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32results about How to "Improve infrared absorption" patented technology

Non-refrigerated infrared detection focal plane device

The invention, which belongs to the technical field of the non-refrigerated infrared detection, relates to a non-refrigerated infrared detection focal plane device. The device comprises a substrate structure, a support structure, and a bridge deck structure. The bridge deck structure is supported on a substrate by bridge legs and bridge piers, an infrared resonant cavity is formed between an infrared absorbed layer film and a reflecting layer. And a thermo-sensitive layer film is on a surface of the infrared absorbed layer film outside the infrared resonant cavity. According to the invention, a customary thinking employed in the invention of a present device structure is broken through; a position relation of the infrared absorbed layer film and the thermo-sensitive layer film within the bridge deck structure is inversed, so that the thermo-sensitive layer film is arranged on the surface of the infrared absorbed layer film outside the infrared resonant cavity, and thus an infrared absorptivity of the infrared detection focal plane device is increased; and therefore, a detection efficiency of the non-refrigerated infrared detection focal plane device is further improved. Furthermore, an anti-reflection film is not required by the device, so that the device structure is simplified to some extent and device cost is also reduced appropriately.
Owner:UNIV OF ELECTRONICS SCI & TECH OF CHINA

Pyroelectric detector based on current type relaxor ferroelectric single crystal and preparing method thereof

InactiveCN106768389AQuick responseStrong ability to resist external noise interferencePyrometry using electric radation detectorsPyroelectric detectorsSingle crystal
The invention relates to a pyroelectric detector based on current type relaxor ferroelectric single crystal. The pyroelectric detector comprises a hollow packaging tube shell, an optical filter, a sensitive element chip Up and a line substrate. The packaging tube shell comprises a tube cap and a base, the optical filter is embedded in a window formed in the upper surface of the tube cap, the lower end of the tube cap is fixedly connected with the base and forms a hollow seal structure with the base, the line substrate is arranged on the base and located in the seal structure, a suspension supporting frame is arranged on the line substrate, and the sensitive element chip Up is arranged on the upper surface of the suspension supporting frame and located under the optical filter; a feedback amplifying circuit is arranged on the line substrate, and the sensitive element chip Up is connected between the two input ends of the feedback amplifying circuit through the suspension supporting frame. The current type circuit is adopted, pyroelectric detector is high in capacity for resisting outside noise interference and capable of fast responding outside infrared radiation, and the time of startup preheating and signal stabilizing is shortened.
Owner:北立传感器技术(武汉)有限公司

High-performance CMOS infrared micro bolometer based on surface electromagnetic wave resonance

The invention discloses a high-performance CMOS infrared micro bolometer based on surface electromagnetic wave resonance. The micro bolometer comprises an L-shaped micro bridge structure. The micro bridge structure comprises bridge piers, bridge arms and an infrared absorbing member. The infrared absorbing member has a multilayer structure which is composed of a silicon nitride layer, a metal grating layer, a silicon dioxide layer, a zigzag aluminum heat-sensitive resistor layer and a silicon dioxide layer, wherein the silicon nitride layer, the metal grating layer, the silicon dioxide layer,the zigzag aluminum heat-sensitive resistor layer and the silicon dioxide layer are successively arranged from top to bottom. Compared with a traditional micro bolometer structure, the micro bolometerstructure is advantageous in that the metal grating is added above the heat-sensitive resistor layer, thereby forming an MIM structure. The CMOS infrared micro bolometer utilizes a surface electromagnetic wave for exciting resonance, thereby remarkably improving infrared absorbility of a detector, improving detector response and realizing high-efficiency detection. Furthermore the micro bolometeraccording to the invention is based on a standard CMOS integrated circuit process and has advantages of easy process realization, low cost, etc.
Owner:NANJING UNIV

