The invention discloses an in-wafer reliability screening method for a GaN HEMT (High Electron Mobility Transistor) device. The in-wafer reliability screening method is characterized by comprising the following steps that: firstly, in-wafer electroluminescence spectrum testing platform is established, a GaN heterojunction HEMT device wafer is placed on a probe platform in a darkroom, and then probes are respectively pressed on a grid electrode, a source electrode and a leakage electrode; and then, the source electrode is grounded, certain forward bias is applied to the leakage electrode, backward bias Vgs, which changes from pinch-off voltage Vp to 0V, is applied to the grid electrode, a change relationship between the luminous intensity of a GaN heterojunction HEMT device and grid voltage is tested by virtue of a spectrum testing system, the luminescence spectrum of the device is tested under the adopted bias point Vgsm with the largest luminous intensity, and then the spectrum is analyzed to evaluate the reliability of the device. The in-wafer reliability screening method has the advantages that in-wafer screening can be realized; a series of reliability screening preparation procedures, such as scribing and packaging, is eliminated without long-time electric stress; and the reliability screening time is shortened, costs are saved, and work efficiency is improved.