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215results about How to "Manufacturing process compatible" patented technology

Double-channel MOS-HEMT (Metal Oxide Semiconductor-High Electron Mobility Transistor) device and manufacturing method

InactiveCN101916773AAddressing Excessive Threshold Voltage and Gate LeakageIncrease saturation drain current and output powerSemiconductor/solid-state device manufacturingSemiconductor devicesPhysicsOxide semiconductor
The invention discloses an Al2O3/AlN/GaN/AlGaN/GaN double-channel MOS-HEMT (Metal Oxide Semiconductor-High Electron Mobility Transistor) device and a manufacturing method. The double-channel MOS-HEMT device comprises a GaN nucleating layer 9, a GaN buffer layer 8, an AlGaN lower barrier layer 7, a GaN channel layer 6, an AlN upper barrier layer 5, an Al2O3 gate dielectric layer 4, a source electrode 1, a drain electrode 3 and a gate electrode 2, wherein the GaN nucleating layer 9, the GaN buffer layer 8, the AlGaN lower barrier layer 7, the GaN channel layer 6 and the AlN upper barrier layer 5 are formed on a sapphire substrate 10 in sequence, the Al2O3 gate dielectric layer 4, the source electrode 1 and thea drain electrode 3 are formed on the AlN upper barrier layer 5, and the gate electrode 2 is formed on the Al2O3 gate dielectric layer 4. The invention is characterized in that an AlN material with good heat conductivity and greater forbidden band width is used as the upper barrier layer, so that the self heating effect of the device is reduced, and the threshold voltage of the device in a depletion mode is reduced; a depth potential well made from AlN and GaN is used for suppressing the hot electron effect under high voltage, so that the current collapse effect of the device is reduced; the strong polarization feature of the AlN material is used to increase the electron concentration in the channel and increase the saturation current and the output power of the device; and the Al2O3 material deposited by using the atomic layer deposition process is used as the gate dielectric layer, so that the leakage current of the gate electrode is reduced, and the breakdown voltage of the device is increased.
Owner:SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI

Composite passivated anti-reflection film used for crystalline silicon solar battery and preparation method thereof

The invention discloses a composite passivated anti-reflection film used for a crystalline silicon solar battery and a preparation method thereof. The composite passivated anti-reflection film consists of a silicon oxide (SiO2) layer, an amorphous alumina (a-Al2O3) layer and an amorphous silicon nitride (a-Si1-xNx) layer which are arranged on the emitter on a light receiving surface of the crystalline silicon solar battery in turn. The preparation method comprises the following steps of: preparing an a-Al2O3 layer on the emitter on the light receiving surface of the crystalline silicon solar battery by a plasma enhanced chemical vapor deposition (PECVD) process or an atomic layer deposition (ALD) process; forming the SiO2 layer between the emitter layer and the a-Al2O3 layer by an annealing process; and preparing the a-Si1-xNx layer on the a-Al2O3 layer by the PECVD process. The composite passivated anti-reflection film has the advantages that: the a-Si1-xNx anti-reflection film has a good anti-reflection effect; the a-Al2O3 / SiO2 composite passivated film has double effects of chemical passivation and field passivation and has a good passivation effect; the a-Si1-xNx / a-Al2O3 / Si2O composite passivated anti-reflection film has high thermal stability and is compatible with a subsequent battery preparation process; and the anti-ultraviolet (UV) performance is high.
Owner:上海太阳能电池研究与发展中心

Flexible thin film solar cell and manufacturing method thereof

The invention discloses a flexible thin film solar cell and a manufacturing method thereof, wherein the manufacturing method comprises the following steps: providing a hard support plate; forming a stripping layer on the surface of the hard support plate; forming a thin film solar cell layer series on the surface of the stripping layer; forming a flexible support layer on the surface of the thin film solar cell layer series; and separating the flexible support layer and the whole thin film solar cell layer series from the hard support plate. In the invention, the flexible thin film solar cell can be manufactured directly on the surface of the hard support plate such as glass without depending on traditional flexible substrates which are high in requirements for physical and chemical characteristics and high in expense and without the complicated flexible thin film solar cell manufacturing process of firstly adhering the flexible substrate on the surface of the hard support plate and then carrying out thin film deposition, therefore, the method of the invention is a revolutionary method for directly manufacturing a large-area and internal cascade flexible thin film solar cell on the hard support plate.
Owner:BEIJING JINGCHENG BOYANG OPTOELECTRONICS EQUIPCO

SOI (silicon on insulator) based electrooptical modulator based on symmetrical and vertical grating coupling

