Non-refrigerated infrared detection focal plane device

Abstract

The invention, which belongs to the technical field of the non-refrigerated infrared detection, relates to a non-refrigerated infrared detection focal plane device. The device comprises a substrate structure, a support structure, and a bridge deck structure. The bridge deck structure is supported on a substrate by bridge legs and bridge piers, an infrared resonant cavity is formed between an infrared absorbed layer film and a reflecting layer. And a thermo-sensitive layer film is on a surface of the infrared absorbed layer film outside the infrared resonant cavity. According to the invention, a customary thinking employed in the invention of a present device structure is broken through; a position relation of the infrared absorbed layer film and the thermo-sensitive layer film within the bridge deck structure is inversed, so that the thermo-sensitive layer film is arranged on the surface of the infrared absorbed layer film outside the infrared resonant cavity, and thus an infrared absorptivity of the infrared detection focal plane device is increased; and therefore, a detection efficiency of the non-refrigerated infrared detection focal plane device is further improved. Furthermore, an anti-reflection film is not required by the device, so that the device structure is simplified to some extent and device cost is also reduced appropriately.

Description

technical field [0001] The invention belongs to the technical field of uncooled infrared detection, and relates to an uncooled infrared detection focal plane micro-bridge structure. Background technique [0002] Infrared detection technology has developed rapidly in the field of infrared technology and has been widely used in civil and military applications. Infrared detectors are the core components of infrared systems and thermal imaging systems. At present, the refrigeration infrared detector in the market has high performance, but it needs to work at low temperature, so it needs a huge refrigeration equipment, the structure is complex, and the system is huge. Thanks to the development of large-scale silicon integrated circuit technology, uncooled infrared focal plane technology has become the mainstream development direction of modern infrared detection technology. Compared with the cooled infrared focal plane, the uncooled infrared detection focal plane is small in si...

AI Technical Summary

Problems solved by technology

Usually, the infrared absorbing layer has a strong reflection of infrared light, so it is necessary to add a layer of anti-reflection coating on the surface of the infrared absorbing layer film; in addition, due to the strong scattering effect of the heat-sensitive layer film on light, the resonant cavity The infrared light reflected back and forth has a certain loss every time it passes through the heat-sensitive layer film

The reasons for the above two aspects make the structure of the existing uncooled infrared detection focal plane device more complicated, and its infrared absorption rate cannot be further improved (there is a theoretical absorption limit)

Images