The invention provides a precise air floating main shaft based on
small hole throttling. The precise air floating main shaft comprises a cylinder
barrel, a shell, a rotating shaft, a front radial air floating bearing, a rear radial air floating bearing, a front
axial thrust air floating bearing, a rear
axial thrust air floating bearing, a driving motor, a broach mechanism and various sensors. A reciprocating type spiral groove is formed in the outer circle of the cylinder
barrel and forms a spiral cooling
water channel with the shell, and the rear end cover is integrated with an air inlet interface, an air outlet interface, a cooling water interface and an air control interface; compressed gas is throttled through an axial gas path and a
small hole to form a high-rigidity gas film to support the rotating shaft, and cooling water flows in the spiral water path to take away heat; the control module is based on rotating speed, displacement,
temperature and pressure signals, adopts a thermal-mechanical
coupling model and a predictive
control algorithm, adaptively adjusts air supply pressure and cooling
water flow, and is suitable for semiconductors and ultra-precision
machining equipment. Through the
collaborative design of the
small hole throttling
air bearing, the reciprocating type spiral cooling
water channel and multi-sensor
intelligent control, the rigidity, the
heat stability and the operation reliability of the main shaft are greatly improved, and the high-precision ultra-precision
machining device is suitable for long-term high-rotating-speed and high-precision ultra-precision
machining.