the
power consumption can be reduced, and as the channel is not in contact with the floating gate, the memory is not easy to leak and higher in reliability. The invention also provides a preparation method of the
thin film transistor memory.