82results about How to "Improved thermal isolation" patented technology

Embodiments of the present invention are generally directed to apparatus and methods for a plasma-processing chamber requiring less maintenance and downtime and possessing improved reliability over the prior art. In one embodiment, the apparatus includes a substrate support resting on a ceramic shaft, an inner shaft allowing for electrical connections to the substrate support at atmospheric pressure, an aluminum substrate support resting on but not fixed to a ceramic support structure, sapphire rest points swaged into the substrate support, and a heating element inside the substrate support arranged in an Archimedes spiral to reduce warping of the substrate support and to increase its lifetime. Methods include increasing time between in-situ cleans of the chamber by reducing particle generation from chamber surfaces. Reduced particle generation occurs via temperature control of chamber components and pressurization of non-processing regions of the chamber relative to the processing region with a purge gas.

The invention concerns a refrigerant compressor with a motor, a compressor driven by the motor, and a muffling device having at least one muffler with a housing. It is endeavoured to reduce the thermal influence of suction gas in the refrigerant compressor. For this purpose, it is ensured that the housing has at least one outer wall, which is made of a foamed plastic.

An electrical fuse is formed on a semiconductor substrate and a first dielectric layer is formed over the electrical fuse. At least one opening is formed by lithographic methods and a reactive ion etch in the first dielectric layer down to a top surface of the electrical fuse or down to shallow trench isolation. A second dielectric layer is deposited by a non-conformal deposition. Thickness of the second dielectric layer on the sidewalls of the at least one opening increases with height so that at least one cavity encapsulated by the second dielectric layer is formed in the at least one opening. The at least one cavity provides enhanced thermal isolation of the electrical fuse since the cavity provides superior thermal isolation than a dielectric material.

An aerogel particle is produced by following processes. A mixing process: an alkoxysilane compound is mixed with an organic solvent to form a first mixed solution. A hydrolysis process: an acid catalyst is added into the first mixed solution to perform a hydrolysis reaction, thereby obtaining a sol. A condensation process: an alkali catalyst is added into the sol to perform a condensation reaction, and a hydrophobic dispersion solvent is added and stirred during the condensation process, thereby subjecting sol to be gelled when it is stirred, further producing the aerogel particle with a uniform structure.

A memory device has a sidewall insulating member with a sidewall insulating member length according to a first spacer layer thickness. A first electrode formed from a second spacer layer having a first electrode length according to a thickness of a second spacer layer and a second electrode formed from the second spacer layer having a second electrode length according to the thickness of the second spacer layer are formed on sidewalls of the sidewall insulating member. A bridge of memory material having a bridge width extends from a top surface of the first electrode to a top surface of the second electrode across a top surface of the sidewall insulating member, wherein the bridge comprises memory material.

The present invention relates to thermally driven pumps. More specifically, one embodiment of the present invention relates to the use of a thermoelectric material to create a thermally driven, bi-directional pump, such as a micro pump, with no moving parts using the thermal transpiration effect (a Knudsen pump). One embodiment of the thermally driven pump of the present invention utilizes a thermoelectric material to assist with the thermal transpiration process resulting in a substantially symmetrical, bidirectional pump. A thermoelectric module is used to induce a temperature gradient across a nanoporous article having at least one nanochannel thus creating fluid flow via thermal transpiration across the nanochannel. The use of the thermoelectric module eliminates the need for a heat sink thereby making the pump substantially symmetrical and enabling bidirectional flow which is accomplished by reversing the polarity of the power supply to the thermoelectric module resulting in reversing the direction of heat transfer.A second embodiment of the thermally driven pump of the present invention comprises a uni-directional, pneumatic, micro fluidic, Knudsen pump which can be integrated into a lab-on-chip device and is configured to pump liquids. The Knudsen pump of the second embodiment is generally comprised of a channel system comprised of a nanochannel and a shallow channel embedded in a bottom substrate and capable of alignment in series with other channels within a lab-on-chip substrate. The nanochannel and shallow channel are both covered by a second substrate comprised of material conducive to finalize creation of the Knudsen channels. A heater is also included within the nanochannel to induce gas flow by thermal transpiration which pneumatically moves liquid through the channels of a lab-on-chip.