Non-refrigeration broadband infrared detector

The invention discloses a non-refrigeration broadband infrared detector. Unit components of the non-refrigeration broadband infrared detector comprise silicon substrates, support layers, metal electrodes, broadband infrared absorption layers, thermal-sensitive layers and a suspension hole, wherein the thermal-sensitive layers are arranged in the middle of the upper parts or the lower parts of the broadband infrared absorption layers; the metal electrodes are arranged on two sides of the thermal-sensitive layers and the upper parts of two ends of the broadband infrared absorption layers; the support layers are arranged at the upper parts of the silicon substrates; the suspension hole is formed between the silicon substrates and the support layers and penetrates through the silicon substrates and the support layers; the broadband infrared absorption layers and the thermal-sensitive layers are arranged above the support layers and completely cover an opening in the upper end of the suspension hole between the support layers. Through the non-refrigeration broadband infrared detector, the broadband infrared absorption layers and the thermal-sensitive layer are combined together to form an infrared sensitive layer; with combination of the infrared sensitive layer and the suspension structure, the performance of the detector can be greatly improved; the problems of complex process, narrow infrared absorption band and low infrared absorption rate of the existing non-refrigeration broadband infrared detector are solved; the infrared detection with non-refrigeration broadband, low cost and high sensitivity is achieved.
Owner:CHONGQING INST OF GREEN & INTELLIGENT TECH CHINESE ACADEMY OF SCI

Caesium and antimony co-doped stannic oxide nano powder and preparation method of dispersion solution thereof

InactiveCN109437287ASmall particle sizeHigh degree of monodispersityTin oxidesAir atmosphereTetrachloride
The invention relates to a method for preparing caesium and antimony co-doped stannic oxide nano powder and a dispersion solution thereof by using an in-situ doped cohydrolysis method. The method comprises the specific operating steps: weighing stannic tetrachloride pentahydrate, trichloroantimony, cesium carbonate and a double component chelating agent and adding the mixture into a hydrochloric acid solution and uniformly stirring the solution; dropwise adding ammonia water into the solution to obtain a precipitate, and stirring the solution to react fully; pouring the precipitate and carrying out vacuum suction filtration, washing the precipitate with deionized water repeatedly, drying the precipitate and grinding the precipitate; sintering the powder in an air atmosphere at a special temperature for a while to obtain the powder which is the caesium and antimony co-doped stannic oxide nano powder; and adding the prepared nano powder into a nano grinding machine, and adding a solventand a dispersing agent and controlling the grinding conditions to prepare the nano dispersion solution finally. The caesium and antimony co-doped stannic oxide nano powder and the dispersion solutionthereof prepared by the method are small in grain size, high in monodispersed degree, high in conducting efficiency and high in infrared absorptivity, so that the using effect of the powder is improved greatly.
Owner:奈蓝(上海)新材料科技有限公司

High performance cmos infrared microbolometer based on surface electromagnetic wave resonance

The invention discloses a high-performance CMOS infrared micro bolometer based on surface electromagnetic wave resonance. The micro bolometer comprises an L-shaped micro bridge structure. The micro bridge structure comprises bridge piers, bridge arms and an infrared absorbing member. The infrared absorbing member has a multilayer structure which is composed of a silicon nitride layer, a metal grating layer, a silicon dioxide layer, a zigzag aluminum heat-sensitive resistor layer and a silicon dioxide layer, wherein the silicon nitride layer, the metal grating layer, the silicon dioxide layer,the zigzag aluminum heat-sensitive resistor layer and the silicon dioxide layer are successively arranged from top to bottom. Compared with a traditional micro bolometer structure, the micro bolometerstructure is advantageous in that the metal grating is added above the heat-sensitive resistor layer, thereby forming an MIM structure. The CMOS infrared micro bolometer utilizes a surface electromagnetic wave for exciting resonance, thereby remarkably improving infrared absorbility of a detector, improving detector response and realizing high-efficiency detection. Furthermore the micro bolometeraccording to the invention is based on a standard CMOS integrated circuit process and has advantages of easy process realization, low cost, etc.
Owner:NANJING UNIV

