The invention discloses a
relaxor ferroelectric single crystal-based Y
waveguide chip integrated structure and a preparation method and application thereof, and the method comprises the steps:
sputtering a
titanium film on the surface of a PIN-PMN-PT substrate, transferring a Y
waveguide pattern to the
titanium film after photoetching, carrying out the selective
etching of the
titanium film after photoetching, forming a Y-type titanium
diffusion waveguide pattern, and carrying out the preparation of the
relaxor ferroelectric single crystal-based Y waveguide
chip integrated structure. The substrate with the Y-type titanium
diffusion waveguide pattern and PbO
powder are sealed and then subjected to titanium
diffusion for 12-36 h at the temperature of 900-1000 DEG C, and then annealing is conducted in the
oxygen atmosphere; then depositing a SiO2 buffer layer on the PIN-PMN-PT substrate,
etching an
electrode contact window pattern, evaporating a
gold film on the etched SiO2 buffer layer, and then selectively
etching and reserving the
gold film corresponding to the
electrode contact window pattern as a modulation
electrode; and performing optical
grinding and
polishing and polarization on the end face of the Y waveguide
chip. According to the invention, the PIN-PMN-PT
single crystal is taken as the substrate, and an optimized titanium diffusion and electrode preparation process is combined, so that the Y waveguide device with low half-wave
voltage,
low transmission loss and high temperature stability is prepared, and the Y waveguide device can be applied to a
spaceflight-level
fiber-optic
gyroscope system.