The invention discloses an in-
wafer reliability
screening method for a GaN HEMT (
High Electron Mobility
Transistor) device. The in-
wafer reliability
screening method is characterized by comprising the following steps that: firstly, in-
wafer electroluminescence spectrum testing platform is established, a GaN
heterojunction HEMT device wafer is placed on a probe platform in a
darkroom, and then probes are respectively pressed on a grid
electrode, a source
electrode and a leakage
electrode; and then, the source electrode is grounded, certain forward bias is applied to the leakage electrode, backward bias Vgs, which changes from pinch-off
voltage Vp to 0V, is applied to the grid electrode, a change relationship between the
luminous intensity of a GaN
heterojunction HEMT device and
grid voltage is tested by virtue of a spectrum testing
system, the
luminescence spectrum of the device is tested under the adopted bias point Vgsm with the largest
luminous intensity, and then the spectrum is analyzed to evaluate the reliability of the device. The in-wafer reliability
screening method has the advantages that in-wafer screening can be realized; a series of reliability screening
preparation procedures, such as scribing and packaging, is eliminated without long-time
electric stress; and the reliability screening time is shortened, costs are saved, and work efficiency is improved.