MEMS thermopile infrared detector and manufacturing method thereof

The invention discloses an MEMS thermopile infrared detector and a manufacturing method thereof, and the infrared detector comprises: a substrate, which is provided with a heat insulation cavity; a supporting layer, which is formed on the upper surface of the substrate; a thermopile unit, which is formed on the supporting layer and sequentially comprises a first thermocouple layer, a first insulating layer and a second thermocouple layer from bottom to top, wherein the first thermocouple layer and the second thermocouple layer are connected through a first contact hole in the first insulating layer; a second insulating layer, an electromagnetic shielding layer and an infrared absorption layer, which are sequentially formed on the thermopile unit, wherein the infrared absorption layer and the second insulating layer are partially etched to form a second contact hole. According to the invention, the electromagnetic shielding layer which can be grounded is arranged below the infrared absorption layer, so that electromagnetic shielding is realized, measurement errors are reduced, and the reliability of the detector is improved; in addition, the electromagnetic shielding layer can reflect infrared radiation generated by a detected object, and secondary absorption of the infrared absorption layer is facilitated, so that the infrared absorption rate of the infrared absorption layer is improved, and the infrared detection performance is enhanced.
Owner:山东新港电子科技有限公司

Liquid crystal box for infrared thermal imaging detector

The invention relates to a liquid crystal box for an infrared thermal imaging detector. In the infrared thermal imaging detector based on a liquid crystal rotation effect, infrared absorption rate of liquid crystal per se is low and the liquid crystal is difficult to use as an infrared sensitive material. The liquid crystal box for the infrared thermal imaging detector comprises an upper substrate, a lower substrate, orientation layers, a liquid crystal layer and sealing rings, wherein the orientation layers are arranged at the inner sides of the substrates, the liquid crystal layer is sandwiched between the orientation layers, the upper substrate transmits infrared light and visible light, and another substrate transmits the visible light; the orientation layers are made of an infrared light and visible light transmitting polymer material, parallel grooves are respectively and uniformly formed at one side of each of the two orientation layers, which faces the liquid crystal layer, and are perpendicular to one another, and infrared absorption layers are plated on the orientation layers by using a thin film deposition manner, and are made of a material which has better absorption characteristic on middle and far infrared rays. By adopting the liquid crystal box, the infrared absorption rate of a thin film is improved, the transformation efficiency of infrared absorption is improved, and the sensitivity of infrared detection is improved.
Owner:XIAN TECH UNIV

A pyroelectric relaxation single crystal ultra-thin sensitive chip and its preparation method

ActiveCN106784290BGuaranteed firmnessThinning of large-scale pyroelectric single crystal materialsThermoelectric device with dielectric constant thermal changeMetal coatingSingle crystal
The invention relates to a pyroelectric relaxation single-crystal ultra-thin sensitive chip and a preparation method thereof. The preparation method comprises: grinding and chemical-mechanical polishing the front and back of the single-chip, and then performing the grinding and chemical-mechanical polishing on the The front and back of the single wafer are vacuum-deposited with a metal film layer; a blackened product is prepared, the blackened product is sprayed on the back of the single wafer after coating, and a mask blackened layer is formed on the back of the single wafer. The preparation method of a pyroelectric relaxation single crystal ultra-thin sensitive chip of the present invention adopts the new chemical mechanical grinding and polishing technology, the vacuum evaporation metal film layer and the ultrasonic spraying polymer mask blackening layer technology, to achieve The effective thinning of large-size pyroelectric single crystal materials ensures the firmness of the metal coating layer, as well as the uniformity, high adhesion and high infrared absorption rate of the blackened absorbing layer. Pyroelectric relaxor ferroelectric single crystal sensitive chip provides a new direction.
Owner:北立传感器技术(武汉)有限公司
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