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143 results about "Cyclobutene" patented technology

Cyclobutene is a cycloalkene. It is of interest as a fundamental value, not for practical applications. It is a colorless easily condensed gas. A modern synthesis involves the 2-step dehydration of cyclobutanol. The compound was first prepared by thermolysis of the ammonium salt [C₄H₇NMe₃]OH.

Directed self-assembly pattern formation methods and compositions

A method of forming a pattern by directed self-assembly, comprising: (a) providing a semiconductor substrate comprising one or more layers to be patterned; (b) applying a crosslinkable underlayer composition over the one or more layers to be patterned to form a crosslinkable underlayer, wherein the crosslinkable underlayer composition comprises a crosslinkable polymer comprising a first unit of the following general formula (I-A) or (I-B):
wherein: P is a polymerizable functional group; L is a single bond or an m+1-valent linking group; X1 is a monovalent electron donating group; X2 is a divalent electron donating group; Ar1 and Ar2 are trivalent and divalent aryl groups, respectively, and carbon atoms of the cyclobutene ring are bonded to adjacent carbon atoms on the same aromatic ring of Ar1 or Ar2; m and n are each an integer of 1 or more; and each R1 is independently a monovalent group; (c) heating the crosslinkable underlayer to form a crosslinked underlayer; (d) forming a self-assembling layer comprising a block copolymer over the crosslinked underlayer; and (e) annealing the self-assembling layer. The methods and compositions find particular applicability in the manufacture of semiconductor devices or data storage devices for the formation of high resolution patterns.
Owner:ROHM & HAAS ELECTRONICS MATERIALS LLC +1

Adamantyl benzocyclobutene monomer and synthesizing method of polymer of adamantyl benzocyclobutene monomer

The invention relates to a high molecular material and discloses an adamantyl benzocyclobutene monomer and a synthesizing method of a polymer of the adamantyl benzocyclobutene monomer. According to the adamantyl benzocyclobutene monomer and the synthesizing method of the polymer of the adamantyl benzocyclobutene monomer, the structural formula of the adamantyl benzocyclobutene monomer is shown as the specification, wherein a formula in the specification is adamantane; a formula in the specification is benzocyclobutene; O is oxygen and Si is silicon; m and n are the quantities of substituent groups on 1, 3, 5 and 7 sites of the adamantane; the sum of the m and the n is smaller than or equal to 4; the n is more than or equal to 1 and less than or equal to 4; R1 is a first fat substituent group or a first aromatic substituent group; R2 is a second fat substituent group or a second aromatic substituent group; R3 is a third fat substituent group or a third aromatic substituent group. The adamantyl benzocyclobutene monomer prepared by the invention is used for carrying out a polymerization reaction to obtain an adamantyl benzocyclobutene monomer polymer. According to the adamantyl benzocyclobutene monomer and the synthesizing method of the polymer of the adamantyl benzocyclobutene monomer, the adamantyl benzocyclobutene monomer and the polymer thereof have low dielectric constants and low dielectric losses; the dielectric properties are good; meanwhile, the adamantyl benzocyclobutene monomer and the polymer thereof have higher hydrophobic property and heat resistance.
Owner:FUDAN UNIV

Manufacturing method of convective acceleration sensor chip based on temperature sensitive resistor

The invention provides a manufacturing method of convective acceleration sensor chip based on a temperature sensitive resistor. The method comprises the following steps: firstly, forming an oxide layer and a low stress silicon nitride layer on the surface of a mono-crystalline silicon wafer; manufacturing the polycrystalline silicon temperature sensitive resistor and a polycrystalline silicon heating resistor on the low stress silicon nitride layer; manufacturing metal interconnection lines to form an acceleration sensor output circuit; corroding the mono-crystalline silicon wafer to form a concave cavity, releasing a cantilever; bonding a cover on the silicon wafer by a BCB (benzo cyclobutene) adhesive to form a sealed cavity, finally the acceleration sensor chip is obtained. The method of the invention uses the low stress silicon nitride layer deposited by LPCVD (low pressure chemical vapor deposition) as a supporting layer of the heating resistor and the temperature sensitive resistor, and manufactures the polycrystalline silicon heating resistor and the polycrystalline silicon temperature sensitive resistor by an LPCVD and doping technology; the manufactured convective acceleration sensor chip has the advantages of high detection precision, high reliability and good stability; and the manufacturing technology is compatible with IC (integrated circuit) technology. In this way, the method of the invention is helpful for realizing chip microminiaturization and low cost.
Owner:SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI

Preparation method of hexafluorobutadiene

The invention relates to a preparation method of hexafluorobutadiene, which comprises the following steps: respectively dehydrating a 3, 4-dichlorohexafluoro-1-butene raw material and an organic solvent, adding the dehydrated 3, 4-dichlorohexafluoro-1-butene raw material and the dehydrated organic solvent into a dechlorination reaction kettle together with zinc powder, carrying out a dechlorination reaction to obtain a dechlorination product, and carrying out rectification and catalytic conversion on the dechlorination product to obtain a hexafluorobutadiene product. Compared with the prior art, the method has the advantages that the by-product is rearranged into hexafluorobutadiene by using a catalyst, and rectification purification is combined, so that the purity of the obtained hexafluorobutadiene product is high, the content of impurities such as hexafluoro-2-butyne and hexafluorocyclobutene in the hexafluorobutadiene product is remarkably reduced, the difficulty of downstream production of high-purity hexafluorobutadiene can be reduced, and the purity requirement on 3, 4-dichlorohexafluoro-1-butene raw material is reduced from 99.95% to 99%, the requirement on the purity of the 3, 4-dichlorohexafluoro-1-butene raw material is reduced, the pressure of upstream production and investment is greatly reduced, and the height of a rectifying tower for producing the 3, 4-dichlorohexafluoro-1-butene can be greatly reduced.
Owner:SHANGHAI RES INST OF CHEM IND
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