ActiveCN102540505AIntegration of coupling and modulation functionsEasy alignmentNon-linear opticsGratingCoplanar waveguide
The invention discloses an SOI (silicon on insulator) based electrooptical modulator based on symmetrical and vertical grating coupling, which comprises a symmetrical and vertical coupling grating, a 3-d B optical beam splitter, two mode converters, two optical phase shift arms, an optical beam combiner, two coplanar waveguide wave traveling electrodes and an annular metal alignment mark, wherein the 3-d B optical beam splitter acts as an interface of the SOI based electrooptical modulator and a single mode fiber or an input end of a coupler and the SOI based electrooptical modulator; the two mode converters act as the connection of a wide wave guide of the symmetrical and vertical coupling grating and a single mode ridge-shaped waveguide; each optical phase shift arm consists of the single mode ridge-shaped waveguide and an electric structure embedded into the single mode ridge-shaped waveguide; the optical beam combiner is used for combining the light in the two optical phase shift arms which are divided by the symmetrical and vertical coupling grating into one beam, thus phase modulation of light is converted into intensity modulation; the coplanar waveguide wave traveling electrodes are respectively positioned on the two optical phase shift arms, form electric contact with the electric structure in the optical phase shift arms, and are used for the loading and transmission of radio frequency / micro wave electrical modulation signals; and the annular metal alignment mark is positioned around the symmetrical and vertical coupling grating, and is used for the alignment of the optical fiber in an optical grating test.
Owner:INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI

Display device and display substrate thereof

The invention provides a display device and a display substrate thereof. The display substrate comprises a display area, a porose area, and a partition area between the display area and the porose area. The partition area is provided with at least one partition ring surrounding the porose area, and is used for partitioning an organic light-emitting material layer. The partition ring comprises at least a support portion and a partition portion. The partition portion is provided with a tensile stress layer used for applying tensile stress to the partition portion. When the organic light-emittingmaterial layer is vapor-deposited, partial section of the partition portion in the partition ring is suspended. The partitioning effect on the organic light-emitting material layer is good, and external water and oxygen can be prevented from entering the display area from the opening. In addition, the partition portion can automatically block the organic light-emitting material layer. The use oflaser burning to remove the organic light-emitting material layer around the porose area is avoided. A hot process is omitted. The spacing between the porose area and the display area is shortened. The border of the porose area is reduced. Third, the tensile stress layer can apply tensile stress to the partition portion to prevent the suspended partition portion from collapsing and falling off. The partitioning performance of the partition portion is reliable.
Owner:YUNGU GUAN TECH CO LTD

Method for bridging electrodes of LED light-emitting units isolated by deep trenches

The invention provides a method for bridging electrodes of LED light-emitting units isolated by deep trenches. The method is specifically implemented for large LED chips with a plurality of light-emitting units isolated by deep trenches. The method includes steps of depositing first passivation layers; performing spin-coating for liquid insulating materials to fill the liquid insulating materials in the isolation trenches among the light-emitting units and forming a flat film on the surface of a chip; curing the liquid insulating materials at a high temperature; etching the film formed by the insulating materials so as to expose the passivation layers on surfaces of the light-emitting units and enabling surfaces, which are positioned at the isolation trenches, of the insulating materials to be flush with surfaces of the passivation layers; depositing second passivation layers to seal parts, which are positioned at the isolation trenches, of the insulating materials in the passivation layers; and etching the passivation layers and manufacturing electrode grooves; depositing metal, manufacturing the electrodes by a lift-off technology and manufacturing connecting bridges of the electrodes on upper surfaces of the passivation layers. The method has the advantages the electrode bridging yield is increased, and the method is applicable to light-emitting unit structures with rectangular, regularly trapezoidal or reversely trapezoidal cross sections, and is particularly applicable to isolation trenches with high depth-to-width ratios.
Owner:SOUTH CHINA UNIV OF TECH

Non-refrigerated infrared detection focal plane device

The invention, which belongs to the technical field of the non-refrigerated infrared detection, relates to a non-refrigerated infrared detection focal plane device. The device comprises a substrate structure, a support structure, and a bridge deck structure. The bridge deck structure is supported on a substrate by bridge legs and bridge piers, an infrared resonant cavity is formed between an infrared absorbed layer film and a reflecting layer. And a thermo-sensitive layer film is on a surface of the infrared absorbed layer film outside the infrared resonant cavity. According to the invention, a customary thinking employed in the invention of a present device structure is broken through; a position relation of the infrared absorbed layer film and the thermo-sensitive layer film within the bridge deck structure is inversed, so that the thermo-sensitive layer film is arranged on the surface of the infrared absorbed layer film outside the infrared resonant cavity, and thus an infrared absorptivity of the infrared detection focal plane device is increased; and therefore, a detection efficiency of the non-refrigerated infrared detection focal plane device is further improved. Furthermore, an anti-reflection film is not required by the device, so that the device structure is simplified to some extent and device cost is also reduced appropriately.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Tunneling field effect transistor and preparation method thereof

