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Preparation method of hybridized hierarchical structure sensitive thin-film sensing device based on two-dimensional material

The invention discloses a preparation method of a hybridized hierarchical structure sensitive thin-film sensing device based on a two-dimensional material. The sensing device comprises a single crystal semiconductor substrate, an insulation layer, an interdigital electrode layer, a first PDDA film layer, a reduction-oxidation graphene film layer, a second PDDA film layer and a hierarchical structure ZnO-PSS thin film which are sequentially overlapped according to a preparation order. The preparation method mainly comprises the following steps: preparing an interdigital electrode device; preparing a film layer material required by the sensing device, and preparing the hybridized hierarchical structure sensitive sensing device by adopting a layer-by-layer self-assembling method. The preparation method has the advantages of fully utilizing characteristics of large specific area, low electronic noise, good semiconductor property and negative electricity of reduced-oxidized graphene and combining the structure characteristic of a hierarchical structure zinc oxide to prepare a hybridized hierarchical structure sensitive thin film; the process is simple, the repeatability is good, and the prepared sensing device can be used in the field of gas detection.
Owner:TSINGHUA UNIV
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