The invention discloses a tunneling field effect transistor and a preparation method thereof. The transistor comprises: a semiconductor substrate, a first channel region and a second channel region, a first gate stack zone, a second gate stack zone, a first source zone, a leakage zone, a second source zone a third insulating layer and a source electrode S, wherein the first conducting layer in the first gate stack zone is connected with the second conducting layer of the second gate stack outside the channel region to form a interdigital grid; the electrodes of the first source zone and second source zone, the drain electrode in the leakage zone and the gate electrode G on the interdigital grid are formed in the third insulating layer. According to the invention, the work current of the tunneling field effect device provided in the invention is a tunneling current and the work current is a current of an MOS (Metal-Oxide-Semiconductor) field effect transistor. The driving current is substantially improved. Meanwhile, the manufacture technology is compatible with the tradition technology and the area is saved, because the interdigital structure is adopted and the first source zone plays a role in substrate lead-out.
Owner:SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORP +1

Short wave optical thermal detector and focal plane array device thereof

The invention discloses a short wave optical thermal detector and a focal plane array device thereof. The short wave optical thermal detector includes an electrode, an electric contact, a photo-thermal detection structure and a substrate. Two ends of the electrode are connected with the electric contact and the photo-thermal detection structure respectively. The photo-thermal detection structure includes heat reactive lines and conducting Na particles capable of generating local surface Plasmon resonance. When electromagnetic radiation of a specific wavelength acts on the conducting Na particles, local surface Plasmon resonance is generated, os that hot spots are formed. Therefore, temperature rise of the heat reactive lines is caused and electric parameter change is caused, and detection of specific electromagnetic radiation by the detector is realized. Through adjusting geometric parameters of the conducting Na particles and combining the conducting Na particles of different parameters, selective spectrum radiation detection and multi-waveband radiation detection are realized. The optical thermal detector provided by the invention is simple in structure and the low cost short wave optical (ultraviolet, visible light and near infrared) waveband detector and the focal plane array device thereof are realized.
Owner:WUHAN IND INST FOR OPTOELECTRONICS

Non-refrigerating film infrared focal plane array detector structure and production method thereof

A non-refrigerating film infrared focal plane array detector structure comprises a first substrate provided with reading circuits, and a second substrate provided with thermal isolation microbridge arrays and sensitive element arrays. The first substrate and the second substrate are integrally bonded. The etched second substrate serves as a pier for each thermal isolation microbridge unit in the thermal isolation microbridge arrays, and a support layer tightly attached to the top of the pier serves as a deck. The deck of each thermal isolation microbridge unit is provided with one sensitive element array. Each sensitive element array is electrically connected with the corresponding reading circuit of the first substrate through a lead electrode. A production method of the non-refrigerating film infrared focal plane array detector structure includes: preparing a pattern on a bonding surface of the first substrate, preparing the support layer, preparing the sensitive element arrays, protecting the front side of the second substrate, preparing the thermal isolation microbridge arrays, bonding the first substrate and the second substrate, removing a front protective layer of the second substrate, and connecting electrodes of the sensitive element electrode reading circuits.
Owner:SICHUAN UNIV

Separated grid type embedded layer float grid nonvolatile storage unit and manufacturing method thereof

The invention relates to a separated grid type embedded layer float grid nonvolatile storage unit and a manufacturing method thereof. The storage unit comprises a semiconductor substrate, a source region, a drain region, a channel region, a float grid, a source electrode and a control grid. The float grid is below first insulated medium layers and fully embedded in the semiconductor substrate, a second insulated medium layer between the float grid and the semiconductor substrate is connected with the first insulated medium layers and fully enclosures the float grid. The float and the second insulated medium layer are positioned between the source region and the drain region, the second insulated medium layer is far from one side of the drain region and contacted with the source region, thechannel region comprises a first channel region which is arranged between the drain region and the second insulated medium layer along the surface of the semiconductor substrate and a second channelalong the surface of the second insulated medium layer to the source region, and first insulated medium layers are arranged between the float grid and the control grid as well as between the float grid and the source electrode, a part protruding levelly at the bottom of the source electrode is positioned above the first insulated medium layer, and a covering part is arranged in the direction vertical to the surface of the semiconductor substrate.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Reverse blocking type IGBT and manufacturing method therefor

The invention discloses a reverse blocking type IGBT and a manufacturing method therefor, and belongs to the technical field of a semiconductor power device. By introducing trench emitter and trench collector structures, the reverse breakdown voltage of a device is improved without influencing the threshold voltage and switch-on of an IGBT device; the overall gate capacitance is lowered, the switching speed of the device is improved, the switching loss and driving power consumption of the device are lowered, and the compromising relation between forward switch-on voltage drop and switch-off loss of the conventional CSTBT structure is improved; the problems of current, voltage oscillation and EMI in the device starting dynamic process can be avoided, and device reliability is improved; theelectric field concentration effect at the bottom of the trench is improved, the forward breakdown voltage of the device is improved, and reliability of the device is further improved; and the currentcarrier enhancement effect at the emitter end of the device is further improved, the current carrier concentration distribution in a drift region can be improved, and compromising between forward switch-on voltage drop and switch-off loss can be further improved. The manufacturing method disclosed in the invention is compatible with the existing manufacturing process of a CSTBT device.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA
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